[go: up one dir, main page]

DE4117914C2 - - Google Patents

Info

Publication number
DE4117914C2
DE4117914C2 DE4117914A DE4117914A DE4117914C2 DE 4117914 C2 DE4117914 C2 DE 4117914C2 DE 4117914 A DE4117914 A DE 4117914A DE 4117914 A DE4117914 A DE 4117914A DE 4117914 C2 DE4117914 C2 DE 4117914C2
Authority
DE
Germany
Prior art keywords
carrier body
electrode carrier
electrodes
pump according
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE4117914A
Other languages
German (de)
English (en)
Other versions
DE4117914A1 (de
Inventor
Klaus 8039 Puchheim De Hofmann
Axel Dipl.-Ing. 8000 Muenchen De Richter
Hermann Dr.-Ing. 8384 Simbach De Sandmaier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE4117914A priority Critical patent/DE4117914A1/de
Priority to PCT/DE1992/000409 priority patent/WO1992021883A1/de
Publication of DE4117914A1 publication Critical patent/DE4117914A1/de
Application granted granted Critical
Publication of DE4117914C2 publication Critical patent/DE4117914C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F99/00—Subject matter not provided for in other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/16—Arrangements for supplying liquids or other fluent material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
    • G01F1/708—Measuring the time taken to traverse a fixed distance
    • G01F1/7088—Measuring the time taken to traverse a fixed distance using electrically charged particles as tracers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • H02N11/006—Motors

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
DE4117914A 1991-05-31 1991-05-31 Mikrominiaturisierte elektrostatische pumpe Granted DE4117914A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE4117914A DE4117914A1 (de) 1991-05-31 1991-05-31 Mikrominiaturisierte elektrostatische pumpe
PCT/DE1992/000409 WO1992021883A1 (de) 1991-05-31 1992-05-15 Mikrominiaturisierte, elektrostatische pumpe und vorrichtung zum bestimmen der strömungsgeschwindigkeit eines gases oder einer flüssigkeit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4117914A DE4117914A1 (de) 1991-05-31 1991-05-31 Mikrominiaturisierte elektrostatische pumpe

Publications (2)

Publication Number Publication Date
DE4117914A1 DE4117914A1 (de) 1992-12-03
DE4117914C2 true DE4117914C2 (pt) 1993-04-01

Family

ID=6432924

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4117914A Granted DE4117914A1 (de) 1991-05-31 1991-05-31 Mikrominiaturisierte elektrostatische pumpe

Country Status (1)

Country Link
DE (1) DE4117914A1 (pt)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10329979A1 (de) * 2003-06-27 2005-01-20 Universität Rostock Pumpe mit mindestens einer Pumpkammer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3398685A (en) * 1961-09-11 1968-08-27 Litton Systems Inc Ion drag pumps
US4463798A (en) * 1981-01-07 1984-08-07 The Boeing Company Electrostatically pumped heat pipe and method
ATE29225T1 (de) * 1982-08-25 1987-09-15 Ici Plc Pumpe mit elektrostatischem antriebseffekt fuer spritzsystem.
DE3925749C1 (pt) * 1989-08-03 1990-10-31 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De

Also Published As

Publication number Publication date
DE4117914A1 (de) 1992-12-03

Similar Documents

Publication Publication Date Title
EP0469019B1 (de) Mikrominiaturisierte elektrostatische pumpe
DE102008017967B4 (de) Resonanzfilter mit geringem Verlust
DE3917396C2 (pt)
DE69223682T2 (de) Miniaturisierte, dynamisch abstimmbare Mikrowellen- und Millimeterwellen-Vorrichtung
DE60310997T2 (de) Mikrofluides system mit stabilisierter flüssig-flüssig-grenzfläche
DE102004015237B4 (de) Sensor mit Vorsprung und Verfahren zu dessen Herstellung
DE4133009A1 (de) Kapazitiver drucksensor und herstellungsverfahren hierzu
DE102007058555A1 (de) Mehrschichtiges Substrat und Verfahren zur Herstellung desselben
DE4117914C2 (pt)
DE4207951C2 (de) Kapazitiver Druck- oder Differenzdrucksensor in Glas-Silizium-Technik
DE69402105T2 (de) Vorrichtung zur Herstellung von Elektreten
DE4243860C2 (de) Mikrominiaturisierte, elektrostatische Pumpe und Verfahren zu deren Herstellung
EP1048087A1 (de) Verfahren zur herstellung piezoelektrischer aktoren
WO2000054874A1 (de) Aktiver mikromischer
EP1428233B1 (de) Vorrichtung zum mechanischen steuern einer elektrischen kapazität und verfahren zur herstellung derselben
WO1992021883A1 (de) Mikrominiaturisierte, elektrostatische pumpe und vorrichtung zum bestimmen der strömungsgeschwindigkeit eines gases oder einer flüssigkeit
DE102020210597A1 (de) Verfahren zur Herstellung einer mikroelektromechanischen Struktur und mikroelektromechanische Struktur
DE102010062056A1 (de) Mikromechanisches Bauteil
DE102021200083A1 (de) Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur
DE4117912C2 (de) Vorrichtung zum Bestimmen der Strömungsgeschwindigkeit eines Gases oder einer Flüssigkeit
DE19955975A1 (de) Lithographisches Verfahren zur Herstellung von Mikrobauteilen
DE102010062062B4 (de) Verfahren zum Herstellen von MEMS-Strukturen und MEMS-Struktur
DE19637945C2 (de) Mikroventil und Verfahren zu seiner Herstellung
EP2662131B1 (de) Emulgiervorrichtung
DE2212094A1 (de) Haltevorrichtung für einen Vibrator

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8381 Inventor (new situation)

Free format text: HOFMANN, KLAUS, 8039 PUCHHEIM, DE RICHTER, AXEL, DIPL.-ING., 8000 MUENCHEN, DE SANDMAIER, HERMANN, DR.-ING., 8384 SIMBACH, DE PLETTNER, ANDREAS, DIPL.-ING., 8133 FELDAFING, DE

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee