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DE4105596A1 - Verfahren zur herstellung von hochtemperaturbestaendigen loetverbindungen - Google Patents

Verfahren zur herstellung von hochtemperaturbestaendigen loetverbindungen

Info

Publication number
DE4105596A1
DE4105596A1 DE19914105596 DE4105596A DE4105596A1 DE 4105596 A1 DE4105596 A1 DE 4105596A1 DE 19914105596 DE19914105596 DE 19914105596 DE 4105596 A DE4105596 A DE 4105596A DE 4105596 A1 DE4105596 A1 DE 4105596A1
Authority
DE
Germany
Prior art keywords
solder
ceramic
soldering
titanium
active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19914105596
Other languages
German (de)
English (en)
Other versions
DE4105596C2 (fr
Inventor
Wolfgang Dipl Ing Dr Weise
Willi Dipl Ing Malikowski
Erich Prof Dr Lugscheider
Wolfgang Dipl Ing Tillmann
Manfred Dr Ing Dr Boretius
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Degussa GmbH filed Critical Degussa GmbH
Priority to DE19914105596 priority Critical patent/DE4105596A1/de
Publication of DE4105596A1 publication Critical patent/DE4105596A1/de
Application granted granted Critical
Publication of DE4105596C2 publication Critical patent/DE4105596C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6581—Total pressure below 1 atmosphere, e.g. vacuum
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/123—Metallic interlayers based on iron group metals, e.g. steel
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/125—Metallic interlayers based on noble metals, e.g. silver
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C04B2237/127—The active component for bonding being a refractory metal
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/361—Boron nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/363—Carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/365—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/368—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/405—Iron metal group, e.g. Co or Ni
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/72—Forming laminates or joined articles comprising at least two interlayers directly next to each other

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE19914105596 1991-02-22 1991-02-22 Verfahren zur herstellung von hochtemperaturbestaendigen loetverbindungen Granted DE4105596A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19914105596 DE4105596A1 (de) 1991-02-22 1991-02-22 Verfahren zur herstellung von hochtemperaturbestaendigen loetverbindungen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19914105596 DE4105596A1 (de) 1991-02-22 1991-02-22 Verfahren zur herstellung von hochtemperaturbestaendigen loetverbindungen

Publications (2)

Publication Number Publication Date
DE4105596A1 true DE4105596A1 (de) 1992-08-27
DE4105596C2 DE4105596C2 (fr) 1992-11-26

Family

ID=6425675

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19914105596 Granted DE4105596A1 (de) 1991-02-22 1991-02-22 Verfahren zur herstellung von hochtemperaturbestaendigen loetverbindungen

Country Status (1)

Country Link
DE (1) DE4105596A1 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798779A1 (fr) * 1995-07-21 1997-10-01 Kabushiki Kaisha Toshiba Plaquette de circuits imprimes de ceramique
WO2002034447A1 (fr) * 2000-10-24 2002-05-02 Nanogate Technologies Gmbh Procede de brasage d"un composite metal-ceramique
US6672501B2 (en) 2000-12-27 2004-01-06 Alstom Technology Ltd Method for repairing damaged areas in a metal component
WO2010100432A3 (fr) * 2009-03-06 2010-11-18 Institute Of Metal Research, Chinese Academy Of Sciences Technologie de scellement
CN101890590A (zh) * 2010-07-01 2010-11-24 哈尔滨工业大学 一种用于钛合金与陶瓷或陶瓷基复合材料钎焊的复合钎料及用其进行钎焊的方法
CN102689108A (zh) * 2012-06-20 2012-09-26 哈尔滨工业大学 连接Si3N4陶瓷和42CrMo钢的复合钎料及用其进行钎焊的方法
EP2414125B1 (fr) 2009-03-31 2015-07-08 Alstom Technology Ltd Elément de brasage double consistant en une première couche constituée d'un matériau d'apport de brasage à base de ni, et en une deuxième couche présentant un élément actif, procédé pour sa fabrication et utilisations dudit élément ; composant de turbine a gaz
CN106736030A (zh) * 2016-12-26 2017-05-31 中南大学 一种焊料及其在焊接C/SiC复合材料和金属中的应用方法
CN107531581A (zh) * 2015-05-12 2018-01-02 卡尔蔡司Smt有限责任公司 制造euv模块的方法、euv模块和euv光刻系统
US11282805B2 (en) 2018-03-22 2022-03-22 Infineon Technologies Ag Silicon carbide devices and methods for manufacturing the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4443398C2 (de) * 1994-12-07 2001-10-11 Abb Patent Gmbh Verfahren zur Herstellung einer Metallisierung
DE19749004C2 (de) * 1997-11-06 2002-04-25 Forschungszentrum Juelich Gmbh Herstellungsverfahren für eine elektrisch leitfähige Verbindung zwischen einem keramischen und einem metallischen Bauteil

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3618102A1 (de) * 1985-06-01 1987-02-26 Nihon Integrated Eng Dev Verfahren zum stoffschluessigen verbinden von keramik-werkstoffen und metall sowie von gleichartigen und verschiedenartigen keramik-werkstoffen miteinander
DE3931156A1 (de) * 1988-09-21 1990-03-22 Ngk Spark Plug Co Metall-keramik-verbindung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3618102A1 (de) * 1985-06-01 1987-02-26 Nihon Integrated Eng Dev Verfahren zum stoffschluessigen verbinden von keramik-werkstoffen und metall sowie von gleichartigen und verschiedenartigen keramik-werkstoffen miteinander
DE3931156A1 (de) * 1988-09-21 1990-03-22 Ngk Spark Plug Co Metall-keramik-verbindung

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
DE-B.: Deutscher Verband für Schweißtechnik e.V., Düsseldorf, DSV 69, Hart- und Hochtemperaturlöten u. Diffusionsschweißen, Vorträge des gleichnamigenInternationalen Kolloquiums in Essen am 21. u. 22. Sept. 1981, S. 40-46 *
DE-B.: Fortschrittsberichte der Deutschen keramischen Gesellschaft, Werkstoffe-Verfahren-Anwendungen, Bd, 1 (1985), Heft 2, S. 199-211, ISSN 0177-6983 *
DE-Z.: Schweißen u. Schneiden, Jg. 32, Ht. (1980),S. 171-175 *
US-Z.: Advances Ceramic Materials, Vol.3, No. 5 (1988), 457-462 *
US-Z.: Journal of the American Ceramic Society, Vol. 73, No. 3 (1990), 552-558 *

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798779A1 (fr) * 1995-07-21 1997-10-01 Kabushiki Kaisha Toshiba Plaquette de circuits imprimes de ceramique
EP0798779A4 (fr) * 1995-07-21 1998-05-13 Toshiba Kk Plaquette de circuits imprimes de ceramique
WO2002034447A1 (fr) * 2000-10-24 2002-05-02 Nanogate Technologies Gmbh Procede de brasage d"un composite metal-ceramique
US6672501B2 (en) 2000-12-27 2004-01-06 Alstom Technology Ltd Method for repairing damaged areas in a metal component
WO2010100432A3 (fr) * 2009-03-06 2010-11-18 Institute Of Metal Research, Chinese Academy Of Sciences Technologie de scellement
EP2414125B1 (fr) 2009-03-31 2015-07-08 Alstom Technology Ltd Elément de brasage double consistant en une première couche constituée d'un matériau d'apport de brasage à base de ni, et en une deuxième couche présentant un élément actif, procédé pour sa fabrication et utilisations dudit élément ; composant de turbine a gaz
CN101890590B (zh) * 2010-07-01 2012-07-25 哈尔滨工业大学 一种用于钛合金与陶瓷钎焊的复合钎料及其钎焊方法
CN101890590A (zh) * 2010-07-01 2010-11-24 哈尔滨工业大学 一种用于钛合金与陶瓷或陶瓷基复合材料钎焊的复合钎料及用其进行钎焊的方法
CN102689108A (zh) * 2012-06-20 2012-09-26 哈尔滨工业大学 连接Si3N4陶瓷和42CrMo钢的复合钎料及用其进行钎焊的方法
CN107531581A (zh) * 2015-05-12 2018-01-02 卡尔蔡司Smt有限责任公司 制造euv模块的方法、euv模块和euv光刻系统
CN107531581B (zh) * 2015-05-12 2021-07-06 卡尔蔡司Smt有限责任公司 制造euv模块的方法、euv模块和euv光刻系统
CN106736030A (zh) * 2016-12-26 2017-05-31 中南大学 一种焊料及其在焊接C/SiC复合材料和金属中的应用方法
CN106736030B (zh) * 2016-12-26 2019-05-17 中南大学 一种焊料在焊接C/SiC复合材料和金属中的应用方法
US11282805B2 (en) 2018-03-22 2022-03-22 Infineon Technologies Ag Silicon carbide devices and methods for manufacturing the same

Also Published As

Publication number Publication date
DE4105596C2 (fr) 1992-11-26

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