DE3788388D1 - Verfahren zur Herstellung eines REFETs oder eines CHEMFETs, sowie deren Herstellung. - Google Patents
Verfahren zur Herstellung eines REFETs oder eines CHEMFETs, sowie deren Herstellung.Info
- Publication number
- DE3788388D1 DE3788388D1 DE87201671T DE3788388T DE3788388D1 DE 3788388 D1 DE3788388 D1 DE 3788388D1 DE 87201671 T DE87201671 T DE 87201671T DE 3788388 T DE3788388 T DE 3788388T DE 3788388 D1 DE3788388 D1 DE 3788388D1
- Authority
- DE
- Germany
- Prior art keywords
- polymer layer
- chemfet
- hydrophilic polymer
- refet
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 229920001477 hydrophilic polymer Polymers 0.000 abstract 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 3
- 239000003792 electrolyte Substances 0.000 abstract 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 229920001600 hydrophobic polymer Polymers 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Laminated Bodies (AREA)
- Silicon Polymers (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8602242A NL8602242A (nl) | 1986-09-05 | 1986-09-05 | Werkwijze voor het vervaardigen van een refet of een chemfet, en de vervaardigde refet of chemfet. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3788388D1 true DE3788388D1 (de) | 1994-01-20 |
DE3788388T2 DE3788388T2 (de) | 1994-03-24 |
Family
ID=19848502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE87201671T Expired - Fee Related DE3788388T2 (de) | 1986-09-05 | 1987-09-03 | Verfahren zur Herstellung eines REFETs oder eines CHEMFETs, sowie deren Herstellung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4882292A (de) |
EP (1) | EP0258951B1 (de) |
JP (1) | JP2564319B2 (de) |
AT (1) | ATE98375T1 (de) |
DE (1) | DE3788388T2 (de) |
NL (1) | NL8602242A (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1215491B (it) * | 1987-05-15 | 1990-02-14 | Enricerche Spa | Biosensore con membrana enzimatica legata chimicamente a un dispositivo semiconduttore. |
IT1222121B (it) * | 1987-07-24 | 1990-08-31 | Eniricerche Spa | Sensore per ioni contenente una membrana organica selettiva |
US5011589A (en) * | 1988-09-30 | 1991-04-30 | Kabushiki Kaisha Toshiba | Solution component sensor device |
US5102526A (en) * | 1990-05-02 | 1992-04-07 | The University Of Michigan | Solid state ion sensor with silicon membrane |
AU671253B2 (en) * | 1990-05-02 | 1996-08-22 | University Of Michigan, The | Solid state ion sensor with polyurethane membrane |
DE4017905A1 (de) * | 1990-06-02 | 1991-12-05 | Basf Ag | Referenzelektrode fuer chemische sensoren |
NL194806C (nl) * | 1991-02-01 | 2003-03-04 | Priva Agro Holding Bv | Werkwijze voor het maken van een membraan voor een elektrochemische sensor en sensor voorzien van een dergelijk membraan. |
NL194838C (nl) * | 1991-05-17 | 2003-04-03 | Priva Agro Holding Bv | Metaalion-selectief membraan en sensor met daarin opgenomen dit membraan. |
NL194721C (nl) * | 1992-10-15 | 2003-01-07 | Priva Agro Holding Bv | Anionselectief membraan en een daarvan voorziene sensor. |
FR2702566B1 (fr) * | 1993-03-08 | 1995-06-09 | Ifremer | Capteur electrochimique integre de mesure de ph et son procede de fabrication. |
EP0661535A1 (de) * | 1993-12-15 | 1995-07-05 | Hitachi, Ltd. | Ionensensor |
DE19536389C2 (de) * | 1995-09-29 | 2003-06-12 | Forschungszentrum Juelich Gmbh | Biosensorsystem zur Messung einer oder mehrerer, insbesondere organischen, durch Pflanzenschädigungen verursachten Spurenkomponenten in Luft |
US6024924A (en) * | 1995-09-29 | 2000-02-15 | Forschungzentrum Julich Gmbh | Biosensor system for detecting organic trace compounds produced by smoldering fires |
CA2251867C (en) * | 1996-04-17 | 2002-11-05 | Motorola, Inc. | Transistor-based molecular detection apparatus and method |
US5958201A (en) * | 1996-08-26 | 1999-09-28 | Dade Behring Inc. | Sodium ion-selective-electrode membrane having extended uselife |
EP1085320A1 (de) * | 1999-09-13 | 2001-03-21 | Interuniversitair Micro-Elektronica Centrum Vzw | Vorrichtung auf Basis von organischem Material zur Erfassung eines Probenanalyts |
EP1085319B1 (de) * | 1999-09-13 | 2005-06-01 | Interuniversitair Micro-Elektronica Centrum Vzw | Vorrichtung auf Basis von organischem Material zur Erfassung eines Probenanalyts |
DE10006238A1 (de) * | 2000-02-11 | 2001-08-23 | Siemens Ag | Halbleitergassensor mit Puffersystem |
DE10335163B3 (de) * | 2003-07-30 | 2005-03-03 | Micronas Gmbh | Gassensor |
JP4557755B2 (ja) * | 2004-03-11 | 2010-10-06 | キヤノン株式会社 | 基板、導電性基板および有機電界効果型トランジスタの各々の製造方法 |
US7794584B2 (en) * | 2005-10-12 | 2010-09-14 | The Research Foundation Of State University Of New York | pH-change sensor and method |
TWI302197B (en) * | 2006-01-04 | 2008-10-21 | Univ Nat Yunlin Sci & Tech | Reference ph sensor, the preparation and application thereof |
WO2007119690A1 (ja) * | 2006-04-12 | 2007-10-25 | Panasonic Corporation | 有機分子膜構造体の形成方法及び有機分子膜構造体 |
DE102008041960A1 (de) | 2008-09-10 | 2010-03-11 | Robert Bosch Gmbh | Messsensor, Verfahren zum Analysieren einer unpolaren Flüssigkeit, Verfahren zum Herstellen eines Messsensors |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5825221B2 (ja) * | 1977-12-12 | 1983-05-26 | 株式会社クラレ | Fet比較電極 |
JPS5626250A (en) * | 1979-08-10 | 1981-03-13 | Olympus Optical Co Ltd | Composite chemical sensor |
DE3020068C2 (de) * | 1979-05-30 | 1983-11-03 | Olympus Optical Co., Ltd., Tokyo | Chemisch empfindliche Meßzelle |
JPS562546A (en) * | 1979-06-20 | 1981-01-12 | Kuraray Co Ltd | Gas sensor using fet and its manufacture |
US4490216A (en) * | 1983-02-03 | 1984-12-25 | Molecular Devices Corporation | Lipid membrane electroanalytical elements and method of analysis therewith |
JPS59182356A (ja) * | 1983-04-01 | 1984-10-17 | Hitachi Ltd | 陰イオン選択電極の感応膜 |
US4650547A (en) * | 1983-05-19 | 1987-03-17 | The Regents Of The University Of California | Method and membrane applicable to implantable sensor |
NL8400916A (nl) * | 1984-03-22 | 1985-10-16 | Stichting Ct Voor Micro Elektr | Werkwijze voor het vervaardigen van een isfet en een aldus vervaardigde isfet. |
CA1223039A (en) * | 1984-03-26 | 1987-06-16 | Michael Thompson | Chemical selective sensors utilizing admittance modulated membranes |
EP0235470B1 (de) * | 1986-01-24 | 1992-11-11 | TERUMO KABUSHIKI KAISHA trading as TERUMO CORPORATION | Ionenempfindlicher FET-Fühler |
-
1986
- 1986-09-05 NL NL8602242A patent/NL8602242A/nl not_active Application Discontinuation
-
1987
- 1987-09-03 AT AT87201671T patent/ATE98375T1/de not_active IP Right Cessation
- 1987-09-03 DE DE87201671T patent/DE3788388T2/de not_active Expired - Fee Related
- 1987-09-03 EP EP87201671A patent/EP0258951B1/de not_active Expired - Lifetime
- 1987-09-04 US US07/093,014 patent/US4882292A/en not_active Expired - Lifetime
- 1987-09-04 JP JP62222874A patent/JP2564319B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0258951B1 (de) | 1993-12-08 |
ATE98375T1 (de) | 1993-12-15 |
NL8602242A (nl) | 1988-04-05 |
EP0258951A2 (de) | 1988-03-09 |
EP0258951A3 (en) | 1990-10-10 |
JPS6388439A (ja) | 1988-04-19 |
US4882292A (en) | 1989-11-21 |
DE3788388T2 (de) | 1994-03-24 |
JP2564319B2 (ja) | 1996-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |