DE3786487D1 - Messfuehler hoher praezision. - Google Patents

Messfuehler hoher praezision.

Info

Publication number: DE3786487D1
Authority: DE; Germany
Prior art keywords: high precision; measuring probe; probe high; measuring; precision
Prior art date: 1986-05-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Revoked

Application number

DE8787303866T

Other languages

English (en)

Other versions

DE3786487T2 (de

Inventor

Keith W Kawate

Anthony J Sabetti

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Texas Instruments Inc

Original Assignee

Texas Instruments Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-05-05

Filing date

1987-04-30

Publication date

1993-08-19

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25331208&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3786487(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1987-04-30 Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc

1993-08-19 Publication of DE3786487D1 publication Critical patent/DE3786487D1/de

1993-11-18 Application granted granted Critical

1993-11-18 Publication of DE3786487T2 publication Critical patent/DE3786487T2/de

2007-05-01 Anticipated expiration legal-status Critical

Status Revoked legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Measuring Fluid Pressure (AREA)

DE19873786487 1986-05-05 1987-04-30 Messfühler hoher Präzision. Revoked DE3786487T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US85956186A	1986-05-05	1986-05-05

Publications (2)

Publication Number	Publication Date
DE3786487D1 true DE3786487D1 (de)	1993-08-19
DE3786487T2 DE3786487T2 (de)	1993-11-18

Family

ID=25331208

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE19873786487 Revoked DE3786487T2 (de)	1986-05-05	1987-04-30	Messfühler hoher Präzision.

Country Status (3)

Country	Link
EP (1)	EP0245031B1 (de)
JP (2)	JPS62267636A (de)
DE (1)	DE3786487T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4977480A (en) *	1988-09-14	1990-12-11	Fuji Koki Mfg. Co., Ltd.	Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US4875135A (en) *	1988-12-02	1989-10-17	Texas Instruments Incorporated	Pressure sensor
US4888662A (en) *	1988-12-08	1989-12-19	Texas Instruments Incorporated	High pressure package for pressure transducers
JP2720718B2 (ja) *	1992-07-09	1998-03-04	株式会社デンソー	半導体センサ装置
JP2882786B1 (ja)	1998-04-14	1999-04-12	長野計器株式会社	センサの信号処理回路
JP2882788B1 (ja)	1998-04-20	1999-04-12	長野計器株式会社	自己校正型センサ
DE19964002A1 (de)	1999-12-30	2001-07-12	Micronas Gmbh	Sensor
DE10207228A1 (de)	2002-02-21	2003-09-04	Bosch Gmbh Robert	Verfahren zur Kalibrierung eines Sensors und Schaltungsanordnung zum Betreiben eines Sensors
EP2755005A3 (de) *	2013-01-09	2017-01-25	Auto Industrial Co., Ltd.	Ausgangsspezifizierungskalibrierungsvorrichtung für kapazitiven Drucksensor
US11506555B2 (en) *	2016-03-24	2022-11-22	Citizen Finedevice Co., Ltd.	Piezoelectric sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3832618A (en) *	1973-01-29	1974-08-27	Fischer & Porter Co	Electronic differential pressure transmitter
JPS5953509B2 (ja) *	1976-04-30	1984-12-25	株式会社島津製作所	静電容量−直流電圧変換装置
US4128006A (en) *	1976-12-13	1978-12-05	Bunker Ramo Corporation	Packaging of pressure sensor cells
JPS56135111A (en) *	1980-03-26	1981-10-22	Yokogawa Hokushin Electric Corp	Impedance-type displacement converter
JPS57171212A (en) *	1981-04-14	1982-10-21	Yokogawa Hokushin Electric Corp	Capacity type converter
JPS58115597A (ja) *	1981-12-29	1983-07-09	富士通株式会社	測定装置
JPS58198739A (ja) *	1982-05-14	1983-11-18	Matsushita Electric Ind Co Ltd	静電容量型圧力センサ
JPS5973747A (ja) *	1982-10-20	1984-04-26	Yokogawa Hokushin Electric Corp	差圧伝送装置
JPS59163515A (ja) *	1983-03-09	1984-09-14	Yokogawa Hokushin Electric Corp	差圧伝送器
JPS6098328A (ja) *	1983-11-02	1985-06-01	Yokogawa Hokushin Electric Corp	圧力・差圧伝送器

1987
- 1987-04-30 EP EP19870303866 patent/EP0245031B1/de not_active Revoked
- 1987-04-30 DE DE19873786487 patent/DE3786487T2/de not_active Revoked
- 1987-05-01 JP JP10874287A patent/JPS62267636A/ja active Pending
1998
- 1998-07-30 JP JP21566098A patent/JP2896371B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0245031A2 (de)	1987-11-11
JP2896371B2 (ja)	1999-05-31
EP0245031A3 (en)	1989-06-14
EP0245031B1 (de)	1993-07-14
DE3786487T2 (de)	1993-11-18
JPS62267636A (ja)	1987-11-20
JPH1194678A (ja)	1999-04-09

Publication	Publication Date	Title
DE3771319D1 (de)	1991-08-14	Metrologische skala.
DE3861463D1 (de)	1991-02-07	Messfuehler.
DE3779824D1 (de)	1992-07-23	Koordinaten-messung.
DE3668700D1 (de)	1990-03-08	Praezisionswaage.
KR880701864A (ko)	1988-11-05	레이저 탐침
IT8023445V0 (it)	1980-11-20	Strumento di misura lineare.
DE3577481D1 (de)	1990-06-07	Messfuehlersystem.
DE3668496D1 (de)	1990-03-01	Messonde.
DE3767880D1 (de)	1991-03-07	Absolutskalenmesssystem.
DE59002854D1 (de)	1993-10-28	Temperaturmessschaltung.
NO163583C (no)	1990-06-20	Koplingsanordning for maaleinstrumenter.
DE3854048D1 (de)	1995-07-27	Temperaturmessanordnung.
DE3689632D1 (de)	1994-03-24	Kapazitätsmessbrücke hoher genauigkeit.
DK544687A (da)	1988-04-21	Fremgangsmaade til optoelektrisk maaling
DE68904334D1 (de)	1993-02-25	Kapazitive messsonde.
DE69021590D1 (de)	1995-09-14	Flüssigkeitsmessanordnung.
DE3777219D1 (de)	1992-04-16	Messwertaufnehmer.
DE3686886D1 (de)	1992-11-05	Kalorimeter hoher genauigkeit.
DE3786487D1 (de)	1993-08-19	Messfuehler hoher praezision.
DE3879240D1 (de)	1993-04-22	Vermessungsinstrument.
DE3776752D1 (de)	1992-03-26	Drei-achsen-messfuehler.
DE3877222D1 (de)	1993-02-18	Messfuehler.
DE3879889D1 (de)	1993-05-06	Testmeter.
DK146087A (da)	1987-09-23	Fluidistor til maalebrug
DE3761340D1 (de)	1990-02-08	Messinstrument.

Legal Events

Date	Code	Title	Description
1994-07-07	8363	Opposition against the patent
2002-12-19	8331	Complete revocation