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DE3668230D1 - Siliziumventil. - Google Patents

Siliziumventil.

Info

Publication number
DE3668230D1
DE3668230D1 DE8686300906T DE3668230T DE3668230D1 DE 3668230 D1 DE3668230 D1 DE 3668230D1 DE 8686300906 T DE8686300906 T DE 8686300906T DE 3668230 T DE3668230 T DE 3668230T DE 3668230 D1 DE3668230 D1 DE 3668230D1
Authority
DE
Germany
Prior art keywords
silicone valve
silicone
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686300906T
Other languages
English (en)
Inventor
Joseph Mario Giachino
James Walter Kress
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Werke GmbH
Original Assignee
Ford Werke GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Werke GmbH filed Critical Ford Werke GmbH
Application granted granted Critical
Publication of DE3668230D1 publication Critical patent/DE3668230D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/04—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00 having valves, e.g. having a plurality of valves in series
    • F02M61/047—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00 having valves, e.g. having a plurality of valves in series the valves being formed by deformable nozzle parts, e.g. flexible plates or discs with fuel discharge orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/166—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
    • F02M61/1853—Orifice plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0096—Fuel injection devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fuel-Injection Apparatus (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Sliding Valves (AREA)
DE8686300906T 1985-02-21 1986-02-11 Siliziumventil. Expired - Fee Related DE3668230D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/703,962 US4647013A (en) 1985-02-21 1985-02-21 Silicon valve

Publications (1)

Publication Number Publication Date
DE3668230D1 true DE3668230D1 (de) 1990-02-15

Family

ID=24827503

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686300906T Expired - Fee Related DE3668230D1 (de) 1985-02-21 1986-02-11 Siliziumventil.

Country Status (9)

Country Link
US (1) US4647013A (de)
EP (1) EP0208386B1 (de)
JP (1) JPH0671790B2 (de)
AU (2) AU5178886A (de)
BR (1) BR8600322A (de)
CA (1) CA1275611C (de)
DE (1) DE3668230D1 (de)
ES (2) ES8800396A1 (de)
MX (1) MX163889B (de)

Families Citing this family (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3621331A1 (de) * 1986-06-26 1988-01-14 Fraunhofer Ges Forschung Mikroventil
DE3635216A1 (de) * 1986-10-16 1988-04-21 Draegerwerk Ag Elektrisch ansteuerbares ventil
FR2608097B1 (fr) * 1986-12-12 1994-04-08 Markpoint System Ab Dispositif a clapet pour imprimantes matricielles
GB8712951D0 (en) * 1987-06-03 1987-07-08 Rolls Royce Plc Valve
US4930701A (en) * 1987-09-08 1990-06-05 Mcdonnell Douglas Corporation Confluent nozzle
EP0314285B1 (de) * 1987-10-19 1993-09-22 Ford Motor Company Limited Silikon-Ventileinrichtung zur Kontrolle des Durchflusses
US4768751A (en) * 1987-10-19 1988-09-06 Ford Motor Company Silicon micromachined non-elastic flow valves
JP2721882B2 (ja) * 1987-11-05 1998-03-04 ダイアグラフ コーポレーション インクジェット印刷装置用プリントヘッド
JPH01138172A (ja) * 1987-11-24 1989-05-31 Toyo Tanso Kk 黒鉛とメソカーボンマイクロビーズとの焼結体
DE3802545A1 (de) * 1988-01-28 1989-08-10 Fraunhofer Ges Forschung Mikropumpe zur foerderung kleinster gasmengen
US4808260A (en) * 1988-02-05 1989-02-28 Ford Motor Company Directional aperture etched in silicon
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US4828184A (en) * 1988-08-12 1989-05-09 Ford Motor Company Silicon micromachined compound nozzle
US4907748A (en) * 1988-08-12 1990-03-13 Ford Motor Company Fuel injector with silicon nozzle
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
US5064165A (en) * 1989-04-07 1991-11-12 Ic Sensors, Inc. Semiconductor transducer or actuator utilizing corrugated supports
JPH02274550A (ja) * 1989-04-17 1990-11-08 Komori Corp 画像記録装置のヘッド制御方法
US5238223A (en) * 1989-08-11 1993-08-24 Robert Bosch Gmbh Method of making a microvalve
DE4025941A1 (de) * 1990-08-16 1992-02-20 Bosch Gmbh Robert Brennstoffeinspritzventil
DE4025945C2 (de) * 1990-08-16 1998-10-08 Bosch Gmbh Robert Verfahren zur Einstellung eines Brennstoffeinspritzventils und Brennstoffeinspritzventil
US5144982A (en) * 1990-10-12 1992-09-08 Milliken Research Corporation Electro-pneumatic valve card assemblies
US5193781A (en) * 1990-10-12 1993-03-16 Milliken Research Corporation Electro-pneumatic valve card assemblies
DE4104019C1 (de) * 1991-02-09 1992-04-23 Robert Bosch Gmbh, 7000 Stuttgart, De
EP0503757B1 (de) * 1991-03-08 1995-03-22 Ford Motor Company Limited Brennstoffeinspritzdüse mit Silikondüse
DE4107660C2 (de) * 1991-03-09 1995-05-04 Bosch Gmbh Robert Verfahren zur Montage von Silizium-Plättchen auf metallischen Montageflächen
DE69213340T2 (de) * 1991-05-30 1997-03-27 Hitachi Ltd Ventil und seine Verwendung in einer Vorrichtung hergestellt aus Halbleitermaterial
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
DE4202387C2 (de) * 1991-11-11 1999-09-09 Bosch Gmbh Robert Ventil mit einer Abspritzöffnung
JPH05203070A (ja) * 1991-11-11 1993-08-10 Robert Bosch Gmbh 弁
US5431342A (en) * 1992-11-23 1995-07-11 Mcdonnell Douglas Corporation Nozzle providing a laminar exhaust stream
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
US5309943A (en) * 1992-12-07 1994-05-10 Ford Motor Company Micro-valve and method of manufacturing
US5286002A (en) * 1993-01-12 1994-02-15 Siemens Automotive L.P. Fuel injector having a composite silicon valve
DE69415362T2 (de) * 1993-02-17 1999-06-10 DENSO CORPORATION, Kariya-city, Aichi-pref. Flüssigkeiteinspritzventil
DE59403742D1 (de) * 1993-05-27 1997-09-18 Fraunhofer Ges Forschung Mikroventil
WO1995004881A1 (en) * 1993-08-06 1995-02-16 Ford Motor Company A fuel injector
US5383597A (en) * 1993-08-06 1995-01-24 Ford Motor Company Apparatus and method for controlling the cone angle of an atomized spray from a low pressure fuel injector
US5435884A (en) * 1993-09-30 1995-07-25 Parker-Hannifin Corporation Spray nozzle and method of manufacturing same
US5401963A (en) * 1993-11-01 1995-03-28 Rosemount Analytical Inc. Micromachined mass spectrometer
US5381826A (en) * 1993-11-29 1995-01-17 The Futurestar Corporation Fluid flow controller and meter
JPH07289953A (ja) * 1994-03-03 1995-11-07 Nippondenso Co Ltd 流体噴射ノズル
DE4413217A1 (de) * 1994-04-15 1995-10-19 Bosch Gmbh Robert Kraftstoffeinspritzdüse für Brennkraftmaschinen
JP3560174B2 (ja) * 1994-05-17 2004-09-02 株式会社デンソー 流体噴射ノズル及びそれを用いた燃料噴射弁
DE4433689C2 (de) * 1994-09-21 1996-07-11 Siemens Ag Chipkonfiguration und Verwendung eines entsprechenden Chips
US6533366B1 (en) 1996-05-29 2003-03-18 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
JP4186135B2 (ja) * 1998-05-15 2008-11-26 Ｓｍｃ株式会社 シリンダ用速度制御装置
KR20010090720A (ko) 1998-09-03 2001-10-19 추후제출 비례 마이크로기계 장치
US6523560B1 (en) 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
US7011378B2 (en) 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
US6540203B1 (en) 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US6305779B1 (en) 1999-04-09 2001-10-23 Eastman Kodak Company MEMS inkjet nozzle cleaning and closing mechanism
GB0002798D0 (en) * 2000-02-09 2000-03-29 Glaxo Group Ltd Actuator nozzle for metered dose inhaler
US6845962B1 (en) 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6494804B1 (en) 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6505811B1 (en) * 2000-06-27 2003-01-14 Kelsey-Hayes Company High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate
US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
DE10063259A1 (de) * 2000-12-19 2002-07-11 Bosch Gmbh Robert Brennstoffeinspritzventil
DE60205093T2 (de) 2001-03-15 2006-05-24 The Government of the United States of America, as represented by the Secretary, Centers for Disease Control and Prevention Vernebler mit kühlkammer
US7025324B1 (en) 2002-01-04 2006-04-11 Massachusetts Institute Of Technology Gating apparatus and method of manufacture
DE10212152A1 (de) * 2002-03-19 2003-12-04 Bosch Gmbh Robert Brennstoffeinspritzventil
US6933660B2 (en) * 2002-06-06 2005-08-23 Caterpillar Inc Piezoelectric bender with increased activating force, and valve using same
WO2005052420A1 (en) * 2003-11-24 2005-06-09 Alumina Micro Llc Microvalve device suitable for controlling a variable displacement compressor
US20070251586A1 (en) * 2003-11-24 2007-11-01 Fuller Edward N Electro-pneumatic control valve with microvalve pilot
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
CN100501212C (zh) * 2004-02-27 2009-06-17 铝微有限公司 微阀装置
US7803281B2 (en) * 2004-03-05 2010-09-28 Microstaq, Inc. Selective bonding for forming a microvalve
AU2005262940B2 (en) * 2004-04-02 2010-07-01 Creare Incorporated Aerosol delivery systems and methods
US7156365B2 (en) * 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
US7137577B2 (en) * 2004-11-05 2006-11-21 Visteon Global Technologies, Inc. Low pressure fuel injector nozzle
CN100591916C (zh) * 2005-01-14 2010-02-24 麦克罗斯塔克公司 用于控制变容积式压缩机的方法和系统
US20070023719A1 (en) * 2005-07-27 2007-02-01 Shannon Mark A Bi-direction rapid action electrostatically actuated microvalve
US8628055B2 (en) * 2005-07-27 2014-01-14 The Board Of Trustees Of The University Of Illinois Bi-direction rapid action electrostatically actuated microvalve
US8123834B2 (en) * 2005-10-06 2012-02-28 The Board Of Trustees Of The University Of Illinois High gain selective metal organic framework preconcentrators
WO2008076388A1 (en) 2006-12-15 2008-06-26 Microstaq, Inc. Microvalve device
DE112008000862T5 (de) 2007-03-30 2010-03-11 Microstaq, Inc., Austin Vorgesteuertes Mikroschieberventil
CN101668973B (zh) 2007-03-31 2013-03-13 盾安美斯泰克公司(美国) 先导式滑阀
US8123841B2 (en) 2008-01-16 2012-02-28 The Board Of Trustees Of The University Of Illinois Column design for micro gas chromatograph
US8269029B2 (en) * 2008-04-08 2012-09-18 The Board Of Trustees Of The University Of Illinois Water repellent metal-organic frameworks, process for making and uses regarding same
US20090277971A1 (en) * 2008-05-12 2009-11-12 James Scott Economical, dripless, reciprocating atomizer
JP2011530683A (ja) * 2008-08-09 2011-12-22 マイクラスタック、インク 改良型のマイクロバルブ・デバイス
US8113482B2 (en) * 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
US8540207B2 (en) 2008-12-06 2013-09-24 Dunan Microstaq, Inc. Fluid flow control assembly
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
US20120145252A1 (en) 2009-08-17 2012-06-14 Dunan Microstaq, Inc. Micromachined Device and Control Method
CN102792419B (zh) 2010-01-28 2015-08-05 盾安美斯泰克股份有限公司 高温选择性融合接合的工艺与构造
CN102812538B (zh) 2010-01-28 2015-05-13 盾安美斯泰克股份有限公司 用以促进接合的重调节半导体表面的方法
EP2359886A1 (de) * 2010-02-12 2011-08-24 Debiotech S.A. Mikromechanischer passiver Durchflussregler
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
DE102010042265A1 (de) 2010-10-11 2012-04-12 PARltec GmbH Ventil, Vorrichtung mit Ventil, Verwendung des Ventils in der Vorrichtung, Mikropumpe mit Ventil, Verneblersystem mit Ventil und Dosier-/Mischvorrichtung mit Ventil
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
US9638092B2 (en) * 2014-06-20 2017-05-02 Joseph S. Adams Combustion-powered tool with flexible silicone control check valve operable between a primary combustion chamber and a secondary combustion chamber
US9914116B2 (en) * 2015-09-10 2018-03-13 Panasonic Intellectual Property Management Co., Ltd. Microelement
CN207430592U (zh) * 2017-11-15 2018-06-01 常州铭赛机器人科技股份有限公司 流体微量喷射装置及其流道组件

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3424063A (en) * 1964-11-19 1969-01-28 Ibm Apparatus using diaphragm - type fluidcontrolled logic devices and method of making same
US3477693A (en) * 1966-12-16 1969-11-11 Perry S Bezanis Cam operated fluid valve
US3918495A (en) * 1973-11-14 1975-11-11 Waters Associates Inc Novel gasket and valve comprising same
DE2407856C3 (de) * 1974-02-19 1978-09-14 Ulrich Dipl.-Ing. 5160 Dueren Rohs Einspritzdüse für flüssige Medien, insbesondere Kraftstoff
US3921916A (en) * 1974-12-31 1975-11-25 Ibm Nozzles formed in monocrystalline silicon
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
US4157935A (en) * 1977-12-23 1979-06-12 International Business Machines Corporation Method for producing nozzle arrays for ink jet printers
DE2832932A1 (de) * 1978-07-27 1980-02-14 Bosch Gmbh Robert Membran und verfahren zur herstellung einer membran
JPS57182449A (en) * 1981-05-07 1982-11-10 Fuji Xerox Co Ltd Forming method of ink jet multinozzle
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve

Also Published As

Publication number Publication date
JPS61193862A (ja) 1986-08-28
EP0208386B1 (de) 1990-01-10
BR8600322A (pt) 1986-10-07
ES557440A0 (es) 1987-09-01
JPH0671790B2 (ja) 1994-09-14
ES8800396A1 (es) 1987-11-01
ES8708043A1 (es) 1987-09-01
AU5125890A (en) 1990-08-09
AU5178886A (en) 1986-08-28
US4647013A (en) 1987-03-03
ES551825A0 (es) 1987-11-01
EP0208386A1 (de) 1987-01-14
CA1275611C (en) 1990-10-30
MX163889B (es) 1992-06-30
AU628140B2 (en) 1992-09-10

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