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DE3380976D1 - Piezoelektrischer versetzungsapparat. - Google Patents

Piezoelektrischer versetzungsapparat.

Info

Publication number
DE3380976D1
DE3380976D1 DE8383305091T DE3380976T DE3380976D1 DE 3380976 D1 DE3380976 D1 DE 3380976D1 DE 8383305091 T DE8383305091 T DE 8383305091T DE 3380976 T DE3380976 T DE 3380976T DE 3380976 D1 DE3380976 D1 DE 3380976D1
Authority
DE
Germany
Prior art keywords
transfer device
piezoelectric transfer
piezoelectric
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8383305091T
Other languages
English (en)
Inventor
Yoshiyuki Suda
Katsunori Yokoyama
Chiaki Tanuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3380976D1 publication Critical patent/DE3380976D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • GPHYSICS
    • G12INSTRUMENT DETAILS
    • G12BCONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B1/00Sensitive elements capable of producing movement or displacement for purposes not limited to measurement; Associated transmission mechanisms therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
DE8383305091T 1982-09-03 1983-09-02 Piezoelektrischer versetzungsapparat. Expired - Lifetime DE3380976D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57152554A JPS5943582A (ja) 1982-09-03 1982-09-03 圧電変位装置

Publications (1)

Publication Number Publication Date
DE3380976D1 true DE3380976D1 (de) 1990-01-18

Family

ID=15542999

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383305091T Expired - Lifetime DE3380976D1 (de) 1982-09-03 1983-09-02 Piezoelektrischer versetzungsapparat.

Country Status (5)

Country Link
US (1) US4510412A (de)
EP (1) EP0106483B1 (de)
JP (1) JPS5943582A (de)
CA (1) CA1202352A (de)
DE (1) DE3380976D1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086880A (ja) * 1983-10-19 1985-05-16 Nec Corp 電歪効果素子
US4895574A (en) * 1984-06-06 1990-01-23 Larry Rosenberg Piezoelectric motivator for prosthetic devices
JPS61108182A (ja) * 1984-11-01 1986-05-26 Toshiba Corp 積層形圧電素子装置とその使用方法
JPS61167785A (ja) * 1985-01-17 1986-07-29 Nippon Denso Co Ltd 圧電素子を利用した作動装置
DE3626507A1 (de) * 1985-08-06 1987-02-19 Canon Kk Betaetigungsvorrichtung
JPH0436138Y2 (de) * 1985-09-02 1992-08-26
JPS62141791A (ja) * 1985-12-16 1987-06-25 Nec Corp セラミツク変位素子
JPS62179783A (ja) * 1986-02-04 1987-08-06 Olympus Optical Co Ltd 圧電式アクチユエ−タ
JPH0732273B2 (ja) * 1986-05-22 1995-04-10 日本電気株式会社 電歪効果素子
JPS63120480A (ja) * 1986-11-10 1988-05-24 Tokin Corp 積層型圧電アクチユエ−タ
JPS63207185A (ja) * 1987-02-23 1988-08-26 Toyota Motor Corp 圧電アクチユエ−タ
US4814622A (en) * 1987-11-06 1989-03-21 Bell Communications Research, Inc. High speed scanning tunneling microscope
US5095725A (en) * 1989-05-12 1992-03-17 Fuji Electric Co., Ltd. Press and actuator using piezoelectric element
GB8928952D0 (en) * 1989-12-21 1990-02-28 Queensgate Instr Ltd Piezo-electric actuators
DE4116270C2 (de) * 1990-05-18 2002-01-17 Toyo Tire & Rubber Co Dämpfungseinrichtung
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
US5173605A (en) * 1991-05-02 1992-12-22 Wyko Corporation Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control
DE4230800A1 (de) * 1992-09-15 1994-03-17 Freudenberg Carl Fa Aktives Stellelement
DE4230799C1 (de) * 1992-09-15 1994-03-31 Freudenberg Carl Fa Aktiver Schwingungstilger
US5367500A (en) * 1992-09-30 1994-11-22 The United States Of America As Represented By The Secretary Of The Navy Transducer structure
JP2542154B2 (ja) * 1992-11-26 1996-10-09 山一電機株式会社 圧電アクチェ―タ―
US5479061A (en) * 1992-12-31 1995-12-26 University Of North Carolina Pleated sheet microelectromechanical transducer
US5925969A (en) * 1995-10-17 1999-07-20 O'neill; Cormac G. Ferroelectric transducers
DE19712923A1 (de) * 1997-03-27 1998-10-01 Bosch Gmbh Robert Piezoelektrischer Aktor
JP2000262076A (ja) * 1999-03-05 2000-09-22 Honda Motor Co Ltd 超磁歪アクチュエータ
US6297576B1 (en) * 2000-06-22 2001-10-02 Agilent Technologies, Inc. Piezoelectric actuator
US20040207293A1 (en) * 2003-04-17 2004-10-21 Seeley Charles Erklin Telescoping piezoelectric actuator
EP1899699A1 (de) * 2005-06-20 2008-03-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Drucksensor
SG11201807944SA (en) 2016-04-07 2018-10-30 Microfine Materials Tech Pte Ltd Displacement connectors of high bending stiffness and piezoelectric actuators made of such

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2883486A (en) * 1954-03-09 1959-04-21 Bell Telephone Labor Inc Piezoelectric switching device
US3154700A (en) * 1961-01-09 1964-10-27 Joseph T Mcnaney Piezoelectric transducer force to motion converter
DE2210696A1 (de) * 1971-05-18 1972-11-30 Elektromaschinenbau Veb K Elektrische Maschine
JPS5235994A (en) * 1975-09-16 1977-03-18 Nippon Telegr & Teleph Corp <Ntt> Piezo electric type digital quivering element
SU640385A1 (ru) * 1976-07-14 1978-12-30 Предприятие П/Я А-1376 Пьезоэлектрический преобразователь микроперемещений
FR2425599A1 (fr) * 1978-05-10 1979-12-07 Commissariat Energie Atomique Vanne de reglage du debit d'un fluide
DE3037078C2 (de) * 1980-10-01 1982-08-12 Daimler-Benz Ag, 7000 Stuttgart Elektrisch angesteuertes Stellglied
DE3048631A1 (de) * 1980-12-23 1982-07-22 Siemens AG, 1000 Berlin und 8000 München Stellglied mit piezokeramischem koerper

Also Published As

Publication number Publication date
CA1202352A (en) 1986-03-25
JPS5943582A (ja) 1984-03-10
EP0106483B1 (de) 1989-12-13
EP0106483A2 (de) 1984-04-25
US4510412A (en) 1985-04-09
EP0106483A3 (en) 1987-01-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee