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DE3224615A1 - Einrichtung mit kapazitivem druck-messwertwandler - Google Patents

Einrichtung mit kapazitivem druck-messwertwandler

Info

Publication number
DE3224615A1
DE3224615A1 DE19823224615 DE3224615A DE3224615A1 DE 3224615 A1 DE3224615 A1 DE 3224615A1 DE 19823224615 DE19823224615 DE 19823224615 DE 3224615 A DE3224615 A DE 3224615A DE 3224615 A1 DE3224615 A1 DE 3224615A1
Authority
DE
Germany
Prior art keywords
capacitor
capacitance
output
pressure
changes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19823224615
Other languages
German (de)
English (en)
Other versions
DE3224615C2 (fr
Inventor
Chen Yi 48084 Troy Mich. Lee
Kyong 91311 Chatsworth Calif. Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kavlico Corp
Original Assignee
Kavlico Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kavlico Corp filed Critical Kavlico Corp
Publication of DE3224615A1 publication Critical patent/DE3224615A1/de
Application granted granted Critical
Publication of DE3224615C2 publication Critical patent/DE3224615C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE19823224615 1981-07-02 1982-07-01 Einrichtung mit kapazitivem druck-messwertwandler Granted DE3224615A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/279,938 US4398426A (en) 1981-07-02 1981-07-02 Linear capacitive pressure transducer system

Publications (2)

Publication Number Publication Date
DE3224615A1 true DE3224615A1 (de) 1983-01-20
DE3224615C2 DE3224615C2 (fr) 1992-11-12

Family

ID=23070982

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19823224615 Granted DE3224615A1 (de) 1981-07-02 1982-07-01 Einrichtung mit kapazitivem druck-messwertwandler

Country Status (5)

Country Link
US (1) US4398426A (fr)
JP (1) JPS587534A (fr)
DE (1) DE3224615A1 (fr)
FR (1) FR2509048B1 (fr)
GB (1) GB2102959B (fr)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI69932C (fi) * 1984-05-31 1986-05-26 Vaisala Oy Maetningsfoerfarande foer kapacitanser speciellt foer smao kapacitanser vid vilker man anvaender tvao referenser
US4625560A (en) * 1985-05-13 1986-12-02 The Scott & Fetzer Company Capacitive digital integrated circuit pressure transducer
US4765184A (en) * 1986-02-25 1988-08-23 Delatorre Leroy C High temperature switch
JPS62211533A (ja) * 1986-03-13 1987-09-17 Yokogawa Electric Corp 容量式変換装置
US5083091A (en) * 1986-04-23 1992-01-21 Rosemount, Inc. Charged balanced feedback measurement circuit
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US4951236A (en) * 1986-05-05 1990-08-21 Texas Instruments Incorporated Low cost high precision sensor
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US4910689A (en) * 1986-12-25 1990-03-20 Canon Kabushiki Kaisha Resistivity value measuring circuit
US4987782A (en) * 1989-10-03 1991-01-29 Allied-Signal Inc. Capacitive pressure transducer system
US5020377A (en) * 1990-01-23 1991-06-04 Kavlico Corporation Low pressure transducer using metal foil diaphragm
GB9009190D0 (en) * 1990-04-24 1990-06-20 Devilbiss The Company Limited Miniature electronic pressure gauge
US5291534A (en) * 1991-06-22 1994-03-01 Toyoda Koki Kabushiki Kaisha Capacitive sensing device
US5233875A (en) * 1992-05-04 1993-08-10 Kavlico Corporation Stable capacitive pressure transducer system
US5349865A (en) * 1993-08-30 1994-09-27 Kavlico Corporation Wide-pressure-range, adaptable, simplified pressure transducer
US5540086A (en) * 1994-08-30 1996-07-30 Kavlico Corporation Oil deterioration sensor
US5528520A (en) * 1994-12-08 1996-06-18 Ford Motor Company Calibration circuit for capacitive sensors
US5705978A (en) * 1995-09-29 1998-01-06 Rosemount Inc. Process control transmitter
US5656780A (en) * 1996-03-28 1997-08-12 Kavlico Corporation Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm
US5824889A (en) * 1997-03-06 1998-10-20 Kavlico Corporation Capacitive oil deterioration and contamination sensor
US5942692A (en) * 1997-04-10 1999-08-24 Mks Instruments, Inc. Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals
US5770802A (en) * 1997-04-16 1998-06-23 Texas Instruments Incorporated Sensor with improved capacitive to voltage converter integrated circuit
US5929754A (en) * 1997-12-03 1999-07-27 Kavlico Corporation High-sensitivity capacitive oil deterioration and level sensor
US5935189A (en) * 1997-12-31 1999-08-10 Kavlico Corporation System and method for monitoring engine performance characteristics
US6122972A (en) * 1998-03-04 2000-09-26 Veris Industries Capacitive pressure sensor with moving or shape-changing dielectric
US6148674A (en) * 1999-09-15 2000-11-21 Park; Kyong M. Shielded capacitive pressure sensor
US6499348B1 (en) 1999-12-03 2002-12-31 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US7028551B2 (en) * 2004-06-18 2006-04-18 Kavlico Corporation Linearity semi-conductive pressure sensor
FR2885416B1 (fr) 2005-05-07 2016-06-10 Acam Messelectronic Gmbh Procede et dispositif de mesure de capacites.
US7592819B2 (en) * 2007-02-23 2009-09-22 Sensata Technologies, Inc. Microprocessor-based capacitance measurement
TW200907823A (en) * 2007-04-11 2009-02-16 Silverbrook Res Pty Co Ltd Sensing device having capacitive force sensor
CA2609619A1 (fr) 2007-09-10 2009-03-10 Veris Industries, Llc Indicateur d'etat
CA2609629A1 (fr) 2007-09-10 2009-03-10 Veris Industries, Llc Commande electrique de courant avec etalonnage automatique
CA2609611A1 (fr) 2007-09-10 2009-03-10 Veris Industries, Llc Indicateur d'etat a noyaux de bobinage segmentes
US8212548B2 (en) 2008-06-02 2012-07-03 Veris Industries, Llc Branch meter with configurable sensor strip arrangement
US8193822B2 (en) * 2009-02-12 2012-06-05 Silicon Laboratories Inc. System and method for determining capacitance value
US20100088240A1 (en) * 2008-07-01 2010-04-08 Ely Andrew J Construction cost estimating and scheduling system and method
US8421639B2 (en) 2008-11-21 2013-04-16 Veris Industries, Llc Branch current monitor with an alarm
US8421443B2 (en) 2008-11-21 2013-04-16 Veris Industries, Llc Branch current monitor with calibration
US9335352B2 (en) 2009-03-13 2016-05-10 Veris Industries, Llc Branch circuit monitor power measurement
US9146264B2 (en) 2011-02-25 2015-09-29 Veris Industries, Llc Current meter with on board memory
US10006948B2 (en) 2011-02-25 2018-06-26 Veris Industries, Llc Current meter with voltage awareness
US9329996B2 (en) 2011-04-27 2016-05-03 Veris Industries, Llc Branch circuit monitor with paging register
US9250308B2 (en) 2011-06-03 2016-02-02 Veris Industries, Llc Simplified energy meter configuration
US9410552B2 (en) 2011-10-05 2016-08-09 Veris Industries, Llc Current switch with automatic calibration
US9279406B2 (en) 2012-06-22 2016-03-08 Illinois Tool Works, Inc. System and method for analyzing carbon build up in an engine
CN104142206B (zh) * 2013-05-07 2018-07-20 上海丽恒光微电子科技有限公司 一种mems电容式压力传感器及其制作方法
US9424975B2 (en) 2013-08-23 2016-08-23 Veris Industries, Llc Split core transformer with self-aligning cores
US9607749B2 (en) 2014-01-23 2017-03-28 Veris Industries, Llc Split core current transformer
US9588148B2 (en) 2014-01-23 2017-03-07 Veris Industries, Llc Input circuit for current transformer
US9869599B2 (en) * 2014-09-30 2018-01-16 Rosemount Inc. High-temperature pressure sensing
US9897504B2 (en) * 2015-04-20 2018-02-20 Infineon Technologies Ag System and method for a MEMS sensor
US10371721B2 (en) 2015-12-28 2019-08-06 Veris Industries, Llc Configuration system for a power meter
US10371730B2 (en) 2015-12-28 2019-08-06 Veris Industries, Llc Branch current monitor with client level access
US10408911B2 (en) 2015-12-28 2019-09-10 Veris Industries, Llc Network configurable system for a power meter
US10274572B2 (en) 2015-12-28 2019-04-30 Veris Industries, Llc Calibration system for a power meter
US11215650B2 (en) 2017-02-28 2022-01-04 Veris Industries, Llc Phase aligned branch energy meter
US11193958B2 (en) 2017-03-03 2021-12-07 Veris Industries, Llc Non-contact voltage sensor
US10705126B2 (en) 2017-05-19 2020-07-07 Veris Industries, Llc Energy metering with temperature monitoring

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB615678A (en) * 1940-05-01 1949-01-10 Philips Nv Improvements in or relating to the conversion of variations of pressure into variations of an electric voltage
DE2129566A1 (de) * 1971-06-15 1972-12-21 Metrawatt Gmbh Linearisierungsschaltung
DE2350083A1 (de) * 1972-10-09 1974-04-18 Yamatake Honeywell Co Ltd Schaltungsanordnung zum korrigieren des ausgangssignals einer messvorrichtung
DE2706431A1 (de) * 1977-02-16 1978-08-17 Hartmann & Braun Ag Schaltungsanordnung zur linearisierung der kennlinien beliebiger messwertgeber
US4227429A (en) * 1978-08-14 1980-10-14 Bowers Jr William Spanner socket wrench

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149353A (en) * 1977-06-02 1978-12-26 Toshiba Corp Pressure transmitter
US4250452A (en) * 1979-04-19 1981-02-10 Motorola, Inc. Pressure sensitive transducer circuits
US4227419A (en) * 1979-09-04 1980-10-14 Kavlico Corporation Capacitive pressure transducer
US4322977A (en) * 1980-05-27 1982-04-06 The Bendix Corporation Pressure measuring system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB615678A (en) * 1940-05-01 1949-01-10 Philips Nv Improvements in or relating to the conversion of variations of pressure into variations of an electric voltage
DE2129566A1 (de) * 1971-06-15 1972-12-21 Metrawatt Gmbh Linearisierungsschaltung
DE2350083A1 (de) * 1972-10-09 1974-04-18 Yamatake Honeywell Co Ltd Schaltungsanordnung zum korrigieren des ausgangssignals einer messvorrichtung
DE2706431A1 (de) * 1977-02-16 1978-08-17 Hartmann & Braun Ag Schaltungsanordnung zur linearisierung der kennlinien beliebiger messwertgeber
US4227429A (en) * 1978-08-14 1980-10-14 Bowers Jr William Spanner socket wrench

Also Published As

Publication number Publication date
GB2102959B (en) 1985-01-16
US4398426A (en) 1983-08-16
DE3224615C2 (fr) 1992-11-12
JPS587534A (ja) 1983-01-17
FR2509048B1 (fr) 1985-07-19
FR2509048A1 (fr) 1983-01-07
GB2102959A (en) 1983-02-09

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Legal Events

Date Code Title Description
8128 New person/name/address of the agent

Representative=s name: KUHNEN, R., DIPL.-ING. WACKER, P., DIPL.-ING. DIPL

8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition