DE2232995A1 - METHOD AND DEVICE FOR ELECTROLYTIC COATING OF PARTS - Google Patents

Description

PATENT ADVOCATE

DR. O. DITTMANN. K. L. SCHIPP DR. A. ν. FIVE BR DIPL. ING. P. STREHL

8 MUNICH ΘΟ MARIAHILFPLATZ 2 ft 8 CZ Ö £ .Ό Ό Ό

DA-8583

1. Anatolij Filippowitsch Isakow, USSR, Moscow

2. Alexandr Ivanovich Kolome _t jtschuk, USSR, Moscow

5. Svetlana Petrovna Monachowa (née Tkatsciyowa), USSR, Moscow

4. Maria Alexandrovna Rudakowa, USSR, Moscow

5. Mikhail Jakowlewitsch Ryaboj, USSR, Moscow

6. Wasilij ¥ asil _t iewitsch Ziopko, USSR, Moscow

7. ITikolaj Pavlovich Ameltsehakow, USSR, Zelenograd

8. Boris Wladimirowits.cn Malin, USSR, Moscow

9. Ilya Vladimirovich Ba.jdalinow, USSR, Moscow 10. Anatoly Ieonidowitsch Ryabpw, USSR, Moscow

METHOD AND DEVICE FOR ELECTROLYTIC COATING. OF

SHARE

(Priorities! July 5, 1971, USSR, No. 1670 568 July 5, 1971, USSR, No. 1670 569)

The present invention relates to the electrodeposition technique of metals in the production of semiconductor devices, in particular integral circuits, and in particular a process for the electrolytic coating of parts and a device for carrying out this process,

When assembling integral circuits, it is necessary to to weld the crystal together with the circuit, namely to the gold-plated surface of the rectangular execution frame with a mesh surface, the area of which is about 40 times larger than that required to weld the crystal on Method of local coating is unknown. must be the whole Frame surface can be coated, resulting in excessive consumption

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of expensive materials, especially gold. It is, for example, a method (e.g. USA patent 34-62350, class 204-15) for local gilding of parts known that consists in the fact that a directed electrolyte flow with a sloping surface constant level is formed, and contrary to the current, in the surface of its level the parts are displaced, whose a protruding surface when in contact with the electrolyte should be completely coated.

This method eliminates the possibility of local coating of any part of the surface.

Devices for the electrolytic coating of parts which have a main container, filled with electrolyte, which is e.g. pumped into an intermediate container for stabilization (Creation of a constant level) and filtration of the same, and a working organ for electrolytic plating, of parts included.

However, the devices mentioned do not allow any local coating of the parts either.

The aim of the present invention is elimination of the disadvantages mentioned.

The invention is based on the object of a method for electrolytic coating and devices for Implementation of the same, which allow

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Layers of expensive metals locally, i.e. only in the places required due to specific dimensions, to apply.

This is achieved in that in the proposed method for the electrolytic coating of parts by forming a directed current with a constant level and feeding it to the part to be coated according to the invention with the aim of enabling the local coating of parts, the directed electrolyte flow in "n ^u Beams are divided into hermetically sealed or separate channels, which have the shape and size of the predetermined teeth of the local coating, and the shaped electrolyte beams in the zone of the local coating are fed perpendicular to the part to be coated, isolated from other areas of the part that are not to be coated .

The proposed method can be implemented, for example, with the aid of a device which has a main container, filled with an electrolyte, which is then placed in an intermediate container to stabilize and filter the Electrolyte is pumped around., And a working organ for electrolytic Coating of parts. The treated part and the electrolyte form electrodes, and that Working organ is according to the invention as a cassette with a channel system for the electrolyte supply and therein with at least executed a nozzle with seals, which the

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Press around the coating area of the part and not close it isolate coating areas of the part.,

For the local electrolytic coating of parts, which have a flat mesh surface, it is useful to have the To arrange channel system in the working organ in such a way that the coating of the part in the electrolyte flow through the Mesh surface of the zone to be coated of the part takes place.

For the local coating of flat solid parts, it is advisable to arrange the duct system in the working organ in such a way that that the supply and discharge of the electrolyte takes place from one side and that on the coating side.

It is also useful to have the * working organ with drainage channels and to provide equalizing nozzles at the nozzle outlet, which ensure a constant speed of the electrolyte flow through Secure the coating zone of the part.

The above objects are successfully achieved by the invention.

With a complete coating of the execution frames of integral circuits, an average of 80 g Gold consumed for 1000 pieces of frame. In the Industry produced millions of such devices.

With the device according to the invention and the device according to the invention, the consumption of gold can be up to 6 >_L; τ ro 1000 devices are reduced.

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. As a result, the gold savings for only 10 million products

adorned devices:

S # _{= 74} , -io \ = 740 kg of gold.

jj At the planning price of 1500 rubles per 1 kg of gold, ' ^{δ represents} the total savings for 10.0 million frames in rubles:

74O.OOO.I5OO = 1,110,000 rubles

If the total production program of the devices produced is taken into account, the savings are orders of magnitude greater.

For a better understanding of the essence of the invention, the method according to the invention for the electrolytic coating of parts and the device according to the invention for its implementation are explained in more detail using an exemplary embodiment with reference to the accompanying drawings. Show it:
1 shows a device for the electrolytic local coating of flat network parts;

2 shows a part with a flat mesh surface; 3 shows a device for electrolytic local coating

of flat solid parts; and
4 shows a part with a flat full surface.

2098.84 / 1337

The method for electrolytically plating parts is as follows. The electrolyte is drawn from the main container pumped into the intermediate tank (the latter is for the stabilization of the electrolyte flow and its Filtration determined); thereupon the electrolyte flow is at a constant level in hermetically sealed channels in "n" Beams divided according to the predetermined number of zones for the local coating, for example in nozzles that the Shape and size correspond to the zones of the local coating. The shaped rays become the one to be coated Part fed vertically in the zones of local treatment .

The method described can be implemented in devices for the electrolytic local coating of parts which allow the coating of flat network parts and flat solid parts.

The device for the electrolytic local coating of flat network parts consists of a main tank, here a bath (Fig.-1), a pump 2, an intermediate container 3 with a filter 4- and a working element 5 for the coating of parts.

The working element 5 for the coating of parts is arranged separately from the main container and designed in the form of a multi-position cassette, which consists of a body 6 with a drainage channel 7 and a channel system 8 (Fig. 1 shows a channel); at the bottom there are nozzles built in

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Nozzles 9 »intermediate layers 10, seals 11 and nuts 12 are made. The lower part of the cassette is as. "movable Pressure strip 13 executed »on which lower sealing washers * 14, movable bushings 15 and compensating nozzles 16 are mounted.

A part 17 is pressed in between the sealing washer 14 and the seal 11, which has a flat mesh surface has (Fig. 2).

The local coating of flat network parts is carried out as follows. The electrolyte is out of the bath 1 passed with the aid of the pump 2 into the intermediate container 3, in which the anode 18 is housed. After passing the Filter 4, the electrolyte is passed through the slot 19 into the multi-position cassette.

The excess electrolyte in the intermediate container is poured off into the bath 1 through the channel 20. From the multi-position cassette gets the electrolyte through the channels. 8, the nozzle 9, the seal 11, which is pressed against the nozzle with the aid of the nut 12 is directed to the locations of the local coating of the "part 17".

The sealing of the coating zone, i.e. its insulation, is achieved with the aid of the seal 11 and the sealing washer 14.

The part 17 is pressed against the seals 11 and 14 by means of the bar which is movable in the vertical direction

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13 »With the help of a flat spring 21 the negative potential (the cathode) fed to the part 17.

The positive potential is fed to the anode 18. The electrolyte is fed into the bath 1 through the equalizing nozzle 16 returned. In this way, the local coating of parts in the device described takes place by means of the Electrolyte flow.

The device for electrolytic local coating of flat solid parts corresponds to the device for the electrical coating of flat power supplies, with the difference that in this case in the upper part of the body 6 (Fig. 3) on a common bar 23 pressure bolts 22 are mounted and the channel system 8 for the electrolyte feed "discharge. in the multi-position cassette from the side of the nozzle into which the part is placed.

The device shown in FIG. 3 is operated analogously to the device in FIG.

The anode 18 is also in the cavity of the intermediate container, housed, and the negative potential is applied to the part by the pressure bolts 22. The size of the compensation nozzle 16 and the drainage channel 7 determine the constant level of the Electrolyte in the cassette and the circulation the coating zone.

The local coating of flat solid parts takes place the supply and discharge of the electrolyte on the side of the coating zone.

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Claims (5)

ΡΑΪΕΝΤΑ NS P R Ü C H E 1. Process for the electrolytic coating of parts by forming a directed electrolyte flow with constant level and supply to a part to be coated, characterized in that for local coating of parts of the directed electrolyte flow in "n" beams divided into hermetically sealed channels which have the shape and size of the predetermined zones of the local coating and that the shaped electrolyte jets on the part to be coated perpendicular to the zone of local coating, isolated from others not to be coated Place the parts to be fed. 2. Apparatus for performing the method according to claim 1, which has a main container filled with electrolyte, which in an intermediate container for stabilization and Filtration is pumped around, and a working organ for the electrolytic coating of. Contains parts, the one to be treated Part and the electrolyte form electrodes, characterized in that the working element (5) is arranged outside the main container (1) and as a cassette with a channel system (8) for the supply of the electrolyte and with at least one nozzle therein Seals (11) is executed, which press around the zones of the coating of the part (17) and those not to be coated Isolate parts of part (17). 209884/1337 223299b 3. Apparatus according to claim 2, characterized that for local coating of Share with a flat network surface the channel system (8) in the working organ (5) is arranged in such a way that the coating of the part (17) when the electrolyte flows through the network surface of the zone of the part to be coated (17) - done. 4. Apparatus according to claim 2, characterized that .to electrolytic Coating of flat full parts, the channel system (8) in the working element (5) is arranged in such a way that the supply and discharge of the electrolyte takes place on the side of the coating zone. 5. Apparatus according to claim 2, 3 or 4 ₁ characterized dadurc that the working member is provided with a drain channel (7) and with compensating nozzles (16) which are arranged at the nozzle outlet and a constant flow rate of the electrolyte through the coating zone of the part (17 ) guarantee. 209884/1337