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DE1086510B - Process for the production of metal coatings by vacuum deposition - Google Patents

Process for the production of metal coatings by vacuum deposition

Info

Publication number
DE1086510B
DE1086510B DEB44596A DEB0044596A DE1086510B DE 1086510 B DE1086510 B DE 1086510B DE B44596 A DEB44596 A DE B44596A DE B0044596 A DEB0044596 A DE B0044596A DE 1086510 B DE1086510 B DE 1086510B
Authority
DE
Germany
Prior art keywords
metal
intermediate layer
production
vapor deposition
metal coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEB44596A
Other languages
German (de)
Inventor
Dipl-Phys Dr Ernst Zehender
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DEB44596A priority Critical patent/DE1086510B/en
Publication of DE1086510B publication Critical patent/DE1086510B/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Description

Verfahren zur Herstellung von Metallüberzügen durch Vakuumbedampfen Die Erfindung bezieht sich auf ein Verfahren zur Herstellung von Metallüberzügen durch Vakuumbedampfen.Process for the production of metal coatings by vacuum evaporation The invention relates to a method for producing metal coatings by vacuum evaporation.

Es ist bekannt, daß dünne aufgedampfte Metallschichten auf glatten Unterlagen, z. B. auf Glas oder Kunststoffen, aber auch auf hochglanzpolierten Metallunterlagen, vielfach schlecht haften. Eine gewisse Verbesserung konnte durch Aufdampfen von Zwischenschichten erzielt werden, die ihrerseits wenigstens auf der Unterlage gut haften. Häufig genügt dann aber die Haftung des auf die Zwischenschicht aufzudampfenden Metalls noch nicht allen Ansprüchen.It is known that thin vapor-deposited metal layers on smooth Documents, e.g. B. on glass or plastics, but also on highly polished metal surfaces, often stick poorly. A certain improvement could be achieved by vapor deposition Interlayers are achieved, which in turn at least work well on the substrate be liable. Often, however, the adhesion of the material to be vapor deposited onto the intermediate layer is sufficient Metal does not yet meet all demands.

Eine wesentliche Verbesserung kann in dieser Hinsicht dadurch erreicht werden, daß gemäß der Erfindung zwischen dem Metallüberzug und der Zwischenschicht durch gleichzeitiges Aufdampfen des Überzugsmetalls und des Stoffes der Zwischenschicht eine Mischschicht aus diesen Komponenten aufgebracht wird.A substantial improvement can thereby be achieved in this respect that according to the invention between the metal coating and the intermediate layer by simultaneous vapor deposition of the coating metal and the substance of the intermediate layer a mixed layer of these components is applied.

Als auf der Unterlage gut haftende Zwischenschichtstoffe sind z. B. Chrom, Eisen, Quarz, Kupfer u. a. bekannt, während andererseits Metallschichten aus Aluminium oder Silber auf diesen Zwischenschichten nicht genügend haften. Erst wenn erfindungsgemäß verfahren wird, läßt sich auch hier eine gute Haftung der Metallschicht auf der Zwischenschicht erreichen.As interlayer materials that adhere well to the base, z. B. Chromium, iron, quartz, copper and others. known, while on the other hand metal layers made of aluminum or silver do not adhere sufficiently to these intermediate layers. First If the method according to the invention is followed, good adhesion of the metal layer can also be achieved here on the intermediate layer.

Das Aufdampfverfahren geht dabei beispielsweise folgendermaßen vor sich: Auf eine Glasplatte wird aus einem Tiegel zunächst Chrom als Haftstoff mit einer Schichtdicke von 50 bis 100 Angström im Vakuum aufgedampft. Während das Chrom noch verdampft, wird aus einem zweiten Tiegel zusätzlich Aluminium aufgedampft, und zwar so lange, bis eine: etwa 50 Angström starke Chrom-Aluminium-Mischschicht entstanden ist. Hierauf wird der Chromverdampfer abgestellt und nur noch Aluminium in der vorgesehenen Stärke aufgedampft. Auf diese Weise, die durch geeignete Steuerung der Heizung der Tiegel für das Chrom und das Aluminium zu bewerkstelligen ist, kann eine besonders gute Verankerung zwischen dem als Haftstoff verwendeten Chrom und dem zur Metallisierung verwendeten Aluminium erreicht werden.The vapor deposition process proceeds as follows, for example yourself: On a glass plate, a crucible is first converted into chromium as an adhesive a layer thickness of 50 to 100 Angstroms is evaporated in a vacuum. While the chrome still evaporated, aluminum is additionally evaporated from a second crucible, until a chromium-aluminum mixed layer approx. 50 Angstroms thick originated. The chrome evaporator is then switched off and only aluminum is left vaporized in the intended strength. In this way that through appropriate control the heating of the crucibles for the chrome and aluminum can be accomplished a particularly good anchorage between the chromium used as an adhesive and the aluminum used for metallization can be achieved.

Claims (3)

PATENTANSPRÜCHE: 1. Verfahren zur Herstellung von Metallüberzügen durch Vakuumbedampfung, wobei in einem Arbeitsgang eine haftungsverbessernde Zwischenschicht und das Überzugsmetall aufgedampft wird, dadurch gekennzeichnet, daß zwischen dem Metallüberzug und der Zwischenschicht durch gleicheitiges Aufdampfen des Überzugsmetalls und des Stoffes der Zwischenschicht eine Mischschicht aus diesen Komponenten aufgebracht wird. PATENT CLAIMS: 1. Process for the production of metal coatings by vacuum vapor deposition, with an adhesion-improving intermediate layer in one operation and the coating metal is vapor deposited, characterized in that between the Metal coating and the intermediate layer by simultaneous vapor deposition of the coating metal and a mixed layer of these components is applied to the substance of the intermediate layer will. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß der Übergang vom Aufdampfen des Zwischenschichtstoffes zum Aufdampfen des Metalls allmählich erfolgt. 2. The method according to claim 1, characterized in that the transition from Vapor deposition of the intermediate layer to vaporize the metal takes place gradually. 3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Zwischenschicht in einer Dicke von 50 bis 100 Angström und die Mischschicht in einer Dicke von etwa 50 Angström aufgedampft wird. In Betracht gezogene Druckschriften: Schweizerische Patentschrift Nr. 299 720.3. The method according to claim 1 or 2, characterized in that the intermediate layer in a thickness of 50 to 100 angstroms and the mixed layer in a thickness of about 50 angstroms is vaporized. Publications considered: Swiss Patent No. 299 720.
DEB44596A 1957-05-11 1957-05-11 Process for the production of metal coatings by vacuum deposition Pending DE1086510B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DEB44596A DE1086510B (en) 1957-05-11 1957-05-11 Process for the production of metal coatings by vacuum deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEB44596A DE1086510B (en) 1957-05-11 1957-05-11 Process for the production of metal coatings by vacuum deposition

Publications (1)

Publication Number Publication Date
DE1086510B true DE1086510B (en) 1960-08-04

Family

ID=6967375

Family Applications (1)

Application Number Title Priority Date Filing Date
DEB44596A Pending DE1086510B (en) 1957-05-11 1957-05-11 Process for the production of metal coatings by vacuum deposition

Country Status (1)

Country Link
DE (1) DE1086510B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2632549A1 (en) * 1975-07-25 1977-02-10 Rca Corp COATING FOR INSULATING SUBSTRATES, IN PARTICULAR VIDEO DISCS
US4650698A (en) * 1983-08-19 1987-03-17 Kabushiki Kaisha Toshiba Method of forming a thin film of a metal or metal compound on a substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH299720A (en) * 1951-06-23 1954-06-30 Alois Dr Vogt Process for the production of surface layers of high electrical conductivity and great mechanical adhesive strength as well as surface layer produced by this process.

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH299720A (en) * 1951-06-23 1954-06-30 Alois Dr Vogt Process for the production of surface layers of high electrical conductivity and great mechanical adhesive strength as well as surface layer produced by this process.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2632549A1 (en) * 1975-07-25 1977-02-10 Rca Corp COATING FOR INSULATING SUBSTRATES, IN PARTICULAR VIDEO DISCS
US4650698A (en) * 1983-08-19 1987-03-17 Kabushiki Kaisha Toshiba Method of forming a thin film of a metal or metal compound on a substrate

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