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DE10230910B8 - Kapazitive Sensoranordnung - Google Patents

Kapazitive Sensoranordnung Download PDF

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Publication number
DE10230910B8
DE10230910B8 DE10230910A DE10230910A DE10230910B8 DE 10230910 B8 DE10230910 B8 DE 10230910B8 DE 10230910 A DE10230910 A DE 10230910A DE 10230910 A DE10230910 A DE 10230910A DE 10230910 B8 DE10230910 B8 DE 10230910B8
Authority
DE
Germany
Prior art keywords
capacitive sensor
sensor arrangement
capacitive
arrangement
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10230910A
Other languages
English (en)
Other versions
DE10230910A1 (de
DE10230910B4 (de
Inventor
Seiichiro Kariya Ishio
Yasutoshi Kariya Suzuki
Hajime Kariya Ito
Yasuaki Kariya Makino
Norikazu Ohta
Keiichi Shimaoka
Hirofumi Funabashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of DE10230910A1 publication Critical patent/DE10230910A1/de
Application granted granted Critical
Publication of DE10230910B4 publication Critical patent/DE10230910B4/de
Publication of DE10230910B8 publication Critical patent/DE10230910B8/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/08—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for safeguarding the apparatus, e.g. against abnormal operation, against breakdown

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
DE10230910A 2001-07-11 2002-07-09 Kapazitive Sensoranordnung Expired - Fee Related DE10230910B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001/211099 2001-07-11
JP2001211099A JP4336066B2 (ja) 2001-07-11 2001-07-11 静電容量型センサ装置

Publications (3)

Publication Number Publication Date
DE10230910A1 DE10230910A1 (de) 2003-02-13
DE10230910B4 DE10230910B4 (de) 2009-10-01
DE10230910B8 true DE10230910B8 (de) 2010-02-11

Family

ID=19046471

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10230910A Expired - Fee Related DE10230910B8 (de) 2001-07-11 2002-07-09 Kapazitive Sensoranordnung

Country Status (3)

Country Link
US (1) US6744258B2 (de)
JP (1) JP4336066B2 (de)
DE (1) DE10230910B8 (de)

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US6828802B2 (en) * 2002-08-16 2004-12-07 Rosemount Inc. Pressure measurement device including a capacitive sensor in an amplifier feedback path
AU2003292623A1 (en) * 2002-12-25 2004-07-22 Act Elsi Inc. Electrostatic capacity detection type proximity sensor
US7004027B2 (en) 2003-03-03 2006-02-28 Yamaha Corporation Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith
US7323886B2 (en) * 2004-08-16 2008-01-29 Ying Lau Lee Linear capacitance measurement and touchless switch
US7498822B2 (en) * 2004-08-16 2009-03-03 Ying Lau Lee Linear capacitance measurement and touchless switch
US20060055415A1 (en) * 2004-09-15 2006-03-16 Mark Takita Environmentally compensated capacitive sensor
US7332915B2 (en) * 2004-09-28 2008-02-19 General Electric Company Sensor system and method of operating the same
US7321416B2 (en) * 2005-06-15 2008-01-22 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion
US7466143B2 (en) * 2005-09-16 2008-12-16 General Electric Company Clearance measurement systems and methods of operation
JP2007121125A (ja) * 2005-10-28 2007-05-17 Hioki Ee Corp 電流検出装置および静電容量測定装置
US7319421B2 (en) * 2006-01-26 2008-01-15 Emerson Process Management Foldback free capacitance-to-digital modulator
US7236113B1 (en) 2006-01-26 2007-06-26 Emerson Process Management Capacitance-to-digital modulator with sensor failure-mode detection
US7215129B1 (en) * 2006-03-30 2007-05-08 General Electric Company Multi tip clearance measurement system and method of operation
US8144125B2 (en) 2006-03-30 2012-03-27 Cypress Semiconductor Corporation Apparatus and method for reducing average scan rate to detect a conductive object on a sensing device
US8040142B1 (en) 2006-03-31 2011-10-18 Cypress Semiconductor Corporation Touch detection techniques for capacitive touch sense systems
JP5061524B2 (ja) * 2006-08-01 2012-10-31 三菱電機株式会社 加速度センサ
US20080088323A1 (en) * 2006-10-16 2008-04-17 Emerson Electric Co. Control and method for a capacitive sensor system
US8547114B2 (en) 2006-11-14 2013-10-01 Cypress Semiconductor Corporation Capacitance to code converter with sigma-delta modulator
US8089288B1 (en) * 2006-11-16 2012-01-03 Cypress Semiconductor Corporation Charge accumulation capacitance sensor with linear transfer characteristic
US8144126B2 (en) 2007-05-07 2012-03-27 Cypress Semiconductor Corporation Reducing sleep current in a capacitance sensing system
US8177474B2 (en) * 2007-06-26 2012-05-15 General Electric Company System and method for turbine engine clearance control with rub detection
US9500686B1 (en) 2007-06-29 2016-11-22 Cypress Semiconductor Corporation Capacitance measurement system and methods
US8169238B1 (en) * 2007-07-03 2012-05-01 Cypress Semiconductor Corporation Capacitance to frequency converter
US8089289B1 (en) 2007-07-03 2012-01-03 Cypress Semiconductor Corporation Capacitive field sensor with sigma-delta modulator
US8570053B1 (en) 2007-07-03 2013-10-29 Cypress Semiconductor Corporation Capacitive field sensor with sigma-delta modulator
KR100915149B1 (ko) * 2007-07-19 2009-09-03 (주)에스엠엘전자 다채널 용량 감지 회로
US8525798B2 (en) 2008-01-28 2013-09-03 Cypress Semiconductor Corporation Touch sensing
US8319505B1 (en) 2008-10-24 2012-11-27 Cypress Semiconductor Corporation Methods and circuits for measuring mutual and self capacitance
US8358142B2 (en) 2008-02-27 2013-01-22 Cypress Semiconductor Corporation Methods and circuits for measuring mutual and self capacitance
US9104273B1 (en) 2008-02-29 2015-08-11 Cypress Semiconductor Corporation Multi-touch sensing method
JP4968121B2 (ja) * 2008-03-10 2012-07-04 富士通セミコンダクター株式会社 容量センサー
FI121979B (fi) * 2008-03-26 2011-06-30 Elsi Technologies Oy Sovitinkomponentti mittausjärjestelmään
US8321174B1 (en) 2008-09-26 2012-11-27 Cypress Semiconductor Corporation System and method to measure capacitance of capacitive sensor array
EP2184700A3 (de) * 2008-11-11 2012-09-12 UPEK, Inc. Pixelerfassungsschaltung mit Gleichtaktaufhebung
JP4797075B2 (ja) * 2009-02-12 2011-10-19 株式会社豊田中央研究所 静電容量式センサ装置
US8176883B2 (en) * 2009-02-26 2012-05-15 Diamond Power International, Inc. Retractable articulating robotic sootblower
US8258797B2 (en) * 2009-06-24 2012-09-04 Synaptics Incorporated Capacitive sensor interference determination
US8723827B2 (en) 2009-07-28 2014-05-13 Cypress Semiconductor Corporation Predictive touch surface scanning
TWI410849B (zh) * 2009-10-19 2013-10-01 Orise Technology Co Ltd 電容式觸控面板的感測電路
US9612691B2 (en) 2009-11-02 2017-04-04 Au Optronics Inducing capacitance detector and capacitive position detector of using same
DE102009052537B4 (de) * 2009-11-11 2011-12-22 Ident Technology Ag Sensorelektronik für eine Mehrzahl von Sensorelementen sowie Verfahren zum Bestimmen einer Position eines Objektes an den Sensorelementen
DE102010064328A1 (de) * 2010-12-29 2012-07-05 Robert Bosch Gmbh Sensorsystem zur Umfeldüberwachung an einem mechanischen Bauteil und Verfahren zur Ansteuerung und Auswertung des Sensorsystems
US8514014B2 (en) 2011-02-09 2013-08-20 Analog Devices, Inc. Reset and resettable circuits
US9762234B2 (en) 2011-02-10 2017-09-12 Synaptics Incorporated Input device interference determination
EP2508874B1 (de) * 2011-04-08 2019-06-05 ams international AG Kapazitiver Sensor, integrierte Schaltung, elektronische Vorrichtung und Verfahren
JP2014010011A (ja) * 2012-06-28 2014-01-20 Denso Corp 湿度センサ
TW201403434A (zh) * 2012-07-12 2014-01-16 Yan-Hong Du 具有動態電容匹配機制的觸控模組
US8823396B2 (en) * 2013-01-11 2014-09-02 Nokia Corporation Apparatus and associated methods
EP2799891A1 (de) * 2013-05-03 2014-11-05 Sensirion AG Sensorschaltungsanordnung
SE1351489A1 (sv) * 2013-12-12 2015-06-13 Fingerprint Cards Ab Fingeravtrycksavkänningssystem och -metod
JP7215253B2 (ja) * 2019-03-13 2023-01-31 株式会社アイシン 静電容量検出装置
US11733060B2 (en) * 2021-02-09 2023-08-22 Infineon Technologies Ag Diagnosis of electrical failures in capacitive sensors

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4439693A (en) * 1981-10-30 1984-03-27 Hughes Aircraft Co. Sample and hold circuit with improved offset compensation
US5028876A (en) * 1989-01-30 1991-07-02 Dresser Industries, Inc. Precision capacitive transducer circuits and methods
DE19520049C2 (de) * 1994-05-31 1997-08-28 Hitachi Ltd Sensorelement vom Kapazitätstyp
DE19652325C1 (de) * 1996-12-16 1998-05-07 Siemens Ag Integrierte Halbleiterschaltung mit Kapazitäts-Redundanz
US5986497A (en) * 1997-05-16 1999-11-16 Mitsubishi Denki Kabushiki Kaisha Interface circuit for capacitive sensor
JP2000199726A (ja) * 1999-01-04 2000-07-18 Fuji Electric Co Ltd 静電容量型圧力センサ
JP2000258272A (ja) * 1999-01-04 2000-09-22 Fuji Electric Co Ltd 静電容量型圧力センサ
JP2002214035A (ja) * 2001-01-19 2002-07-31 Sharp Corp 熱型赤外線検出素子およびその製造方法並びに該熱型赤外線検出素子を備えた撮像装置

Family Cites Families (7)

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Publication number Priority date Publication date Assignee Title
JPH0750789B2 (ja) 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JP2517467B2 (ja) 1990-10-05 1996-07-24 山武ハネウエル株式会社 静電容量式圧力センサ
JPH0750789A (ja) 1993-08-05 1995-02-21 Sharp Corp 小型携帯用テレビ
JPH09257618A (ja) 1996-03-26 1997-10-03 Toyota Central Res & Dev Lab Inc 静電容量型圧力センサおよびその製造方法
US5672808A (en) * 1996-06-11 1997-09-30 Moore Products Co. Transducer having redundant pressure sensors
JP3362714B2 (ja) 1998-11-16 2003-01-07 株式会社豊田中央研究所 静電容量型圧力センサおよびその製造方法
US6618235B1 (en) * 2002-03-28 2003-09-09 General Electric Company Snubber circuit

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4439693A (en) * 1981-10-30 1984-03-27 Hughes Aircraft Co. Sample and hold circuit with improved offset compensation
US5028876A (en) * 1989-01-30 1991-07-02 Dresser Industries, Inc. Precision capacitive transducer circuits and methods
DE19520049C2 (de) * 1994-05-31 1997-08-28 Hitachi Ltd Sensorelement vom Kapazitätstyp
DE19652325C1 (de) * 1996-12-16 1998-05-07 Siemens Ag Integrierte Halbleiterschaltung mit Kapazitäts-Redundanz
US5986497A (en) * 1997-05-16 1999-11-16 Mitsubishi Denki Kabushiki Kaisha Interface circuit for capacitive sensor
JP2000199726A (ja) * 1999-01-04 2000-07-18 Fuji Electric Co Ltd 静電容量型圧力センサ
JP2000258272A (ja) * 1999-01-04 2000-09-22 Fuji Electric Co Ltd 静電容量型圧力センサ
JP2002214035A (ja) * 2001-01-19 2002-07-31 Sharp Corp 熱型赤外線検出素子およびその製造方法並びに該熱型赤外線検出素子を備えた撮像装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Sensors and Actuators 84 (2000) 351-361 *

Also Published As

Publication number Publication date
JP4336066B2 (ja) 2009-09-30
DE10230910A1 (de) 2003-02-13
DE10230910B4 (de) 2009-10-01
US6744258B2 (en) 2004-06-01
US20030011378A1 (en) 2003-01-16
JP2003028741A (ja) 2003-01-29

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Legal Events

Date Code Title Description
8181 Inventor (new situation)

Inventor name: SHIMAOKA, KEIICHI, AICHI, JP

Inventor name: SUZUKI, YASUTOSHI, KARIYA, AICHI, JP

Inventor name: FUNAHASHI, HIROFUMGI, AICHI, JP

Inventor name: ISHIO, SEIICHIRO, KARIYA, AICHI, JP

Inventor name: ITO, HAJIME, KARIYA, AICHI, JP

Inventor name: MAKINO, YASUAKI, KARIYA, AICHI, JP

Inventor name: OHTA, NORIKAZU, AICHI, JP

8181 Inventor (new situation)

Inventor name: FUNAHASHI, HIROFUMI, AICHI, JP

Inventor name: ISHIO, SEIICHIRO, KARIYA, AICHI, JP

Inventor name: OHTA, NORIKAZU, AICHI, JP

Inventor name: SHIMAOKA, KEIICHI, AICHI, JP

Inventor name: MAKINO, YASUAKI, KARIYA, AICHI, JP

Inventor name: SUZUKI, YASUTOSHI, KARIYA, AICHI, JP

Inventor name: ITO, HAJIME, KARIYA, AICHI, JP

8110 Request for examination paragraph 44
8396 Reprint of erroneous front page
8364 No opposition during term of opposition
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee