CN2541830Y - Thin film strain resistance for peripheral fixed support circular plane diaphragm steel cup - Google Patents
Thin film strain resistance for peripheral fixed support circular plane diaphragm steel cup Download PDFInfo
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- CN2541830Y CN2541830Y CN 01257599 CN01257599U CN2541830Y CN 2541830 Y CN2541830 Y CN 2541830Y CN 01257599 CN01257599 CN 01257599 CN 01257599 U CN01257599 U CN 01257599U CN 2541830 Y CN2541830 Y CN 2541830Y
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- thin film
- film strain
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Abstract
A film strain resistance for clamping circular flat diaphragm steel cups on the periphery comprises four film strain resistance grids which are completely same and a film bar-shaped resistance group, which is characterized in that four film strain resistance grids are uniformly distributed on an orthogonal shaft line of a steel cup flat diaphragm which has an inner diameter of phi 11 millimeters, the distance between an inner end of every film strain resistance grid and the point of an central shaft is 0.28 millimeter, and the distance between an outer end and the point of the central shaft is 5.2 millimeters. The film bar-shaped resistance group is positioned on any end of the orthogonal shaft line and a vertical axis is distributed symmetrically and has a distance of 6 millimeters from the point of the central shaft. Any two film strain resistance grids can form a bridge. The qualified rate of products cannot be influenced by the discreteness of bridge arm resistances and the abatement of insulation performance with two reserved film strain resistance grids. Simultaneously, a compensating resistance comprising the film bar-shaped resistance group has the same temperature coefficient with the bridge arm resistance, zero points of the bridge can be balanced conveniently, the zero-point compensation technology of non-temperature compensation can be realized, and the quality of products is greatly improved.
Description
Technical field: the utility model relates to thin film strain resistor, relates in particular to the technological improvement of the thin film strain resistor that is used for the circular flat diaphragm steel bowl of periphery fixed.
Background technology: diaphragm pressure sensor is since nineteen fifty-one U. S. application patent, the elastic body steel bowl of pressure transducer great majority so far adopts the circular flat diaphragm steel bowl of periphery fixed, on the flat diaphragm of steel bowl, only arrange four parallel bar shaped palisade thin film strain resistors or four complicated thin film strain resistors, constitute Wheatstone bridge.The electric bridge that this mode constitutes, the resistance discreteness of four resistance of its brachium pontis is bigger, and it is very difficult that sensor is joined resistance, brings a lot of inconvenience for the back operation production of sensor, and its performance is a greater impact; In case the insulating property of brachium pontis resistance or a plurality of resistance and steel bowl lost efficacy in addition, with the defective of bringing product to remedy, made the finished product rate reduce greatly.
Summary of the invention: the utility model wants the problem of technical solution to be, provide that a kind of four thin film strain resistor grid that are positioned on the quadrature-axis and are made of four resistance, four external resistances and film bar shaped resistor group are formed, join capacitance-resistance easily, compensation is convenient, yield rate improves greatly the thin film strain resistor that is used for the circular flat diaphragm steel bowl of periphery fixed.
For this reason, the technical solution of the utility model is: a kind of thin film strain resistor that is used for the circular flat diaphragm steel bowl of periphery fixed, form by four identical thin film strain resistor grid and a film bar shaped resistor group, it is characterized in that: four thin film strain resistor grid are evenly distributed on the quadrature-axis of steel bowl flat diaphragm that internal diameter is φ 11mm, end distance central shaft intersection point 0.28mm in each thin film strain resistor grid, outer end distance central shaft intersection point 5.2mm; Film bar shaped resistor group is positioned at any end of quadrature-axis, and vertical axis and symmetrical distribution are apart from central shaft intersection point 6mm.
Described thin film strain resistor grid are formed by connecting by interior resistance pad, interior resistance pad lead-in wire bar, six interior resistance grizzly bars, five interior resistance connection straps, the public pad lead-in wire of interior resistance bar, public pad, the public pad lead-in wire of external resistance bar, five external resistance connection straps, six external resistance grizzly bars, external resistance pad lead-in wire bar, external resistance pads, wherein six interior resistance grizzly bars that are of a size of long 560 μ m, wide 25 μ m to 40 μ m are connected in series by the interior resistance connection strap of five long 100 μ m, wide 100 μ m, constitute an interior resistance; Article six, interior resistance grizzly bar is parallel to each other, and spacing is 20 μ m to 40 μ m; Article six, the external resistance grizzly bar that is of a size of long 560 μ m, wide 25 μ m to 40 μ m is connected in series by the external resistance connection strap of five long 100 μ m, wide 100 μ m, constitutes an external resistance; Article six, the external resistance grizzly bar is parallel to each other, and spacing is 20 μ m to 40 μ m.
An end of resistance grizzly bar is connected with the interior resistance pad of 1mm * 1mm by the interior resistance pad lead-in wire bar that is of a size of 0.6mm * 0.4mm in described, and the other end of interior resistance grizzly bar links to each other with the public pad that is of a size of 1mm * 1mm by the public pad lead-in wire of the interior resistance of 1.4mm * 0.4mm bar; One end of external resistance grizzly bar is connected with the external resistance pad of 1mm * 1mm by the external resistance pad lead-in wire bar that is of a size of 0.6mm * 0.4mm, and the other end of external resistance grizzly bar links to each other with the public pad that is of a size of 1mm * 1mm by the public pad lead-in wire of the external resistance of 1.0mm * 0.4mm bar.
The long 5.2mm of described film bar shaped resistor group, wide 0.7mm, by four bar resistor pads that are of a size of 0.7mm * 0.7mm, and form by three compensating resistances of the alternate 1.2mm of being divided into of bar resistor pad * 0.7mm, 0.7mm * 0.7mm, 0.5mm * 0.7mm.
Owing to adopted the said structure improvement, the thin film strain resistor grid are increased to four that are positioned on two quadrature-axis by two that are positioned on the axis, increase a film bar shaped resistor group that is positioned on any axis simultaneously, so just had four interior resistance, four external resistances, they can match arbitrarily and constitute two strain resistor bridges.The way of determining is known about in the influence that the discreteness of arm resistance, insulating property inefficacy are brought,, the compensating resistance that temperature coefficient identical the same that is constituted by film bar shaped resistor group simultaneously with the arm resistance material, zero point of balanced bridge easily, realize the zero compensation technology of non-temperature compensation, improve the quality and the yield rate of product greatly.
Description of drawings: the utility model is made an explanation below in conjunction with accompanying drawing.
Fig. 1 is a general plane synoptic diagram of the present utility model.
Fig. 2 is the structural representation of thin film strain resistor grid.
Fig. 3 is the structural representation of film bar shaped resistor group.
Fig. 4 is a steel bowl structure cross-sectional schematic.
Embodiment: shown in Fig. 1,4: a kind of thin film strain resistor that is used for the circular flat diaphragm steel bowl of periphery fixed, be made up of 1,2,3,4 and film bar shaped resistor group 5 of four identical thin film strain resistor grid, wherein thin film strain resistor grid 1,3 are on the longitudinal axis of flat diaphragm 6 that the internal diameter of steel bowl 7 is φ 11mm; The internal diameter that thin film strain resistor grid 2,4 are in steel bowl 7 is on the transverse axis of flat diaphragm 6 of φ 11mm, first and last, inverse clock half-twist, 180 °, 270 ° obtain in the plane along the orthogonal axes center for thin film strain resistor grid the 2,3, the 4th, thin film strain resistor grid 1.The interior end distance central shaft intersection point 0.28mm of four thin film strain resistor grid 1,2,3,4, outer end distance central shaft intersection point 5.2mm.Film bar shaped resistor group 5 is positioned at any end (Fig. 1 indicates and is positioned at the positive aspect of Y-axis) of quadrature-axis, and vertical axis and symmetrical distribution are apart from central shaft intersection point 6mm.
As shown in Figure 2: thin film strain resistor grid 1 or 2 or 3 or 4 are by interior resistance pad 8, interior resistance pad lead-in wire bar 15, article six, interior resistance grizzly bar 13, article five, interior resistance connection strap 11, the public pad lead-in wire of interior resistance bar 17, public pad 10, the public pad lead-in wire of external resistance bar 18, article five, external resistance connection strap 12, article six, external resistance grizzly bar 14, external resistance pad lead-in wire bar 16, external resistance pad 9 is formed by connecting, wherein six are of a size of long 560 μ m, the interior resistance grizzly bar 13 of wide 25 μ m to 40 μ m is by five long 100 μ m, the interior resistance connection strap 11 of wide 100 μ m is connected in series, constitutes an interior resistance; Article six, interior resistance grizzly bar 13 is parallel to each other, and spacing is 20 μ m to 40 μ m; Article six, the external resistance grizzly bar 14 that is of a size of long 560 μ m, wide 25 μ m to 40 μ m is connected in series by the external resistance connection strap 12 of five long 100 μ m, wide 100 μ m, constitutes an external resistance; Article six, external resistance grizzly bar 14 is parallel to each other, and spacing is 20 μ m to 40 μ m.
As shown in Figure 2: an end of interior resistance grizzly bar 13 is connected with the interior resistance pad 8 of 1mm * 1mm by the interior resistance pad lead-in wire bar 15 that is of a size of 0.6mm * 0.4mm, and the other end of interior resistance grizzly bar 13 links to each other with the public pad 10 that is of a size of 1mm * 1mm by the public pad lead-in wire of the interior resistance of 1.4mm * 0.4mm bar 17; One end of external resistance grizzly bar 14 is connected with the external resistance pad 9 of 1mm * 1mm by the external resistance pad lead-in wire bar 16 that is of a size of 0.6mm * 0.4mm, and the other end of external resistance grizzly bar 14 links to each other with the public pad 10 that is of a size of 1mm * 1mm by the public pad lead-in wire of the external resistance of 1.0mm * 0.4mm bar 18.
As shown in Figure 3: film bar shaped resistor group 5 long 5.2mm, wide 0.7mm, by four bar resistor pads 19 that are of a size of 0.7mm * 0.7mm, and form by the compensating resistance 20 of the bar resistor pad 19 alternate 1.2mm of being divided into * 0.7mm, the compensating resistance 21 of 0.7mm * 0.7mm, the compensating resistance 22 of 0.5mm * 0.7mm.Because three compensating resistances is in different size, its resistance also just has nothing in common with each other, and their material is the same with the arm resistance material, temperature coefficient is also just identical with the temperature coefficient of arm resistance, can carry out zero compensation to the electric bridge that constitutes by two thin film strain resistor grid easily like this, realize the zero compensation technology of non-temperature compensation, the performance of product is improved greatly.
After four thin film strain resistor grid have been made, by test, can select the resistance consistance best, two of the insulation resistance maximum thin film strain resistor grid constitute an electric bridge between brachium pontis and the steel bowl, so no longer because of one or two thin film strain resistor grid arm resistance discretenesses are big, insulating property lost efficacy causes entire product to scrap, improved the yield rate of product greatly.
Steel bowl flat diaphragm internal diameter is φ 11mm in the utility model example; if with this inner diameter values multiply by one greater than 0.5 less than 3 coefficient; the flat diaphragm series of a different inner diameters size will be produced; only need do corresponding change to thin film strain resistor grid that should series and the size of film bar shaped resistor group and get final product, these changes also belong among the protection of the present utility model.
Claims (4)
1, a kind of thin film strain resistor that is used for the circular flat diaphragm steel bowl of periphery fixed, form by four identical thin film strain resistor grid and a film bar shaped resistor group, it is characterized in that: four thin film strain resistor grid are evenly distributed on the quadrature-axis of steel bowl flat diaphragm that internal diameter is φ 11mm, end distance central shaft intersection point 0.28mm in each thin film strain resistor grid, outer end distance central shaft intersection point 5.2mm; Film bar shaped resistor group is positioned at any end of quadrature-axis, and vertical axis and symmetrical distribution are apart from central shaft intersection point 6mm.
2, as claims 1 described thin film strain resistor that is used for the circular flat diaphragm steel bowl of periphery fixed, it is characterized in that: described thin film strain resistor grid are by interior resistance pad, interior resistance pad lead-in wire bar, article six, interior resistance grizzly bar, article five, interior resistance connection strap, the public pad lead-in wire of interior resistance bar, public pad, the public pad lead-in wire of external resistance bar, article five, external resistance connection strap, article six, external resistance grizzly bar, external resistance pad lead-in wire bar, the external resistance pad is formed by connecting, wherein six are of a size of long 560 μ m, the interior resistance grizzly bar of wide 25 μ m to 40 μ m is by five long 100 μ m, the interior resistance connection strap of wide 100 μ m is connected in series, constitutes an interior resistance; Article six, interior resistance grizzly bar is parallel to each other, and spacing is 20 μ m to 40 μ m; Article six, the external resistance grizzly bar that is of a size of long 560 μ m, wide 25 μ m to 40 μ m is connected in series by the external resistance connection strap of five long 100 μ m, wide 100 μ m, constitutes an external resistance; Article six, the external resistance grizzly bar is parallel to each other, and spacing is 20 μ m to 40 μ m.
3, as claims 2 described thin film strain resistors that are used for the circular flat diaphragm steel bowl of periphery fixed, it is characterized in that: an end of resistance grizzly bar is connected with the interior resistance pad of 1mm * 1mm by the interior resistance pad lead-in wire bar that is of a size of 0.6mm * 0.4mm in described, and the other end of interior resistance grizzly bar links to each other with the public pad that is of a size of 1mm * 1mm by the public pad lead-in wire of the interior resistance of 1.4mm * 0.4mm bar; One end of external resistance grizzly bar is connected with the external resistance pad of 1mm * 1mm by the external resistance pad lead-in wire bar that is of a size of 0.6mm * 0.4mm, and the other end of external resistance grizzly bar links to each other with the public pad that is of a size of 1mm * 1mm by the public pad lead-in wire of the external resistance of 1.0mm * 0.4mm bar.
4, the thin film strain resistor that is used for the circular flat diaphragm steel bowl of periphery fixed as claimed in claim 1, it is characterized in that: the long 5.2mm of described film bar shaped resistor group, wide 0.7mm, by four bar resistor pads that are of a size of 0.7mm * 0.7mm, and form by three compensating resistances of the alternate 1.2mm of being divided into of bar resistor pad * 0.7mm, 0.7mm * 0.7mm, 0.5mm * 0.7mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01257599 CN2541830Y (en) | 2001-12-25 | 2001-12-25 | Thin film strain resistance for peripheral fixed support circular plane diaphragm steel cup |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01257599 CN2541830Y (en) | 2001-12-25 | 2001-12-25 | Thin film strain resistance for peripheral fixed support circular plane diaphragm steel cup |
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| Publication Number | Publication Date |
|---|---|
| CN2541830Y true CN2541830Y (en) | 2003-03-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01257599 Expired - Fee Related CN2541830Y (en) | 2001-12-25 | 2001-12-25 | Thin film strain resistance for peripheral fixed support circular plane diaphragm steel cup |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109506826A (en) * | 2017-09-14 | 2019-03-22 | 森萨塔科技公司 | Pressure sensor with improved deformeter |
| WO2022050389A1 (en) * | 2020-09-03 | 2022-03-10 | Tdk株式会社 | Pressure sensor |
-
2001
- 2001-12-25 CN CN 01257599 patent/CN2541830Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109506826A (en) * | 2017-09-14 | 2019-03-22 | 森萨塔科技公司 | Pressure sensor with improved deformeter |
| CN109506826B (en) * | 2017-09-14 | 2022-01-14 | 森萨塔科技公司 | Pressure sensor with improved strain gauge |
| WO2022050389A1 (en) * | 2020-09-03 | 2022-03-10 | Tdk株式会社 | Pressure sensor |
| JP2022042781A (en) * | 2020-09-03 | 2022-03-15 | Tdk株式会社 | Pressure sensor |
| JP7420022B2 (en) | 2020-09-03 | 2024-01-23 | Tdk株式会社 | pressure sensor |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |