CN222637899U

CN222637899U - A multi-line laser and scanner

Info

Publication number: CN222637899U
Application number: CN202323439495.1U
Authority: CN
Inventors: 郑俊; 林晓露; 陈尚俭; 王江峰
Original assignee: Scantech Hangzhou Co Ltd
Current assignee: Scantech Hangzhou Co Ltd
Priority date: 2023-12-15
Filing date: 2023-12-15
Publication date: 2025-03-18
Anticipated expiration: 2033-12-15

Abstract

The application relates to a multi-line laser and a scanner, which comprises a laser light source and a light source shaping part, wherein the light source shaping part comprises a collimation module, a light spot shaping module and a light splitting module, the light splitting module is used for splitting an incident light beam into a plurality of sub-light beams and emitting the sub-light beams at different emitting angles, so that the sub-light beams emitted from the light source shaping part form multi-line lasers at a designated position, and parameters of the multi-line lasers can be adjusted according to the number of the sub-light beams and the width of the sub-light beams. By utilizing the application, the focal depth can be adjusted by controlling the width of each sub-beam emitted by the light splitting module, thereby realizing large focal depth multi-line laser. The optical fiber is not limited by the size of an incident light spot, and the allowable light transmission size of the diaphragm is far larger than that of the existing DOE spectroscopic technology. Aiming at the application scene with large focal depth, the method has higher energy utilization rate.

Description

Multi-line laser and scanner

Technical Field

The application relates to the field of optical equipment, in particular to a multi-line laser and a scanner.

Background

The existing multi-line laser technology is that light spots emitted by a laser light source enter a prism after being collimated by a lens, the light spots are shaped into linear light spots by the prism, and finally, the linear light spots are split by a DOE (DIFFRACTIVE OPTICAL ELEMENTS, a diffraction optical device) to be expanded into multi-line laser. The DOE copies and projects the incident light spots into beam splitting light spots emergent at different angles. Each split beam spot maintains the original optical characteristics of the incident spot, including the size and beam divergence angle of the original spot, except for the optical power, the sum of the individual split beam spot powers obtained by DOE splitting is less than the spot power incident to the DOE.

Because the light intensity distribution of the emergent light spots has a certain focal depth, the light spot size, the working distance and the focal depth are balanced with each other. Therefore, under the requirement of large focal depth application, the existing multi-line laser generally uses a diaphragm in front of the DOE to physically shield the light spot incident to the DOE, so as to reduce the size of the incident light spot, thereby obtaining a larger focal depth. To obtain a large deep-focus optical energy distribution, a stop is added before the DOE to reduce the spot size incident to the DOE. The larger the depth of focus, the smaller the required incident spot size, and the smaller the incident spot size, the lower the light energy utilization.

Aiming at the problem of low light energy utilization rate of a multi-line laser in a large focal depth application scene in the related technology, no effective solution is proposed at present.

Disclosure of utility model

The embodiment provides a multi-line laser and a scanner, so as to solve the problem that the multi-line laser in the related technology has low light energy utilization rate in a large focal depth application scene.

In a first aspect, in this embodiment, there is provided a multi-line laser including a laser light source and a light source shaping portion, where the light source shaping portion includes a collimation module, a spot shaping module, and a beam splitting module;

the laser light source is used for generating light spots;

The collimation module is used for collimating or focusing the incident light spots;

The light spot shaping module is used for shaping an incident spot light spot into a linear light spot and emitting the linear light spot;

The beam splitting module is used for splitting an incident beam into a plurality of sub-beams and emitting the sub-beams at different emitting angles, so that the sub-beams emitted from the light source shaping part form multi-line lasers at a designated position, wherein parameters of the multi-line lasers can be adjusted according to the number of the sub-beams and the width of the sub-beams.

In one embodiment, the parameters of the multi-line laser include at least one of the number of laser lines, laser line brightness, and depth of focus.

In one embodiment, the focal length of the collimating module ranges from 6mm to 12mm.

In one embodiment, the outgoing light spot of the laser light source sequentially passes through the collimation module, the light spot shaping module and the light splitting module to form the multi-line laser;

Or the emergent light spots of the laser light source sequentially pass through the collimation module, the light splitting module and the light spot shaping module to form the multi-line laser.

In one embodiment, the light splitting module includes a first optical face;

the first optical surface of the light splitting module comprises a plurality of facets with different inclination angles;

The incident light beams on the first optical surface are refracted at the small surfaces to form a plurality of sub-light beams and emergent at different emergent angles;

the width of each sub-beam is determined by the face width of its exit facet, the exit angle of each sub-beam is determined by the inclination angle of its exit facet, and the number of sub-beams is determined by the number of facets.

In one embodiment, the surface shape of each facet may be one or a combination of more of a plane, a sphere, an aspherical surface, and a free-form surface.

In one embodiment, the first optical surface of the optical splitting module has at least one of a concave surface, a convex surface, and an irregular surface.

In one embodiment, the light splitting module is a diffraction optical device or an ultra-structured lens with adjustable phase.

In one embodiment, the first optical surface of the beam splitting module includes a microstructure, and the microstructure is used for realizing phase regulation of the sub-beams.

In one embodiment, the microstructure is at least one of stepped, hole-like, and columnar.

In one embodiment, the light spot shaping module is a powell lens, a cylindrical mirror, a microprism array structure, a phase-adjustable diffractive optical device, or a super-structured lens.

In one embodiment, after the outgoing light spot of the laser light source passes through the collimation module, the light splitting module and the light spot shaping module in sequence, multi-line laser is formed at a designated position;

The collimation module and the light splitting module are of an integrated structure;

Or, the light splitting module and the light spot shaping module are of an integrated structure.

In one embodiment, the outgoing light spot of the laser light source sequentially passes through the collimation module, the light spot shaping module and the light splitting module to form multi-line laser at a designated position;

the collimation module and the light spot shaping module are of an integrated structure;

or, the light spot shaping module and the light splitting module are of an integrated structure.

In one embodiment, the collimation module, the spot shaping module and the beam splitting module are an integrated structure.

In a second aspect, in this embodiment there is provided a scanner comprising a scanning device comprising the multiline laser provided in the first aspect above.

In one embodiment, the scanner further comprises a tracking device for tracking the pose of the scanning device.

Compared with the related art, the multi-line laser and the scanner provided in the embodiment have the advantages that the light splitting module can split an incident light beam into a plurality of sub-light beams and emit the sub-light beams at different emitting angles, so that the sub-light beams emitted from the light source shaping part form multi-line lasers at specified positions, and parameters of the multi-line lasers can be adjusted according to the number of the sub-light beams and the width of the sub-light beams. Therefore, the focal depth can be adjusted by controlling the width of each sub-beam emitted by the light splitting module, so that the large focal depth multi-line laser is realized. The optical fiber is not limited by the size of an incident light spot, and the allowable light transmission size of the diaphragm is far larger than that of the existing DOE spectroscopic technology. Aiming at the application scene with large focal depth, the method has higher energy utilization rate.

The details of one or more embodiments of the application are set forth in the accompanying drawings and the description below to provide a more thorough understanding of the other features, objects, and advantages of the application.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute a limitation on the application. In the drawings:

fig. 1 is a schematic structural diagram of a multi-line laser according to a first embodiment of the present application;

FIG. 2A is a schematic view of a shaped optical path of a Powell prism in one direction;

FIG. 2B is a schematic view of the shaped optical path of the Bowilt prism in a direction perpendicular to the direction shown in FIG. 2A;

FIG. 3 is a schematic view of a shaping optical path of a microprism array structure;

FIG. 4 is a schematic view of the microstructure of the surface of the super-structured lens;

FIG. 5A is a schematic view of the optical path in one direction of laser source divergence;

FIG. 5B is a schematic view of the optical path in another vertical direction of the laser source divergence;

Fig. 6 is a schematic structural diagram of a multi-line laser according to a second embodiment of the present application;

Fig. 7 is a schematic diagram of a light splitting principle of a light splitting module according to an embodiment of the present application

FIG. 8A is a schematic diagram of a concave spectroscopic module according to an embodiment of the present application;

FIG. 8B is a schematic diagram of a convex spectroscopic module according to an embodiment of the present application;

fig. 9A is a schematic structural diagram of a two-dimensional spectroscopic module according to an embodiment of the present application;

fig. 9B is a schematic structural diagram of another two-dimensional spectroscopic module according to an embodiment of the present application;

FIG. 10A is a schematic diagram of a spectroscopic result of a parallel light source using the one-dimensional spectroscopic module provided in FIG. 9A;

FIG. 10B is a schematic diagram of a spectroscopic result of a parallel light source using the two-dimensional spectroscopic module provided in FIG. 9B;

fig. 11 is a schematic diagram of simulation results of a multi-line laser according to a third embodiment of the present application.

Detailed Description

The present application will be described and illustrated with reference to the accompanying drawings and examples for a clearer understanding of the objects, technical solutions and advantages of the present application.

Unless defined otherwise, technical or scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terms "a," "an," "the," "these" and similar terms in this application are not intended to be limiting in number, but may be singular or plural. The terms "comprises," "comprising," "includes," "including," "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, and system, article, or apparatus that comprises a list of steps or modules (units) is not limited to the list of steps or modules (units), but may include other steps or modules (units) not listed or inherent to such process, method, article, or apparatus. The terms "connected," "coupled," and the like in this disclosure are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The term "plurality" as used herein means two or more. "and/or" describes the association relationship of the association object, and indicates that three relationships may exist, for example, "a and/or B" may indicate that a exists alone, a and B exist simultaneously, and B exists alone. Typically, the character "/" indicates that the associated object is an "or" relationship. The terms "first," "second," "third," and the like, as referred to in this disclosure, merely distinguish similar objects and do not represent a particular ordering for objects.

Referring to fig. 1, a first embodiment of the present application provides a multi-line laser for generating multi-line laser light. The multi-line laser includes a laser light source 100 and a light source shaping section 001, and the light source shaping section 001 includes a collimation module 200, a spot shaping module 300, and a beam splitting module 400. The outgoing light spot of the laser light source 100 sequentially passes through the collimation module 200, the light spot shaping module 300 and the light splitting module 400, and then forms multi-line laser at a designated position.

The laser device comprises a laser light source 100 for generating light spots, and a light source shaping part 001 for shaping and dividing the light spots generated by the laser light source 100 to form multi-line laser with adjustable parameters. Specifically, the collimating module 200 is used for collimating or focusing an incident spot, the spot shaping module 300 is used for shaping the incident spot light spot into linear spot light to be emitted, and the beam splitting module 400 is used for splitting an incident beam into a plurality of sub-beams and emitting the sub-beams at different emitting angles, so that the sub-beams emitted from the light source shaping part 001 form multi-line lasers at a designated position.

As shown in fig. 1, an initial light spot generated by a laser light source 100 enters a collimation module 200 in a light source shaping part 001, is collimated into nearly parallel light by the collimation module 200 and then enters a light spot shaping module 300, the light spot shaping module 300 shapes the light spot in one divergence angle direction into a linear light spot, meanwhile, the direction of another light beam in the vertical divergence angle direction of the incident light source is not changed, the light beam shaping for converting the linear light spot into the linear light spot is completed, and an emergent light beam from the light spot shaping module 300 enters a beam splitting module 400, is split into a plurality of sub-light beams by the beam splitting module 400 and is emergent at different emergent angles to form multi-line laser at a designated position. Wherein, the parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams.

Specifically, the parameters of the multi-line laser include at least one of the number of laser lines, the brightness of the laser lines and the focal depth. In the multi-line laser provided in this embodiment, the number of laser lines of the generated multi-line laser is determined by the number of sub-beams formed by splitting the beam splitting module 400, and the greater the number of sub-beams formed by splitting the beam splitting module 400, the greater the number of laser lines of the generated multi-line laser. Therefore, if the number of laser lines of the formed multi-line laser is to be adjusted, the number of sub-beams divided and formed by the beam splitting module 400 in the multi-line laser provided in this embodiment is only required to be adjusted.

In the multi-line laser provided in this embodiment, the laser line brightness of the generated multi-line laser is determined by the width of the sub-beam formed by splitting the beam splitting module 400, and the greater the width of the sub-beam formed by splitting the beam splitting module 400, the higher the laser line brightness of the generated multi-line laser. Therefore, if the laser line brightness of the formed multi-line laser is to be adjusted, the beam splitting module 400 in the multi-line laser provided in this embodiment only needs to adjust the width of the sub-beam formed by splitting.

In addition, the multi-line laser provided in this embodiment generates multi-line laser light with a minimum line width at a specified position determined by the focal length of the collimation module 200. The larger the focal length of the collimation module 200, the smaller the linewidth of the multi-line laser formed at the specified location. But the larger the focal length of the collimating module 200, the longer the overall laser length and the larger the diameter, so comprehensive consideration is required.

As an implementation manner, the multi-line laser provided in this embodiment has the focal length of the collimating module 200 ranging from 6mm to 12mm. For example, the focal length of the collimation module 200 is set to 6mm, 8mm, 10mm and 12mm, so that the whole length of the multi-line laser is not too large under the condition that the minimum line width of the multi-line laser formed at a designated position meets the requirement of large focal depth, and the use requirement is met. Taking a multi-line laser applied to a handheld three-dimensional scanner as an example, the focal length range of the collimating lens can be fully adopted to be 6 mm-12 mm. The above specified position is the optimal position of the usage distance range defined for the product.

It should be noted that, in the multi-line laser provided in this embodiment, the outgoing beam from the spot shaping module 300 is split into a plurality of sub-beams by the beam splitting module 400 and is outgoing at different outgoing angles, so that multi-line laser is formed at a specified position. Because the light spot energy is in gaussian distribution, the light spot with weaker edge energy can be shielded by using a large diaphragm, so that the middle uniform light energy is incident to the light splitting module 400. Each sub-beam emitted from the beam splitting module 400 corresponds to a portion of the incident beam of the beam splitting module 400. In the multi-line laser provided in this embodiment, in an application scenario with the same focal depth requirement, the beam splitting module 400 allows the incident light spot width to be several times that allowed by the DOE in the conventional method. Thus, the light energy utilization rate is greatly improved.

Further, in the prior art, the DOE is adopted to copy and then project the incident light spots into the beam-splitting light spots emergent from different angles, and the laser parameters of the emergent light spots are limited by the width of the incident light spots of the DOE. Aiming at the application requirement of large focal depth, only the light spot incident to the DOE can be physically shielded, so that the size of the incident light spot is reduced, and a larger focal depth is obtained, but the utilization rate of light energy is low. The beam splitting module 400 of the multi-line laser provided in the first embodiment can split the incident beam into a plurality of sub-beams and emit the sub-beams at different emitting angles, so that the sub-beams emitted from the light source shaping portion form multi-line laser at a designated position, and parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams. The focal depth can be adjusted by controlling the width of each sub-beam emitted by the beam splitting module 400, and the smaller the beam width of the split sub-beam is, the larger the corresponding laser line focal depth is, so that the large focal depth multi-line laser is realized.

Therefore, compared with the prior art, the multi-line laser provided by the first embodiment is not limited by the size of the incident light spot, the allowable light transmission size of the diaphragm is far larger than that of the prior DOE light splitting technology, the multi-line laser has higher energy utilization rate, and simultaneously, larger focal depth can be realized.

Specifically, the laser light source 100 in the present application may be implemented by any of a solid laser light source, a gas laser light source, and a semiconductor laser light source, which is not limited herein.

The collimating module 200 in the present application may be implemented by a spherical lens, an aspherical lens, a cylindrical lens, or the like. The collimating module 200 may be composed of one lens or several lenses. It should be noted that the focal length of the lens used to implement the collimation module 200 is determined by the combination of the size of the multi-line laser and the desired laser linewidth. The larger the focal length, the longer the overall length of the multi-line laser, the thinner the laser linewidth and the larger the focal depth. In addition, the laser line width is also related to the diffraction quality factor of the laser light source 100, and generally, the larger the laser beam power is, the larger the laser diffraction quality factor is, and the laser spot needs to be focused by an aspherical lens.

The spot shaping module 300 of the present application is mainly used for shaping a spot light into a linear spot, and may be a refractive beam shaping device or a diffractive beam shaping device.

Further, the refractive spot shaping device uses the law of refraction of light to achieve spot shaping, such as a powell lens, a cylindrical mirror, or a microprism array structure. Fig. 2A and 2B are schematic diagrams of shaping light paths of the powell lens in two perpendicular directions. The powell lens is a cylindrical lens with a quadratic coefficient that shapes only one direction of the spot and corresponds to a planar lens for the other perpendicular direction. The Baowel prism controls the fan angle and the energy uniformity of the linear light spot through the refractive index of the material, the radius of curvature of the cylindrical surface and the quadratic term coefficient. When the sector angle of the laser line is larger, a material with high refractive index, such as n=1.8, can be selected, and when the sector angle of the laser line is smaller, a material with low refractive index, such as n=1.5, can be selected. Both the radius of curvature and the quadratic coefficient affect the ray fan angle and uniformity. In general, the influence of the curvature radius on the fan angle is large, and the influence of the quadratic coefficient on the light uniformity is large. The radius of curvature is typically larger than the diameter of the incident spot, typically positive, and the quadratic coefficient is typically negative.

As shown in fig. 3, a schematic view of a shaping optical path of a micro-prism array structure is shown, in which the convex portion resembles a powell lens, and the beam passing through each small convex can be shaped into a line laser. The spatial coherence of laser lines is reduced by superposition of multi-line lasers, and the effect of inhibiting laser speckles is realized.

The diffraction type light spot shaping device mainly utilizes the fluctuation of light to realize light spot shaping. In particular, with a lower light propagation speed through the raised areas in the diffraction element than through the lower areas, a controlled phase modulation is achieved, producing a diffraction effect to shape the light beam. By varying the propagation phase of the incident light through the design of the microstructure pattern fabricated on the substrate material, the spot can be shaped into any desired intensity profile and shape. The spot shaping module 300 of the present application may be implemented using phase-adjustable diffractive optics and super-structured lenses. The super-structured lens is also called super-lens, see fig. 4, and its surface is composed of an array of sub-wavelength optical scatterers, and the light beam is manipulated by adjusting the size, shape, distribution, etc. of the scatterers. These scatterers may be metal or dielectric nanopillars or sub-wavelength pore structures in metal or dielectric films. Of course, the spot shaping module 300 of the present application may also implement spot shaping using DOE in the prior art, and will not be described in detail herein.

The light splitting module 400 in the present application may be implemented by a refractive light splitting device or a diffractive light splitting device. Specifically, the refractive light-splitting device splits light by utilizing the facets with different inclination angles on the light-splitting side and emits the light towards a designated angle, so that an incident collimated or near-collimated light beam can be split into a plurality of light beams and diverged at different angles. The energy of each sub-beam and the focal depth of the laser line can be controlled by controlling the width of each facet, the emergent angle of each sub-beam can be controlled by controlling the inclined angle of each facet, and the multi-line laser with uniform energy and large focal depth can be realized. For the refractive spectroscopic device, specific examples will be provided below for explanation.

The diffraction type light-splitting device utilizes the microstructure design of the surface to realize phase regulation and control to split the light beam and emit the light beam towards the appointed direction. The diffraction type light splitting device controls the energy of each sub-beam and the focal depth of the laser line by regulating and controlling the periodic width of the microstructure. The diffractive optical element may be implemented by using the above-mentioned phase-adjustable diffractive optical element or super-structured lens, which will not be described in detail here.

The collimating module 200 and the spot shaping module 300 in the first embodiment may be separate or may be an integrated structure. As an embodiment, the collimation module 200 and the spot shaping module 300 are an integrated structure. The light entrance surface of the integrated structure comprising the collimation module 200 and the spot shaping module 300 may be spherical, aspherical or other surface type capable of realizing the collimation function. The collimation module 200 and the spot shaping module 300 are integrally arranged and can be integrally processed together, so that the processing cost and the assembly cost are reduced. At the same time, the size of the optical path can be reduced.

The spot shaping module 300 and the beam splitting module 400 in the first embodiment may be separate or may be an integrated structure. For example, one side of the integrated structure including the spot shaping module 300 and the beam splitting module 400 adopts a hawk prism, cylindrical mirror, or microprism array structure, and the other side adopts a refractive beam splitting device or a diffractive beam splitting device. As another embodiment, the spot shaping module 300 and the beam splitting module 400 are an integrated structure, and are integrally manufactured together, thereby reducing the manufacturing cost and the assembly cost. At the same time, the size of the optical path can be reduced.

As described above, the spot shaping module 300 shapes the spot light beam in one divergence angle direction of the laser into the linear light beam, the beam splitting module 400 splits the incident beam in the other perpendicular divergence angle direction of the laser into a plurality of sub-beams and emits the sub-beams at different emitting angles, and finally the multi-line laser is realized at the designated position. Referring to fig. 5A and 5B, schematic views of optical paths in two mutually perpendicular directions according to the first embodiment are shown, and arrows represent the transmission directions of light. As shown in fig. 5A and 5B, the beam emitted from the laser light source 100 is collimated into near-parallel light by the collimation module 200, which finally realizes the focusing of a light spot at a designated position, the light spot shaping module 300 shapes the light spot in one divergence angle direction of the light source into a linear light spot, which does not change the light path trend of the other vertical divergence angle direction of the light source, and the light splitting module 400 splits the light spot in the other vertical divergence angle direction of the light source and emits the light spot at different angles, so as to finally realize the multi-line laser with a certain focal depth at the designated position.

Therefore, the spot shaping module 300 and the beam splitting module 400 respectively act in two directions perpendicular to each other, so that the two can exchange sequences, and the two can be in front of and behind each other on the optical path.

Referring to fig. 6, based on the same inventive concept, a multi-line laser is provided in a second embodiment of the present application, which is used for generating multi-line laser. The multi-line laser includes a laser light source 100 and a light source shaping section 001, and the light source shaping section 001 includes a collimation module 200, a spot shaping module 300, and a beam splitting module 400. The outgoing light spot of the laser light source 100 sequentially passes through the collimation module 200, the light splitting module 400 and the light spot shaping module 300, and then forms multi-line laser at a designated position.

The laser device comprises a laser light source 100 for generating light spots, and a light source shaping part 001 for shaping and dividing the light spots generated by the laser light source 100 to form multi-line laser with adjustable parameters. The device comprises a collimation module 200 for collimating or focusing an incident spot, a spot shaping module 300 for shaping the incident spot into linear spot and emitting, and a beam splitting module 400 for splitting the incident beam into a plurality of sub-beams and emitting at different emitting angles, so that the sub-beams emitted from the light source shaping part 001 form multi-line lasers at a designated position.

As shown in fig. 6, an initial light spot generated by a laser light source 100 enters a collimation module 200 in a light source shaping part 001, is collimated into nearly parallel light by the collimation module 200, then enters a beam splitting module 400, is split into a plurality of sub-beams by the beam splitting module 400 and is emitted to a light spot shaping module 300 at different emitting angles, the light spot shaping module 300 shapes a light spot in one divergence angle direction of an incident light source in the plurality of sub-beams into a linear light spot, and meanwhile, the direction of the light beam in the other vertical divergence angle direction of the incident light source is not changed, and after finishing beam shaping for converting the plurality of point light spots in different directions into the linear light spot, multi-line laser is formed at a designated position.

Wherein, the parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams.

It should be noted that, in the multi-line laser provided in this embodiment, the outgoing beam from the collimation module 200 enters the beam splitting module 400, is split into a plurality of sub-beams by the beam splitting module 400, exits at different outgoing angles, enters the spot shaping module 300 for shaping, and finally forms multi-line laser at a designated position. Because the light spot energy is in gaussian distribution, the light spot with weaker edge energy can be shielded by using a large diaphragm, so that the middle uniform light energy is incident to the light splitting module 400. Each sub-beam emitted from the beam splitting module 400 corresponds to a portion of the incident beam of the beam splitting module 400. In the multi-line laser provided in this embodiment, in an application scenario with the same focal depth requirement, the beam splitting module 400 allows the incident light spot width to be several times that allowed by the DOE in the conventional method. Thus, the light energy utilization rate is greatly improved.

Similarly, for the application requirement of large focal depth, the prior art needs to physically shield the light spot incident to the DOE so as to reduce the size of the incident light spot, thereby obtaining larger focal depth, but also resulting in lower light energy utilization rate. In the multi-line laser provided in the second embodiment of the present application, the beam splitting module 400 can split the incident beam into a plurality of sub-beams and emit the sub-beams at different emitting angles, so that the sub-beams emitted from the light source shaping portion form multi-line lasers at the designated positions, and parameters of the multi-line lasers can be adjusted according to the number of the sub-beams and the width of the sub-beams. The focal depth can be adjusted by controlling the width of each sub-beam emitted by the beam splitting module 400, and the smaller the beam width of the split sub-beam is, the larger the corresponding laser line focal depth is, so that the large focal depth multi-line laser is realized.

Therefore, compared with the prior art, the multi-line laser provided by the second embodiment has the advantages that the allowable light transmission size of the diaphragm is far larger than that of the prior DOE light splitting technology, the energy utilization rate is higher, and the larger focal depth can be realized.

The second embodiment provides a multi-line laser, which is different from the multi-line laser provided in the first embodiment only in that the optical path positions of the beam splitting module 400 and the spot shaping module 300 are interchanged, and the specific implementation schemes of the respective modules can be implemented with reference to the first embodiment, and the repetition is not repeated.

The collimating module 200 and the spectroscopic module 400 in the second embodiment may be separate or may be an integrated structure. For example, the light-entering side of the integrated structure including the collimation module 200 and the light-splitting module 400 may be a sphere, an aspheric surface, or other surface type capable of realizing the collimation function, and the light-splitting side may be a facet with different inclination angles or a microstructure capable of realizing phase regulation.

As an embodiment, the collimating module 200 and the light splitting module 400 are an integrated structure, and are integrally manufactured together, thereby reducing the manufacturing cost and the assembly cost. At the same time, the size of the optical path can be reduced.

The beam splitting module 400 and the spot shaping module 300 in the second embodiment may be separate or may be an integrated structure. For example, one side of the integrated structure including the spot shaping module 300 and the beam splitting module 400 adopts a hawk prism, a cylindrical mirror, or a micro-polygonal array structure, and the other side adopts a refractive beam splitting device or a diffractive beam splitting device.

As another embodiment, the spot shaping module 300 and the beam splitting module 400 are an integrated structure, and are integrally manufactured together, thereby reducing the manufacturing cost and the assembly cost. At the same time, the size of the optical path can be reduced.

Similarly, the collimating module 200, the spot shaping module 300 and the beam splitting module 400 in the multi-line laser provided in the first embodiment and the second embodiment may be separate or may be an integrated structure. As an embodiment, the collimating module 200, the spot shaping module 300 and the beam splitting module 400 are an integrated structure, and are integrally processed together, thereby reducing processing cost and assembly cost. At the same time, the size of the optical path can be reduced.

Next, various refractive spectroscopic devices are provided in the embodiments of the present application to implement the above spectroscopic module 400.

In one embodiment, referring to fig. 7, a schematic diagram of the light splitting principle of the light splitting module 400 is shown, where the arrow represents the light transmission direction. The light splitting module 400 includes a first optical surface including a plurality of facets having different inclination angles. The incident light beam of the first optical surface is refracted at each facet to form a plurality of sub-light beams and emergent light beams with different emergent angles. The first optical surface may be a light exit surface of the spectroscopic module 400 or a light entrance surface of the spectroscopic module 400. The width of each sub-beam is determined by the face width of the emergent facet, the emergent angle of each sub-beam is determined by the inclined angle of the emergent facet, and the number of the sub-beams obtained by dividing is determined by the number of the facets.

For the same focal depth requirement, i.e. the same size of the outgoing spot, the prior art uses DOE for splitting, and uses aperture to reduce the initial spot size of the incident beam, and then distributes the incoming spot energy to each sub-beam. The beam splitting module 400 provided by the application allows the initial beam with larger size to be incident, and cuts the initial beam into the required emergent light spot size through the surface width of each facet of the first optical surface, wherein the energy of each sub-beam is the energy obtained by cutting the corresponding surface, and redistribution is not needed. Therefore, the energy utilization is much higher than DOE spectroscopy, and the more beams split, the higher the energy utilization is relatively.

Specifically, the surface shape of each facet may be one or a combination of more of a plane, a sphere, an aspherical surface, and a free-form surface. The surface shape of each facet of the first optical surface of the beam splitting module 400 may be a plane, and if the spot of each sub-beam needs to be reshaped, the surface shape of each facet may be a sphere, an aspheric surface, a free-form surface, or any other surface shape, or may be a combination of surface shapes, which is not limited in the present application.

Further, the first optical surface has at least one of a concave surface, a convex surface, and an irregular surface. As shown in fig. 8A and 8B, fig. 8A is a schematic structural view of a light splitting module 400 with a concave first optical surface, and fig. 8B is a schematic structural view of a light splitting module 400 with a convex first optical surface.

The above-described spectroscopic module 400 shown in fig. 8A and 8B can realize one-dimensional spectroscopic. Two-dimensional spectroscopic can also be achieved by the conversion of the surface shape of the first optical surface 410. As shown in fig. 9A and 9B, two-dimensional spectroscopic modules 400 are schematically configured. Taking the example of the light splitting of the parallel light source, the light splitting result of the two-dimensional light splitting module 400 shown in fig. 9A on the parallel light source is shown in fig. 10A, and the light splitting result of the two-dimensional light splitting module 400 shown in fig. 9B on the parallel light source is shown in fig. 10B.

As an embodiment, the first optical surface comprises a microstructure for achieving phase modulation of the sub-beams. Further, the microstructure is at least one of a step shape, a hole shape, and a columnar shape, which is not limited in the present application.

As a specific implementation manner, the third embodiment of the present application provides a multi-line laser, which includes a laser diode with an excitation light power of 1.8W and a wavelength of 450nm, an aspheric lens with a focal length of 8mm, a powell lens, and the refractive beam splitter. Wherein, the powell lens material is ZF7, the refractive index n=1.81, the radius curvature is 1, and the quadratic coefficient is-4. The incident light spot width of the refraction type light-splitting device is 4.5mm, and the width of each emergent facet is 0.4mm. It is desirable to realize an 11-line laser at 300mm, in which the laser line length direction divergence angle is 45 °. Fig. 11 is a simulation effect of the multi-line laser provided in the third embodiment of the present application in optical simulation software Tracepro.

According to simulation results, the conventional DOE multi-line scheme is required to realize 11-line laser with the same focal depth, and a diaphragm with the width of 0.4mm is required to limit the size of an incoming light spot, and the energy of each sub-beam is 1/11 of the energy of an outgoing sub-beam in the embodiment. If a conventional DOE multi-line scheme were to achieve the same power of 11-line laser, then the 4.5mm wide stop required to be used would limit the entrance spot size so that the depth of focus of the laser line would be very small.

Therefore, compared with the traditional multi-line laser adopting DOE, the embodiment greatly improves the energy utilization rate of laser and increases the focal depth of the laser line.

Based on the same inventive concept, an embodiment of the present utility model further provides a scanner, including a scanning device, where the scanning device includes the multi-line laser provided in any one of the above embodiments.

Further, the scanner further comprises a tracking device, wherein the tracking device is used for tracking the pose of the scanning device.

According to the multi-line laser and the scanner provided by the embodiment of the application, the beam is split by the design of the beam splitting module 400 to replace the traditional DOE beam splitting, so that the focal depth of the laser lines of all the sub-beams and the energy uniformity of all the sub-beams are controlled by controlling the spot width of all the sub-beams split by the beam splitting module. The multi-line laser and the multi-line laser generated by the scanner provided by the application have the advantage that parameters of the multi-line laser can be adjusted according to the number of the sub-beams and the width of the sub-beams. Compared with the traditional multi-line laser and scanner, the laser has higher energy utilization rate and larger focal depth.

It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to be limiting. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure in accordance with the embodiments provided herein.

It is to be understood that the drawings are merely illustrative of some embodiments of the present application and that it is possible for those skilled in the art to adapt the present application to other similar situations without the need for inventive work. In addition, it should be appreciated that while the development effort might be complex and lengthy, it would nevertheless be a routine undertaking of design, fabrication, or manufacture for those of ordinary skill having the benefit of this disclosure, and thus should not be construed as a departure from the disclosure.

The term "embodiment" in this disclosure means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive. It will be clear or implicitly understood by those of ordinary skill in the art that the embodiments described in the present application can be combined with other embodiments without conflict.

The above examples merely represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the patent claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of the application should be assessed as that of the appended claims.

Claims

1. A multi-line laser, characterized in that it comprises a laser light source and a light source shaping unit, wherein the light source shaping unit comprises a collimation module, a light spot shaping module and a light splitting module;

The laser light source is used to generate a light spot;

The collimation module is used to collimate or focus the incident light spot;

The light spot shaping module is used to shape the incident point light spot into a line light spot for outgoing emission;

The beam splitting module is used to split the incident light beam into multiple sub-beams and emit them at different emission angles, so that the sub-beams emitted from the light source shaping part form multi-line lasers at specified positions; wherein the parameters of the multi-line lasers are adjusted according to the number of the sub-beams and the width of the sub-beams.

2 . The multi-line laser according to claim 1 , wherein the parameters of the multi-line laser include at least one of the following: the number of laser lines, the brightness of the laser lines, and the focal depth. 3 .

3 . The multi-line laser according to claim 1 , wherein the focal length of the collimation module ranges from 6 mm to 12 mm.

4. The multi-line laser according to any one of claims 1 to 3, characterized in that the output light spot of the laser light source passes through the collimation module, the light spot shaping module, and the light splitting module in sequence to form the multi-line laser;

Alternatively, the output light spot of the laser light source forms the multi-line laser after passing through the collimation module, the light splitting module, and the light spot shaping module in sequence.

5. The multi-line laser according to claim 4, wherein the light splitting module comprises a first optical surface;

The first optical surface of the light splitting module includes a plurality of facets with different inclination angles; the incident light beam on the first optical surface is refracted at each of the facets to form a plurality of sub-beams which are emitted at different emission angles;

The width of each of the sub-beams is determined by the width of its exit facet, the exit angle of each of the sub-beams is determined by the inclination angle of its exit facet, and the number of the sub-beams is determined by the number of the facets.

6 . The multi-line laser according to claim 5 , wherein the surface shape of each of the small faces is a combination of one or more of a plane, a spherical surface, an aspherical surface, and a free-form surface.

7 . The multi-line laser according to claim 5 , wherein the overall surface shape of the first optical surface of the light splitting module is at least one of a concave surface, a convex surface, and an irregular surface shape.

8 . The multi-line laser according to claim 4 , wherein the light splitting module is a phase-adjustable diffractive optical device or a meta-lens.

9 . The multi-line laser according to claim 5 , wherein the first optical surface of the light splitting module comprises a microstructure, and the microstructure is used to achieve phase control of the sub-beam.

10 . The multi-line laser according to claim 9 , wherein the microstructure is in at least one of a step shape, a hole shape, and a column shape.

11. The multi-line laser according to claim 4, characterized in that the light spot shaping module is a Powell prism, a cylindrical mirror, a microprism array structure, a phase-adjustable diffractive optical device or a meta-lens.

12. The multi-line laser according to any one of claims 1 to 3, characterized in that the output light spot of the laser light source forms a multi-line laser at a specified position after passing through the collimation module, the light splitting module, and the light spot shaping module in sequence;

The collimation module and the light splitting module are an integrated structure;

Alternatively, the light splitting module and the light spot shaping module are an integrated structure.

13. The multi-line laser according to any one of claims 1 to 3, characterized in that the output light spot of the laser light source forms a multi-line laser at a specified position after passing through the collimation module, the light spot shaping module, and the light splitting module in sequence;

The collimation module and the light spot shaping module are an integrated structure;

Alternatively, the light spot shaping module and the light splitting module are an integrated structure.

14 . The multi-line laser according to claim 1 , wherein the collimation module, the light spot shaping module and the light splitting module are an integrated structure.

15. A scanner, characterized by comprising a scanning device, wherein the scanning device comprises the multi-line laser according to any one of claims 1 to 14.

16. The scanner according to claim 15 is characterized in that it also includes a tracking device, wherein the tracking device is used to track the position and posture of the scanning device.