CN222579964U - A photoluminescence defect detector - Google Patents
A photoluminescence defect detector Download PDFInfo
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- CN222579964U CN222579964U CN202420717512.9U CN202420717512U CN222579964U CN 222579964 U CN222579964 U CN 222579964U CN 202420717512 U CN202420717512 U CN 202420717512U CN 222579964 U CN222579964 U CN 222579964U
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Abstract
The utility model relates to the technical field of defect detection, in particular to a photoluminescence defect detector. The defect detector comprises a supporting platform and an optical detection device connected to the supporting platform, wherein the optical detection device comprises a laser emitter, an object carrying platform and a recognition mechanism, the object carrying platform is used for carrying a sample to be detected, light emitted by the laser emitter can irradiate the sample to be detected, the recognition mechanism comprises a second light splitting piece, a first recognition channel and a second recognition channel, the second light splitting piece can split light excited by the sample to be detected into a first light beam and a second light beam, the first recognition channel is used for receiving and recognizing the first light beam, and the second recognition channel is used for receiving and recognizing the second light beam. According to the utility model, the second light splitting piece divides the light after the sample to be detected is excited into two light beams according to the set wavelength threshold, and the two light beams are accurately identified and analyzed through the two identification channels, so that the detection efficiency and the detection precision of the detector can be improved.
Description
Technical Field
The utility model relates to the technical field of defect detection, in particular to a photoluminescence defect detector.
Background
The photoluminescence defect detector is an instrument for detecting surface defects of a sample, and is based on the principle that the sample to be detected is excited by light with a certain wavelength to emit light with a specific wavelength, then an identification mechanism is used for capturing light signals emitted by the sample to be detected, and the light signals are displayed on a screen after being processed by a computer, so that defects which cannot be detected by naked eyes in the sample to be detected are detected.
Existing photoluminescence defect detectors typically use a camera to capture the optical signal emitted from the sample to be detected and convert the optical signal into an image for output. Because the identification accuracy of the image is limited, some small defects in the sample to be detected cannot be identified, so that the detection accuracy of the defect detector is low.
Disclosure of utility model
The utility model aims to provide a photoluminescence defect detector to solve the technical problem of low detection precision of the existing photoluminescence defect detector.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
A photoluminescence defect detector, comprising a supporting platform and an optical detection device connected with the supporting platform;
The optical detection device comprises a laser emitter, an object carrying platform and a recognition mechanism, wherein the object carrying platform is used for carrying a sample to be detected, light emitted by the laser emitter can irradiate the sample to be detected, the recognition mechanism comprises a second light splitting piece, a first recognition channel and a second recognition channel, the second light splitting piece can split light excited by the sample to be detected into a first light beam and a second light beam, the first recognition channel is used for receiving and recognizing the first light beam, and the second recognition channel is used for receiving and recognizing the second light beam.
Further, the first identification channel comprises a second slit filter sheet and a spectrometer, wherein the second slit filter sheet is arranged on the path of the first light beam and is positioned between the second light splitting sheet and the spectrometer.
Further, the second recognition channel comprises a filter plate and a scanning camera, wherein the filter plate is arranged on the path of the second light beam and is positioned between the second light splitting plate and the scanning camera.
Further, the second identification channel further comprises a rotator for driving the filter sheet to rotate.
Further, the device also comprises a first rotating prism mechanism, wherein the first rotating prism mechanism comprises a rotatable first prism, and light emitted by the laser emitter irradiates the sample to be detected through the first prism.
Further, the optical detection device further comprises a light spot shaping mechanism, wherein the light spot shaping mechanism is arranged between the laser transmitter and the first rotating prism mechanism and comprises a first lens, a first slit filter sheet and a second lens which are sequentially arranged on a light path of the laser transmitter.
Further, the optical detection device further comprises a first beam splitter and/or a focusing objective lens, and the first beam splitter and/or the focusing objective lens are arranged on the light path of the laser transmitter and are positioned between the first prism and the carrying platform.
Further, the optical detection device comprises a protective cover, wherein the protective cover is arranged on the supporting platform, and part of the optical detection device is arranged above the supporting platform and arranged in the protective cover.
Further, the laser transmitter, the light spot shaping mechanism, the first rotating prism mechanism and the first light splitting sheet are sequentially arranged along the horizontal direction, and the first light splitting sheet and the carrying platform are sequentially arranged along the vertical direction;
The laser transmitter, the light spot shaping mechanism, the first rotating prism mechanism and the first light splitting sheet are all arranged above the supporting platform and in the protective cover;
the carrying platform is arranged below the supporting platform.
Further, the carrying platform is arranged on the cross-shaped movable guide rail.
The utility model has the beneficial effects that:
The photoluminescence defect detector comprises a supporting platform and an optical detection device connected to the supporting platform, wherein the optical detection device comprises a laser emitter, a carrying platform and a recognition mechanism, the carrying platform is used for carrying a sample to be detected, light emitted by the laser emitter can irradiate the sample to be detected, the recognition mechanism comprises a second light splitting sheet, a first recognition channel and a second recognition channel, the second light splitting sheet can split light excited by the sample to be detected into a first light beam and a second light beam, the first recognition channel is used for receiving and recognizing the first light beam, and the second recognition channel is used for receiving and recognizing the second light beam. According to the utility model, the second light splitting piece divides the light after the sample to be detected is excited into two light beams according to the set wavelength threshold, and the two light beams are respectively and accurately identified and analyzed through the two identification channels, so that the two-channel identification and analysis result can be obtained almost simultaneously, and the detection efficiency and the detection precision of the detector can be improved.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a photo-luminescence defect detector according to an embodiment of the present utility model;
FIG. 2 is a schematic structural view of a first prism according to a first embodiment of the present utility model;
FIG. 3 is a schematic structural diagram of a photoluminescence defect detector according to a fourth embodiment of the utility model;
Fig. 4 is a schematic diagram of a connection structure of a first rotating prism mechanism, a second rotating prism mechanism and a driving assembly according to a fifth embodiment of the present utility model;
FIG. 5 is a cross-sectional view at A-A of FIG. 4;
Fig. 6 is a schematic structural diagram of a first rotating prism mechanism, a second rotating prism mechanism and a driving assembly according to a fifth embodiment of the present utility model when the first prism is connected to a first transmission shaft;
fig. 7 is a schematic structural diagram of a first rotating prism mechanism, a second rotating prism mechanism and a driving assembly according to a fifth embodiment of the present utility model when the second prism is connected to the second transmission shaft.
Icon:
1-a supporting platform;
2-optical detection device, 21-laser emitter, 22-carrying platform, 23-identification mechanism, 231-second light splitter, 232-second slit filter, 233-spectrometer, 234-rotator, 235-filter, 236-scanning camera, 24-first rotating prism mechanism, 241-first prism, 25-spot shaping mechanism, 251-first lens, 252-first slit filter, 253-second lens, 26-first light splitter, 27-focusing objective lens, 28-F-theta lens, 29-second rotating prism mechanism, 291-second prism, 292-third driving source, 210-driving component, 2101-fourth driving source, 2102-master wheel, 2103-first driven wheel, 2104-second driven wheel, 2105-rotating plate, 21051-arc tooth, 2106-first transmission shaft, 2107-second transmission shaft, 2108-rack, 2109-fifth driving source, 10-conical gear, 21011-gear and 3-shield.
Detailed Description
The technical solutions of the present utility model will be clearly and completely described in connection with the embodiments, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that, in the description of the present utility model, the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
It should be noted that, in the description of the present utility model, the terms "connected" and "mounted" should be understood in a broad sense, and for example, they may be fixedly connected, detachably connected, or integrally connected, may be directly connected, may be connected through an intermediate medium, and may be mechanically connected or electrically connected. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
Example 1
The existing photoluminescence defect detector usually uses a camera to capture the optical signal emitted by a sample to be detected, and the detection precision of the defect detector is low.
Based on this, a first embodiment of the present utility model provides a photoluminescence defect detector, referring to fig. 1, the photoluminescence defect detector includes a support platform 1 and an optical detection device 2 connected to the support platform 1;
The optical detection device 2 comprises a laser emitter 21, an object carrying platform 22 and a recognition mechanism 23, wherein the object carrying platform 22 is used for carrying a sample to be detected, light emitted by the laser emitter 21 can irradiate the sample to be detected, the recognition mechanism 23 comprises a second light splitting sheet 231, a first recognition channel and a second recognition channel, the second light splitting sheet 231 can split light after the sample to be detected is excited into a first light beam and a second light beam, the first recognition channel is used for receiving and recognizing the first light beam, and the second recognition channel is used for receiving and recognizing the second light beam.
In the above structure, the second light-splitting sheet 231 is a wavelength square light sheet, which allows light rays with a specific wavelength or more to pass through, and light rays with a specific wavelength or less are reflected, wherein the light rays passing through the second light-splitting sheet 231 form a first light beam, the first light beam enters the first recognition channel, the light rays reflected by the second light-splitting sheet 231 form a second light beam, and the second light beam enters the second recognition channel. In this embodiment, the second beam splitter 231 divides the light excited by the sample to be detected into two light beams according to the set wavelength threshold, and performs precise recognition analysis on the two light beams through the two recognition channels, so that the recognition analysis results of two channels can be obtained almost simultaneously, and the detection efficiency and the detection accuracy of the detector can be improved.
Further, the first recognition channel includes a second slit filter 232 and a spectrometer 233, wherein the second slit filter 232 is disposed on the path of the first light beam and between the second beam splitter 231 and the spectrometer 233, which can effectively reduce scattering and interference of light and improve recognition accuracy of the spectrometer 233, and the spectrometer 233 is used for analyzing spectral data of the first light beam.
Further, the second recognition channel includes a filter 235 and a scan camera 236, wherein the filter 235 is disposed on the path of the second light beam and between the second light splitter 231 and the scan camera 236, and is used for screening according to the wavelength characteristics of the excitation light, and the scan camera 236 may be an area-array camera or a line-array camera, and is capable of outputting the obtained excitation light with image information. By performing a differential analysis on the image or the image output by the scanning camera 236, the morphology and surface quality of the sample to be detected can be obtained.
Based on the above structure, the second recognition channel further includes a rotator 234, and the rotator 234 is used to drive the filter 235 to rotate. The arrangement of the rotator 234 enables the filter 235 to rotate according to the use requirement and switch for a specific light band, so that the detector can be rapidly applied to the requirements of various excitation spectrums, and the adaptation degree of the detector is improved.
The utility model coaxially designs the camera and the spectrometer to obtain the information of the double channels, wherein the camera channel can perform a high-speed line scanning mode to obtain the photoluminescence or fluorescence light intensity signal analysis, and the spectrometer channel can perform the spectrum signal analysis to obtain the distribution of the light wavelength and the full width at half maximum information. According to the defect detector provided by the utility model, the defects on the surface of the sample to be detected can be detected through the scanning camera 236, and the defects which cannot be identified by the scanning camera 236 can be detected through the spectrometer 233, so that the defect detector has the advantages of high detection precision, high detection efficiency and the like.
With continued reference to fig. 1, the photoluminescence defect detector further comprises a first rotating prism mechanism 24, wherein the first rotating prism mechanism 24 comprises a rotatable first prism 241, and light emitted by the laser emitter 21 irradiates a sample to be detected through the first prism 241.
In the above-described structure, the rotatable first prism 241 can perform angle change on the light emitted from the laser emitter 21, so that the light can perform single-axis high-speed scanning, and thus the sample to be detected is scanned in a line scanning mode. The scanning mode of the rotatable first prism 241 can maintain the characteristics of the laser transmitter, does not dedifferentiate the intensity of the laser transmitter and the quality of subsequent excitation light, and can improve the detection range and the detection efficiency of the detector due to the larger scanning angle range and the higher scanning speed.
Alternatively, the first prism 241 is in the form of a polyhedron, which may be prismatic, pyramid-shaped, or other irregular prismatic, for example, the first prism 241 may be tetrahedral, pentahedral, octahedral, or the like.
Referring to fig. 2, as a specific example, the first prisms 241 may have a diamond-shaped columnar or diamond-shaped polyhedral structure.
On the basis of the structure, the first rotating prism mechanism 24 further comprises a first driving source for driving the first prism 241 to rotate, wherein the first driving source can be a motor, an output shaft of the motor is connected to the first prism 241, and when the motor works, the first prism 241 can be driven to rotate back and forth around the rotating axis of the first prism 241, so that light rays can be scanned at a single axial high speed.
With continued reference to fig. 1, the photoluminescent defect detector further includes a spot shaping mechanism 25, where the spot shaping mechanism 25 is disposed between the laser transmitter 21 and the first rotating prism mechanism 24, and includes a first lens 251, a first slit filter 252, and a second lens 253 sequentially disposed in the light path of the laser transmitter 21.
In the above structure, the light spot shaping mechanism 25 covers the wavelength of the excited substance corresponding to the main optical band, when in operation, the light emitted by the laser emitter 21 sequentially passes through the first lens 251, the first slit filter 252 and the second lens 253, and the light spot shaping mechanism 25 shapes and expands the laser emitter to provide good light spot quality.
Further, the photoluminescence defect detector further comprises an F- θ lens 28, wherein the F- θ lens 28 is disposed in the light path of the laser transmitter 21 and downstream of the first prism 241. The F-theta lens 28 can ensure uniformity of spot size and focal coplanarity during scanning of the first prism 241.
Further, the photoluminescence defect detector further comprises a first beam splitter 26 and/or a focusing objective lens 27, wherein the first beam splitter 26 and/or the focusing objective lens 27 are arranged on the light path of the laser transmitter 21 and are positioned between the first prism 241 and the carrying platform 22.
In this embodiment, the photoluminescence defect detector includes a first beam splitter 26 and a focusing objective lens 27, and the first beam splitter 26 and the focusing objective lens 27 are disposed in order along the light path of the laser emitter 21.
In the above structure, the first light-splitting sheet 26 is a wavelength square light sheet, which allows light with a specific wavelength or more to pass through, light with a specific wavelength or less is reflected, the reflected light forms an incident light beam to be irradiated on the surface of the sample to be detected, and after the surface of the sample to be detected absorbs the incident light, excitation light (which may be photoluminescence or fluorescence) higher than the wavelength of the incident light is generated, and the excitation light can penetrate through the first light-splitting sheet 26 and enter the identification mechanism 23. The first beam splitter 26 is arranged to screen incident light irradiated on the sample to be detected, and to change the angle of the light, so that the overall arrangement of the device is more reasonable and compact.
In the above-described structure, the focusing objective 27 is disposed between the first beam splitter 26 and the stage 22, for focusing light on the sample to be inspected.
With continued reference to fig. 1, the photoluminescence defect detector further includes a protective cover 3, where the protective cover 3 is connected to the support platform 1, and a part of the optical detection device 2 is connected above the support platform 1 and disposed in the protective cover 3.
Specifically, the laser emitter 21, the spot shaping mechanism 25, the first rotating prism mechanism 24, the F- θ lens 28, and the first dichroic sheet 26 are sequentially arranged in the horizontal direction, the second slit filter sheet 232, the second dichroic sheet 231, the first dichroic sheet 26, the focusing objective 27, and the object stage 22 are sequentially arranged in the vertical direction, and the second dichroic sheet 231, the filter sheet 235, and the scanning camera 236 are sequentially arranged in the horizontal direction.
On the basis of the above structure, the laser transmitter 21, the spot shaping mechanism 25, the first rotating prism mechanism 24, the F- θ lens 28, the first beam splitter 26, the second beam splitter 231, the second slit filter 232, the filter 235 and the scanning camera 236 are all connected above the supporting platform 1 by the bracket structure and are arranged in the protective cover 3, and the protective cover 3 can protect the optical elements inside and can also prevent the interference of external light. The carrying platform 22 is arranged below the supporting platform 1 and outside the protective cover 3, so that samples can be replaced conveniently. The spectrometer 233 is disposed outside the shield 3 to facilitate the adjustment operation.
Through above-mentioned structure, the defect detector that this embodiment provided has advantages such as rationally distributed, compact structure, convenient operation.
Example two
The embodiment provides a photoluminescence defect detector, which is an extension scheme based on the first embodiment.
In this embodiment, the carrying platform 22 is mounted on a cross-shaped moving rail, and the carrying platform 22 can move in any direction in a plane, so that the line laser can perform comprehensive scanning on the sample to be detected.
Example III
The embodiment provides a photoluminescence defect detector, which is an extension scheme based on the first embodiment.
In this embodiment, the first prism 241 has two rotation axes perpendicular to each other, and the first rotating prism mechanism 24 further includes a second driving source for driving the first prism 241 to rotate, where the first driving source and the second driving source are respectively used for driving the first prism 241 to rotate around the two rotation axes, so that the line laser can perform comprehensive scanning on the sample to be detected. Illustratively, referring to fig. 1, one of the rotation axes is located at the center of the first prism 241 and perpendicular to the paper surface, and the other rotation axis is located at one side of the first prism 241 and parallel to the paper surface, the line laser is converted into the plane laser by rotating the first prism 241 about two rotation axes perpendicular to each other, so that the sample to be detected can be scanned comprehensively.
Example IV
The present embodiment provides a photoluminescent defect detector, and the photoluminescent defect detector provided in the present embodiment is a further extension performed on the basis of the first embodiment.
Referring to fig. 3, the photoluminescence defect detector provided in the present embodiment further includes a second rotating prism mechanism 29, the second rotating prism mechanism 29 being disposed downstream of the first rotating prism mechanism 24 (specifically between the first rotating prism mechanism 24 and the F- θ lens 28), which includes a second prism 291 and a third driving source 292 for driving the second prism 291 to rotate. In this embodiment, the first prism 241 has a rotation axis, and the rotation axis of the first prism 241 is perpendicular to the rotation axis of the second prism 291, and the line laser is converted into the surface laser by the first prism 241 and the second prism 291, so that the sample to be detected can be scanned comprehensively.
In the above structure, the third driving source 292 may be a motor, and an output shaft of the motor is connected to the second prism 291.
Example five
The embodiment provides a photoluminescence defect detector, which is an extension scheme based on the fourth embodiment.
Referring to fig. 4, the photoluminescence defect detector in the present embodiment further includes a driving assembly 210, the driving assembly 210 including a fourth driving source 2101, a driving wheel 2102, a first driven wheel 2103, a second driven wheel 2104, a rotating plate 2105, a first transmission shaft 2106, and a second transmission shaft 2107, wherein:
The fourth driving source 2101 may be a motor;
The rotating plate 2105 and the driving wheel 2102 are sequentially sleeved on the output shaft of the fourth driving source 2101;
The driving wheel 2102 is connected with the first driven wheel 2103 and the second driven wheel 2104 respectively, and the connection mode can be tooth meshing or belt connection;
One end of the first transmission shaft 2106 is fixedly connected to the first driven wheel 2103, and the other end of the first transmission shaft can be connected to the first prism 241;
one end of the second transmission shaft 2107 is fixedly connected to the second driven wheel 2104, and the other end can be connected to the second prism 291;
Both ends of the rotating plate 2105 are respectively connected to the first transmission shaft 2106 and the second transmission shaft 2107, and the rotating plate 2105 can rotate around an output shaft of the fourth driving source 2101, so that the first transmission shaft 2106 and the second transmission shaft 2107 are driven to rotate around an output shaft of the fourth driving source 2101, and the connection state of the first transmission shaft 2106 and the first prism 241 and the connection state of the second transmission shaft 2107 and the second prism 291 are changed.
Specifically, the first transmission shaft 2106 and the second transmission shaft 2107 respectively penetrate through two ends of the rotating plate 2105 and can rotate around the axis of the first transmission shaft 2106, the second transmission shaft 2107 and the rotating plate 2105 can be axially limited through fasteners.
Referring to fig. 5, the driving assembly 210 further includes a rack 2108 and a fifth driving source 2109 for driving the rack 2108 to reciprocate, wherein arc teeth 21051 are disposed on the rotating plate 2105, the rack 2108 is meshed with the arc teeth 21051, the rack 2108 can drive the rotating plate 2105 to rotate during the reciprocating movement process, and the fifth driving source 2109 can be an air cylinder, and the end part of a piston rod of the air cylinder is connected with the rack 2108.
Referring to fig. 6, a bevel gear 21010 is provided at each of the end of the rotation shaft of the first prism 241 and the end of the first transmission shaft 2106, and the force transmission direction can be changed by the bevel gear 21010. In this embodiment, when the cylinder rod is retracted, the rotary plate 2105 is rotated clockwise, the bevel gear 21010 at the end of the rotary shaft of the first prism 241 is engaged with the bevel gear 21010 at the end of the first transmission shaft 2106, at this time, the first transmission shaft 2106 is connected to the first prism 241, the second transmission shaft 2107 is disconnected from the second prism 291, and the fourth driving source 2101 can drive the first prism 241 to rotate, but cannot drive the second prism 291 to rotate.
Referring to fig. 7, a gear 21011 is provided at each of the end of the rotation shaft of the second prism 291 and the end of the second transmission shaft 2107. In this embodiment, when the cylinder rod is extended, the rotary plate 2105 is rotated counterclockwise, the gear 21011 at the end of the rotary shaft of the second prism 291 is engaged with the gear 21011 at the end of the second transmission shaft 2107, at this time, the second transmission shaft 2107 is connected to the second prism 291, the first transmission shaft 2106 is disconnected from the first prism 241, and the fourth driving source 2101 can drive the second prism 291 to rotate, but cannot drive the first prism 241 to rotate.
Further, a hugging structure is respectively disposed on the rotation axis of the first prism 241 and the rotation axis of the second prism 291, so as to prevent the first prism 241 and the second prism 291 from rotating under the inertia effect after the first prism 241 and the first transmission shaft 2106 are disconnected and after the second prism 291 and the second transmission shaft 2107 are disconnected. Alternatively, the clasping structure may be a rubber block, which can abut on the peripheral surfaces of the rotation shaft of the first prism 241 and the rotation shaft of the second prism 291.
In order to ensure smooth engagement of the two bevel gears 21010 and the two gears 21011, the tooth profiles of the bevel gears 21010 and the two gears 21011 are substantially triangular.
It should be noted that in this embodiment, the supporting platform 1 needs to be provided with an arc-shaped through hole for the first transmission shaft 2106 and the second transmission shaft 2107 to rotate.
In this embodiment, the first prism 241 and the second prism 291 are driven by the same driving source and can alternately rotate, so that the sample to be detected can be scanned comprehensively.
It should be noted that the above embodiments are merely for illustrating the technical solution of the present utility model and not for limiting the same, and although the present utility model has been described in detail with reference to the above embodiments, it should be understood by those skilled in the art that the technical solution described in the above embodiments may be modified or some or all of the technical features may be equivalently replaced, and these modifications or substitutions do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the present utility model.
Claims (10)
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| CN202420717512.9U CN222579964U (en) | 2024-04-09 | 2024-04-09 | A photoluminescence defect detector |
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| CN202420717512.9U CN222579964U (en) | 2024-04-09 | 2024-04-09 | A photoluminescence defect detector |
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