CN222332136U - Devices for molecular beam epitaxy and crystal growth - Google Patents

Abstract

The utility model is applicable to the field of vacuum thin film deposition technology, and provides a device for molecular beam epitaxy and crystal growth. The above-mentioned device for molecular beam epitaxy and crystal growth includes a vacuum chamber, a gas supply unit, a vacuum obtaining device, a pressure detection unit and a regulating valve. The vacuum obtaining device is connected to the vacuum chamber pipeline and is used to reduce the pressure in the vacuum chamber; the gas supply unit is connected to the vacuum chamber pipeline and is used to input gas into the vacuum chamber, and the pressure detection unit is used to detect the pressure value in the vacuum chamber; the regulating valve is arranged on the pipeline between the vacuum obtaining device and the vacuum chamber; the regulating valve includes a valve body and a regulating structure, at least part of the regulating structure is arranged in the valve body, and the regulating structure is used to adjust the opening size of the entire valve body, so that the pressure regulation of the entire device is more convenient.

Description

Device for molecular beam epitaxy and crystal growth

Technical Field

The utility model belongs to the technical field of vacuum film deposition, and particularly relates to a device for molecular beam epitaxy and crystal growth.

Background

Vacuum film deposition is a film deposition technology carried out in a vacuum environment and is widely applied to the fields of electronics, semiconductors, aerospace, energy science, nuclear industry, optics, decoration, protective coatings and the like. The working principle is that a thin film is formed on a substrate or a workpiece by a physical (including evaporation, sputtering and the like) or chemical method under vacuum condition. The device for molecular beam epitaxy and crystal growth needs a constant vacuum environment in the working process, but because the vacuum cavity is connected with the gas supply system, the gas supply system can provide gas for the vacuum cavity to change the pressure in the vacuum cavity, so that the pressure in the vacuum cavity needs to be adjusted to keep stable. However, the existing devices for molecular beam epitaxy and crystal growth have the technical problem that the vacuum pressure adjustment is inconvenient.

Disclosure of utility model

The utility model aims to provide a device for molecular beam epitaxy and crystal growth, which aims to solve the technical problem of inconvenient pressure regulation of a vacuum cavity in the prior art.

The device for molecular beam epitaxy and crystal growth comprises a vacuum cavity, an air supply unit, a vacuum obtaining device, a pressure detection unit and an adjusting valve, wherein the vacuum obtaining device is communicated with a vacuum cavity pipeline and is used for extracting air in the vacuum cavity, the air supply unit is communicated with the vacuum cavity pipeline and is used for inputting air into the vacuum cavity, the pressure detection unit is used for detecting a pressure value in the vacuum cavity, the adjusting valve is arranged on the pipeline between the vacuum obtaining device and the vacuum cavity, the adjusting valve comprises a valve body and an adjusting structure, at least part of the adjusting structure is arranged in the valve body, and the adjusting structure is used for adjusting the opening degree of the valve body.

In an alternative embodiment, the valve body has a first opening, a second opening, and a channel communicating the first opening and the second opening, and the adjusting structure includes a valve flap movably disposed in the valve body and a driving set for driving the valve flap to move between a first position covering the first opening and a second position avoiding the channel.

In an alternative embodiment, the driving set includes a rotary rod body and a power unit, the rotary rod body has a degree of freedom of rotation around an axis thereof relative to the valve body, the valve clack has only a degree of freedom of movement along the axis of the rotary rod body relative to the valve body, a first end of the rotary rod body is located in the valve body and is in threaded connection with the valve clack, and a second end of the rotary rod body is located outside the valve body and is connected with a driving end of the power unit.

In an optional embodiment, the adjusting valve further comprises an expansion seal sleeve, the expansion seal sleeve is located on one side, away from the first opening, of the valve clack, and is sleeved outside the connecting structure of the valve clack and the rotating rod body, the first end of the expansion seal sleeve is connected to the valve clack in a sealing mode, the second end of the expansion seal sleeve is connected to the inner wall of the valve body in a sealing mode, and the expansion seal sleeve can be switched between a first expansion state corresponding to the first position and a second expansion state corresponding to the second position under the driving of the valve clack.

In an alternative embodiment, a first boss is arranged on one side, away from the first opening, of the valve clack, a first end of the telescopic sealing sleeve is sealed and arranged on the first boss, a second boss is arranged on the inner wall of the valve body, the second boss is arranged on one side, away from the first position, of the second position, and a second end of the telescopic sealing sleeve is sealed and arranged on the second boss.

In an alternative embodiment, the valve clack comprises a main cover body and a connecting column, the connecting column is connected to the side surface of the main cover body, which faces the rotating rod body, an accommodating hole coaxially arranged with the rotating rod body is formed in the connecting column, and the second end of the rotating rod body is in threaded connection with the inner wall of the accommodating hole.

In an alternative embodiment, sealing means are provided on the valve body and/or on the main cover for bringing the main cover into sealing contact with the valve body when the main cover is moved to the first position.

In an alternative embodiment, the sealing structure comprises a sealing ring arranged on the surface of the main cover body, which faces the first opening, and the valve body is provided with a sealing surface which is used for being matched with the sealing ring, and the sealing surface is arranged around the first opening.

In an alternative embodiment, a connection unit is further arranged between the driving end of the power unit and the second end of the rotating rod body, and the driving end of the power unit is detachably connected with the second end of the rotating rod body through the connection unit.

In an alternative embodiment, a mounting bracket is arranged outside the valve body, the power unit is connected to the mounting bracket and is arranged at intervals with the valve body, and the mounting bracket is provided with an avoidance space for accommodating the connecting unit.

Compared with the prior art, the utility model has the technical effects that the vacuum cavity is respectively communicated with the vacuum obtaining device and the air supply unit through pipelines, the pressure value in the vacuum cavity can be continuously reduced through the vacuum obtaining device, and air is input into the vacuum cavity through the air supply unit. Meanwhile, a pressure detection unit is arranged on the vacuum cavity, so that the pressure in the vacuum cavity can be detected. In addition, an adjusting valve comprising a valve body and an adjusting structure is arranged on a pipeline between the vacuum cavity and the vacuum obtaining device, at least part of the adjusting structure is arranged in the valve body, and the adjusting structure is used for adjusting the opening of the valve body. Compared with the prior art, the pressure in the vacuum cavity is detected through the pressure detection unit, when the pressure in the vacuum cavity is larger than a preset value, the opening of the valve body can be increased through the adjusting component, the gas quantity extracted from the vacuum cavity by the vacuum obtaining device in unit time is larger than the gas supply quantity of the gas supply unit, the pressure in the vacuum cavity is reduced, when the pressure in the vacuum cavity is smaller than the preset value, the opening of the valve body can be reduced through the adjusting component, the gas quantity extracted from the vacuum cavity by the vacuum obtaining device in unit time is smaller than the gas supply quantity of the gas supply unit, the pressure in the vacuum cavity is increased, and the pressure regulation of the whole equipment is more convenient.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the embodiments of the present utility model or the drawings used in the description of the prior art, and it is obvious that the drawings described below are only some embodiments of the present utility model, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of an apparatus for molecular beam epitaxy and crystal growth according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a regulating valve used in an embodiment of the present utility model;

FIG. 3 is a schematic cross-sectional view of a regulator valve employed in an embodiment of the present utility model;

Fig. 4 is an enlarged schematic view of the structure at a in fig. 3.

Reference numerals illustrate:

1. A vacuum chamber; 2, an air supply unit, 3, a vacuum obtaining device, 4, a pressure detection unit, 5, a regulating valve, 51, a valve body, 511, a second boss, 512, a sealing surface, 513, a main body, 514, a sealing end cover, 52, a regulating structure, 521, a valve clack, 5211, a main cover body, 5212, a connecting column, 5213, a sealing ring, 5214, a first boss, 5215, a containing hole, 522, a driving group, 5221, a rotating rod body, 5222, a power unit, 53, a first opening, 54, a second opening, 55, a telescopic sealing sleeve, 56, a mounting bracket, 57, a connecting unit, 58, a connecting part and 6, and a control unit.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

In the description of the present utility model, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements or in an interaction relationship between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent.

Referring to fig. 1 to 4, in an embodiment of the present utility model, an apparatus for molecular beam epitaxy and crystal growth is provided, which includes a vacuum chamber 1, a gas supply unit 2, a vacuum obtaining device 3, a pressure detecting unit 4 and a regulating valve 5. The vacuum obtaining device 3 is communicated with the pipeline of the vacuum cavity 1 and is used for reducing the pressure in the vacuum cavity 1. The gas supply unit 2 is communicated with the pipeline of the vacuum cavity 1 and is used for inputting gas into the vacuum cavity 1. The pressure detection unit 4 is used for detecting the pressure value in the vacuum chamber 1. The regulating valve 5 is arranged on a pipeline between the vacuum obtaining device 3 and the vacuum cavity 1. The regulating valve 5 comprises a valve body 51 and a regulating structure 52, at least part of the regulating structure 52 is arranged in the valve body 51, and the regulating structure 52 is used for regulating the opening degree of the valve body 51.

Specifically, the vacuum cavity 1 is a closed container with a certain accommodating space, and is in a state of relatively being "vacuum" in the vacuum cavity 1 when working, that is, the pressure in the vacuum cavity 1 is smaller than the external air pressure. The vacuum obtaining device 3 refers to a device capable of generating or maintaining vacuum degree, wherein the vacuum obtaining device 3 can be a single device such as a vacuum pump, a vacuum unit and the like, and the vacuum obtaining device 3 can also be an air suction pipeline formed by a plurality of devices. The air supply unit 2 may be an air storage container, an air producing device, or the like, and the air supply unit 2 may be an air supply line composed of a plurality of devices. The air supply unit 2 supplies a specific gas or a mixed gas to the inside of the apparatus, thereby changing the atmosphere environment inside the apparatus and affecting the performance, color or adhesion of the coating material. The pressure detecting unit 4 refers to a member for detecting or monitoring pressure, and the pressure detecting unit 4 may include a pressure sensor, a signal conversion, and the like, wherein the pressure sensor may be mechanical, electrical, film, optical, and the like.

The regulating valve 5 is a valve structure capable of regulating the flow rate passing through the valve body, wherein the valve body 51 is a shell-shaped structure with a certain space inside, the regulating structure 52 is a regulating component arranged in the valve body 51 and used for regulating the opening degree of the valve body 51, the regulating structure 52 can be manually driven by an operator, and the regulating structure 52 can also be driven by a power unit such as a motor or a cylinder. The opening degree of the valve body 51 refers to the degree of change between the valve opening and the closed state. Wherein a larger opening represents a larger flow rate through the valve and a smaller opening represents a smaller flow rate through the valve under the same pressure and flow rate conditions.

According to the device for molecular beam epitaxy and crystal growth provided by the embodiment of the utility model, the vacuum cavity 1 is respectively communicated with the vacuum obtaining device 3 and the gas supply unit 2 through pipelines, the pressure value in the vacuum cavity 1 can be continuously reduced through the vacuum obtaining device 3, and gas is input into the vacuum cavity 1 through the gas supply unit 2. Meanwhile, a pressure detection unit 4 is arranged on the vacuum cavity 1, so that the pressure in the vacuum cavity 1 can be detected. Furthermore, an adjusting valve 5 comprising a valve body 51 and an adjusting structure 52 is arranged on the line between the vacuum chamber 1 and the vacuum obtaining device 3, at least part of the adjusting structure 52 is arranged in the valve body 51, and the adjusting structure 52 is used for adjusting the opening of the valve body 51. Compared with the prior art, the pressure in the vacuum cavity 1 is detected through the pressure detection unit 4, when the pressure in the vacuum cavity 1 is larger than a preset value, the opening of the valve body 51 can be increased through the adjusting component, the air quantity extracted from the vacuum cavity 1 by the vacuum obtaining device 3 in unit time can be larger than the air supply quantity of the air supply unit 2, the pressure in the vacuum cavity 1 can be reduced, when the pressure in the vacuum cavity 1 is smaller than the preset value, the opening of the valve body 51 can be reduced through the adjusting component, the air quantity extracted from the vacuum cavity 1 by the vacuum obtaining device 3 in unit time can be smaller than the air supply quantity of the air supply unit 2, and therefore the pressure in the vacuum cavity 1 can be improved, and the pressure of equipment can be adjusted more conveniently.

In one embodiment, referring to fig. 2 and 3, the valve body 51 has a first opening 53, a second opening 54, and a passage communicating the first opening 53 and the second opening 54. The adjusting structure 52 includes a valve clack 521 and a driving set 522, where the valve clack 521 is movably disposed in the valve body 51, and the driving set 522 is used to drive the valve clack 521 to move between a first position covering the first opening 53 and a second position avoiding the passage. Specifically, the first opening 53 and the second opening 54 are both open structures capable of communicating the valve body 51 with the outside, wherein the first opening 53 may be in pipeline communication with the vacuum cavity 1, and the second opening 54 may be in pipeline communication with the vacuum obtaining device 3, and the first opening 53 may also be in pipeline communication with the vacuum obtaining device 3, and the second opening 54 may be in pipeline communication with the vacuum cavity 1. The passage is a region in the valve body 51 that communicates the first opening 53 and the second opening 54, and the first position is a position where the valve flap 521 completely covers the first opening 53, and the second position is a position where the valve flap 521 is away from the first opening 53 and bypasses the open passage to communicate the first opening 53 and the second opening 54. The valve flap 521 is a member having a certain volume, and the valve flap 521 may be a disk, a block, a column, or the like, or the valve flap 521 may be formed by combining various shapes. The driving set 522 refers to a component capable of driving an object to move, the driving set 522 can adopt a linear driving structure, such as a cylinder, a hydraulic cylinder, an electric push rod and the like, and the driving set 522 can also adopt a mode that a screw rod is matched with a motor. The valve flap 521 is movably disposed within the valve body 51 and can simultaneously be driven between a first position and a second position by a drive group 522. When the valve flap 521 is in the first position, the opening of the entire valve body 51 is minimized when the valve flap 521 is completely covered at the first opening 53, the first opening 53 is completely blocked from the second opening 54, and when the valve flap 521 is in the first position, the valve flap 521 is far away from the first opening 53, at which time the opening of the entire valve body 51 is increased. The opening of the valve body 51 is adjusted by driving the valve clack 521 to be far away from or close to the first opening 53 by the driving group 522, so that the opening of the valve is more convenient to adjust, and the pressure is also more convenient to adjust.

In an alternative embodiment, referring to fig. 2, a connection portion 58 is disposed at each of the first opening 53 and the second opening 54, the connection portion 58 is used to communicate the first opening 53 or the second opening 54 with other pipes, specifically, the connection portion 58 refers to a member having a certain length and a channel disposed therein, one end of the connection portion 58 is communicated with the first opening 53 or the second opening 54, and the other end of the connection portion 58 extends away from the valve body 51, where the connection portion 58 is generally integrally formed with the valve body 51. The first opening 53 or the second opening 54 can be connected with other components or pipes more conveniently by the arrangement of the connecting part 58, and the tightness of the connection of the valve body 51 with other components can be better.

In one embodiment, referring to fig. 3, the driving set 522 includes a rotating shaft 5221 and a power unit 5222. The rotation rod 5221 has a degree of freedom of rotation about its own axis with respect to the valve body 51, the valve flap 521 has only a degree of freedom of movement along the axis of the rotation rod 5221 with respect to the valve body 51, a first end of the rotation rod 5221 is located inside the valve body 51 and is screw-coupled to the valve flap 521, and a second end of the rotation rod 5221 is located outside the valve body 51 and is coupled to the driving end of the power unit 5222. Specifically, the rotary rod 5221 is a rod-shaped member having a certain length, and the rotary rod 5221 has a degree of freedom of rotation about its own axis with respect to the valve body 51, the rotary rod 5221 may be provided through a side wall of the valve body 51, and the rotary rod 5221 may remain sealed while rotating relative to the valve body 51. The power unit 5222 refers to a device that can output torque, and the power unit 5222 may be an electric motor, a hydraulic motor, or the like. The fact that the valve flap 521 has only a degree of freedom to move along the axis of the rotation rod 5221 with respect to the valve body 51 means that the valve flap 521 can slide only along the axis of the rotation rod 5221 and cannot rotate together with the rotation rod 5221, which can be achieved by providing a limit structure on the inner wall of the valve body 51. Meanwhile, the first end of the rotating rod 5221 is located in the valve body 51 and is in threaded connection with the valve clack 521, the second end of the rotating rod 5221 is located outside the valve body 51 and is connected with the driving end of the power unit 5222, the rotating rod 5221 can be driven to rotate around the axis of the rotating rod 5222 through the power unit 5222, and in the rotating process of the rotating rod 5221, the valve clack 521 only has the freedom of moving along the axis of the rotating rod 5221 relative to the valve body 51, so that the valve clack 521 can be driven to move along the axis of the rotating rod 5221 through threads. The valve clack 521 is driven to move in a mode of matching the rotary rod 5221 with the power unit 5222, so that the position of the valve clack 521 is adjusted more conveniently and stably.

In an alternative embodiment, referring to fig. 1 and 2, the power unit 5222 may be a device capable of outputting rotational torque, such as an electric motor or a hydraulic motor, wherein the control end of the power unit 5222, the control end of the vacuum obtaining device 3, and the pressure detecting unit 4 may be electrically connected to the control unit 6. When the vacuum chamber 1 is in operation, the control unit 6 can acquire an actual pressure value in the vacuum chamber 1 from the pressure detection unit 4 and compare the actual pressure value with a preset pressure value, when the actual pressure value is larger than the preset pressure value, the control unit 6 can control the power unit 5222 to rotate forward, further, the valve clack 521 can be driven by the rotary rod 5221 to be far away from the first opening 53, the opening degree of the valve body 51 is increased, the air quantity extracted from the vacuum chamber 1 by the vacuum obtaining device 3 in unit time can be larger than the air supply quantity of the air supply unit 2, the pressure in the vacuum chamber 1 is reduced, and when the actual pressure value is smaller than the preset pressure value, the control unit 6 can control the power unit 5222 to rotate reversely, further, the valve clack 521 can be driven by the rotary rod 5221 to be close to the first opening 53, the opening degree of the valve body 51 is reduced, the air quantity extracted from the vacuum obtaining device 3 in unit time can be smaller than the air supply quantity of the air supply unit 2, and the pressure in the vacuum chamber 1 is increased. In addition, the control unit 6 can coordinate and control a plurality of devices in a PID (Proportional-Integral-Differential) adjustment mode, so that the adjustment of the pressure in the vacuum cavity 1 is more intelligent and accurate.

In one embodiment, referring to fig. 3 and 4, the regulating valve 5 further includes a telescopic sealing sleeve 55. The telescopic sealing sleeve 55 is located at one side of the valve clack 521 away from the first opening and sleeved outside the connecting structure of the valve clack 521 and the rotary rod 5221, the first end of the telescopic sealing sleeve 55 is connected to the valve clack 521 in a sealing manner, the second end of the telescopic sealing sleeve 55 is connected to the inner wall of the valve body 51 in a sealing manner, and the telescopic sealing sleeve 55 can be switched between a first telescopic state corresponding to the first position and a second telescopic state corresponding to the second position under the driving of the valve clack 521. Specifically, the telescopic sealing sleeve 55 is a tubular component capable of changing the length of the telescopic sealing sleeve 55, the telescopic sealing sleeve 55 is sleeved outside the rotary rod 5221, the first end of the telescopic sealing sleeve 55 is in sealing connection with the valve clack 521, the second end of the telescopic sealing sleeve is in sealing connection with the inner wall of the valve body 51, a sealing structure can be formed by the telescopic sealing sleeve 55 and the valve clack 521, the rotary rod 5221 is separated from other areas of the valve body 51, leakage at the joint of the rotary rod 5221 and the valve body 51 is avoided, and meanwhile, the telescopic sealing sleeve 55 can be switched between a first telescopic state corresponding to the first position and a second telescopic state corresponding to the second position under the driving of the valve clack 521, so that the whole tightness of the regulating valve 5 is better.

In an alternative embodiment, referring to fig. 4, the telescopic sealing sleeve 55 may be a bellows, which is a tubular elastic element with a corrugated shape, and has good elasticity, stretchability and tightness, and the telescopic sealing sleeve 55 may be a metal product, so that the telescopic sealing sleeve 55 may play a certain role in supporting, thereby avoiding the valve clack 521 rotating along with the rotating rod 5221, and making the position adjustment of the valve clack 521 more convenient and stable.

In one embodiment, referring to fig. 4, a first boss 5214 is disposed on a side of the valve clack 521 facing away from the first opening 53, a first end of the telescopic sealing sleeve 55 is sealed and sleeved on the first boss 5214, a second boss 511 is disposed on an inner wall of the valve body 51, the second boss 511 is disposed on a side of the second position facing away from the first position, and a second end of the telescopic sealing sleeve 55 is sealed and sleeved on the second boss 511. Specifically, the first boss 5214 is a structure having a certain height on the valve clack 521, and the first boss 5214 and the valve clack 521 may be an integrally formed structure. The second boss 511 means a structure having a certain height on the inner wall of the valve body 51. The first end of the telescopic sealing sleeve 55 is sealed and sleeved on the first boss 5214, and the inner wall of the telescopic sealing sleeve 55 is abutted against the circumference of the first boss 5214, so that the contact area between the first end of the telescopic sealing sleeve 55 and the valve clack 521 can be increased, and the tightness between the first end of the telescopic sealing sleeve 55 and the valve clack 521 is better. Meanwhile, the second end of the telescopic sealing sleeve 55 is sealed and sleeved on the second boss 511, and the inner wall of the telescopic sealing sleeve 55 is abutted against the circumference of the second boss 511, so that the contact area between the first end of the telescopic sealing sleeve 55 and the inner wall of the valve body 51 can be increased, and the tightness between the second end of the telescopic sealing sleeve 55 and the inner part of the valve body 51 is better.

In an alternative embodiment, referring to fig. 4, a first end of the telescopic sealing sleeve 55 may be in sealing connection with the first boss 5214 by welding, and a second end of the telescopic sealing sleeve 55 may also be in sealing connection with the second boss 511 by welding, so that the overall tightness of both ends of the whole telescopic sealing sleeve 55 may be better.

In one embodiment, referring to fig. 4, the valve clack 521 includes a main cover 5211 and a connecting post 5212, the connecting post 5212 is connected to a side surface of the main cover 5211 facing the rotating rod 5221, the connecting post 5212 is provided with a receiving hole 5215 coaxially disposed with the rotating rod 5221, a second end of the rotating rod 5221 is movably disposed in the receiving hole 5215, and the rotating rod 5221 is in threaded connection with an inner wall of the receiving hole 5215. Specifically, the main cover 5211 refers to a member having a certain volume, and the shape of the main cover 5211 is matched to the shape of the first opening 53 but has an area larger than that of the first opening 53. The connecting post 5212 is a cylindrical member with a certain length, and the connecting post 5212 is provided with a receiving hole 5215 coaxially arranged with the rotating rod 5221, so that the second end of the rotating rod 5221 extends into the receiving hole 5215, and the rotating rod 5221 is in threaded connection with the inner wall of the receiving hole 5215. The main cover 5211 and the connecting post 5212 can be integrally formed, and the main cover 5211 and the connecting post 5212 can be two independent components and can be connected by welding, fastening or clamping. By dividing the valve clack 521 into the main cover 5211 and the connecting post 5212, the whole coverage area of the valve clack 521 is ensured, and meanwhile, the threaded connection of the valve clack 521 and the rotating rod 5221 is more convenient, so that the whole volume of the valve clack 521 is reduced, and the manufacturing cost of the regulating valve 5 is reduced.

In one embodiment, referring to fig. 4, a sealing structure is provided on the valve body 51 and/or the main cover 5211 for sealing the main cover 5211 to the valve body 51 when the main cover 5211 is moved to the first position. Specifically, the sealing structure refers to a structure capable of sealing two parts, and the sealing structure can be a sealing ring, a sealing gasket and the like. When the main cover 5211 is brought into contact with the inner wall of the valve body 51 by the provision of the seal structure, the sealing property between the main cover 5211 and the inner wall of the valve body 51 is improved.

In one embodiment, referring to fig. 4, the sealing structure includes a sealing ring 5213 disposed on a surface of the main cover 5211 facing the first opening 53, a sealing surface 512 for cooperating with the sealing ring 5213 is disposed on the valve body 51, and the sealing surface 512 is disposed around the first opening 53. Specifically, the sealing ring 5213 refers to a gasket for sealing between two connection members, wherein the sealing ring 5213 may be made of rubber. And a clamping groove for accommodating the sealing ring 5213 may be provided on the main cover 5211, and the sealing ring 5213 is mounted in the clamping groove. The seal surface 512 is a surface structure provided on the inner wall of the valve body 51, and when the main cover 5211 is brought into contact with the inner wall of the valve body 51 by providing the seal ring 5213, the sealing property between the main cover 5211 and the inner wall of the valve body 51 is improved. The sealing surface 512 is arranged to be matched with the main cover 5211, and the shape of the sealing surface 512 can be matched with the shape of the side surface of the main cover 5211 facing the first opening 53, so that the contact surface between the main cover 5211 and the inner wall of the valve body 51 is larger when the main cover 5211 is abutted against the inner wall of the valve body 51, and the tightness between the main cover 5211 and the inner wall of the valve body 51 is better.

In one embodiment, referring to fig. 4, the valve body 51 is provided with a sealing surface 512 for cooperating with the main cover 5211, and the sealing surface 512 is disposed around the first opening 53. Specifically, the sealing surface 512 is a surface structure disposed on the inner wall of the valve body 51, and the main cover 5211 can be mutually matched by the arrangement of the sealing surface 512, and the shape of the sealing surface 512 can be matched with the shape of the side surface of the main cover 5211 facing the first opening 53, so that the contact surface between the main cover 5211 and the inner wall of the valve body 51 is larger when the main cover 5211 is abutted against the inner wall of the valve body 51, and the tightness between the main cover 5211 and the inner wall of the valve body 51 is better.

In one embodiment, referring to fig. 3, the valve body 51 includes a main body 513 and a sealing end cap 514, the main body 513 has a cavity, the first opening 53 and the second opening 54 are both disposed on the main body 513, the main body 513 further has a mounting opening disposed opposite to the first opening 53, and the sealing end cap 514 seals the sealing cover disposed at the mounting opening and is detachably connected to the main body 513. The rotary rod 5221 may be disposed through the seal end cap 514, and a seal bearing may be disposed between the rotary rod 5221 and the seal end cap 514, and may maintain a seal while rotating the rotary rod 5221. By dividing the valve body 51 into the main body 513 and the seal cap 514, the assembly of the regulator valve 5 can be made more convenient and faster.

In an embodiment, referring to fig. 2 and 3, a connection unit 57 is further disposed between the driving end of the power unit 5222 and the second end of the rotating rod 5221, and the driving end of the power unit 5222 is detachably connected to the second end of the rotating rod 5221 by the connection unit 57. Specifically, the connection unit 57 is a component capable of connecting two components, the connection unit 57 can be a coupler, a speed reducer, etc., and the connection between the driving end of the power unit 5222 and the second end of the rotary rod 5221 can be more convenient and the connection is also more firm through the arrangement of the connection unit 57.

In an alternative embodiment, referring to fig. 3, the connection unit 57 may be a coupling, and the connection between the driving end of the power unit 5222 and the second end of the rotating rod 5221 is disassembled by the coupling, so that the connection between the driving end of the power unit 5222 and the rotating rod 5221 is more firm, and the disassembly between the driving end of the power unit 5222 and the rotating rod 5221 is more convenient, so that the repair and maintenance are convenient when the components are damaged.

In one embodiment, referring to fig. 2, a mounting bracket 56 is disposed on the outer portion of the valve body 51, and the power unit 5222 is connected to the mounting bracket 56 and is disposed at a distance from the valve body 51, and the mounting bracket 56 has an avoidance space for accommodating the connection unit 57. Specifically, the mounting bracket 56 is a supporting component with a certain height, and the mounting and fixing of the power unit 5222 can be more convenient and firm through the arrangement of the mounting bracket 56. Meanwhile, the mounting bracket 56 is also provided with an avoidance space, and the driving end of the power unit 5222 and the second end of the rotary rod 5221 can be extended into the avoidance space during assembly, and the two are connected by the reconnection unit 57, so that the structure of the regulating valve 5 is more compact.

The foregoing description of the preferred embodiments of the present utility model has been provided for the purpose of illustrating the general principles of the present utility model and is not to be construed as limiting the scope of the utility model in any way. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model, and other embodiments of the present utility model as will occur to those skilled in the art without the exercise of inventive faculty, are intended to be included within the scope of the present utility model.

Claims (10)

1. The device for molecular beam epitaxy and crystal growth is characterized by comprising a vacuum cavity, a gas supply unit, a vacuum obtaining device, a pressure detection unit and an adjusting valve, wherein the vacuum obtaining device is communicated with a vacuum cavity pipeline and is used for extracting gas in the vacuum cavity, the gas supply unit is communicated with the vacuum cavity pipeline and is used for inputting gas into the vacuum cavity, the pressure detection unit is used for detecting a pressure value in the vacuum cavity, the adjusting valve is arranged on the pipeline between the vacuum obtaining device and the vacuum cavity, the adjusting valve comprises a valve body and an adjusting structure, at least part of the adjusting structure is arranged in the valve body, and the adjusting structure is used for adjusting the opening of the valve body.

2. The apparatus for molecular beam epitaxy and crystal growth of claim 1, wherein the valve body has a first opening, a second opening, and a channel communicating the first opening and the second opening, the adjustment structure comprising a valve flap movably disposed within the valve body and a drive group for driving the valve flap between a first position closing the first opening and a second position clear of the channel.

3. The apparatus for molecular beam epitaxy and crystal growth according to claim 2, wherein the drive group comprises a rotary rod body having a degree of freedom of rotation about its own axis with respect to the valve body, and a power unit, the valve flap having only a degree of freedom of movement along the axis of the rotary rod body with respect to the valve body, a first end of the rotary rod body being located within the valve body and threadedly connected to the valve flap, and a second end of the rotary rod body being located outside the valve body and connected to a drive end of the power unit.

4. The device for molecular beam epitaxy and crystal growth according to claim 3, wherein the regulating valve further comprises an expansion seal sleeve, the expansion seal sleeve is located at one side of the valve clack away from the first opening and sleeved outside the connecting structure of the valve clack and the rotating rod body, a first end of the expansion seal sleeve is connected to the valve clack in a sealing manner, a second end of the expansion seal sleeve is connected to the inner wall of the valve body in a sealing manner, and the expansion seal sleeve can be switched between a first expansion state corresponding to the first position and a second expansion state corresponding to the second position under the driving of the valve clack.

5. The device for molecular beam epitaxy and crystal growth of claim 4, wherein a first boss is disposed on a side of the valve clack facing away from the first opening, a first end of the telescopic sealing sleeve is sealed and sleeved on the first boss, a second boss is disposed on an inner wall of the valve body, the second boss is disposed on a side of the second position facing away from the first position, and a second end of the telescopic sealing sleeve is sealed and sleeved on the second boss.

6. The apparatus for molecular beam epitaxy and crystal growth according to claim 3, wherein the valve flap comprises a main cover and a connecting post, the connecting post is connected to a side surface of the main cover facing the rotating rod body, a receiving hole coaxially arranged with the rotating rod body is arranged on the connecting post, and a second end of the rotating rod body is in threaded connection with an inner wall of the receiving hole.

7. The apparatus for molecular beam epitaxy and crystal growth of claim 6, wherein a sealing structure is provided on the valve body and/or on the main cover for sealing contact of the main cover with the valve body when the main cover is moved to the first position.

8. The apparatus for molecular beam epitaxy and crystal growth of claim 7, wherein said sealing structure comprises a sealing ring disposed on a plate surface of said main cover facing said first opening, and a sealing surface for cooperating with said sealing ring is disposed on said valve body, said sealing surface being disposed around said first opening.

9. The apparatus for molecular beam epitaxy and crystal growth according to any one of claims 3 to 8, wherein a connection unit is further provided between the driving end of the power unit and the second end of the rotating rod body, and the driving end of the power unit is detachably connected to the second end of the rotating rod body through the connection unit.

10. The apparatus for molecular beam epitaxy and crystal growth according to claim 9, wherein a mounting bracket is provided outside the valve body, the power unit is connected to the mounting bracket and is spaced from the valve body, and the mounting bracket has an avoidance space thereon for accommodating the connection unit.