CN221649724U - Laser optical power detection module and detection system - Google Patents
Laser optical power detection module and detection system Download PDFInfo
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Abstract
Description
技术领域Technical Field
本实用新型属于激光功率测试领域,具体涉及到一种激光器光功率检测模块及检测系统。The utility model belongs to the field of laser power testing, and specifically relates to a laser optical power detection module and a detection system.
背景技术Background Art
近年来随着激光技术的发展,激光器输出功率水平不断提升。而在相关高功率光纤激光器及相关设备的研发、使用过程中,需要对激光的功率进行准确的测量。从功率测试原理上来分,一种是光电式,即利用半导体材料吸收光子,以形成电流信号,代表器件为光电探测器;另一种是热电式,即光照射到吸收物上,光能转化成热能,吸收物温度升高,进而产生电压信号,该信号与激光功率成正比,代表器件为热电堆。其中,光电探测器比热电堆具有更高的响应速度和灵敏度,但是由于光电探测器的损伤阈值较低,因此其量程相对较小。In recent years, with the development of laser technology, the output power level of lasers has been continuously improved. In the process of research and development and use of related high-power fiber lasers and related equipment, it is necessary to accurately measure the power of the laser. From the principle of power testing, one is photoelectric, that is, using semiconductor materials to absorb photons to form a current signal, and the representative device is a photodetector; the other is thermoelectric, that is, light is irradiated on the absorber, and the light energy is converted into heat energy. The temperature of the absorber rises, and then a voltage signal is generated. This signal is proportional to the laser power, and the representative device is a thermopile. Among them, the photodetector has a higher response speed and sensitivity than the thermopile, but because the damage threshold of the photodetector is low, its range is relatively small.
目前在高功率工业激光器的生产过程中,所使用的功率计基本只能依赖进口设备,售价高昂,且维护成本高、维修周期长。基于可测量高功率的激光功率计成本高昂,还间接导致高功率激光器的制造成本也高,其售价也长时间居高不下。At present, in the production process of high-power industrial lasers, the power meters used can basically only rely on imported equipment, which is expensive, has high maintenance costs and long repair cycles. The high cost of laser power meters that can measure high power also indirectly leads to high manufacturing costs for high-power lasers, and their prices have remained high for a long time.
基于此,为解决现有技术中所使用的高功率激光功率计大多依赖进口、成本高昂且维护成本高、维修周期长的问题,需要设计一种新的激光器光功率检测模块及检测系统。Based on this, in order to solve the problem that most of the high-power laser power meters used in the prior art rely on imports, are expensive, have high maintenance costs, and have long repair cycles, it is necessary to design a new laser optical power detection module and detection system.
实用新型内容Utility Model Content
本申请的目的在于针对现有技术的不足之处,提供一种激光器光功率检测模块及检测系统,旨在解决现有技术中的高功率激光功率计大多依赖进口、成本高昂且维护成本高、维修周期长的问题。The purpose of this application is to address the deficiencies in the prior art and provide a laser optical power detection module and detection system, aiming to solve the problem that most high-power laser power meters in the prior art rely on imports, are expensive, have high maintenance costs, and have long repair cycles.
为实现上述目的,本申请采用的技术方案是:To achieve the above purpose, the technical solution adopted in this application is:
一种激光器光功率检测模块,包括能量衰减腔、反射板以及多个光电探测器,能量衰减腔具有相对设置的激光输入口和激光输出口,能量衰减腔用于将自激光输入口通过的激光衰减为低能量光束信号;反射板安装于激光输出口,以用于接收并漫反射经过能量衰减腔后发生传输的激光,并使之再次衰减形成多个低能量光束信号;多个光电探测器间隔设置于激光输入口所在端面,以用于接收自反射板反射回能量衰减腔的低能量光束信号,并将其转化成电信号输出。A laser optical power detection module comprises an energy attenuation cavity, a reflection plate and a plurality of photoelectric detectors. The energy attenuation cavity has a laser input port and a laser output port which are arranged relatively to each other. The energy attenuation cavity is used to attenuate the laser passing through the laser input port into a low-energy beam signal. The reflection plate is installed at the laser output port to receive and diffusely reflect the laser transmitted after passing through the energy attenuation cavity, and attenuate it again to form a plurality of low-energy beam signals. The plurality of photoelectric detectors are arranged at intervals on the end face where the laser input port is located, and are used to receive the low-energy beam signal reflected from the reflection plate back to the energy attenuation cavity, and convert it into an electrical signal for output.
作为优选方案,能量衰减腔呈圆柱形,内壁设置有黑色的阳极氧化膜。As a preferred solution, the energy attenuation cavity is cylindrical, and the inner wall is provided with a black anodized film.
作为优选方案,反射板的材质为石墨、铝、铜或者铜铝合金。As a preferred solution, the reflector is made of graphite, aluminum, copper or copper-aluminum alloy.
作为优选方案,反射板朝向能量衰减腔的端面具有漫反射层。As a preferred solution, the end surface of the reflection plate facing the energy attenuation cavity has a diffuse reflection layer.
作为优选方案,检测模块还包括具有多个安装孔的探测器固定座,探测器固定座与能量衰减腔具有激光输入口的一端相连接,各个光电探测器一一对应地安装于探测器固定座的各个安装孔内。As a preferred solution, the detection module also includes a detector fixing seat with multiple mounting holes, the detector fixing seat is connected to one end of the energy attenuation cavity having a laser input port, and each photoelectric detector is installed one-to-one in each mounting hole of the detector fixing seat.
作为优选方案,探测器固定座还具有信号输出端口,以用于将电信号输出。As a preferred solution, the detector fixing seat also has a signal output port for outputting the electrical signal.
作为优选方案,检测模块包括散热片,散热片安装于反射板侧壁,用于对反射板散热;检测模块包括多个冷却水道,多个冷却水道设置于能量衰减腔的外侧,用于对能量衰减腔散热。As a preferred solution, the detection module includes a heat sink installed on the side wall of the reflective plate for dissipating heat from the reflective plate; the detection module includes multiple cooling water channels, which are arranged on the outside of the energy attenuation cavity for dissipating heat from the energy attenuation cavity.
作为优选方案,检测模块还包括固定底板,能量衰减腔、反射板均设置于固定底板上,固定底板还具有延伸部,以用于固定激光输出头,且探测器固定座上设有和激光输出头的输出端对位的激光入口。As a preferred solution, the detection module also includes a fixed base plate, the energy attenuation cavity and the reflector are both arranged on the fixed base plate, the fixed base plate also has an extension portion for fixing the laser output head, and the detector fixing seat is provided with a laser inlet aligned with the output end of the laser output head.
本申请还提出一种检测系统,包括上述方案中任一项所述的检测模块,检测系统还包括处理器,各个光电探测器与处理器电连接,处理器用于接收自信号输出端口输出的电信号并将其进行处理。The present application also proposes a detection system, comprising a detection module described in any one of the above schemes, the detection system also comprising a processor, each photodetector is electrically connected to the processor, and the processor is used to receive the electrical signal output from the signal output port and process it.
与现有技术相比,本申请的有益效果是:本实用新型实施例所提供的激光器光功率检测模块包括能量衰减腔,反射板以及多个光电探测器。在功率检测之前,需要对模块进行校准对标,得出光电转换的校准系数。高功率激光自能量衰减腔的激光输入口输入后,被腔内的黑色阳极氧化膜部分吸收,余下未被吸收的少量低能量激光到达设置于激光输出口的反射板,被漫反射成多个低能量光束信号,多个低能量光束信号被反射回能量衰减腔,实现二次衰减之后被多个光电探测器吸收并得出各个光电探测器采样的均值,再根据校准系数反算待测高功率激光的功率。本申请通过在能量衰减腔的激光输出口设置具有漫反射层的反射板实现了高功率激光的衰减及分解,结构简单,相比于现有技术中进口的高功率光功率计成本大大降低。Compared with the prior art, the beneficial effects of the present application are as follows: the laser optical power detection module provided by the embodiment of the utility model includes an energy attenuation cavity, a reflector and a plurality of photodetectors. Before power detection, the module needs to be calibrated and benchmarked to obtain the calibration coefficient of photoelectric conversion. After the high-power laser is input from the laser input port of the energy attenuation cavity, it is partially absorbed by the black anodized film in the cavity, and the remaining small amount of low-energy laser that is not absorbed reaches the reflector plate set at the laser output port, and is diffusely reflected into a plurality of low-energy beam signals, and the plurality of low-energy beam signals are reflected back to the energy attenuation cavity, and after secondary attenuation, they are absorbed by a plurality of photodetectors and the average value of each photodetector sampling is obtained, and then the power of the high-power laser to be measured is calculated based on the calibration coefficient. The present application realizes the attenuation and decomposition of high-power lasers by setting a reflector plate with a diffuse reflection layer at the laser output port of the energy attenuation cavity, and has a simple structure, and the cost is greatly reduced compared with the imported high-power optical power meter in the prior art.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.
图1为本实用新型实施例中激光器光功率检测模块的立体示意图;FIG1 is a three-dimensional schematic diagram of a laser optical power detection module in an embodiment of the utility model;
图2为本实用新型实施例中激光器光功率检测模块的爆炸图;FIG2 is an exploded view of a laser optical power detection module in an embodiment of the present utility model;
图3为本实用新型实施例中激光器光功率检测模块的轴向截面图。FIG3 is an axial cross-sectional view of a laser optical power detection module in an embodiment of the present utility model.
附图说明:1、反射板;2、能量衰减腔;21、冷却水道;3、探测器固定座;31、光电探测器;32、信号输出端口;33定位板;4、挡板;5、固定底板;51、延伸部;6、激光入口。Description of the drawings: 1. Reflection plate; 2. Energy attenuation cavity; 21. Cooling water channel; 3. Detector fixing seat; 31. Photoelectric detector; 32. Signal output port; 33 Positioning plate; 4. Baffle; 5. Fixed bottom plate; 51. Extension part; 6. Laser inlet.
具体实施方式DETAILED DESCRIPTION
下面详细描述本申请的实施例,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,旨在用于解释本申请,而不能理解为对本申请的限制。The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limiting the present application.
在本申请的描述中,需要理解的是,术语“长度”、“宽度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。In the description of the present application, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
此外,术语“第一”、“第二”等仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”等的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In addition, the terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the feature. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
在本申请中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本申请中的具体含义。In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
定义:以本申请中的检测模块在图1中所处的状态定义各个部件之间的上下及左右方位关系。Definition: The up-down and left-right orientation relationships between the various components are defined by the state of the detection module in this application in FIG1 .
如图1和图2所示,本实用新型提供的一种激光器光功率检测模块,包括能量衰减腔2、反射板1以及多个光电探测器31,能量衰减腔2具有相对设置的激光输入口(图中未示出)和激光输出口(图中未示出),其用于将自激光输入口通过的激光衰减为低能量光束信号;反射板1安装于激光输出口,以用于接收并漫反射经过能量衰减腔2之后发生衰减的激光,并使之形成多个光束信号;多个光电探测器31间隔设置于激光输入口所在端面,以用于接收多个发生衰减的低能量光束信号,并将其转化成电信号输出。As shown in Figures 1 and 2, the utility model provides a laser optical power detection module, including an energy attenuation cavity 2, a reflection plate 1 and a plurality of photodetectors 31. The energy attenuation cavity 2 has a laser input port (not shown in the figure) and a laser output port (not shown in the figure) arranged relatively to each other, and is used to attenuate the laser passing through the laser input port into a low-energy beam signal; the reflection plate 1 is installed at the laser output port to receive and diffusely reflect the attenuated laser after passing through the energy attenuation cavity 2, and form a plurality of beam signals; the plurality of photodetectors 31 are arranged at intervals on the end face where the laser input port is located, so as to receive a plurality of attenuated low-energy beam signals and convert them into electrical signals for output.
可以理解的是,在模块用于实际功率检测之前,需要先进行校准对标,以得出光电转换的校准系数。It is understandable that before the module is used for actual power detection, it needs to be calibrated to obtain the calibration coefficient of the photoelectric conversion.
本申请提出的新型激光器光功率检测模块通过在能量衰减腔的激光输出口设置具有漫反射层的反射板实现了待测高功率激光的衰减及分解,结构简单,便于维护,适用于检测高功率激光,制作成本及维修成本也更为低廉。The novel laser optical power detection module proposed in the present application realizes the attenuation and decomposition of the high-power laser to be measured by arranging a reflection plate with a diffuse reflection layer at the laser output port of the energy attenuation cavity. The module has a simple structure and is easy to maintain. It is suitable for detecting high-power lasers, and the manufacturing and maintenance costs are also lower.
具体而言,本实施例检测模块的能量衰减腔2呈圆柱形,其内壁覆有黑色的阳极氧化膜,以便于吸收激光。当激光射入腔体内部时,随着光线在腔体内部入射的距离越深入,光线的被衰减程度越强。Specifically, the energy attenuation cavity 2 of the detection module of this embodiment is cylindrical, and its inner wall is covered with a black anodized film to absorb laser light. When the laser is incident into the cavity, the deeper the incident distance of the light is in the cavity, the stronger the attenuation of the light is.
可以理解的是,能量衰减腔2的腔体可以配置成由多节拼接而成,由此,当需要对更高功率的激光进行检测时,则可以适当加长腔体的长度,以增加对光束的衰减程度。It is understandable that the cavity of the energy attenuation cavity 2 can be configured to be composed of multiple sections. Therefore, when a higher power laser needs to be detected, the length of the cavity can be appropriately lengthened to increase the attenuation of the light beam.
在一个实施例中,反射板1的材质为石墨、铝、铜或者铜铝合金等,其朝向能量衰减腔2的端面可进行喷砂处理,以形成漫反射层,或者在该端面上直接涂覆具有高反射率的漫反射涂层,例如氧化铝、氧化锆、或者氧化钛等漫反射涂层。In one embodiment, the reflective plate 1 is made of graphite, aluminum, copper or copper-aluminum alloy, and its end surface facing the energy attenuation cavity 2 can be sandblasted to form a diffuse reflection layer, or a diffuse reflection coating with high reflectivity, such as aluminum oxide, zirconium oxide, or titanium oxide, can be directly coated on the end surface.
请继续参照图2,本申请的检测模块还包括对应设置的探测器固定座3和挡板4。探测器固定座3与挡板4均具有多个安装孔(图中未示出),以用于相互通过螺栓等固定件相固定,同时防止外部的的烟尘等进入到探测器固定座3进而进入到能量衰减腔2中,影响光束衰减效果或采样的准确率。且探测器固定座3与能量衰减腔2具有激光输入口的一端通过螺栓等固定件相连接,各个光电探测器31一一对应地安装于探测器固定座3的各个安装孔内,并通过定位板33一一固定。自反射板1漫反射回的多个光束信号经过能量衰减腔2的二次衰减后打到各个光电探测器31上,各个光电探测器31将采集到的光信号转换成电信号,再根据校准系数反推出入射的待测高功率激光的功率。Please continue to refer to Figure 2. The detection module of the present application also includes a corresponding detector fixing seat 3 and a baffle 4. The detector fixing seat 3 and the baffle 4 both have multiple mounting holes (not shown in the figure) for fixing each other through bolts and other fixings, while preventing external smoke and dust from entering the detector fixing seat 3 and then entering the energy attenuation cavity 2, affecting the beam attenuation effect or the accuracy of sampling. The detector fixing seat 3 and the end of the energy attenuation cavity 2 with a laser input port are connected by bolts and other fixings, and each photodetector 31 is installed in each mounting hole of the detector fixing seat 3 in a one-to-one correspondence, and is fixed one by one by a positioning plate 33. The multiple light beam signals diffusely reflected from the reflection plate 1 are hit on each photodetector 31 after secondary attenuation in the energy attenuation cavity 2. Each photodetector 31 converts the collected light signal into an electrical signal, and then infers the power of the incident high-power laser to be measured based on the calibration coefficient.
结合图1,本申请检测模块的探测器固定座3、能量衰减腔2、反射板1和挡板4依次连接,可配合激光输出头形成密封空间,防止激光泄露对周边人事造成损伤。1 , the detector fixing seat 3, energy attenuation cavity 2, reflector 1 and baffle 4 of the detection module of the present application are connected in sequence, and can cooperate with the laser output head to form a sealed space to prevent laser leakage from causing damage to surrounding personnel.
可以理解的是,探测器固定座3还具有信号输出端口32,以用于将光电探测器31形成的电信号输出。It can be understood that the detector fixing base 3 also has a signal output port 32 for outputting the electrical signal generated by the photodetector 31 .
本申请的实施例还提出一种检测系统,包括上述方案中的检测模块。可以理解的是,该检测系统包括处理器(图中未示出),处理器与各个光电探测器31电连接,光电探测器31产生的电信号通过信号输出端口32被处理器接收并处理。The embodiment of the present application also proposes a detection system, including the detection module in the above scheme. It is understandable that the detection system includes a processor (not shown in the figure), the processor is electrically connected to each photodetector 31, and the electrical signal generated by the photodetector 31 is received and processed by the processor through the signal output port 32.
具体的,处理器接收到光电探测器输出的功率值的电信号后,结合其内部的比例运算器中预存的校准系数,对各光电探测器的实测功率值进行放大处理,从而得到待测高功率激光的实际功率。Specifically, after receiving the electrical signal of the power value output by the photodetector, the processor amplifies the measured power value of each photodetector in combination with the calibration coefficient pre-stored in the internal proportional operator, thereby obtaining the actual power of the high-power laser to be measured.
在一些实施例中,处理器包括运算器和处理器,运算器用于对数据进行加工处理,比如与、或、求反等逻辑运算以及比较数值等,可以直接选用单片机,由微控制单元MCU完成数据分析以及处理工作。In some embodiments, the processor includes an arithmetic unit and a processor. The arithmetic unit is used to process data, such as logical operations such as AND, OR, and negation, as well as comparing values. A single-chip microcomputer can be directly selected, and the microcontroller unit MCU completes the data analysis and processing.
比例运算器中预存的校准系数由标准光束标定得到。即利用标准激光器在多个功率值下出光,各个输入功率各对应一组光电探测器的输出光电流,再根据实际的需求选择对应的算法得到多组校准系数的拟合方程,每个输入功率均对应一组光电探测器的输出电流。则最终处理器可以获取到激光器的标准光束在若干种光功率值的输出条件下对应的光电流,得到校准系数的参数值。The calibration coefficients stored in the proportional operator are obtained by calibrating the standard beam. That is, the standard laser is used to emit light at multiple power values, and each input power corresponds to the output photocurrent of a group of photodetectors. Then, the corresponding algorithm is selected according to actual needs to obtain the fitting equations of multiple groups of calibration coefficients, and each input power corresponds to the output current of a group of photodetectors. Finally, the processor can obtain the photocurrent corresponding to the output conditions of the laser's standard beam under several optical power values, and obtain the parameter value of the calibration coefficient.
需要说明的是,标准光束与待测高功率激光是不同的激光,标准光束是指在进行校准对标操作时获取校准系数的拟合方程时所采用的激光,待测高功率激光是指实际过程中需要检测光功率的激光。It should be noted that the standard beam and the high-power laser to be tested are different lasers. The standard beam refers to the laser used to obtain the fitting equation of the calibration coefficient during the calibration operation, and the high-power laser to be tested refers to the laser whose optical power needs to be detected in the actual process.
在一些实施例中,选用的处理器采用8通道的AD7686芯片以及32位微控制器并行采样,光电探测器31的数量被选定为8个。在其他的实施例中,处理器可选用其他类型,光电探测器31也可以是其他数量。In some embodiments, the selected processor uses an 8-channel AD7686 chip and a 32-bit microcontroller for parallel sampling, and the number of photodetectors 31 is selected to be 8. In other embodiments, other types of processors can be selected, and the number of photodetectors 31 can also be other.
进一步的,在本申请实施例的功率检测过程中,反射板1和能量衰减腔2均需及时冷却散热,因此,检测模块还包括散热片(图中未示出),散热片具体安装于反射板1侧壁,以用于对反射板1散热。Furthermore, during the power detection process of the embodiment of the present application, the reflector 1 and the energy attenuation cavity 2 both need to be cooled and dissipated in a timely manner. Therefore, the detection module also includes a heat sink (not shown in the figure), which is specifically installed on the side wall of the reflector 1 to dissipate heat from the reflector 1.
请参照图3,图3为检测模块的轴向截面图,检测模块还包括多个冷却水道21,多个冷却水道21呈直通式设置于能量衰减腔2的外侧,内部流通冷却水或其他冷却液,以加快能量衰减腔2的冷却,提高散热效果。冷却水道21还可呈螺旋状环绕设置于能量衰减腔2的外侧,以加大冷却面积,进一步提高散热效果。Please refer to FIG3, which is an axial cross-sectional view of the detection module. The detection module also includes a plurality of cooling water channels 21, which are arranged in a straight-through manner on the outside of the energy attenuation cavity 2, and cooling water or other coolant flows inside to accelerate the cooling of the energy attenuation cavity 2 and improve the heat dissipation effect. The cooling water channel 21 can also be arranged in a spiral shape around the outside of the energy attenuation cavity 2 to increase the cooling area and further improve the heat dissipation effect.
请继续参照图1和图2,本申请的检测模块还包括固定底板5,能量衰减腔2、反射板1均设置于固定底板5上,固定底板5具有延伸部51,以用于固定激光输出头(图中未示出),且探测器固定座3上设有与激光输出头的输出端对位的激光入口6,激光输入口与激光入口6相连通,以便于激光的输入。Please continue to refer to Figures 1 and 2. The detection module of the present application also includes a fixed base plate 5. The energy attenuation cavity 2 and the reflector 1 are both arranged on the fixed base plate 5. The fixed base plate 5 has an extension portion 51 for fixing a laser output head (not shown in the figure), and the detector fixing seat 3 is provided with a laser inlet 6 aligned with the output end of the laser output head. The laser input port is connected to the laser inlet 6 to facilitate the input of the laser.
为了便于能量衰减腔2稳定装配于固定底板5上,所述能量衰减腔2位于立方壳体中,多个冷却水道21位于立方壳体与圆柱形能量衰减腔2外壁所组成的夹层空间。In order to facilitate the stable assembly of the energy attenuation chamber 2 on the fixed bottom plate 5, the energy attenuation chamber 2 is located in a cubic shell, and a plurality of cooling water channels 21 are located in the interlayer space formed by the cubic shell and the outer wall of the cylindrical energy attenuation chamber 2.
由上述实施例可以看出,本申请通过在能量衰减腔的激光输出口设置具有漫反射层的反射板实现了待测高功率激光的衰减及分解,将高功率激光转化成了多个低能量光束,再通过测算低能量光束的光功率值反推待测的高功率激光的功率值,相较于现有技术而言,本申请的结构更为简单,也便于维护,适用于检测高功率激光,且制作成本和维修成本也更为低廉。It can be seen from the above embodiments that the present application realizes the attenuation and decomposition of the high-power laser to be measured by arranging a reflection plate with a diffuse reflection layer at the laser output port of the energy attenuation cavity, converting the high-power laser into multiple low-energy light beams, and then inferring the power value of the high-power laser to be measured by measuring the optical power value of the low-energy light beam. Compared with the prior art, the structure of the present application is simpler and easier to maintain, so it is suitable for detecting high-power lasers, and the production cost and maintenance cost are also lower.
最后应说明的是:以上实施例仅用以说明本申请的技术方案,而非对其限制;在本申请的思路下,以上实施例或者不同实施例中的技术特征之间也可以进行组合,步骤可以以任意顺序实现,并存在如上所述的本申请的不同方面的许多其它变化,为了简明,它们没有在细节中提供;尽管参照前述实施例对本申请进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本申请各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Under the concept of the present application, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other changes in different aspects of the present application as described above, which are not provided in detail for the sake of simplicity. Although the present application has been described in detail with reference to the aforementioned embodiments, a person of ordinary skill in the art should understand that the technical solutions described in the aforementioned embodiments can still be modified, or some of the technical features can be replaced by equivalents. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.
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