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CN204495464U - Laser powermeter - Google Patents

Laser powermeter Download PDF

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Publication number
CN204495464U
CN204495464U CN201520172080.9U CN201520172080U CN204495464U CN 204495464 U CN204495464 U CN 204495464U CN 201520172080 U CN201520172080 U CN 201520172080U CN 204495464 U CN204495464 U CN 204495464U
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laser
infrared
power
power meter
converter
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王涛
张玉莹
陆耀东
张丽雯
孙岩
张萍
宋金鹏
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Beijing Jingyi Photoelectric Technology Research Institute Co ltd
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BEIJING INST OF ELECTRO-OPTICS
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Abstract

本实用新型提供一种激光功率计,包括:激光转换器,用于吸收入射激光,并将所述入射激光转换为红外线向外发射;红外接收器,用于接收所述红外线,并对所述红外线进行会聚;红外探测器,用于接收会聚后的红外线,并将所述会聚后的红外线转换为电信号;以及功率测试器,与所述红外探测器连接,用于接收所述电信号,并根据所述电信号计算得到所述入射激光的功率值。本实用新型提供的激光功率计既具有光谱覆盖范围宽和可测功率范围宽的优点,还具有响应时间短的优点。

The utility model provides a laser power meter, comprising: a laser converter, used to absorb incident laser light, and convert the incident laser light into infrared rays to emit outward; an infrared receiver, used to receive the infrared rays, and Infrared rays are converged; an infrared detector is used to receive the converged infrared rays and convert the converged infrared rays into electrical signals; and a power tester is connected to the infrared detector and used to receive the electrical signals, And calculate the power value of the incident laser light according to the electrical signal. The laser power meter provided by the utility model not only has the advantages of wide spectrum coverage and wide measurable power range, but also has the advantage of short response time.

Description

激光功率计Laser Power Meter

技术领域technical field

本实用新型涉及激光功率检测技术,尤其涉及一种激光功率计。The utility model relates to a laser power detection technology, in particular to a laser power meter.

背景技术Background technique

随着激光技术的发展,激光器在通信、医疗、工业制造等领域的应用越来越广泛。在激光器的研制、生产及应用过程中,对激光器的功率进行测量和标定是必不可少的步骤。With the development of laser technology, lasers are widely used in communication, medical, industrial manufacturing and other fields. In the process of laser development, production and application, it is an essential step to measure and calibrate the power of the laser.

激光功率计就是一种测量激光功率的设备,按照测量原理不同,激光功率计主要包括两类,光电型激光功率计和量热型激光功率计。其中,光电型激光功率计是利用半导体的光电效应实现功率测量,当激光照射在光电型激光功率计的探测光敏面上时,其中的PN结所在回路内会形成光电流,入射激光的功率越大,光电流越大,通过对光电流进行测量就能得知入射激光的功率。而量热型激光功率计是利用吸光材料将激光的能量转化为热量传递给热电堆的一端,使得热电堆自身的两端具有温度差,并将温度差转化为电势差,通过测量电势差的大小就可以得知入射激光的功率。A laser power meter is a device for measuring laser power. According to different measurement principles, laser power meters mainly include two types, photoelectric laser power meters and calorimetric laser power meters. Among them, the photoelectric laser power meter uses the photoelectric effect of semiconductors to realize power measurement. When the laser is irradiated on the detection photosensitive surface of the photoelectric laser power meter, a photocurrent will be formed in the circuit where the PN junction is located. The higher the power of the incident laser The larger the photocurrent, the greater the photocurrent, and the power of the incident laser can be known by measuring the photocurrent. The calorimetric laser power meter uses a light-absorbing material to convert the energy of the laser into heat and transfer it to one end of the thermopile, so that the two ends of the thermopile itself have a temperature difference, and the temperature difference is converted into a potential difference. By measuring the size of the potential difference, the The power of the incident laser light can be known.

光电型激光功率计的优点是响应时间较快,但其光谱的覆盖范围较窄,且可测的功率范围也较窄。而量热型激光功率计具有光谱覆盖范围宽、功率可测范围大的优点,因此,对于中功率和高功率的激光进行测量,以及对多个波长且各波长之间跨度较大的激光功率进行对比测量时,通常都采用量热型激光功率计,但是这种功率计的响应时间较长。上述两种激光功率计都存在各自的缺点,在测量过程中难以满足多种激光器的要求。The advantage of the photoelectric laser power meter is that the response time is fast, but its spectral coverage is narrow, and the measurable power range is also narrow. The calorimetric laser power meter has the advantages of wide spectral coverage and large power measurable range. Therefore, for the measurement of medium-power and high-power lasers, as well as for the laser power For comparative measurements, a calorimetric laser power meter is usually used, but this type of power meter has a long response time. The above two laser power meters have their own shortcomings, and it is difficult to meet the requirements of various lasers in the measurement process.

实用新型内容Utility model content

本实用新型提供一种激光功率计,既具有光谱覆盖范围宽和可测功率范围宽的优点,还具有响应时间短的优点。The utility model provides a laser power meter, which not only has the advantages of wide spectrum coverage and wide measurable power range, but also has the advantage of short response time.

本实用新型实施例提供一种激光功率计,包括:The embodiment of the utility model provides a laser power meter, including:

激光转换器,用于吸收入射激光,并将所述入射激光转换为红外线向外发射;A laser converter for absorbing incident laser light and converting the incident laser light into infrared rays for outward emission;

红外接收器,用于接收所述红外线,并对所述红外线进行会聚;an infrared receiver, configured to receive the infrared rays and converge the infrared rays;

红外探测器,用于接收会聚后的红外线,并将所述会聚后的红外线转换为电信号;以及,an infrared detector for receiving converged infrared rays and converting the converged infrared rays into electrical signals; and,

功率测试器,与所述红外探测器连接,用于接收所述电信号,并根据所述电信号计算得到所述入射激光的功率值。A power tester, connected with the infrared detector, is used to receive the electrical signal, and calculate the power value of the incident laser light according to the electrical signal.

如上所述的激光功率计,所述红外接收器为透射式的红外接收器。According to the above laser power meter, the infrared receiver is a transmission infrared receiver.

如上所述的激光功率计,所述红外接收器为反射式的红外接收器。According to the above laser power meter, the infrared receiver is a reflective infrared receiver.

如上所述的激光功率计,所述激光转换器中设置有冷却装置,所述冷却装置为传导冷却装置、风冷装置或水冷装置。According to the above laser power meter, the laser converter is provided with a cooling device, and the cooling device is a conduction cooling device, an air cooling device or a water cooling device.

如上所述的激光功率计,所述激光转换器的感光面设有吸光涂层。According to the above laser power meter, the photosensitive surface of the laser converter is provided with a light-absorbing coating.

如上所述的激光功率计,所述激光转换器的感光面设有抗激光损伤涂层。According to the above laser power meter, the photosensitive surface of the laser converter is provided with an anti-laser damage coating.

如上所述的激光功率计,所述透射式的红外接收器的表面设有增透膜。According to the above laser power meter, the surface of the transmissive infrared receiver is provided with an anti-reflection film.

如上所述的激光功率计,所述反射式的红外接收器的表面设有反射膜,所述反射膜为铝膜、铜膜、银膜或金膜。According to the above-mentioned laser power meter, the surface of the reflective infrared receiver is provided with a reflective film, and the reflective film is an aluminum film, a copper film, a silver film or a gold film.

如上所述的激光功率计,所述红外探测器为锑化铟探测器或碲镉汞探测器。As for the above laser power meter, the infrared detector is an indium antimonide detector or a mercury cadmium telluride detector.

如上所述的激光功率计,还包括与所述功率测试器连接的功率显示器。The above laser power meter further includes a power display connected to the power tester.

本实用新型实施例提供的激光功率计通过采用激光转换器吸收入射激光,并向外辐射红外线,然后采用红外接收器接收红外线,并会聚至红外探测器,以使红外探测器将红外线的能量转换为相应的电信号,再通过功率测试器将电信号转换为相应的功率数值,该功率数值与入射激光的功率相对应,使得该激光功率计既具有光谱覆盖范围宽和可测功率范围宽的优点,还具有响应时间短的优点。The laser power meter provided by the embodiment of the utility model adopts a laser converter to absorb incident laser light, and radiates infrared rays outward, and then uses an infrared receiver to receive infrared rays and converge them to an infrared detector, so that the infrared detector converts the energy of infrared rays For the corresponding electrical signal, the electrical signal is converted into a corresponding power value by a power tester, which corresponds to the power of the incident laser, so that the laser power meter has both a wide spectral coverage and a wide measurable power range. Advantages, also has the advantage of short response time.

附图说明Description of drawings

图1为本实用新型实施例一提供的激光功率计的结构示意图;Fig. 1 is a schematic structural diagram of a laser power meter provided by Embodiment 1 of the present invention;

图2为本实用新型实施例二提供的激光功率计的结构示意图。Fig. 2 is a schematic structural diagram of the laser power meter provided by Embodiment 2 of the present invention.

附图标记:Reference signs:

1-激光器;  2-激光转换器;  31-透射式的红外接收器;1-laser; 2-laser converter; 31-transmissive infrared receiver;

4-红外探测器;  5-功率测试器;  32-反射式的红外接收器。4-infrared detector; 5-power tester; 32-reflective infrared receiver.

具体实施方式Detailed ways

实施例一Embodiment one

鉴于现有技术中常用的两种激光功率计各自都存在一些缺点,在测量过程中不能够满足多种激光器单独测量或组合测量的需要,本实施例提供一种激光功率计,既具有光谱覆盖范围宽和可测功率范围宽的优点,还具有响应时间短的优点。In view of the fact that the two commonly used laser power meters in the prior art each have some shortcomings, and cannot meet the needs of individual or combined measurement of multiple lasers during the measurement process, this embodiment provides a laser power meter that has spectral coverage The advantages of wide range and wide measurable power range also have the advantage of short response time.

本实施例提供的激光功率计,包括:激光转换器、红外接收器、红外探测器以及功率测试器。其中,激光转换器用于吸收入射激光,并将入射激光转换为红外线向外发射。红外接收器用于接收激光转换器发出的红外线,并对红外线进行会聚。红外探测器用于接收会聚后的红外线,并将会聚后的红外线的能量转换为电信号。功率测试器,与红外探测器连接,用于接收红外探测器发出的电信号,并根据该电信号计算得到入射激光的功率值。The laser power meter provided in this embodiment includes: a laser converter, an infrared receiver, an infrared detector, and a power tester. Among them, the laser converter is used to absorb the incident laser light and convert the incident laser light into infrared rays to emit outward. The infrared receiver is used to receive the infrared rays emitted by the laser converter and converge the infrared rays. The infrared detector is used to receive the converged infrared rays and convert the energy of the converged infrared rays into electrical signals. The power tester, connected with the infrared detector, is used to receive the electrical signal sent by the infrared detector, and calculate the power value of the incident laser according to the electrical signal.

具体的,入射激光为待测的激光器所发出的激光光线。激光器发出的入射激光照射在激光转换器的感光面(也即:受光照区域)上,激光转换器吸收激光的能量后,受光照区域的温度升高,并向外辐射红外线,入射激光的功率越大,受光照区域的温度越高,即辐射的红外线能量越大。红外接收器能够接收激光转换器辐射的红外线,并且将红外线进行会聚至红外探测器的探测区域,红外探测器将探测到的红外线的能量转换为相应的电信号。功率测试器与红外探测器电连接,接收该电信号,并将该电信号转换为对应的功率数据,通过该功率数据即可得知入射激光的功率大小。Specifically, the incident laser is the laser light emitted by the laser to be tested. The incident laser light emitted by the laser is irradiated on the photosensitive surface of the laser converter (that is, the illuminated area). After the laser converter absorbs the energy of the laser, the temperature of the illuminated area rises and radiates infrared rays outward. The power of the incident laser The larger the , the higher the temperature of the illuminated area, that is, the greater the radiated infrared energy. The infrared receiver can receive the infrared rays radiated by the laser converter, and converge the infrared rays to the detection area of the infrared detector, and the infrared detector converts the energy of the detected infrared rays into corresponding electrical signals. The power tester is electrically connected with the infrared detector, receives the electrical signal, and converts the electrical signal into corresponding power data, through which the power of the incident laser can be known.

上述方案的检测原理是首先将入射激光的功率转换为红外线的能量,该转换过程不受激光光谱的范围影响,即全部光谱范围内的激光均能够使激光转换器发热,并且能向外辐射红外线,则入射激光的功率对应于相应的红外线的能量,因此,上述激光功率计的光谱覆盖范围非常宽,并且该激光功率计也不受入射激光功率范围的限制。其次,上述激光功率计还将红外线的能量转换为电信号,再根据该电信号计算得到入射激光的功率,这个过程与现有的量热型激光功率计相比,本实施例提供的激光功率计的响应过程较快,响应时间较短。The detection principle of the above scheme is to first convert the power of the incident laser into infrared energy. The conversion process is not affected by the range of the laser spectrum, that is, the laser in the entire spectral range can heat the laser converter and radiate infrared rays outward. , then the power of the incident laser corresponds to the energy of the corresponding infrared rays. Therefore, the spectral coverage of the above-mentioned laser power meter is very wide, and the laser power meter is not limited by the range of the incident laser power. Secondly, the above-mentioned laser power meter also converts the energy of infrared rays into an electrical signal, and then calculates the power of the incident laser according to the electrical signal. Compared with the existing calorimetric laser power meter in this process, the laser power provided by this embodiment The response process of the meter is faster and the response time is shorter.

综上,本实施例提供的激光功率计通过采用激光转换器吸收入射激光,并向外辐射红外线,然后采用红外接收器接收红外线,并会聚至红外探测器,以使红外探测器将红外线的能量转换为相应的电信号,再通过功率测试器将电信号转换为相应的功率数值,该功率数值与入射激光的功率相对应,使得该激光功率计既具有光谱覆盖范围宽和可测功率范围宽的优点,还具有响应时间短的优点。To sum up, the laser power meter provided in this embodiment absorbs incident laser light by using a laser converter, and radiates infrared rays outward, and then uses an infrared receiver to receive infrared rays and converge them to an infrared detector, so that the infrared detector can convert the energy of infrared rays to It is converted into a corresponding electrical signal, and then the electrical signal is converted into a corresponding power value by a power tester. The power value corresponds to the power of the incident laser, so that the laser power meter has both a wide spectral coverage and a wide measurable power range. Advantages, also has the advantage of short response time.

对于上述激光功率计中的各个器件,本领域技术人员可以设计多种实现方式,本实施例提供一种具体的实现方式。For each device in the above laser power meter, those skilled in the art can design various implementation manners, and this embodiment provides a specific implementation manner.

图1为本实用新型实施例一提供的激光功率计的结构示意图。如图1所示,该激光功率计是对待测的激光器1发射的激光进行检测,该激光功率计可以包括:激光转换器2、透射式的红外接收器31、红外探测器4以及功率测试器5。FIG. 1 is a schematic structural diagram of a laser power meter provided by Embodiment 1 of the present invention. As shown in Figure 1, the laser power meter detects the laser light emitted by the laser 1 to be tested, and the laser power meter may include: a laser converter 2, a transmissive infrared receiver 31, an infrared detector 4 and a power tester 5.

其中,激光转换器2也可以称为测试靶,顾名思义就是用来接收激光器1发出的入射激光。激光转换器2的感光面接收到入射激光,导致激光转换器2中受入射激光照射的部分温度升高,并向外辐射红外线。入射激光的功率越大,激光转换器2的温度越高,向外辐射的红外线能量越强。激光转换器2具体可以采用现有技术中常见的铝、铜等金属制成的金属板,以实现在受到激光照射后升高温度的功能。Wherein, the laser converter 2 can also be called a test target, as the name implies, it is used to receive the incident laser light emitted by the laser 1 . The photosensitive surface of the laser converter 2 receives the incident laser light, which causes the temperature of the part of the laser converter 2 irradiated by the incident laser light to rise, and radiates infrared rays to the outside. The greater the power of the incident laser, the higher the temperature of the laser converter 2, and the stronger the infrared energy radiated outward. Specifically, the laser converter 2 can adopt a metal plate made of common metals such as aluminum and copper in the prior art, so as to realize the function of raising the temperature after being irradiated by laser light.

透射式的红外接收器31的功能是收集激光转换器2发射出的红外线,并进行会聚,具体可采用凸透镜。激光转换器2发射出的红外线穿过凸透镜后发生会聚。透射式的红外接收器31优选采用对红外辐射透过率较高的介质材料制成,为了进一步提高透过率,还可以在透射式的红外接收器31的表面镀针对红外辐射的增透膜。The function of the transmissive infrared receiver 31 is to collect the infrared rays emitted by the laser converter 2 and converge them, specifically, a convex lens can be used. The infrared rays emitted by the laser converter 2 are converged after passing through the convex lens. The transmissive infrared receiver 31 is preferably made of a dielectric material with high transmittance to infrared radiation. In order to further improve the transmittance, an anti-reflection coating for infrared radiation can also be plated on the surface of the transmissive infrared receiver 31. .

若采用凸透镜作为透射式的红外接收器31,且凸透镜为短焦距透镜,激光转换器2与凸透镜的距离远大于凸透镜的焦距,则红外探测器4的光敏面可位于凸透镜的焦点处,接受会聚后的红外线。红外探测器4的功能是将接收到的红外线的能量转换为相应的电信号,具体可采用现有技术中常用的器件,例如锑化铟探测器、碲镉汞探测器等,其中,锑化铟的化学式为InSb,碲镉汞的化学式为HgCdTe。If a convex lens is adopted as the transmissive infrared receiver 31, and the convex lens is a short focal length lens, the distance between the laser converter 2 and the convex lens is far greater than the focal length of the convex lens, then the photosensitive surface of the infrared detector 4 can be positioned at the focal point of the convex lens, accepting convergence After the infrared. The function of the infrared detector 4 is to convert the energy of the received infrared rays into a corresponding electrical signal. Specifically, devices commonly used in the prior art can be used, such as indium antimonide detectors, mercury cadmium telluride detectors, etc., wherein antimonide The chemical formula of indium is InSb, and the chemical formula of mercury cadmium telluride is HgCdTe.

功率测试器5与红外探测器4电连接,接收红外探测器4发出的电信号。功率测试器5的功能是将该电信号进行计算,得到相应的功率数值,该功率数值与入射激光的功率是对应的。功率测试器5也可以采用现有技术中常用的能根据模拟量电信号得到功率数值的测试设备。The power tester 5 is electrically connected with the infrared detector 4 and receives the electrical signal sent by the infrared detector 4 . The function of the power tester 5 is to calculate the electrical signal to obtain the corresponding power value, which corresponds to the power of the incident laser. The power tester 5 can also use the test equipment commonly used in the prior art, which can obtain the power value according to the analog electrical signal.

上述各器件的型号以及各器件的布局均可由技术人员来设定,例如根据红外线的辐射范围确定透射式的红外接收器31的位置、焦距以及红外探测器4的位置。The models of the above components and the layout of the components can be set by technicians, such as determining the position and focal length of the transmissive infrared receiver 31 and the position of the infrared detector 4 according to the radiation range of infrared rays.

上述技术方案通过采用激光转换器吸收入射激光,并向外辐射红外线,然后采用透射式的红外接收器接收红外线,并会聚至红外探测器,以使红外探测器将红外线的能量转换为相应的电信号,再通过功率测试器将电信号转换为相应的功率数值,该功率数值与入射激光的功率相对应,使得该激光功率计既具有光谱覆盖范围宽和可测功率范围宽的优点,还具有响应时间短的优点。The above technical solution absorbs the incident laser light by using a laser converter, and radiates infrared rays to the outside, and then uses a transmission infrared receiver to receive the infrared rays and converge them to the infrared detector, so that the infrared detector converts the energy of the infrared rays into corresponding electric signal, and then the electrical signal is converted into the corresponding power value by the power tester, which corresponds to the power of the incident laser, so that the laser power meter has the advantages of wide spectral coverage and wide measurable power range, as well as The advantage of short response times.

进一步的,可以在激光转换器2的感光面涂覆能够增加激光吸收率的吸光涂层,以提高对激光的吸收能力。Further, a light-absorbing coating that can increase the laser absorption rate can be coated on the photosensitive surface of the laser converter 2, so as to improve the absorption ability of the laser light.

另外,考虑到高功率的激光照射在激光转换器2上,有可能对激光转换器2造成损伤,还可以在激光转换器2的感光面涂覆抗激光损伤涂层,以避免激光转换器2受损,提高其使用寿命。In addition, considering that high-power laser irradiation on the laser converter 2 may cause damage to the laser converter 2, an anti-laser damage coating can also be coated on the photosensitive surface of the laser converter 2 to prevent the laser converter 2 from being damaged. damaged, increasing its service life.

上述激光功率计还可以包括功率显示器,与功率测试器5连接,以将功率测试器5得到的功率数值进行显示。或者,功率显示器可以与功率测试器5集成在一体,即功率测试器5即具有计算功率数值的功能,又兼备显示功率数值的功能。The above-mentioned laser power meter may also include a power display connected to the power tester 5 to display the power value obtained by the power tester 5 . Alternatively, the power display can be integrated with the power tester 5, that is, the power tester 5 not only has the function of calculating the power value, but also has the function of displaying the power value.

在上述技术方案的基础上,激光转换器2的感光面受入射激光照射,使得受光照区域的温度升高,并且,激光转换器2中与受光照区域临近的部分的温度也会升高。为了避免在激光功率较大的情况下,激光转换器2中与受光照区域临近部分的温度过高而发生损伤,可以在激光转换器2中设置冷却装置,以降低与受光照区域临近部分的温度,避免损伤。该冷却装置可采用传导冷却方式、风冷、水冷或其它形式的冷却方式。On the basis of the above technical solution, the photosensitive surface of the laser converter 2 is irradiated by the incident laser light, so that the temperature of the irradiated area increases, and the temperature of the part of the laser converter 2 adjacent to the irradiated area also increases. In order to avoid damage to the laser converter 2 adjacent to the irradiated area due to excessive temperature when the laser power is high, a cooling device can be provided in the laser converter 2 to reduce the temperature of the adjacent part of the irradiated area. temperature to avoid damage. The cooling device can adopt conduction cooling, air cooling, water cooling or other cooling methods.

其中,传导冷却方式的一种形式是采用导热性能较好的导热结构与激光转换器2贴合,使得激光转换器2的热量通过导热结构快速和周围空气进行热量交换,实现传导冷却,增加与空气的接触面积,提高冷却效率。另一种形式是通过热沉的方式,采用自身温度不随外界传给它的热量变化而变化的设备作为与受光照区域相邻的部分。Among them, one form of the conduction cooling method is to use a heat conduction structure with better heat conduction performance to bond with the laser converter 2, so that the heat of the laser converter 2 can quickly exchange heat with the surrounding air through the heat conduction structure, so as to realize conduction cooling. Air contact area improves cooling efficiency. Another form is to use a device whose temperature does not change with the heat transferred to it from the outside by means of a heat sink as a part adjacent to the illuminated area.

风冷的方式,可以在激光转换器2背离受光照区域的一侧设置风扇,加快周围空气的流动速度,以提高冷却效率。In the way of air cooling, a fan can be arranged on the side of the laser converter 2 away from the illuminated area to speed up the flow of the surrounding air to improve the cooling efficiency.

水冷的方式,可以在激光转换器2内设置冷却水路,向冷却水路中通有较低温度的循环水,能够快速带走激光转换器2的热量,也能够加速冷却,提高冷却效率。In the way of water cooling, a cooling water circuit can be provided in the laser converter 2, and circulating water with a lower temperature is passed through the cooling water channel, which can quickly take away the heat of the laser converter 2, and can also accelerate cooling and improve cooling efficiency.

实施例二Embodiment two

上述实施例一提供了一种采用透射式的红外接收器31构成的激光功率计,与实施例一不同的是,本实施例提供的激光功率计中的红外接收器采用反射式的。图2为本实用新型实施例二提供的激光功率计的结构示意图。如图2所示,该激光功率计是对待测的激光器1发射的激光进行检测,该激光功率计可以包括:激光转换器2、反射式的红外接收器32、红外探测器4以及功率测试器5。The first embodiment above provides a laser power meter composed of a transmissive infrared receiver 31 . The difference from the first embodiment is that the infrared receiver in the laser power meter provided by this embodiment is reflective. Fig. 2 is a schematic structural diagram of the laser power meter provided by Embodiment 2 of the present invention. As shown in Figure 2, the laser power meter detects the laser emitted by the laser 1 to be tested, and the laser power meter may include: a laser converter 2, a reflective infrared receiver 32, an infrared detector 4 and a power tester 5.

其中,激光转换器2也可以称为测试靶,顾名思义就是用来接收激光器1发出的入射激光。激光转换器2的感光面接收到入射激光,导致激光转换器2中受入射激光照射的部分温度升高,并向外辐射红外线。入射激光的功率越大,激光转换器2的温度越高,向外辐射的红外线能量越强。激光转换器2具体可以采用现有技术中常见的一些材料制成,例如铝、铜等金属制成的金属板,以实现在受到激光照射后升高温度的功能。Wherein, the laser converter 2 can also be called a test target, as the name implies, it is used to receive the incident laser light emitted by the laser 1 . The photosensitive surface of the laser converter 2 receives the incident laser light, which causes the temperature of the part of the laser converter 2 irradiated by the incident laser light to rise, and radiates infrared rays to the outside. The greater the power of the incident laser, the higher the temperature of the laser converter 2, and the stronger the infrared energy radiated outward. Specifically, the laser converter 2 can be made of some common materials in the prior art, such as metal plates made of metals such as aluminum and copper, so as to realize the function of raising the temperature after being irradiated by laser light.

反射式的红外接收器32的功能是收集激光转换器2发射出的红外线,并进行会聚,具体可采用凹面镜。激光转换器2发射出的红外线照射到凹面镜的表面发生反射,然后发生会聚。The function of the reflective infrared receiver 32 is to collect the infrared rays emitted by the laser converter 2 and converge them. Specifically, a concave mirror can be used. The infrared rays emitted by the laser converter 2 irradiate the surface of the concave mirror for reflection and then converge.

反射式的红外接收器32优选采用对红外辐射反射率较高的介质材料制成,为了进一步提高反射率,还可以在反射式的红外接收器32的表面镀有针对红外辐射的反射膜,例如铝膜、铜膜、银膜或金膜等。The reflective infrared receiver 32 is preferably made of a dielectric material with high reflectivity to infrared radiation. In order to further improve the reflectivity, the surface of the reflective infrared receiver 32 can also be coated with a reflective film for infrared radiation, such as Aluminum film, copper film, silver film or gold film, etc.

若采用凹面镜作为反射式的红外接收器32,则红外探测器4的光敏面可位于凹面镜对激光转换器2发射出的红外线的会聚点处,接收会聚后的红外线。红外探测器4的功能是将接收到的红外线的能量转换为相应的电信号,具体可采用现有技术中常用的器件,例如锑化铟探测器、碲镉汞探测器等,其中,锑化铟的化学式为InSb,碲镉汞的化学式为HgCdTe。If a concave mirror is used as the reflective infrared receiver 32, the photosensitive surface of the infrared detector 4 can be located at the converging point of the infrared rays emitted by the concave mirror to the laser converter 2 to receive the converged infrared rays. The function of the infrared detector 4 is to convert the energy of the received infrared rays into a corresponding electrical signal. Specifically, devices commonly used in the prior art can be used, such as indium antimonide detectors, mercury cadmium telluride detectors, etc., wherein antimonide The chemical formula of indium is InSb, and the chemical formula of mercury cadmium telluride is HgCdTe.

功率测试器5与红外探测器4电连接,接收红外探测器4发出的电信号。功率测试器5的功能是将该电信号进行计算,得到相应的功率数值,该功率数值与入射激光的功率是对应的。功率测试器5也可以采用现有技术中常用的能根据模拟量电信号得到功率数值的测试设备。The power tester 5 is electrically connected with the infrared detector 4 and receives the electrical signal sent by the infrared detector 4 . The function of the power tester 5 is to calculate the electrical signal to obtain the corresponding power value, which corresponds to the power of the incident laser. The power tester 5 can also use the test equipment commonly used in the prior art, which can obtain the power value according to the analog electrical signal.

上述各器件的型号以及各器件的布局均可由技术人员来设定,例如根据红外线的辐射范围确定反射式的红外接收器32的位置、焦距以及红外探测器4的位置。The models of the above-mentioned components and the layout of the components can be set by technicians, for example, the position and focal length of the reflective infrared receiver 32 and the position of the infrared detector 4 are determined according to the radiation range of infrared rays.

上述技术方案通过采用激光转换器吸收入射激光,并向外辐射红外线,然后采用反射式的红外接收器接收红外线,并会聚至红外探测器,以使红外探测器将红外线的能量转换为相应的电信号,再通过功率测试器将电信号转换为相应的功率数值,该功率数值与入射激光的功率相对应,使得该激光功率计既具有光谱覆盖范围宽和可测功率范围宽的优点,还具有响应时间短的优点。The above technical solution absorbs the incident laser light by using a laser converter, and radiates infrared rays to the outside, and then uses a reflective infrared receiver to receive the infrared rays and converge them to the infrared detector, so that the infrared detector converts the energy of the infrared rays into corresponding electric signal, and then the electrical signal is converted into the corresponding power value by the power tester, which corresponds to the power of the incident laser, so that the laser power meter has the advantages of wide spectral coverage and wide measurable power range, as well as The advantage of short response times.

进一步的,可以在激光转换器2的感光面涂覆能够增加激光吸收率的吸光涂层,以提高对激光的吸收能力。Further, a light-absorbing coating that can increase the laser absorption rate can be coated on the photosensitive surface of the laser converter 2, so as to improve the absorption ability of the laser light.

另外,考虑到高功率的激光照射在激光转换器2上,有可能对激光转换器2造成损伤,还可以在激光转换器2的感光面涂覆抗激光损伤涂层,以避免激光转换器2受损,提高其使用寿命。In addition, considering that high-power laser irradiation on the laser converter 2 may cause damage to the laser converter 2, an anti-laser damage coating can also be coated on the photosensitive surface of the laser converter 2 to prevent the laser converter 2 from being damaged. damaged, increasing its service life.

上述激光功率计还可以包括功率显示器,与功率测试器5连接,以将功率测试器5得到的功率数值进行显示。或者,功率显示器可以与功率测试器5集成在一体,即功率测试器5即具有计算功率数值的功能,又兼备显示功率数值的功能。The above-mentioned laser power meter may also include a power display connected to the power tester 5 to display the power value obtained by the power tester 5 . Alternatively, the power display can be integrated with the power tester 5, that is, the power tester 5 not only has the function of calculating the power value, but also has the function of displaying the power value.

在上述技术方案的基础上,激光转换器2的感光面受入射激光照射,使得受光照区域的温度升高,并且,激光转换器2中与受光照区域临近的部分的温度也会升高。为了避免在激光功率较大的情况下,激光转换器2中与受光照区域临近部分的温度过高而发生损伤,可以在激光转换器2中设置冷却装置,以降低与受光照区域临近部分的温度,避免损伤。该冷却装置可采用传导冷却方式、风冷、水冷或其它形式的冷却方式。On the basis of the above technical solution, the photosensitive surface of the laser converter 2 is irradiated by the incident laser light, so that the temperature of the irradiated area increases, and the temperature of the part of the laser converter 2 adjacent to the irradiated area also increases. In order to avoid damage to the laser converter 2 adjacent to the irradiated area due to excessive temperature when the laser power is high, a cooling device can be provided in the laser converter 2 to reduce the temperature of the adjacent part of the irradiated area. temperature to avoid damage. The cooling device can adopt conduction cooling, air cooling, water cooling or other cooling methods.

其中,传导冷却方式的一种形式是采用导热性能较好的导热结构与激光转换器2贴合,使得激光转换器2的热量通过导热结构快速和周围空气进行热量交换,实现传导冷却,增加与空气的接触面积,提高冷却效率。另一种形式是通过热沉的方式,采用自身温度不随外界传给它的热量变化而变化的设备作为与受光照区域相邻的部分。Among them, one form of the conduction cooling method is to use a heat conduction structure with better heat conduction performance to bond with the laser converter 2, so that the heat of the laser converter 2 can quickly exchange heat with the surrounding air through the heat conduction structure, so as to realize conduction cooling. Air contact area improves cooling efficiency. Another form is to use a device whose temperature does not change with the heat transferred to it from the outside by means of a heat sink as a part adjacent to the illuminated area.

风冷的方式,可以在激光转换器2背离受光照区域的一侧设置风扇,加快周围空气的流动速度,以提高冷却效率。In the way of air cooling, a fan can be arranged on the side of the laser converter 2 away from the illuminated area to speed up the flow of the surrounding air to improve the cooling efficiency.

水冷的方式,可以在激光转换器2内设置冷却水路,向冷却水路中通有较低温度的循环水,能够快速带走激光转换器2的热量,也能够加速冷却,提高冷却效率。In the way of water cooling, a cooling water circuit can be provided in the laser converter 2, and circulating water with a lower temperature is passed through the cooling water channel, which can quickly take away the heat of the laser converter 2, and can also accelerate cooling and improve cooling efficiency.

最后应说明的是:以上各实施例仅用以说明本实用新型的技术方案,而非对其限制;尽管参照前述各实施例对本实用新型进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本实用新型各实施例技术方案的范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model, and are not intended to limit it; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand : It is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements to some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions depart from the various embodiments of the present invention Scope of technical solutions.

Claims (10)

1.一种激光功率计,其特征在于,包括:1. A laser power meter, characterized in that, comprising: 激光转换器,用于吸收入射激光,并将所述入射激光转换为红外线向外发射;A laser converter for absorbing incident laser light and converting the incident laser light into infrared rays for outward emission; 红外接收器,用于接收所述红外线,并对所述红外线进行会聚;an infrared receiver, configured to receive the infrared rays and converge the infrared rays; 红外探测器,用于接收会聚后的红外线,并将所述会聚后的红外线转换为电信号;以及,an infrared detector for receiving converged infrared rays and converting the converged infrared rays into electrical signals; and, 功率测试器,与所述红外探测器连接,用于接收所述电信号,并根据所述电信号计算得到所述入射激光的功率值。A power tester, connected with the infrared detector, is used to receive the electrical signal, and calculate the power value of the incident laser light according to the electrical signal. 2.根据权利要求1所述的激光功率计,其特征在于,所述红外接收器为透射式的红外接收器。2. The laser power meter according to claim 1, wherein the infrared receiver is a transmission infrared receiver. 3.根据权利要求1所述的激光功率计,其特征在于,所述红外接收器为反射式的红外接收器。3. The laser power meter according to claim 1, wherein the infrared receiver is a reflective infrared receiver. 4.根据权利要求2或3所述的激光功率计,其特征在于,所述激光转换器中设置有冷却装置,所述冷却装置为传导冷却装置、风冷装置或水冷装置。4. The laser power meter according to claim 2 or 3, wherein a cooling device is provided in the laser converter, and the cooling device is a conduction cooling device, an air cooling device or a water cooling device. 5.根据权利要求4所述的激光功率计,其特征在于,所述激光转换器的感光面设有吸光涂层。5. The laser power meter according to claim 4, wherein the photosensitive surface of the laser converter is provided with a light-absorbing coating. 6.根据权利要求4所述的激光功率计,其特征在于,所述激光转换器的感光面设有抗激光损伤涂层。6. The laser power meter according to claim 4, wherein the photosensitive surface of the laser converter is provided with an anti-laser damage coating. 7.根据权利要求2所述的激光功率计,其特征在于,所述透射式的红外接收器的表面设有增透膜。7. The laser power meter according to claim 2, wherein an anti-reflection film is provided on the surface of the transmissive infrared receiver. 8.根据权利要求3所述的激光功率计,其特征在于,所述反射式的红外接收器的表面设有反射膜,所述反射膜为铝膜、铜膜、银膜或金膜。8. The laser power meter according to claim 3, wherein a reflective film is provided on the surface of the reflective infrared receiver, and the reflective film is an aluminum film, a copper film, a silver film or a gold film. 9.根据权利要求1所述的激光功率计,其特征在于,所述红外探测器为锑化铟探测器或碲镉汞探测器。9. The laser power meter according to claim 1, wherein the infrared detector is an indium antimonide detector or a mercury cadmium telluride detector. 10.根据权利要求1所述的激光功率计,其特征在于,还包括与所述功率测试器连接的功率显示器。10. The laser power meter according to claim 1, further comprising a power display connected to the power tester.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104792413A (en) * 2015-03-25 2015-07-22 北京光电技术研究所 Laser power meter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104792413A (en) * 2015-03-25 2015-07-22 北京光电技术研究所 Laser power meter

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