CN221224167U - Beam quality test and system optical axis calibration and adjustment system - Google Patents
Beam quality test and system optical axis calibration and adjustment system Download PDFInfo
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- CN221224167U CN221224167U CN202323327009.7U CN202323327009U CN221224167U CN 221224167 U CN221224167 U CN 221224167U CN 202323327009 U CN202323327009 U CN 202323327009U CN 221224167 U CN221224167 U CN 221224167U
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Abstract
The utility model discloses a light beam quality test and system optical axis calibration adjustment system, which relates to the technical field of laser detection equipment and comprises a test box body, a main mirror assembly, a secondary mirror assembly, a reflecting mirror assembly and a dichroic mirror assembly, wherein an optical element mounting frame is arranged in the test box body, the main mirror assembly is arranged at one end of the optical element mounting frame, the secondary mirror assembly is correspondingly arranged at the other end of the optical element mounting frame, the reflecting mirror assembly is arranged on a reflecting path of the secondary mirror assembly, and the dichroic mirror assembly is arranged on a reflecting path of the reflecting mirror assembly. The device integrates the functions of beam quality test and system optical axis calibration and adjustment, controls the size and cost of laser test equipment, and improves the test and adjustment efficiency of the system.
Description
Technical Field
The utility model relates to the technical field of laser detection equipment, in particular to a beam quality test and system optical axis calibration, installation and adjustment system.
Background
Beam quality detection is an important link in laser technology, and is related to the performance and application of laser. In the use of various optoelectronic devices, such as lasers, it is necessary to perform a test analysis of the beam quality of the optoelectronic device. Because the beam emitted by the laser used has larger energy, and the detection device used for testing the laser beam does not have larger energy storage space, the detection device cannot bear larger power density, and generally, a small proportion of the beam is split for detection and analysis under the condition of not influencing the main optical path of the laser. Therefore, the energy density of the separated laser beam must be controlled within an acceptable range for the detector.
Along with development of photoelectric technology, photoelectric equipment is widely applied in various fields, optical axis consistency is used as an important performance index parameter, when the photoelectric equipment is installed and debugged, an important basic work is optical axis calibration, and a special calibration instrument is usually adopted during calibration, so that the precision of the instrument is high, but the instrument is high in price, heavy in volume and inconvenient to use.
A beam quality testing device, bulletin CN 215767595U, is also used to test the quality of a laser beam, wherein the testing device comprises a bench. The surface of the pedestal is sequentially provided with a laser collimation output unit, a laser attenuation unit, a laser focusing unit and a laser quality detection unit along a laser irradiation path. The laser collimation output unit comprises a laser output head and a collimation adapter. The laser attenuation unit at least comprises an attenuation lens. The laser focusing unit at least comprises a focusing lens. The laser quality detection unit is used for receiving the laser focused by the focusing lens. The technical scheme has the advantages of complex structure, small applicable laser testing range and single function.
Disclosure of utility model
The utility model aims to overcome the defects of the prior art, provide a system for testing the quality of a light beam and calibrating and adjusting the optical axis of a system, and solve the problems that the existing light beam quality testing equipment cannot be suitable for testing the strong laser and has single function.
The utility model is realized by the following technical scheme:
The utility model provides a light beam quality test and system optical axis calibration system of adjusting, includes test box, primary mirror subassembly, secondary mirror subassembly, speculum subassembly and dichroscope subassembly, be equipped with the optical element mounting bracket in the test box, be equipped with primary mirror subassembly in optical element mounting bracket one end, the other end corresponds and is equipped with secondary mirror subassembly, be equipped with the speculum subassembly on the reflection path of secondary mirror subassembly, be equipped with the dichroscope subassembly on the reflection path of speculum subassembly.
Further, an attenuation mirror assembly and a laser quality detection assembly are sequentially arranged on the reflection path of the dichroic mirror assembly.
Further, the outside of the test box body is correspondingly provided with a strong laser device with the secondary mirror component, a spectroscope component is arranged between the strong laser device and the secondary mirror component, and an absorption pool is arranged on a reflection path of the spectroscope component.
The strong laser equipment emits laser, through the spectroscope component, the spectroscope component reflects most energy light beams to the absorption tank for absorption, and the remaining small energy light beams pass through the spectroscope component and reach the main mirror component through the secondary mirror component, and are reflected to the secondary mirror component again through the main mirror component, the secondary mirror component emits light beams onto the reflecting mirror component, the reflecting mirror component reflects light beams onto the dichroic mirror component again, and is reflected to the laser quality detection component through the dichroic mirror component again, and the laser quality detection component is located the focal plane position of the system, and the laser quality detection component receives the information of the light beams and displays the characteristics.
Further, a calibration mirror assembly and a laser are sequentially arranged on the transmission path of the dichroic mirror assembly.
Further, an optical axis calibration device to be measured for optical axis calibration is arranged on the outer side of the test box body and corresponds to the secondary mirror assembly,
The light emitted by the laser firstly diverges the light beam through the calibration mirror assembly, then reaches the dichroic mirror assembly, the dichroic mirror assembly has 50% transmittance for the light emitted by the light source, the transmitted light can directly reach the reflecting mirror assembly, then reaches the main mirror assembly through the reflection of the secondary mirror assembly, the main mirror assembly performs collimation output on the diverged light beam, and then the reflected light can be transmitted through the secondary mirror assembly to reach the optical axis calibration device to be measured.
Further, a plurality of leveling feet are arranged at the bottom of the test box body.
Compared with the prior art, the utility model has the following advantages and beneficial effects:
1. The utility model relates to a light beam quality test and system optical axis calibration adjustment system, which adopts a coaxial reflection design without central obscuration of a large-caliber long-focus light beam (particularly suitable for application requirements of collecting central view field information) and is realized by a secondary mirror beam splitting flat plate; the input caliber and the output caliber of the calibration device are not smaller than 350mm; the effective focal length of the system is not less than 5000mm; the structure size of the device is only 2.5 mm by 0.75m while realizing a long focal length of 5m and a transmitting and receiving caliber of not less than 350mm; the angular resolution of the system is better than 2 mu rad; the off-axis optical element is not adopted, so that the cost, the adjustment difficulty and the imbalance risk of the system are reduced.
2. The invention selects the reflective design structure, has no chromatic aberration, and can meet the calibration of laser beams in different wave bands. The advantages of the coaxial collimator and the off-axis collimator are combined, the high-precision detection is met, the structure is compact, the center is not blocked, and the problems of high processing difficulty and high cost of the off-axis collimator under the condition of large caliber and long focal length are avoided.
3. The system for testing the quality of the light beam and calibrating and adjusting the optical axis of the system integrates the functions of testing the quality of the light beam and calibrating and adjusting the optical axis of the system into a set of device, thereby controlling the size and the cost of laser testing equipment and improving the testing and adjusting efficiency of the system.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model. In the drawings:
FIG. 1 is a schematic diagram of the structure of the test case of the present utility model.
Fig. 2 is a schematic structural view of an optical element arrangement according to the present utility model.
Fig. 3 is a schematic diagram of embodiment 1 of the present utility model.
Fig. 4 is a schematic diagram of embodiment 2 of the present utility model.
In the drawings, the reference numerals and corresponding part names:
The device comprises a 1-main mirror assembly, a 2-secondary mirror assembly, a 3-reflecting mirror assembly, a 4-dichroic mirror assembly, a 5-calibration mirror assembly, a 6-laser, a 7-attenuation mirror assembly, an 8-laser quality detection assembly, a 9-optical element mounting frame, a 10-leveling foot, 11-strong laser equipment, a 12-optical axis calibration device to be tested, a 13-spectroscope assembly, a 14-absorption tank and a 15-test box body.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe the embodiments of the application herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are only used to better describe the present application and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.
Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the present application will be understood by those of ordinary skill in the art according to the specific circumstances.
Furthermore, the terms "mounted," "configured," "provided," "connected," "coupled," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
Example 1
As shown in fig. 1-3, the system for testing the quality of a light beam and calibrating and adjusting the optical axis of the system comprises a testing box body 15, a main mirror assembly 1, a secondary mirror assembly 2, a reflecting mirror assembly 3 and a dichroic mirror assembly 4, wherein the testing box body 15 is placed on a special optical equipment testing platform, various required auxiliary optical testing equipment can be installed on the platform, and a plurality of leveling feet 10 are arranged at the bottom of the testing box body 15. The height and levelness of the test box body 15 on the test platform are adjusted through the leveling foundation 10, an optical element mounting frame 9 is arranged in the test box body 15, a supporting table is arranged on the optical element mounting frame 9 according to the size and the function of each optical element, each optical element is convenient to mount, a main mirror assembly 1 is arranged at one end of the optical element mounting frame 9, the main mirror assembly 1 is an aspheric mirror with a large curvature, the incident light beam is focused and transmitted, a secondary mirror assembly 2 is correspondingly arranged at the other end of the main mirror assembly, a reflecting mirror assembly 3 is arranged on the reflecting path of the secondary mirror assembly, and a dichroic mirror assembly 4 is arranged on the reflecting path of the reflecting mirror assembly 3. The dichroic mirror has a 50% transmittance for light emitted by the light source. Both the primary mirror assembly 1 and the secondary mirror assembly 2 have a reflection angle adjusting function.
An attenuation mirror assembly 7 and a laser quality detection assembly 8 are sequentially arranged on the reflection path of the dichroic mirror assembly 4.
The outside of the test box body 15 is provided with a strong laser device 11 corresponding to the secondary mirror assembly 2, a spectroscope assembly 13 is arranged between the strong laser device 11 and the secondary mirror assembly 2, and an absorption tank 14 is arranged on the reflection path of the spectroscope assembly 13. The strong laser equipment 11 emits laser, through the spectroscope component 13, the spectroscope component 13 reflects most energy light beams to the absorption tank 14 for absorption, and the remaining small energy light beams reach the main mirror component 1 through the spectroscope component 13 through the secondary mirror component 2, and are reflected to the secondary mirror component 2 again through the main mirror component 1, the secondary mirror component 2 emits light beams to the reflecting mirror component 3, the reflecting mirror component 3 reflects light beams to the dichroic mirror component 4 again and reflects light beams to the laser quality detection component 8 through the dichroic mirror component 4, the laser quality detection component 8 is located at the focal plane position of the system, and the laser quality detection component 8 receives information of the light beams and displays characteristics.
The beam quality testing flow has the function one as the auxiliary debugging and testing of the beam quality of the strong laser equipment. As shown in fig. 1-3, the intense laser device emits laser light, and through the beam splitter component 13, the beam splitter component 13 reflects most of the energy to the absorption cell 14 for absorption, and the lower energy enters the optical test system in the test box 15 through the beam splitter component 13. The laser beam firstly passes through the secondary mirror component 2 to reach the primary mirror component 1, the primary mirror component 1 is an aspheric mirror with large curvature, the incident laser beam is focused and transmitted, the laser beam is reflected by the primary mirror component 1 and then reflected to the secondary mirror component 2, and is reflected by the secondary mirror component 2 and then reflected by the reflecting mirror component 3, and is reflected by the dichroic mirror component 4 and then reflected by the attenuation mirror component 7 to the image processing camera (laser quality detection component 8), the image processing camera is positioned at the focal plane position of the system, and the image processing camera receives the information of the laser beam and displays the characteristics.
The quality of the light beam of the strong laser output equipment can be qualitatively and quantitatively analyzed according to the characteristic information displayed by the camera. As an auxiliary debugging function, the collected light beams can be qualitatively judged according to far-field light spot distribution of the light beams in the camera, for example, the defocusing state and the existing obvious aberration of the light beams output by the system to be tested can be debugged according to the analyzed information, and real-time feedback is carried out; and as a beam quality analysis device of the system to be tested, the beam quality of the detection beam can be accurately calculated according to the image information collected by the camera and the characteristic parameters of the test system.
According to the characteristics of the strong laser equipment 11 of the tested equipment, the laser energy absorption and dispersion equipment, such as the dichroic mirror component 4, the spectroscope component 13, the absorption cell 14 and the attenuation mirror component 7, which are designed in a targeted way, continuously weaken the strong laser beam according to the characteristics of the strong laser equipment 11 of the tested equipment, so that the purposes of safe, controllable and accurate measurement of the laser beam are realized.
Example 2
As shown in fig. 1, 2 and 4, in the system for testing the quality of a light beam and calibrating and adjusting the optical axis of the system, a main mirror assembly 1 is arranged at one end of an optical element mounting frame 9, a secondary mirror assembly 2 is correspondingly arranged at the other end of the optical element mounting frame, a reflecting mirror assembly 3 is arranged on the reflecting path of the secondary mirror assembly, and a dichroic mirror assembly 4 is arranged on the reflecting path of the reflecting mirror assembly 3. The dichroic mirror assembly 4 is provided with a calibration mirror assembly 5 and a laser 6 in sequence in the transmission path. The outside of the test box body 15 is correspondingly provided with an optical axis calibration device 12 to be tested for optical axis calibration corresponding to the secondary mirror assembly 2,
The light emitted by the laser 6 firstly diverges the light beam through the calibration mirror assembly 5, then reaches the dichroic mirror assembly 4, the dichroic mirror assembly 4 has 50% transmittance for the light emitted by the light source, the transmitted light can directly reach the reflecting mirror assembly 3, then reaches the main mirror assembly 1 through the reflection of the secondary mirror assembly 2, the main mirror assembly 1 collimates and outputs the diverged light beam, and then the reflected light passes through the secondary mirror assembly 2 to reach the optical axis calibration device 12 to be measured.
The present embodiment describes an optical axis calibration auxiliary adjustment function, which is shown in fig. 1, 2 and 4. The light emitted by the light source laser 6 firstly diverges the light beam through the calibration mirror assembly 5, then reaches the dichroic mirror assembly 4, the dichroic mirror assembly 4 has 50% transmittance for the light emitted by the light source, the transmitted light can directly reach the reflecting mirror assembly 3, the reflecting mirror assembly 3 reflects the light beam to the secondary mirror assembly 2, then reaches the main mirror assembly 1 through the reflection of the secondary mirror assembly 2, the main mirror assembly 1 performs collimation output on the diverged light beam, and then reflects the secondary mirror assembly 2, and the light beam passes through the secondary mirror assembly 2 to reach the optical axis calibration device 12 to be tested for optical axis calibration.
In combination with the method for testing the beam quality of the system to be tested in embodiment 1, when testing the beam quality of the system, it is necessary to debug the optical axis of the laser to the marking zero point of the image processing camera, and at this time, the optical axes of the emission light sources of the system to be tested and the auxiliary adjustment device may be considered to be parallel and coincident. If the system to be tested is provided with other modules needing optical axis calibration, the state can be taken as a reference, if the module needing optical axis calibration is a detection system, the auxiliary adjustment device is received to emit light of a light source, the optical axes of the two modules need to be parallel, the light spots received by detection are adjusted to the zero point position of the detection module, and the light spots can be adjusted to the corresponding crossing positions by utilizing a trigonometric function and an object image relation according to the working distance and the angle when the optical axes need to be crossed; if the system to be tested has other emission devices needing calibration, the light beam can be received on the image processing camera of the adjusting device according to the principle of light beam quality test, and the optical axis of the emission device can be calibrated horizontally and crosswise according to the requirement.
The invention selects the reflective design structure, has no chromatic aberration, and can meet the calibration of laser beams in different wave bands. The advantages of the coaxial collimator and the off-axis collimator are combined, the high-precision detection is met, the structure is compact, the center is not blocked, and the problems of high processing difficulty and high cost of the off-axis collimator under the condition of large caliber and long focal length are avoided.
The effective focal length is one of important parameters of the light pipe device, and when the laser beam is calibrated by utilizing the detection principle of the collimator, the calibration precision is related to the focal length of the laser beam, and the longer the focal length is, the higher the calibration precision is, and the higher the reliability is. When the focal length of the light pipe is long, if the cost and the space utilization rate are not considered, the bottleneck in design and processing and manufacturing is not existed, and the main reason is that the corresponding cost and the size of the structure and the space occupation rate are consistent with the starting point of pursuing small and compact products in many industrial products.
The angular resolution of the device is related to the resolution of the optical system and the resolution of the camera. When the high-energy laser device is calibrated and evaluated for beam quality, high detection precision is required to realize quality detection of the high-energy laser beam, so that the reliability and the authenticity of detection are realized. High accuracy beam quality detection requires a high angular resolution of the detection device.
The utility model adopts a coaxial reflection type design with large caliber and long focal length and without central obscuration, the input and output calibers are not less than 350mm, the effective focal length of the system is not less than 5m, the angular resolution of the system is better than 2 mu rad, not only can realize the high-precision detection of far-field laser beams of large caliber laser beams, but also can combine the functions of beam quality test and optical axis calibration into a set of device, and can realize the system calibration of equipment to be tested.
The utility model has the far-field laser beam quality detection function, and the detection caliber can reach 350mm; the device has an infinite target simulation function, and meets the test requirements of special equipment; the device is particularly used as a beam quality detection and auxiliary adjustment device of the strong laser equipment, has reliable performance and controllable cost, can meet the system adjustment of the equipment, has the design of a common light path, and can improve the adjustment efficiency of the strong laser equipment.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the utility model, and is not meant to limit the scope of the utility model, but to limit the utility model to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the utility model are intended to be included within the scope of the utility model.
Claims (6)
1. The utility model provides a light beam quality test and system optical axis calibration system of adjusting, includes test box (15), primary mirror subassembly (1), secondary mirror subassembly (2), speculum subassembly (3) and dichroism mirror subassembly (4), its characterized in that: the testing box body (15) is internally provided with an optical element mounting frame (9), one end of the optical element mounting frame (9) is provided with a main mirror assembly (1), the other end of the optical element mounting frame is correspondingly provided with a secondary mirror assembly (2), a reflecting mirror assembly (3) is arranged on a reflecting path of the secondary mirror assembly, and a dichroic mirror assembly (4) is arranged on a reflecting path of the reflecting mirror assembly (3).
2. The system for testing quality of light beams and calibrating and adjusting optical axes of system according to claim 1, wherein: an attenuation mirror assembly (7) and a laser quality detection assembly (8) are sequentially arranged on the reflection path of the dichroic mirror assembly (4).
3. The system for testing quality of light beams and calibrating and adjusting optical axes of system according to claim 2, wherein: the outside of the test box body (15) is provided with a strong laser device (11) corresponding to the secondary mirror assembly (2), a spectroscope assembly (13) is arranged between the strong laser device (11) and the secondary mirror assembly (2), and an absorption pool (14) is arranged on a reflection path of the spectroscope assembly (13);
The strong laser equipment (11) emits laser, through spectroscope component (13), spectroscope component (13) reflects most energy light beam to absorption pond (14) absorption, and the energy light beam of remaining weak point passes through spectroscope component (13) and reaches primary mirror component (1) through secondary mirror component (2), reflects secondary mirror component (2) again through primary mirror component (1), secondary mirror component (2) is with the light beam emission to reflector component (3), reflector component (3) is with the light beam reflection to dichroic mirror component (4) again, reflects to laser quality detection subassembly (8) through dichroic mirror component (4), and laser quality detection subassembly (8) are located the focal plane position of system, and laser quality detection subassembly (8) receive the information of light beam and carry out the characteristic display.
4. The system for testing quality of light beams and calibrating and adjusting optical axes of system according to claim 1, wherein: and a calibration mirror assembly (5) and a laser (6) are sequentially arranged on the transmission path of the dichroic mirror assembly (4).
5. The system for beam quality testing and system optical axis calibration and adjustment according to claim 4, wherein: the outer side of the test box body (15) and the secondary mirror assembly (2) are correspondingly provided with an optical axis calibration device (12) to be tested for optical axis calibration,
Light emitted by the laser (6) firstly diverges light beams through the calibration mirror assembly (5), then reaches the dichroic mirror assembly (4), the dichroic mirror assembly (4) has 50% transmittance for light emitted by the light source, the transmitted light can directly reach the reflecting mirror assembly (3), then reaches the main mirror assembly (1) through reflection of the secondary mirror assembly (2), the main mirror assembly (1) collimates and outputs the diverged light beams, and then the reflected light passes through the secondary mirror assembly (2) to reach the optical axis calibration device (12) to be measured.
6. A beam quality testing and system optical axis calibration and adjustment system according to any one of claims 1-5, wherein: a plurality of leveling feet (10) are arranged at the bottom of the test box body (15).
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CN202323327009.7U CN221224167U (en) | 2023-12-07 | 2023-12-07 | Beam quality test and system optical axis calibration and adjustment system |
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