CN220844043U

CN220844043U - Conveying structure and silicon wafer surface dirt detection device

Info

Publication number: CN220844043U
Application number: CN202322429292.8U
Authority: CN
Inventors: 赵哲; 王刚; 张权; 柴尉; 黄文�
Original assignee: Guangzhou Yihong Intelligent Equipment Co ltd
Current assignee: Guangzhou Yihong Intelligent Equipment Co ltd
Priority date: 2023-09-07
Filing date: 2023-09-07
Publication date: 2024-04-26
Anticipated expiration: 2033-09-07

Abstract

The utility model relates to the technical field of silicon wafer dirt detection, and discloses a conveying structure and a silicon wafer surface dirt detection device. The utility model has the beneficial effects that the distance between the two conveyor belts can be adjusted through the mutual matching of the supporting plate, the power piece and the fixing piece, the detection of silicon wafers with different sizes can be realized, the fixing of the conveyor belts can be realized through the fixing piece, and the running stability is ensured; through the cooperation of first detection spare and second detection spare, can realize carrying out whole detection to the upper and lower surface of silicon chip for it is more comprehensive to detect.

Description

Conveying structure and silicon wafer surface dirt detection device

Technical Field

The utility model relates to the technical field of silicon wafer dirt detection, in particular to a conveying structure and a silicon wafer surface dirt detection device.

Background

The silicon chip sorting machine is used for detecting the silicon chip after the silicon chip is manufactured, wherein the silicon chip sorting machine comprises the step of screening the silicon chip with dirty surfaces.

In the prior art, when detecting the silicon chip, the silicon chip is transported, the existing transport device can not adjust according to the size of the detected silicon chip, the detection of the silicon chip with various sizes is inconvenient, and meanwhile, the upper surface and the lower surface of the silicon chip can not be detected completely.

Disclosure of utility model

Some simplifications or omissions may be made in this section as well as in the description of the utility model and in the title of the utility model, which may not be used to limit the scope of the utility model.

The utility model aims to provide a conveying structure which can solve the problem that the conveying structure cannot be adjusted according to the size of a detected silicon wafer.

In order to solve the technical problems, the utility model provides the following technical scheme: the utility model provides a transport structure, its includes the transportation subassembly, the transportation subassembly includes the backup pad, installs in the power spare of backup pad and sets up in the mounting of power spare one side, backup pad, power spare and mounting cooperation are used.

As a preferred embodiment of the conveying structure according to the utility model, wherein: one side fixedly connected with three riser of backup pad, two fixedly connected with slide rail between the riser, the slide rail is fixed in one side of backup pad, a plurality of jacks have been seted up to one side of backup pad.

As a preferred embodiment of the conveying structure according to the utility model, wherein: the power piece comprises two sliding seats sliding on the sliding rail, a vertical plate fixed on one side of the sliding seats, a motor arranged on one side of the fixing frame, a driving wheel and a plurality of auxiliary wheels, wherein the driving wheel and the auxiliary wheels rotate on one side of the vertical plate.

As a preferred embodiment of the conveying structure according to the utility model, wherein: the output of motor fixedly connected with pivot, and the one end of pivot rotate connect in one side of mount, two the outer lane of pivot is located to the action wheel movable sleeve, install the conveyer belt in the pivot, the conveyer belt cooperatees with the auxiliary wheel.

As a preferred embodiment of the conveying structure according to the utility model, wherein: the mounting is including being fixed in the fixed plate of sliding seat one side, be fixed in the fixed shell of fixed plate one side and set up the spring in the fixed shell, one side fixedly connected with of fixed plate two spacing, and the standing groove has been seted up to one side of spacing, two the spacing is located the both sides of fixed shell.

As a preferred embodiment of the conveying structure according to the utility model, wherein: the fixed plate is provided with a through hole, the through hole is internally and slidably connected with an inserting rod, one end of the inserting rod is positioned inside the fixed shell, one side of the fixed shell is fixedly connected with a connecting rod, and the spring is positioned on the outer ring of the connecting rod.

As a preferred embodiment of the conveying structure according to the utility model, wherein: the spring is characterized in that two ends of the spring are respectively fixed on one side of the inserted link and the inner wall of the fixed shell, the connecting rod is provided with a groove, the pull rod is rotationally connected in the groove, one end of the pull rod is fixedly connected with a connecting plate, and the connecting plate is matched with the placing groove.

The utility model has the beneficial effects that: according to the utility model, the distance between the two conveyor belts can be adjusted through the mutual matching of the supporting plate, the power piece and the fixing piece, the detection of silicon wafers with different sizes is realized, the fixing of the conveyor belts can be realized through the fixing piece, and the running stability is ensured.

The utility model aims to provide a silicon wafer surface dirt detection device which can solve the problem that the upper surface and the lower surface of a silicon wafer cannot be detected completely.

In order to solve the technical problems, the utility model provides the following technical scheme: the utility model provides a silicon chip surface dirt detection device, its includes detection component, detection component includes first detection piece and sets up in the second detection piece of first detection piece one side, first detection piece, second detection piece all cooperate with two transportation components.

As a preferable scheme of the silicon wafer surface dirt detection device, the utility model comprises the following steps: the first detection piece is including setting up in the first mounting bracket of conveyer belt below, install in the first light source of first mounting bracket one side and set up in the first line of first light source under sweep the camera, first logical groove has been seted up to first light source, first logical groove and first line sweep camera looks adaptation.

As a preferable scheme of the silicon wafer surface dirt detection device, the utility model comprises the following steps: the second detection piece is including setting up in the second mounting bracket of conveyer belt one side, install in the second light source of second mounting bracket one side and set up in the second line of second light source directly over sweep the camera, the second through groove has been seted up to the second light source, the second light source is located the top of conveyer belt, the camera is swept to the second line and second through groove looks adaptation.

The utility model has the beneficial effects that: according to the utility model, through the cooperation of the first detection part and the second detection part, all the upper and lower surfaces of the silicon wafer can be detected, so that the detection is more comprehensive.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Wherein:

Fig. 1 is a schematic structural view of a conveying structure.

Fig. 2 is a schematic structural view of the fixing member.

Fig. 3 is a schematic cross-sectional view of the fastener.

Fig. 4 is a schematic structural diagram of a silicon wafer surface contamination detection device.

Fig. 5 is a schematic structural view of the first detecting member.

Fig. 6 is a schematic structural view of the second detecting member.

Detailed Description

In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, but the present utility model may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present utility model is not limited to the specific embodiments disclosed below.

Further, reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic can be included in at least one implementation of the utility model. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments.

Example 1

Referring to fig. 1, a first embodiment of the present utility model provides a conveying structure, which includes a conveying assembly 100, where the conveying assembly 100 includes a support plate 101, a power member 102 mounted on the support plate 101, and a fixing member 103 disposed on one side of the power member 102, and the support plate 101, the power member 102, and the fixing member 103 are used cooperatively, and by operating the power member 102, adjustment of a distance of a conveyor belt 102g can be achieved, and fixing of the conveyor belt 102g can be achieved by the fixing member 103.

Specifically, three risers 102b are fixedly connected with one side of backup pad 101, and fixedly connected with slide rail 101a between two risers 102b, slide rail 101a are fixed in one side of backup pad 101, and a plurality of jacks 101c have been seted up to one side of backup pad 101, can play the effect of supporting through backup pad 101, can guarantee the stability of device at the in-process of device operation.

When in use, the horizontal movement of the conveyor belt 102g can be realized through the sliding rail 101a, the cooperation between the jack 101c and the inserted link 103f can realize the stabilization of the conveyor belt 102g on the supporting plate 101, the stability during transportation is ensured, and the whole transportation assembly 100 can be conveniently moved through the supporting plate 101.

Example 2

Referring to fig. 2 and 3, a second embodiment of the present utility model is different from the first embodiment in that: the power piece 102 further comprises two sliding seats 102a sliding on the sliding rail 101a, a vertical plate 102b fixed on one side of the sliding seats 102a, a motor 102c installed on one side of the fixed frame 101b, a driving wheel 102e rotating on one side of the vertical plate 102b and a plurality of auxiliary wheels 102f, wherein the motor 102c provides enough power for the device, and the number of the auxiliary wheels 102f can be designed according to practical situations.

Specifically, the output end of the motor 102c is fixedly connected with a rotating shaft 102d, one end of the rotating shaft 102d is rotatably connected to one side of the fixing frame 101b, two driving wheels 102e are movably sleeved on the outer ring of the rotating shaft 102d, a conveying belt 102g is installed on the rotating shaft 102d, the conveying belt 102g is matched with an auxiliary wheel 102f, and through the matching of the driving wheels 102e and the rotating shaft 102d, the driving wheels 102e can be driven to rotate through the rotating shaft 102d, and the driving wheels 102e can be ensured to slide on the rotating shaft 102 d.

Specifically, the fixing member 103 includes a fixing plate 103a fixed on one side of the sliding seat 102a, a fixing shell 103d fixed on one side of the fixing plate 103a, and a spring 103g disposed in the fixing shell 103d, one side of the fixing plate 103a is fixedly connected with two limiting frames 103b, a placing groove 103c is formed in one side of the limiting frames 103b, the two limiting frames 103b are located on two sides of the fixing shell 103d, and the connecting plate 103k can be fixed through the placing groove 103c formed in the limiting frame 103b, so that a worker can operate through two hands when the conveyor belt 102g needs to be moved.

Specifically, through hole 103e has been seted up to fixed plate 103a, has inserted bar 103f in the through hole 103e sliding connection, and inserted bar 103 f's one end is located inside the fixed shell 103d, and one side fixedly connected with connecting rod 103h of fixed shell 103d, spring 103g are located the outer lane of connecting rod 103h, through inserted bar 103f and jack 101 c's cooperation, can realize the fixed to conveyer belt 102 g.

Specifically, the two ends of the spring 103g are fixed on one side of the inserting rod 103f and the inner wall of the fixing shell 103d respectively, the connecting rod 103h is provided with a groove 103i, the groove 103i is rotationally connected with a pull rod 103j, one end of the pull rod 103j is fixedly connected with a connecting plate 103k, the connecting plate 103k is matched with the placing groove 103c, the inserting rod 103f can be helped to restore to the original position through the spring 103g, and meanwhile, the stability of the inserting rod 103f can be kept when the connecting plate 103k is placed in the placing groove 103 c.

When the conveyer belt 102g is required to move in use, the connecting plate 103k is pulled at the moment, the connecting rod 103h is driven to move by the movement of the connecting plate 103k through the pull rod 103j, so that the inserting rod 103f can be driven to move into the fixed shell 103d, when the inserting rod 103f moves to a proper position, the connecting plate 103k is pulled to exceed the height of the limiting frame 103b, then the connecting plate 103k is rotated, the pull rod 103j rotates in the groove 103i at the moment, when the connecting plate 103k rotates to be flush with the placing groove 103c, when the connecting plate 103k is loosened, the connecting plate 103k can be clamped into the placing groove 103c, at the moment, the sliding seat 102a can be moved to drive the conveying belts 102g to move, the distance between the two conveying belts 102g is adjusted, after the adjustment is completed, the connecting plate 103k is pulled to pull the connecting plate out of the range of the placing groove 103c, then the connecting plate 103k is rotated, when the connecting plate 103k is rotated to an initial position, the connecting plate 103k is loosened, and then the inserting rod 103f can be driven to be inserted into the inserting hole 101c through the action of the spring 103g, so that the fixing of the sliding seat 102a is realized.

Example 3

Referring to fig. 4 to 6, in a third embodiment of the present utility model, which is based on the first two embodiments, the embodiment provides a silicon wafer surface dirt detecting device, which includes a detecting assembly 200, the detecting assembly 200 includes a first detecting member 201 and a second detecting member 202 disposed on one side of the first detecting member 201, the first detecting member 201 and the second detecting member 202 are both matched with the two transporting assemblies 100, and dirt on the silicon wafer surface can be detected through the first detecting member 201 and the second detecting member 202.

Specifically, the first detecting element 201 includes a first mounting frame 201a disposed below the conveyor belt 102g, a first light source 201c mounted on one side of the first mounting frame 201a, and a first line scanning camera 201b disposed right below the first light source 201c, a first through groove 201d is formed in the first light source 201c, the first through groove 201d is adapted to the first line scanning camera 201b, light can be emitted to the surface of the silicon wafer through the first light source 201c, and meanwhile the silicon wafer is scanned through the first through groove 201d through the first line scanning camera 201b, so that dirt on the lower surface of the silicon wafer is detected.

Specifically, the second detecting element 202 includes a second mounting frame 202d disposed on one side of the conveyor belt 102g, a second light source 202a mounted on one side of the second mounting frame 202d, and a second line scanning camera 202c disposed right above the second light source 202a, where the second light source 202a is provided with a second through slot 202b, the second light source 202a is located above the conveyor belt 102g, and the second line scanning camera 202c is adapted to the second through slot 202b, and dirt on the upper surface of the silicon wafer can be detected by the second line scanning camera 202c through the second through slot 202 b.

When the silicon wafer cleaning device is used, when the silicon wafer is transported through the conveyor belt 102g, the lower surface of the silicon wafer is polished through the upper side of the first light source 201c, dirt is conveniently observed through the first light source 201c, the dirt on the lower surface of the silicon wafer is detected through the first through groove 201d by the first line scanning camera 201b, when the silicon wafer moves to the lower side of the second light source 202a, the upper surface of the silicon wafer is polished through the second light source 202a, dirt is conveniently observed through the second light source 202a, and the dirt on the lower surface of the silicon wafer is detected through the second through groove 202b by the second line scanning camera 202 c.

In sum, when detecting the silicon wafer, firstly, adjust the distance between the conveyer belt 102g, pull the connecting plate 103k, the removal of connecting plate 103k can drive connecting rod 103h through pull rod 103j and remove, thereby can drive inserted bar 103f and remove in to fixed shell 103d, when inserted bar 103f removes to suitable position, with connecting plate 103k pulling the height that exceeds spacing 103b, then rotate connecting plate 103k and can rotate in recess 103i this moment, when connecting plate 103k rotates to flush with standing groove 103c, loosen connecting plate 103k, connecting plate 103k can block into standing groove 103c, at this moment just can move sliding seat 102a and drive conveyer belt 102g and remove, realize the regulation to two conveyer belt 102g distance, after the regulation is accomplished, pull connecting plate 103k will its scope of standing groove 103c, then rotate connecting plate 103k, when rotating to the initial position, the time, can drive inserted bar 103f and insert in jack 101c through the effect of spring 103g and realize the fixed motor of sliding seat 102a, after that connecting plate 103k rotates to flush with standing groove 103c, can block 102c, can carry out the first line inspection through the light source and the first side of moving surface of the light source 201c can be carried out to the surface of the second side of the silicon wafer, the light source is carried out on the surface of the first side of the surface of the silicon wafer is convenient, the surface is scanned 201c and can be moved down through the first line is moved down, and the light source is carried out the surface of the first line is moved down to the surface of the silicon wafer is 201c is moved down, and can be convenient to the surface 201b is moved down to the surface of the light source is moved to the surface 201c, and can be the light to the surface is moved to the light source is moved to the light to the surface is 201 b.

It should be noted that the above embodiments are only for illustrating the technical solution of the present utility model and not for limiting the same, and although the present utility model has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the present utility model may be modified or substituted without departing from the spirit and scope of the technical solution of the present utility model, which is intended to be covered in the scope of the claims of the present utility model.

Claims

1. A conveying structure, characterized in that: comprising the steps of (a) a step of,

The conveying assembly (100), the conveying assembly (100) comprises a supporting plate (101), a power piece (102) arranged on the supporting plate (101) and a fixing piece (103) arranged on one side of the power piece (102), and the supporting plate (101), the power piece (102) and the fixing piece (103) are matched for use;

Three vertical plates (102 b) are fixedly connected to one side of the supporting plate (101), a sliding rail (101 a) is fixedly connected between the two vertical plates (102 b), the sliding rail (101 a) is fixed to one side of the supporting plate (101), and a plurality of jacks (101 c) are formed in one side of the supporting plate (101);

The power piece (102) comprises two sliding seats (102 a) sliding on the sliding rail (101 a), a vertical plate (102 b) fixed on one side of the sliding seats (102 a), a motor (102 c) arranged on one side of the fixed frame (101 b), a driving wheel (102 e) and a plurality of auxiliary wheels (102 f), wherein the driving wheel (102 e) rotates on one side of the vertical plate (102 b);

The fixing piece (103) comprises a fixing plate (103 a) fixed on one side of the sliding seat (102 a), a fixing shell (103 d) fixed on one side of the fixing plate (103 a) and springs (103 g) arranged in the fixing shell (103 d), two limiting frames (103 b) are fixedly connected to one side of the fixing plate (103 a), a placing groove (103 c) is formed in one side of each limiting frame (103 b), and the two limiting frames (103 b) are located on two sides of the fixing shell (103 d).

2. The transport structure of claim 1, wherein: the output end of the motor (102 c) is fixedly connected with a rotating shaft (102 d), one end of the rotating shaft (102 d) is rotatably connected to one side of the fixing frame (101 b), two driving wheels (102 e) are movably sleeved on the outer ring of the rotating shaft (102 d), a conveying belt (102 g) is arranged on the rotating shaft (102 d), and the conveying belt (102 g) is matched with the auxiliary wheel (102 f).

3. The transport structure of claim 2, wherein: through-hole (103 e) has been seted up to fixed plate (103 a), sliding connection has inserted bar (103 f) in through-hole (103 e), the one end of inserted bar (103 f) is located inside fixed shell (103 d), one side fixedly connected with connecting rod (103 h) of fixed shell (103 d), spring (103 g) are located the outer lane of connecting rod (103 h).

4. A delivery structure as claimed in claim 3, wherein: the two ends of the spring (103 g) are respectively fixed on one side of the inserted link (103 f) and the inner wall of the fixed shell (103 d), the connecting rod (103 h) is provided with a groove (103 i), the groove (103 i) is rotationally connected with a pull rod (103 j), one end of the pull rod (103 j) is fixedly connected with a connecting plate (103 k), and the connecting plate (103 k) is matched with the placing groove (103 c).

5. A silicon chip surface dirt detection device which is characterized in that: comprising a conveying structure according to any one of claims 1 to 4; and

The detection assembly (200) comprises a first detection piece (201) and a second detection piece (202) arranged on one side of the first detection piece (201), and the first detection piece (201) and the second detection piece (202) are matched with the two transport assemblies (100);

The first detection piece (201) comprises a first mounting frame (201 a) arranged below the conveyor belt (102 g), a first light source (201 c) arranged on one side of the first mounting frame (201 a) and a first line scanning camera (201 b) arranged right below the first light source (201 c), wherein a first through groove (201 d) is formed in the first light source (201 c), and the first through groove (201 d) is matched with the first line scanning camera (201 b);

the second detection piece (202) comprises a second installation frame (202 d) arranged on one side of the conveyor belt (102 g), a second light source (202 a) arranged on one side of the second installation frame (202 d) and a second line scanning camera (202 c) arranged right above the second light source (202 a), a second through groove (202 b) is formed in the second light source (202 a), the second light source (202 a) is located above the conveyor belt (102 g), and the second line scanning camera (202 c) is matched with the second through groove (202 b).