CN217058838U - Multi-axis integrated micro-electro-mechanical system inertia device testing device and system - Google Patents
Multi-axis integrated micro-electro-mechanical system inertia device testing device and system Download PDFInfo
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Abstract
The utility model provides a multiaxis integrated micro-electromechanical system inertia device testing arrangement and system, wherein, multiaxis integrated micro-electromechanical system inertia device testing arrangement includes: a magnetic field generator controlled to generate a magnetic field H in a predetermined space; the two-axis rotary table is placed in the preset space and comprises a rotary table, a first rotary shaft and a second rotary shaft, wherein the rotary table is fixed at one end of the first rotary shaft, the second rotary shaft is orthogonal to the first rotary shaft, and the first rotary shaft drives the rotary table to synchronously rotate when controlled to rotate; when the second rotating shaft is controlled to rotate, the first rotating shaft and the rotating disc are driven to synchronously and circumferentially move by taking the second rotating shaft as a central shaft. Compared with the prior art, the utility model discloses can realize that multiaxis (for example nine) integrate MEMS inertial device's high-efficient reliable volume production is tested.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a test technical field of micro-electromechanical system device especially relates to a multiaxis integrated micro-electromechanical system inertia device testing arrangement and system.
[ background of the invention ]
The MEMS device refers to a high-tech electromechanical device having a Micro-Electro-Mechanical System (MEMS) and a size of only a few millimeters or less, and the processing technology thereof combines lithography, etching, thin film, LIGA, silicon micromachining, non-silicon micromachining, and precision machining technologies. At present, the application field of the MEMS device is quite wide, and common products such as MEMS accelerometer, MEMS microphone, MEMS optical sensor, MEMS pressure sensor, MEMS gyroscope, MEMS humidity sensor, MEMS gas sensor, MEMS infrared thermopile sensor. For an IMU (inertial measurement unit) of an MEMS, along with the improvement of the integration level of a module of an intelligent micro-electromechanical device, there exist some highly integrated IMU products, such as a three-axis accelerometer, a six-axis gyroscope (integration of a three-axis accelerometer and a three-axis gyroscope), and even a three-axis magnetic sensor, a three-axis gyroscope, and a three-axis accelerometer are integrated together to form a nine-axis inertial measurement unit, which is integrally packaged in an MEMS frame. When the conventional test system is used for testing a nine-axis inertial measurement unit, internal functional units (a magnetic functional unit, an acceleration functional unit and a gyroscope functional unit) can be tested respectively only by stages and modules and by adopting different devices, and the test system and the test method have the defects of long test time, high equipment cost, complex operation, low test efficiency and the like, and cannot be efficiently and reliably applied to mass production test of multi-axis integrated MEMS inertial device (such as a nine-axis IMU) product.
Therefore, a new technical solution is needed to solve the above problems.
[ Utility model ] A method for manufacturing a semiconductor device
An object of the utility model is to provide a multiaxis integrated MEMS inertial device testing arrangement and system, it can realize the high-efficient reliable volume production test of multiaxis (for example nine) integrated MEMS inertial device.
According to the utility model discloses an aspect, the utility model provides a multiaxis integrated micro-electromechanical system inertia device testing arrangement, it includes: a magnetic field generator controlled to generate a magnetic field H in a predetermined space; the two-axis rotary table is placed in the preset space and comprises a rotary table, a first rotary shaft and a second rotary shaft, wherein the rotary table is fixed at one end of the first rotary shaft, the second rotary shaft is orthogonal to the first rotary shaft, and the first rotary shaft is controlled to rotate so as to drive the rotary table to synchronously rotate; when the second rotating shaft is controlled to rotate, the first rotating shaft and the rotating disc are driven to synchronously and circumferentially move by taking the second rotating shaft as a central shaft.
According to another aspect of the present invention, the present invention provides a system for testing a multi-axis integrated mems inertial device, comprising a test board and a device for testing a multi-axis integrated mems inertial device, wherein the test board is fixed on the turntable, and the surface of the test board is perpendicular to the first axis of rotation; the test board is used for placing a plurality of inertia devices to be tested. Wherein, multiaxis integrated MEMS inertial device testing arrangement includes: a magnetic field generator controlled to generate a magnetic field H in a predetermined space; the two-axis rotary table is placed in the preset space and comprises a rotary table, a first rotary shaft and a second rotary shaft, wherein the rotary table is fixed at one end of the first rotary shaft, the second rotary shaft is orthogonal to the first rotary shaft, and the first rotary shaft is controlled to rotate so as to drive the rotary table to synchronously rotate; when the second rotating shaft is controlled to rotate, the first rotating shaft and the rotating disc are driven to synchronously and circumferentially move by taking the second rotating shaft as a central shaft.
Compared with the prior art, the utility model discloses can accomplish the high-efficient volume production test of the IMU (inertia measurement device) of reaching 9 axles with one set of device, and can be downward compatible, accomplish the magnetic sensor product of single function, single function gyroscope, the test of single function accelerometer product, and also can be according to the integrated complexity of product, accomplish the multiaxis, the combination test of multi-functional integrated MEMS inertia device, based on this volume production testing arrangement's test system framework, test time is shorter, equipment cost is lower, therefore, the high applicability, can be applied to the volume production test of the integrated MEMS inertia device of multiaxis high-efficiently reliably.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive labor. Wherein:
fig. 1 is a schematic structural diagram of a multi-axis integrated mems inertial device testing apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of the test board 2 shown in fig. 1 according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of one embodiment of the multi-axis integrated MEMS inertial device testing apparatus shown in FIG. 1;
FIG. 4 is a schematic diagram of another embodiment of the testing apparatus for testing inertia components of a multi-axis integrated micro-electro-mechanical system shown in FIG. 1;
FIG. 5 is a schematic diagram of another embodiment of the multi-axis integrated MEMS inertial device testing apparatus shown in FIG. 1;
FIG. 6 is a schematic diagram of another embodiment of the testing apparatus for testing inertia components of the multi-axis integrated micro-electro-mechanical system shown in FIG. 1;
FIG. 7 is a schematic diagram of another embodiment of the multi-axis integrated MEMS inertial device testing apparatus shown in FIG. 1;
FIG. 8 is a schematic diagram of another embodiment of the testing apparatus for testing inertia components of the multi-axis integrated micro-electro-mechanical system shown in FIG. 1;
fig. 9 is a functional block diagram of a multi-axis integrated mems inertial device testing system in one embodiment of the invention.
[ detailed description ] embodiments
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with at least one implementation of the invention is included. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected herein mean electrically connected, directly or indirectly.
In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the invention. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," "coupled," and the like are to be construed broadly; for example, the connection can be fixed, detachable or integrated; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be in communication within two elements or in interactive relationship between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
According to an aspect of the utility model, the utility model provides a multiaxis integrated micro-electromechanical system inertia device testing arrangement.
Please refer to fig. 1, which is a schematic structural diagram of a testing apparatus for a multi-axis integrated mems inertia device according to an embodiment of the present invention. The multi-axis integrated mems inertial device testing apparatus shown in fig. 1 includes a two-axis turntable 11 and a magnetic field generator 12. Wherein the magnetic field generator 12 is controlled to generate a magnetic field H in a predetermined space. The two-axis turntable 11 is placed in the predetermined space, the two-axis turntable 11 includes a turntable 111, a first rotating shaft 112 and a second rotating shaft 113, wherein the turntable 111 is fixed at one end of the first rotating shaft 112, the second rotating shaft 113 is orthogonal (or perpendicular) to the first rotating shaft 112, the first rotating shaft 112 and the second rotating shaft 113 are controlled to rotate, and the first rotating shaft 112 drives the turntable 111 to rotate synchronously when rotating; when the second rotating shaft 113 rotates, the first rotating shaft 112 and the rotating disc 111 are driven to synchronously and circumferentially move by taking the second rotating shaft 113 as a central axis.
In the embodiment shown in fig. 1, the magnetic field generator 12 comprises a pair of uniaxial coils 121, the pair of uniaxial coils 121 are oppositely and parallelly arranged, and the pair of uniaxial coils 121 is controlled to generate the magnetic field H in the space between the pair of uniaxial coils 121, namely, the space between the pair of uniaxial coils 121 is the predetermined space.
The two-axis turntable 11 is located between the pair of single-axis coils 121.
According to another aspect of the utility model, the utility model provides a multiaxis integrated micro-electromechanical system inertia device test system.
Fig. 9 is a functional block diagram of a multi-axis integrated mems inertial device testing system according to an embodiment of the present invention. The multi-axis integrated Micro-Electro-Mechanical System (MEMS) inertial device testing System shown in fig. 9 includes a multi-axis integrated MEMS (Micro-Electro-Mechanical System) inertial device testing apparatus 1, a testing board 2 and an upper computer 4 as shown in fig. 1.
The test board 2 is detachably fixed on the turntable 111, and the surface of the test board 2 is perpendicular to the first rotating shaft 112 (see fig. 1 in particular). The test board 2 is used for placing an inertial device 21 to be tested.
The upper computer 4 is in communication connection with the two-axis rotary table 11 and the magnetic field generator 12 so as to control the first rotating shaft 112, the second rotating shaft 113 and the magnetic field generator 12 to act in sequence; the upper computer 4 is further in communication connection with the test board 2, and when the first rotating shaft 112, the second rotating shaft 113 and the magnetic field generator 12 are controlled to perform ordered actions, the upper computer 4 further reads the measured data of the inertia devices 21 to be tested on the test board 2 in real time; the upper computer 4 analyzes and processes the measured data of the inertia device 21 to be tested, so as to judge the yield of each inertia device 21 to be tested.
It should be noted that, the inertia device 21 to be measured in the present invention is integrated with a three-axis magnetic sensor and/or a three-axis gyroscope and/or a three-axis accelerometer; the measured data of the inertia device 21 to be measured includes measured magnetic field data of the three-axis magnetic sensor in the XYZ axis direction and/or measured angular velocity data of the three-axis gyroscope in the XYZ axis direction and/or measured acceleration data of the three-axis accelerometer in the XYZ axis direction.
In subsequent embodiments, the utility model provides an inertia device 21 that awaits measuring is implemented on the basis of nine inertia devices (promptly integrate simultaneously and have 3 gyroscopes, 3 accelerometers and 3 MEMS devices of magnetic sensor), but the utility model provides a inertia device 21 that awaits measuring can cover the volume production test of arbitrary one or more triaxial products more than arbitrary, has wider suitability, does not give unnecessary details here.
The following concrete introduction utilizes the utility model provides a multiaxis integrated MEMS inertia device testing arrangement carries out the test method of volume production test.
To better illustrate the working process of the multi-axis integrated mems inertial device testing apparatus provided in the present invention, a reference coordinate system may be established on the testing board 2, in the embodiment shown in fig. 1 and 3-8, the X axis and the Y axis are perpendicular to each other and define the plane where the testing board 2 fixed on the turntable 111 is located, and the Z axis is perpendicular to the plane defined by the X axis and the Y axis, wherein the orientations of the X axis, the Y axis and the Z axis relative to the testing board 2 are not changed; the direction of the magnetic field H generated by the magnetic field generator 12 in a predetermined space is along the horizontal direction; the directions of the three-axis magnetic sensor, the three-axis gyroscope and the three-axis accelerometer in the inertial device 21 to be measured are the directions of the reference coordinate system.
Step 1: loading a plurality of inertia devices 21 to be tested in a test board 2, fixing the test board 2 on the surface of a turntable 111, wherein the upper computer 4 controls a first rotating shaft 112 and/or a second rotating shaft 113 to rotate so that the test board 2 fixed on the turntable 111 is located at a first position and points to a first direction (refer to fig. 1, a reference coordinate system at a position a is obtained), and the upper computer 4 sets a magnetic field H generated by the magnetic field generator 12 in a predetermined space to be 0Gauss (Gauss), at the moment, the upper computer 4 communicates with the test board 2 so as to read an actually measured acceleration ACCZ in a Z-axis negative direction of an accelerometer in the inertia devices 21 to be tested -1g And g is the gravitational acceleration. When testing board 2 is located the first position and points to first position, first pivot 112 is vertical to be placed, test board 2 level is placed, test board 2 is located directly over first pivot 112, and the positive direction of Z axle is vertical upwards, and the positive direction of Y axle is unanimous with magnetic field H's positive direction. Step1 is that when the upper computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the positive direction of the Z axis of the test board 2 fixed on the turntable 111 is vertical upward, and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is set to be 0Gauss, the upper computer 4 communicates with the test board 2 to read the actually measured acceleration ACCZ in the negative direction of the Z axis of the accelerometer in the inertial device 21 to be tested - 。
Step 2: in fig. 1 (that is, the test board 2 is located at the first position and points to the first direction), and on the basis that the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0Guass, the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be positive 1Gauss (or a predetermined magnetic field value in the forward direction), at this time, the upper computer 4 communicates with the test board 2 to read the Y-axis forward direction measured magnetic field value Mag of the magnetic sensor in the inertial device 21 to be tested Y+1G (ii) a Then, the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be negative 1Gauss (or a negative predetermined magnetic field value), at this time, the upper computer 4 communicates with the test board 2 to read the negative actually-measured magnetic field value Mag of the Y-axis of the magnetic sensor in the inertia device 21 to be measured Y-1G (ii) a The upper computer 4 is based on the positive actual measurement magnetic field value Mag of Y axle Y+1G And negative Y-axis actually measured magnetic field value Mag Y-1G And calculating the sensitivity of the magnetic sensor in the Y-axis direction in the inertia device 21 to be tested, and then resetting the magnetic field H generated by the magnetic field generator 12 in a preset space to be 0 Guass. Step2 is that when the upper computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the Y-axis direction on the test board 2 is parallel to the direction of the magnetic field H generated by the magnetic field generator 12 in the predetermined space, and the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be a positive or negative predetermined magnetic field value, the upper computer 4 communicates with the test board 2 to read the Y-axis positive measured magnetic field value Mag of the magnetic sensor in the inertial device 21 to be tested Y+ Or negative Y-axis actually measured magnetic field value Mag Y- ；
Step3, on the basis that the test board 2 is located at the first position and points to the first direction in fig. 1 and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0Guass, the upper computer 4 controls the first rotating shaft 112 of the two-axis turntable 11 to move circumferentially, so that the turntable 111 rotates 90 degrees counterclockwise, so that the test board 2 moves from the first position and points to the first direction to the first position and points to the second direction (refer to fig. 3, a reference coordinate system at B is obtained), and the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be positive 1Gauss (or a predetermined magnetic field value in the positive direction), at this time, the upper computer 4 communicates with the test board 2 to read the actually measured magnetic field value Mag in the positive direction of the X axis of the magnetic sensor in the inertial device 21 to be measured X+1G (ii) a Then, the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in a predetermined space to be negative 1Gauss (or a negative predetermined magnetic field value), and at this time, the upper computer 4 communicates with the test board 2 to read the negative actually measured magnetic field value Mag of the X-axis of the magnetic sensor in the inertial device 21 to be tested X-1G (ii) a The upper computer 4 is based on the positive actually measured magnetic field value Mag of the X axis X+1G And negative direction measured magnetic field value Mag of X axis X-1G The sensitivity of the magnetic sensor in the X-axis direction in the inertial device 21 to be measured is calculated, and then the magnetic field H generated by the magnetic field generator 12 in a predetermined space is reset to 0 Guass. Wherein the test board 2 is located at the second positionWhen a position and pointing to the second position, first pivot 112 is vertical to be placed, survey test panel 2 level and place, survey test panel 2 and be located directly over first pivot 112, and the positive direction of Z axle is vertical upwards, and the positive direction of X axle is unanimous with magnetic field H's positive direction. The essence of Step3 is: when the upper computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so as to enable the direction of the X axis on the test board 2 to be parallel to the direction of the magnetic field H generated by the magnetic field generator 12 in the predetermined space, and the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be a positive or negative predetermined magnetic field value, the upper computer 4 communicates with the test board 2 so as to read the positive actually measured magnetic field value Mag of the X axis of the magnetic sensor in the inertial device to be tested X+ Or the measured magnetic field value Mag of the negative X-axis X- 。
Step4, on the basis that fig. 3 (i.e. the test board 2 is located at the first position and points to the second direction) and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0Guass, the upper computer 4 controls the first rotating shaft 112 to rotate clockwise by 360 °, the rotating disc 111 rotates clockwise by 360 ° at the set angular velocity ω (e.g. 100 °/s), and at this time, the upper computer 4 communicates with the test board 2 to read the Z-axis positive actual measurement angular velocity GyroZ of the gyroscope in the inertial device 21 to be measured +100°/S (ii) a Then, the upper computer 4 controls the first rotating shaft 112 to rotate 360 ° counterclockwise, the rotating disc 111 rotates 360 ° counterclockwise at a set angular velocity ω (e.g., 100 °/s), and at this time, the upper computer 4 communicates with the test board 2 to read the Z-axis negative actual measurement angular velocity GyroZ of the gyroscope in the inertial device 21 to be tested -100°/S (ii) a The upper computer 4 is used for measuring the angular velocity GyroZ in the positive direction on the basis of the Z axis +100°/S And-axial negative direction actually measured angular velocity GyroZ -100°/S And calculating the Z-axis sensitivity of the gyroscope in the inertial device 21 to be tested. The essence of Step4 is: when the upper computer 4 rotates by controlling the first rotating shaft 112 and/or the second rotating shaft 113 to enable the Z axis on the test board 2 to be along the vertical direction, the upper computer 4 controls the magnetic field H generated by the magnetic field generator 12 in the preset space to be 0Guass, and the upper computer 4 controls the first rotating shaft 112 to rotate clockwise or anticlockwise at the set angular speed omega, the upper computer 4 and the test boardThe board 2 communicates to read the forward actual measurement angular velocity GyroZ of the Z axis of the gyroscope in the inertia device 21 to be measured +ω Or Z-axis negative direction actual measurement angular velocity GyroZ -ω 。
Step 5: in fig. 3 (that is, the test board 2 is located at the first position and points to the second direction), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0Guass, the upper computer 4 controls the second rotating shaft 113 to rotate 90 ° counterclockwise, so that the test board 2 moves from the first position and points to the second position and points to the third direction (refer to fig. 4, and a reference coordinate system C is obtained), at this time, the upper computer 4 communicates with the test board 2 to read the actually measured acceleration ACCX in the X-axis negative direction of the accelerometer in the inertia device 21 to be measured -1g g and g are gravity acceleration. Wherein, when surveying test panel 2 and being located the second position and pointing to the third position, first pivot 112 level is placed, survey test panel 2 and vertically placing, survey test panel 2 and be located first pivot 112's left side, and the positive direction of X axle is vertical upwards, and the positive direction of Z axle is unanimous with magnetic field H's minus direction. Step5 is essentially, works as the host computer 4 rotates so that to be fixed in through controlling first pivot 112 and/or second pivot 113 the X axle positive direction of the test board 2 on the carousel 111 is vertical upwards, just the host computer sets up when the magnetic field H that magnetic field generator 12 produced in predetermined space is 0Gauss, host computer 4 and test board 2 communication are in order to read the actual measurement acceleration ACCX of the X axle negative direction of the accelerometer in the inertia device 21 that awaits measuring - 。
Step 6: in fig. 4 (that is, the test board 2 is located at the second position and points to the third direction), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0Guass, the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be a positive 1Gauss (or a positive predetermined magnetic field value), at this time, the upper computer 4 communicates with the test board 2 to read the Z-axis negative actually-measured magnetic field value Mag of the magnetic sensor in the inertia device 21 to be tested Z-1G (ii) a Then, the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in a predetermined space to be negative 1Gauss (or a negative predetermined magnetic field value), and at this time, the upper computer 4 communicates with the test board 2 to readThe Z-axis positive actual measurement magnetic field value Mag of the magnetic sensor in the inertial device 21 to be measured Z+1G (ii) a The upper computer 4 actually measures the magnetic field value Mag based on the Z axis negative direction Z-1G And the positive actual measurement magnetic field value Mag of the Z axis Z+1G And calculating the sensitivity of the magnetic sensor in the Z-axis direction in the inertia device 21 to be tested, and then resetting the magnetic field H generated by the magnetic field generator 12 in a predetermined space to be 0 Guass. The essence of Step6 is: when the upper computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so as to enable the Z-axis direction on the test board 2 to be parallel to the direction of the magnetic field H generated by the magnetic field generator 12 in the predetermined space, and the upper computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be a positive or negative predetermined magnetic field value, the upper computer 4 communicates with the test board 2 to read the negative actually-measured Z-axis magnetic field value Mag of the magnetic sensor in the inertia device 21 to be tested Z- /or the measured magnetic field value Mag of the Z-axis positive direction Z+ 。
Step 7: in fig. 4 (i.e. the test board 2 is located at the second position and points to the third direction), and the magnetic field generator 12 generates a magnetic field H of 0Guass in the predetermined space, the upper computer 4 controls the first rotating shaft 112 to rotate 90 ° counterclockwise, so that the test board 2 moves from the second position and points to the third direction (refer to fig. 4, obtaining the reference coordinate system at C) to the second position and points to the fourth direction (refer to fig. 5, obtaining the reference coordinate system at D), at this time, the upper computer 4 communicates with the test board 2 to read the actually measured acceleration ACCY in the positive direction of the Y axis of the accelerometer in the inertia device under test 21 +1g And g is the gravitational acceleration. Wherein, when surveying test panel 2 and being located the second position and pointing to the fourth position, first pivot 112 level is placed, survey test panel 2 and vertically placing, survey test panel 2 and be located first pivot 112's left side, and the positive direction of Y axle is vertical downwards, and the positive direction of Z axle is unanimous with magnetic field H's minus direction. The essence of the method is that the host computer 4 rotates to fix the upper computer 4 through controlling the first rotating shaft 112 and/or the second rotating shaft 113, the positive direction of the Y axis of the test board 2 on the rotating disc 111 is downward and vertical, and the magnetic field generator 12 generates in the predetermined space when the magnetic field H is 0Gauss, the host computer 4 communicates with the test board 2 to read the magnetic field H to be testedActually measured acceleration ACCY of positive Y-axis direction of accelerometer in inertial device 21 + 。
In fig. 5 (i.e. the test board 2 is located at the second position and points to the fourth direction), and the magnetic field generator 12 generates the magnetic field H of 0Guass in the predetermined space, the upper computer 4 controls the first rotating shaft 112 to rotate 90 ° counterclockwise, so that the test board 2 moves from the second position and points to the fourth position (refer to fig. 5, obtaining the reference coordinate system at D) to the second position and points to the fifth direction (refer to fig. 6, obtaining the reference coordinate system at E), at this time, the upper computer 4 communicates with the test board 2 to read the actually measured acceleration ACCX X in the positive direction of the accelerometer in the inertial device under test 21 +1g And g is the gravitational acceleration. When testing board 2 and being located the second position and pointing to the fifth position, first pivot 112 level is placed, test board 2 is vertical to be placed, test board 2 is located first pivot 112's left side, and the positive direction of X axle is vertical downwards, and the positive direction of Z axle is unanimous with magnetic field H's negative direction. Its essence is, works as host computer 4 rotates so that to make through controlling first pivot 112 and/or second pivot 113 and is fixed in the X axle positive direction vertical downwards of survey test panel 2 on carousel 111, and sets for when the magnetic field H that magnetic field generator 12 produced in predetermined space is 0Gauss, host computer 4 and survey test panel 2 communication are in order to read the actual measurement acceleration ACCX in the X axle positive direction of the interior accelerometer of inertia device 21 that awaits measuring + 。
In fig. 6 (i.e. the test board 2 is located at the second position and points to the fifth direction), and the magnetic field generator 12 generates the magnetic field H of 0Guass in the predetermined space, the upper computer 4 controls the first rotating shaft 112 to rotate 90 ° counterclockwise, so that the test board 2 moves from the second position and points to the fifth direction (refer to fig. 6, obtaining the reference coordinate system at E) to the second position and points to the sixth direction (refer to fig. 7, obtaining the reference coordinate system at F), at this time, the upper computer 4 communicates with the test board 2 to read the actually measured acceleration ACCY in the negative direction of the Y axis of the accelerometer in the inertial device 21 to be measured -1g And g is the gravitational acceleration. Wherein, when the test board 2 is located at the second position and points to the sixth orientation, the first rotating shaft 112The level is placed, survey test panel 2 and vertically place, survey test panel 2 and be located first pivot 112's left side, and the positive direction of Y axle is vertical upwards, and the positive direction of Z axle is unanimous with magnetic field H's minus direction. The essence of the method is that the host computer 4 rotates to fix the upper computer 4 through controlling the first rotating shaft 112 and/or the second rotating shaft 113 to make the upper computer on the rotating disc 111 vertically upward in the positive direction of the Y axis of the test board 2 and set the magnetic field generator 12 generates in the predetermined space when the magnetic field H is 0Gauss, the host computer 4 communicates with the test board 2 to read the actually measured acceleration ACCY axis of the accelerometer in the inertia device 21 to be tested - 。
Step 8: in fig. 7 (that is, the test board 2 is located at the second position and points to the sixth direction), and the magnetic field generator 12 generates the magnetic field H of 0Guass in the predetermined space, the upper computer 4 controls the second rotating shaft 113 to rotate clockwise by 360 ° at the set angular velocity ω (for example, 100 °/s), and at this time, the upper computer 4 communicates with the test board 2 to read the actual measurement angular velocity GyroX X in the positive direction of the X axis of the gyroscope in the inertial device 21 to be measured +100°/S (ii) a Then, the upper computer 4 controls the second rotating shaft 113 to rotate 360 ° counterclockwise at a set angular velocity ω (e.g., 100 °/s), and at this time, the upper computer 4 communicates with the test board 2 to read the negative actual measurement angular velocity GyroX of the X-axis negative actual measurement angular velocity GyroX of the gyroscope in the inertial device 21 to be measured -100°/S (ii) a The upper computer 4 actually measures the angular velocity GyroX based on the X axis positive direction +100°/S And negative direction actual measurement angular velocity GyroX of X axis -100°/S And calculating the X-axis sensitivity of the gyroscope in the inertial device 21 to be tested. The essence of Step8 is: when the upper computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so as to enable the X axis on the test board 2 fixed on the turntable 111 to be parallel to the second rotating shaft 113, the upper computer 4 controls the magnetic field H generated by the magnetic field generator 12 in a predetermined space to be 0Guass, and the upper computer 4 controls the second rotating shaft 113 to rotate clockwise or counterclockwise at a set angular velocity ω, the upper computer 4 communicates with the test board 2 so as to read the actual measurement angular velocity GyroX X of the gyroscope in the inertial device to be measured in the forward direction of the X axis of the gyroscope +ω Or negative direction actual measurement angular velocity GyroX of X axis -ω ；
Step 9: in FIG. 7 (i.e.The test board 2 is located at the second position and points to the sixth direction), and the magnetic field generator 12 generates a magnetic field H of 0Guass in a predetermined space, the upper computer 4 controls the first rotating shaft 112 to rotate 90 ° counterclockwise, so that the test board 2 moves from the second position and points to the sixth direction (see fig. 7, obtaining a reference coordinate system at F) to the second position and points to the seventh direction (see fig. 8, obtaining a reference coordinate system at G), the upper computer 4 controls the second rotating shaft 113 to rotate 360 ° clockwise at a set angular velocity ω (e.g. 100 °/s), and at this time, the upper computer 4 communicates with the test board 2 to read a measured angular velocity GyroY Y measured in the Y-axis forward direction of the gyroscope in the inertial device 21 to be measured +100°/S (ii) a Then, the upper computer 4 controls the second rotating shaft 113 to rotate counterclockwise by 360 ° at a set angular velocity ω (e.g., 100 °/s), and at this time, the upper computer 4 communicates with the test board 2 to read a negative actually-measured angular velocity GyroY of a gyroscope in the inertial device 21 to be measured on the test board 2 -100°/S (ii) a The upper computer 4 actually measures the angular velocity GyroY based on the Y axis positive direction +100°/S And Y-axis negative direction actually measured angular velocity GyroY -100°/S And calculating the Y-axis sensitivity of the gyroscope in the inertial device 21 to be tested. When the test board 2 is located at the second position and points to the seventh position, the first rotating shaft 112 is horizontally placed, the test board 2 is vertically placed, the test board 2 is located on the left side of the first rotating shaft 112, the positive direction of the X axis is vertically upward, and the positive direction of the Z axis is consistent with the negative direction of the magnetic field H. The essence of Step9 is: when the upper computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so as to enable the Y axis on the test board 2 to be parallel to the second rotating shaft 113, the upper computer 4 controls the magnetic field H generated by the magnetic field generator 12 in a preset space to be 0Guass, and the test board 2 controls the second rotating shaft 113 to rotate clockwise or anticlockwise at a set angular velocity omega, the upper computer 4 communicates with the test board 2 so as to read the forward actual measurement angular velocity Gyro Y of the Y axis of the gyroscope in the inertial device to be tested on the test board 2 +ω Or negative Y-axis actually measured angular velocity GyroY -ω 。
Step 10: at G of FIG. 8 (i.e., the test plate 2 is at the second position and points to the seventh orientation), and the magnetic field generator12 on the basis that the magnetic field H generated in the predetermined space is 0Guass, the upper computer 4 controls the second rotating shaft 113 to rotate 90 degrees counterclockwise, so that the test board 2 moves from the second position and points to the seventh position (refer to fig. 8, a reference coordinate system at the position G is obtained) to the third position and points to the eighth position (refer to fig. 8, a reference coordinate system at the position H is obtained), at this time, the upper computer 4 communicates with the test board 2 to read the actually measured acceleration ACCZ in the positive direction of the Z axis of the accelerometer in the inertia device 21 to be measured +1g And g is the acceleration of gravity. Wherein, when surveying test panel 2 and being located the third position and pointing to the eighth position, first pivot 112 is vertical to be placed, survey test panel 2 level and place, survey test panel 2 and be located under first pivot 112, and the positive direction of Z axle is vertical downwards, and the positive direction of X axle is unanimous with magnetic field H's minus direction. Step10 is that when the upper computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so as to make the positive direction of the Z axis fixed on the test board 2 vertically downward and set the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be 0Gauss, the upper computer 4 communicates with the test board 2 to read the actually measured acceleration ACCZ in the positive direction of the Z axis of the accelerometer in the inertia device 21 to be measured + 。
The actually measured magnetic field data MagX-1G, MagY-1G, MagZ-1G, MagX of the triaxial magnetic sensor in the inertial device 21 to be measured in the XYZ axial direction is obtained from the Step1-Step10 +1G 、MagY +1G 、MagZ +1G (ii) a Actual measurement angular velocity data, GyroX, of three-axis gyroscope in XYZ-axis direction +100°/s GyroY +100°/s 、GyroZ +100°/s GyroX -100°/s 、GyroY -100°/s GyroZ -100°/s (ii) a Actually measured acceleration data ACCX of three-axis accelerometer in XYZ axis direction -1g 、ACCY -1g 、ACCZ -1g 、ACCX +1g 、ACCY +1g And ACCZ +1g (ii) a Key indexes of each inertia device to be tested, such as Sensitivity, can be obtained through calculation to judge the yield of mass production.
The magnetic sensor X \ Y \ Z sensitivity calculation mode is as follows: sen _ MagX \ Y \ Z ═ e (MagX \ Y \ Z) +1G -MagX\Y\Z -1G ) 2; gyroscope X \ Y \ Z sensitivity calculationThe method comprises the following steps: sen _ GyroX \ Y \ Z ═ g (GyroX \ Y \ Z) +100°/s -GyroX\Y\Z -100°/s ) 200; the X \ Y \ Z sensitivity calculation mode of the accelerometer is as follows: sen _ ACCX \ Y \ Z ═ or (ACCX \ Y \ Z) +1g -ACCX\Y\Z -1g )/2。
Please refer to fig. 2, which is a schematic structural diagram of the test board 2 shown in fig. 1 according to an embodiment of the present invention.
Wherein, the inertia device 21 that awaits measuring can be through the welded mode welding on the reservation position of surveying test panel 2, in the embodiment that fig. 2 shows, is provided with fixed socket on surveying test panel 2, has a plurality of position in the socket, and the inertia device 21 that awaits measuring places in the position to conveniently adorn and get a plurality of inertia device 21 that awaits measuring, improve test system's multiplexibility and efficiency. That is to say, the socket is disposed on the test board 2, the socket is used for detachably plugging the inertia device 21 to be tested, and when the inertia device 21 to be tested is plugged into the socket, the inertia device 21 to be tested and the test board 2 are electrically connected. The state in which the device under test 21 is placed in the socket is not shown in fig. 2, but is understood by those skilled in the art and will not be described here.
After the group of inertia devices 21 to be tested is measured, the inertia devices 21 to be tested on the test board 2 (the socket has a plurality of parts, the inertia devices 21 to be tested are placed in the parts, and a communication connection can be established between the test board 2 and an external controller (for example, an upper computer 4)) are picked up, a new inertia device 21 to be tested is replaced, and a new round of test is performed. In the embodiment of the present invention, preferably, referring to fig. 2, a reference inertia device 22 is disposed at the center of the test board 2, and is preferably welded at the center of the surface of the test board 2.
The test board 2 is reserved with a communication interface for communicating with an external controller (for example, the upper computer 4), and the communication interface includes a communication interface of the reference inertial device 22 and a communication interface of the to-be-tested inertial device 21. The reference inertia device 22 is not generally replaced in the mass production test, and in the test process, the signal (or the measured data) of the reference inertia device 22 and the signal (or the measured data) of the inertia device 21 to be tested are transmitted to the external controller (for example, the upper computer 4) in real time together, so that angular velocity reference during rotation is provided for the inertia device 21 to be tested (if working condition fluctuation occurs, the stable interval data of the measured data of the inertia device 21 to be tested can be extracted according to the curve characteristics of the reference inertia device 22 on the test board 2 to calculate the sensitivity parameters), thereby improving the accuracy during the calculation of the angular velocity sensitivity and improving the reliability of the test result.
Referring to fig. 9, the System for testing a multi-axis integrated Micro-Electro-Mechanical System (MEMS) inertial device shown in fig. 9 includes a testing apparatus 1 for testing a multi-axis integrated MEMS (Micro-Electro-Mechanical System) inertial device, a testing board 2 and a host computer 4, and further includes a sample wafer 3 to be tested and a good carrier tape 5.
In the system, a plurality of inertia devices 21 to be tested are picked up from a sample wafer 3 to be tested by an intelligent device such as a manual or mechanical arm and are loaded into a test board 2, the test board 2 can be fixed on the surface of a turntable 111 (refer to fig. 1-8) of a multi-axis integrated MEMS inertia device measuring device 1 in a manual or automatic mechanical arm manner, the test board 2 is in communication connection with an upper computer 4, the upper computer 4 is in communication connection with the multi-axis integrated MEMS inertia device measuring device 1, and the upper computer 4 controls a first rotating shaft 112, a second rotating shaft 113 and a single-axis coil 121 of the multi-axis integrated MEMS inertia device measuring device 1 to continuously and orderly act (refer to step1 to step10 in the action process), the acquisition of three-axis magnetic sensing data and/or three-axis gyroscope data and/or three-axis acceleration data can be realized, the high-efficiency mass production test of the nine-axis integrated inertia device 21 to be tested (3-axis magnetic sensor + 3-axis gyroscope + 3-axis accelerometer) can be realized at the highest, the upper computer 4 controls the two-axis turntable 11 and the single-axis coil 121 to act simultaneously, also communicates with the test board 2 in real time, receives the measured data of a plurality of inertia devices 21 to be tested, and the yield of the inertia device 21 under test is obtained based on the data analysis process (including but not limited to calculating the sensitivity index) received in real time, the position of the good product in the test board 2 is displayed in a visual PASS or Fail way, so that the good product can be conveniently picked out manually, or the upper computer 4 is connected with intelligent mechanical equipment, controls the intelligent mechanical equipment to automatically take out the good-product devices in the specific positions and sends the good-product devices to the good-product carrier belt 5 to complete good-product loading.
To sum up, the utility model provides a multiaxis integrated MEMS inertial device testing arrangement, system and method to one set of device can accomplish the high-efficient volume production test of reaching 9 IMU (inertia measurement unit) (or the inertia device 21 that awaits measuring) of axle, and can be compatible down, accomplish the magnetic sensor product of single function, single function gyroscope, the test of single function accelerometer product, and also can be according to the integrated complexity of product, accomplish the multiaxis, the combination test of multi-functional integrated MEMS inertial device (or the inertia device 21 that awaits measuring), based on this volume production testing arrangement's test system framework, test time is shorter, equipment cost is lower, and therefore, the high-efficient and reliable application is in the volume production test of multiaxis integrated MEMS inertial device (or the inertia device 21 that awaits measuring).
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.
While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, and alterations to the above embodiments may occur to those of ordinary skill in the art without departing from the scope of the present invention.
Claims (6)
1. A multi-axis integrated MEMS inertial device testing apparatus, comprising:
a magnetic field generator controlled to generate a magnetic field H in a predetermined space;
the two-axis rotary table is placed in the preset space and comprises a rotary table, a first rotary shaft and a second rotary shaft, wherein the rotary table is fixed at one end of the first rotary shaft, the second rotary shaft is orthogonal to the first rotary shaft, and the first rotary shaft is controlled to rotate so as to drive the rotary table to synchronously rotate; when the second rotating shaft is controlled to rotate, the first rotating shaft and the rotating disc are driven to synchronously and circumferentially move by taking the second rotating shaft as a central shaft.
2. The multi-axis integrated MEMS inertial device testing apparatus of claim 1,
the magnetic field generator comprises a pair of single-axis coils, the pair of single-axis coils are oppositely and parallelly arranged, and the space between the pair of single-axis coils is the preset space;
the two-axis turntable is located between the pair of single-axis coils.
3. A multi-axis integrated MEMS inertial device testing system comprising a test board and a multi-axis integrated MEMS inertial device testing apparatus as claimed in any one of claims 1-2,
the test board is fixed on the turntable, and the surface of the test board is perpendicular to the first rotating shaft;
the test board is used for placing a plurality of inertia devices to be tested.
4. The multi-axis integrated micro-electromechanical system inertial device testing system of claim 3,
the test board is provided with a socket, the socket is used for detachably inserting the inertia device to be tested, and when the inertia device to be tested is inserted in the socket, the inertia device to be tested and the test board are electrically connected.
5. The multi-axis integrated micro-electromechanical system inertial device testing system of claim 4,
the inertial device to be tested comprises a three-axis magnetic sensor and/or a three-axis gyroscope and/or a three-axis accelerometer;
the measured data of the inertia device to be measured comprises measured magnetic field data of a three-axis magnetic sensor in the direction of XYZ axes and/or measured angular velocity data of a three-axis gyroscope in the direction of XYZ axes and/or measured acceleration data of a three-axis accelerometer in the direction of XYZ axes.
6. The multi-axis integrated MEMS inertial device testing system as claimed in claim 4, further comprising a sample wafer to be tested and a good product carrier tape,
the test board receives the inertia devices to be tested which are picked up from the sample wafer to be tested;
the good product carrier tape is used for loading the good product to-be-tested inertial device picked from the test board.
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| CN114152271B (en) * | 2021-12-16 | 2024-10-29 | 美新半导体(天津)有限公司 | Multi-axis integrated micro-electromechanical system inertia device testing device, system and method |
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