CN114152271B - Multi-axis integrated micro-electromechanical system inertia device testing device, system and method - Google Patents

Abstract

The present invention provides a multi-axis integrated MEMS inertial device test device, system and method, wherein the multi-axis integrated MEMS inertial device test device comprises: a magnetic field generator, which is controlled to generate a magnetic field H in a predetermined space; a two-axis turntable, which is placed in the predetermined space, and the two-axis turntable comprises a turntable, a first rotating shaft and a second rotating shaft, wherein the turntable is fixed to one end of the first rotating shaft, the second rotating shaft is orthogonal to the first rotating shaft, and the first rotating shaft drives the turntable to rotate synchronously when the first rotating shaft is controlled to rotate; when the second rotating shaft is controlled to rotate, it drives the first rotating shaft and the turntable to synchronously move circumferentially with the second rotating shaft as the central axis. Compared with the prior art, the present invention can realize efficient and reliable mass production testing of multi-axis (e.g., nine-axis) integrated MEMS inertial devices.

Description

Multi-axis integrated micro-electromechanical system inertial device testing device, system and method

[Technical field]

The present invention relates to the technical field of testing micro-electromechanical system devices, and in particular to a multi-axis integrated micro-electromechanical system inertial device testing device, system and method.

[Background technology]

MEMS devices refer to high-tech electronic mechanical devices with micro-electro-mechanical systems (MEMS) and a size of only a few millimeters or even smaller. Their processing technology integrates lithography, corrosion, thin film, LIGA, silicon micromachining, non-silicon micromachining and precision machining technology. At present, MEMS devices are widely used in a wide range of applications, and common products include MEMS accelerometers, MEMS microphones, MEMS optical sensors, MEMS pressure sensors, MEMS gyroscopes, MEMS humidity sensors, MEMS gas sensors, and MEMS infrared thermopile sensors. For MEMS IMU (inertial measurement unit), with the improvement of the integration of intelligent micro-electromechanical device modules, there are currently some highly integrated IMU products, such as three-axis accelerometers, six-axis gyroscopes (integration of three-axis accelerometers and three-axis gyroscopes), and even the integration of three-axis magnetic sensors, three-axis gyroscopes and three-axis accelerometers to form a nine-axis inertial measurement device, which is integrated and packaged in a MEMS frame. When the current test system tests the nine-axis inertial measurement device, it can only test the internal functional units (magnetic functional unit, acceleration functional unit and gyroscope functional unit) separately in stages and modules using different equipment. Such a test system and test method have the disadvantages of long test time, high equipment cost, cumbersome operation and low test efficiency, and cannot be efficiently and reliably applied to the mass production test of multi-axis integrated MEMS inertial devices (such as nine-axis IMU) products.

Therefore, it is urgent to propose a new technical solution to solve the above problems.

[Summary of the invention]

One of the objectives of the present invention is to provide a multi-axis integrated micro-electromechanical system inertial device testing device, system and method, which can realize efficient and reliable mass production testing of multi-axis (for example, nine-axis) integrated MEMS inertial devices.

According to one aspect of the present invention, the present invention provides a multi-axis integrated micro-electromechanical system inertial device testing device, which includes: a magnetic field generator, which is controlled to generate a magnetic field H in a predetermined space; a two-axis turntable, which is placed in the predetermined space, and the two-axis turntable includes a turntable, a first rotating shaft and a second rotating shaft, wherein the turntable is fixed to one end of the first rotating shaft, the second rotating shaft is orthogonal to the first rotating shaft, and the first rotating shaft drives the turntable to rotate synchronously when it is controlled to rotate; when the second rotating shaft is controlled to rotate, it drives the first rotating shaft and the turntable to synchronously move circumferentially with the second rotating shaft as the center axis.

According to another aspect of the present invention, the present invention provides a multi-axis integrated micro-electromechanical system inertial device test system, which includes a test board and a multi-axis integrated micro-electromechanical system inertial device test device, wherein the test board is fixed on the turntable, and the surface of the test board is perpendicular to the first rotating shaft; the test board is used to place a number of inertial devices to be tested. Among them, the multi-axis integrated micro-electromechanical system inertial device test device includes: a magnetic field generator, which is controlled to generate a magnetic field H in a predetermined space; a two-axis turntable, which is placed in the predetermined space, and the two-axis turntable includes a turntable, a first rotating shaft and a second rotating shaft, wherein the turntable is fixed to one end of the first rotating shaft, the second rotating shaft is orthogonal to the first rotating shaft, and the first rotating shaft drives the turntable to rotate synchronously when it is controlled to rotate; when the second rotating shaft is controlled to rotate, it drives the first rotating shaft and the turntable to synchronously move circumferentially with the second rotating shaft as the center axis.

According to another aspect of the present invention, the present invention provides a test method for a multi-axis integrated micro-electromechanical system inertial device mass production test system, which comprises the following steps:

Step 1: Load the plurality of inertial devices to be tested into the test board, fix the test board on the surface of the turntable, the test board is located at a first position and points to a first orientation, the host computer sets the magnetic field H generated by the magnetic field generator in a predetermined space to be 0 Gauss, at this time, the host computer communicates with the test board to read the measured acceleration ACCZ _- in the negative direction of the Z axis of the accelerometer in the inertial device to be tested, wherein, when the test board is located at the first position and points to the first orientation, the first rotating shaft is placed vertically, the test board is placed horizontally, the test board is located directly above the first rotating shaft, and the positive direction of the Z axis is vertically upward, and the positive direction of the Y axis is consistent with the positive direction of the magnetic field H;

Step 2: The test board is located at a first position and points to a first orientation, and the host computer sets the magnetic field H generated by the magnetic field generator in a predetermined space to a positive predetermined magnetic field value. At this time, the host computer communicates with the test board to read the Y-axis positive measured magnetic field value Mag _Y+ of the magnetic sensor in the inertial device to be tested; then, the host computer sets the magnetic field H generated by the magnetic field generator in the predetermined space to a negative predetermined magnetic field value. At this time, the host computer communicates with the test board to read the Y-axis negative measured magnetic field value Mag _Y- of the magnetic sensor in the inertial device to be tested; the host computer calculates the Y-axis sensitivity of the magnetic sensor in the inertial device to be tested based on the Y-axis positive measured magnetic field value Mag _Y+ and the Y-axis negative measured magnetic field value Mag _Y- , and then resets the magnetic field H generated by the magnetic field generator in the predetermined space to 0Guass;

Step 3: The host computer controls the circumferential movement of the first rotating shaft of the two-axis turntable to rotate the turntable counterclockwise by 90 degrees, so that the test board moves from the first position and points to the first orientation to the first position and points to the second orientation, and the host computer sets the magnetic field H generated by the magnetic field generator in the predetermined space to a positive predetermined magnetic field value. At this time, the host computer communicates with the test board to read the X-axis positive measured magnetic field value Mag _X+ of the magnetic sensor in the inertial device to be tested; then, the host computer sets the magnetic field H generated by the magnetic field generator in the predetermined space to a negative predetermined magnetic field value. At this time, the host computer communicates with the test board to read the X-axis negative measured magnetic field value Mag _X- of the magnetic sensor in the inertial device to be tested; the host computer calculates the X-axis sensitivity of the magnetic sensor in the inertial device to be tested based on the X-axis positive measured magnetic field value Mag _X+ and the X-axis negative measured magnetic field value Mag _X- , and then resets the magnetic field H generated by the magnetic field generator in the predetermined space to 0Guass;

Step 4: The host computer controls the first rotating shaft to rotate 360° clockwise, and the turntable rotates 360° clockwise at the set angular velocity ω. At this time, the host computer communicates with the test board to read the positive Z-axis measured angular velocity GyroZ _+ω of the gyroscope in the inertial device to be tested; Then, the host computer controls the first rotating shaft to rotate 360° counterclockwise, and the turntable rotates 360° counterclockwise at the set angular velocity ω. At this time, the host computer communicates with the test board to read the negative Z-axis measured angular velocity GyroZ _-ω of the gyroscope in the inertial device to be tested; The host computer calculates the Z-axis sensitivity of the gyroscope in the inertial device to be tested 21 based on the positive Z-axis measured angular velocity GyroZ _+ω and the negative Z-axis measured angular velocity GyroZ _-ω ;

Step 5, the host computer controls the second rotating shaft to rotate 90° counterclockwise, so that the test board moves from the first position and points to the second orientation to the second position and points to the third orientation. At this time, the host computer communicates with the test board to read the measured acceleration ACCX _- in the negative direction of the X-axis of the accelerometer in the inertial device to be tested;

Step 6, the host computer sets the magnetic field H generated by the magnetic field generator in the predetermined space to a positive predetermined magnetic field value, at which time, the host computer communicates with the test board to read the Z-axis negative measured magnetic field value Mag _Z- of the magnetic sensor in the inertial device to be tested; then, the host computer sets the magnetic field H generated by the magnetic field generator in the predetermined space to a negative predetermined magnetic field value, at which time, the host computer communicates with the test board to read the Z-axis positive measured magnetic field value Mag _Z+ of the magnetic sensor in the inertial device to be tested; the host computer calculates the Z-axis sensitivity of the magnetic sensor in the inertial device to be tested based on the Z-axis negative measured magnetic field value Mag Z- and the Z-axis positive measured magnetic field value Mag Z+, and then resets the magnetic field H generated by the magnetic field generator in the predetermined space to 0 Guass;

Step 7, the host computer controls the first rotating shaft to rotate 90° counterclockwise, so that the test board moves from the second position and points to the third position to the second position and points to the fourth position. At this time, the host computer communicates with the test board to read the measured acceleration ACCY ₊ in the positive direction of the Y axis of the accelerometer in the inertial device to be tested;

The host computer controls the first rotating shaft to rotate counterclockwise by 90° again, so that the test board moves from the second position pointing to the fourth direction to the second position pointing to the fifth direction. At this time, the host computer communicates with the test board to read the measured acceleration ACCX ₊ in the positive direction of the X-axis of the accelerometer in the inertial device to be tested on the test board;

The host computer controls the first rotating shaft to rotate counterclockwise by 90° again, so that the test board moves from the second position pointing to the fifth orientation to the second position pointing to the sixth orientation. At this time, the host computer communicates with the test board to read the measured acceleration ACCY _- in the negative direction of the Y axis of the accelerometer in the inertial device to be tested;

Step 8: The host computer controls the second rotating shaft to rotate 360° clockwise at the set angular velocity ω. At this time, the host computer communicates with the test board to read the X-axis positive measured angular velocity GyroX _+ω of the gyroscope in the inertial device to be tested; Then, the host computer controls the second rotating shaft to rotate 360° counterclockwise at the set angular velocity ω. At this time, the host computer communicates with the test board to read the X-axis negative measured angular velocity GyroX _-ω of the gyroscope in the inertial device to be tested; The host computer calculates the X-axis sensitivity of the gyroscope in the inertial device to be tested based on the X-axis positive measured angular velocity GyroX _+ω and the X-axis negative measured angular velocity GyroX _-ω ;

Step 9: The host computer controls the first rotating shaft to rotate 90° counterclockwise, so that the test board moves from the second position and points to the sixth orientation to the second position and points to the seventh orientation, and the host computer controls the second rotating shaft to rotate 360° clockwise at the set angular velocity ω. At this time, the host computer communicates with the test board to read the Y-axis positive measured angular velocity GyroY _+ω of the gyroscope in the inertial device to be tested; Then, the host computer controls the second rotating shaft to rotate 360° counterclockwise at the set angular velocity ω. At this time, the host computer communicates with the test board to read the Y-axis negative measured angular velocity GyroY _-ω of the gyroscope in the inertial device to be tested; The host computer calculates the Y-axis sensitivity of the gyroscope in the inertial device to be tested based on the Y-axis positive measured angular velocity GyroY _+ω and the Y-axis negative measured angular velocity GyroY _-ω ;

Step 10: The host computer controls the second rotating shaft to rotate 90° counterclockwise, so that the test board moves from the second position pointing to the seventh orientation to the third position pointing to the eighth orientation. At this time, the host computer communicates with the test board to read the measured acceleration ACCZ ₊ in the positive direction of the Z axis of the accelerometer in the inertial device to be tested.

Compared with the prior art, the present invention can complete the efficient mass production test of up to 9-axis IMU (inertial measurement unit) with a set of devices, and can be backward compatible, complete the test of single-function magnetic sensor products, single-function gyroscopes, and single-function accelerometer products, and can also complete the combined test of multi-axis and multi-function integrated MEMS inertial devices according to the complexity of product integration. The test system architecture based on the mass production test device has short test time, low equipment cost, wide applicability, and can be efficiently and reliably applied to the mass production test of multi-axis integrated MEMS inertial devices.

【Brief Description of the Drawings】

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

FIG1 is a schematic structural diagram of a multi-axis integrated MEMS inertial device testing device in one embodiment of the present invention;

FIG2 is a schematic diagram of the structure of the test board 2 shown in FIG1 in one embodiment of the present invention;

FIG3 is a schematic diagram of an implementation state of the multi-axis integrated MEMS inertial device testing device shown in FIG1 ;

FIG4 is a schematic diagram of another implementation state of the multi-axis integrated MEMS inertial device testing device shown in FIG1 ;

FIG5 is a schematic diagram of another implementation state of the multi-axis integrated MEMS inertial device testing device shown in FIG1 ;

FIG6 is a schematic diagram of another implementation state of the multi-axis integrated MEMS inertial device testing device shown in FIG1 ;

FIG7 is a schematic diagram of another implementation state of the multi-axis integrated MEMS inertial device testing device shown in FIG1 ;

FIG8 is a schematic diagram of another implementation state of the multi-axis integrated MEMS inertial device testing device shown in FIG1 ;

FIG. 9 is a functional block diagram of a multi-axis integrated MEMS inertial device testing system according to an embodiment of the present invention.

[Specific implementation method]

In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

The term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments. Unless otherwise specified, the words "connected", "connected", and "connected" herein that indicate electrical connection all refer to direct or indirect electrical connection.

In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore, cannot be understood as limiting the present invention. In the description of the present invention, "plurality" means two or more, unless otherwise clearly and specifically defined.

In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "coupled" and the like should be understood in a broad sense; for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

According to one aspect of the present invention, the present invention provides a multi-axis integrated micro-electromechanical system inertial device testing device.

Please refer to FIG. 1, which is a schematic diagram of the structure of a multi-axis integrated MEMS inertial device test device in one embodiment of the present invention. The multi-axis integrated MEMS inertial device test device shown in FIG. 1 includes a two-axis turntable 11 and a magnetic field generator 12. The magnetic field generator 12 is controlled to generate a magnetic field H in a predetermined space. The two-axis turntable 11 is placed in the predetermined space, and the two-axis turntable 11 includes a turntable 111, a first rotating shaft 112, and a second rotating shaft 113, wherein the turntable 111 is fixed to one end of the first rotating shaft 112, the second rotating shaft 113 is orthogonal (or perpendicular) to the first rotating shaft 112, the first rotating shaft 112 and the second rotating shaft 113 are controlled to rotate, and when the first rotating shaft 112 rotates, the turntable 111 is driven to rotate synchronously; when the second rotating shaft 113 rotates, the first rotating shaft 112 and the turntable 111 are driven to synchronously move circumferentially with the second rotating shaft 113 as the central axis.

In the specific embodiment shown in Figure 1, the magnetic field generator 12 includes a pair of single-axis coils 121, which are placed opposite to each other and in parallel. The pair of single-axis coils 121 are controlled to generate a magnetic field H in the space between the pair of single-axis coils 121, that is, the space between the pair of single-axis coils 121 is the predetermined space.

The two-axis turntable 11 is located between the pair of single-axis coils 121 .

According to another aspect of the present invention, the present invention provides a multi-axis integrated micro-electromechanical system inertial device testing system.

Please refer to FIG9 , which is a functional block diagram of a multi-axis integrated MEMS inertial device test system in one embodiment of the present invention. The multi-axis integrated MEMS inertial device test system shown in FIG9 includes a multi-axis integrated MEMS (Micro-Electro-Mechanical System, i.e., micro-electromechanical system) inertial device test device 1, a test board 2, and a host computer 4 as shown in FIG1 .

The test board 2 is detachably fixed on the rotating disk 111 , and the surface of the test board 2 is perpendicular to the first rotating shaft 112 (see FIG. 1 for details). The test board 2 is used to place the inertial device 21 to be tested.

The host computer 4 is connected in communication with the two-axis turntable 11 and the magnetic field generator 12 to control the orderly movement of the first rotating shaft 112, the second rotating shaft 113 and the magnetic field generator 12; the host computer 4 is also connected in communication with the test board 2, and when the first rotating shaft 112, the second rotating shaft 113 and the magnetic field generator 12 are controlled to move in an orderly manner, the host computer 4 also reads the measured data of the several inertial devices 21 to be tested on the test board 2 in real time; the host computer 4 analyzes and processes the measured data of the inertial devices 21 to be tested to judge the yield of each inertial device 21 to be tested.

It should be particularly noted that the inertial device 21 to be tested in the present invention is integrated with a three-axis magnetic sensor and/or a three-axis gyroscope and/or a three-axis accelerometer; the measured data of the inertial device 21 to be tested includes the measured magnetic field data of the three-axis magnetic sensor in the XYZ axis direction and/or the measured angular velocity data of the three-axis gyroscope in the XYZ axis direction and/or the measured acceleration data of the three-axis accelerometer in the XYZ axis direction.

In subsequent embodiments, the inertial device 21 to be tested mentioned in the present invention is implemented on the basis of a nine-axis inertial device (i.e., a MEMS device that simultaneously integrates a 3-axis gyroscope, a 3-axis accelerometer, and a 3-axis magnetic sensor). However, the inertial device 21 to be tested provided by the present invention can cover mass production testing of any one or more of the above three-axis products, and has a wide applicability, which will not be elaborated here.

The following specifically introduces a test method for performing mass production tests using the multi-axis integrated MEMS inertial device test device provided by the present invention.

In order to better illustrate the working process of the multi-axis integrated micro-electromechanical system inertial device testing device provided by the present invention, a reference coordinate system can be established on the test board 2. In the embodiments shown in Figures 1 and 3-8, the X-axis and the Y-axis are perpendicular to each other and define the plane where the test board 2 fixed on the turntable 111 is located, and the Z-axis is perpendicular to the plane defined by the X-axis and the Y-axis, wherein the orientations of the X-axis, the Y-axis and the Z-axis relative to the test board 2 remain unchanged; the direction of the magnetic field H generated by the magnetic field generator 12 in the predetermined space is along the horizontal direction; the directions of the three-axis magnetic sensor, the three-axis gyroscope and the three-axis accelerometer in the inertial device 21 to be tested are the directions of the reference coordinate system.

Step 1: Load several inertial devices 21 to be tested into the test board 2, fix the test board 2 on the surface of the turntable 111, and the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the test board 2 fixed on the turntable 111 is located at the first position and points to the first orientation (refer to Figure 1, obtain the reference coordinate system at A), and the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to 0Gauss (Gauss). At this time, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCZ _-1g in the negative direction of the Z axis of the accelerometer in the inertial device 21 to be tested, where g is the gravitational acceleration. Wherein, when the test board 2 is located at the first position and points to the first orientation, the first rotating shaft 112 is placed vertically, the test board 2 is placed horizontally, the test board 2 is located directly above the first rotating shaft 112, and the positive direction of the Z axis is vertically upward, and the positive direction of the Y axis is consistent with the positive direction of the magnetic field H. Step 1 is essentially that when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the positive direction of the Z axis of the test board 2 fixed on the turntable 111 is vertically upward, and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is set to 0 Gauss, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCZ _- in the negative direction of the Z axis of the accelerometer in the inertial device 21 to be tested.

Step 2: Based on FIG. 1 (i.e., the test board 2 is located at the first position and points to the first orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0Gauss, the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be positive 1Gauss (or a positive predetermined magnetic field value). At this time, the host computer 4 communicates with the test board 2 to read the Y-axis positive measured magnetic field value Mag _Y+1G of the magnetic sensor in the inertial device 21 to be tested; then, the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be negative 1Gauss (or a negative predetermined magnetic field value). At this time, the host computer 4 communicates with the test board 2 to read the Y-axis negative measured magnetic field value Mag _Y-1G of the magnetic sensor in the inertial device 21 to be tested; the host computer 4 is based on the Y-axis positive measured magnetic field value Mag _Y+1G and the Y-axis negative measured magnetic field value Mag _Y-1G calculates the sensitivity of the magnetic sensor in the Y-axis direction of the inertial device 21 to be tested, and then resets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to 0Guass. Step 2 is essentially that when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the Y-axis direction on the test board 2 is parallel to the direction of the magnetic field H generated by the magnetic field generator 12 in the predetermined space, and the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to a positive or negative predetermined magnetic field value, the host computer 4 communicates with the test board 2 to read the Y-axis positive measured magnetic field value Mag _Y+ or the Y-axis negative measured magnetic field value Mag _Y- of the magnetic sensor in the inertial device 21 to be tested;

Step 3: Based on FIG. 1 (i.e., the test board 2 is located at the first position and points to the first orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0Gauss, the host computer 4 controls the first rotating shaft 112 of the two-axis turntable 11 to move circumferentially, so that the turntable 111 rotates 90 degrees counterclockwise, so that the test board 2 moves from the first position and points to the first orientation to the first position and points to the second orientation (refer to FIG. 3, and obtain the reference coordinate system at B), and the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be positive 1Gauss (or a predetermined positive magnetic field value). At this time, the host computer 4 communicates with the test board 2 to read the X-axis positive measured magnetic field value Mag _X+1Gauss of the magnetic sensor in the inertial device 21 to be tested. ; Then, the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to negative 1Gauss (or a predetermined negative magnetic field value). At this time, the host computer 4 communicates with the test board 2 to read the negative measured magnetic field value Mag _X-1G of the magnetic sensor in the inertial device 21 to be tested in the X-axis; The host computer 4 calculates the sensitivity of the magnetic sensor in the inertial device 21 to be tested in the X-axis direction based on the positive measured magnetic field value Mag _X+1G and the negative measured magnetic field value Mag _X-1G of the X-axis, and then resets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to 0Guass. Wherein, when the test board 2 is located in the first position and points to the second orientation, the first rotating shaft 112 is placed vertically, the test board 2 is placed horizontally, the test board 2 is located directly above the first rotating shaft 112, and the positive direction of the Z axis is vertically upward, and the positive direction of the X axis is consistent with the positive direction of the magnetic field H. The essence of Step 3 is: when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so as to make the X-axis direction on the test board 2 parallel to the direction of the magnetic field H generated by the magnetic field generator 12 in the predetermined space, and the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to a predetermined positive or negative magnetic field value, the host computer 4 communicates with the test board 2 to read the measured magnetic field value Mag _X+ in the positive direction of the X axis or the measured magnetic field value Mag _X- in the negative direction of the X axis of the magnetic sensor in the inertial device to be tested.

Step 4: In FIG. 3 (i.e., the test board 2 is located at the first position and points to the second orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0 Guass, the host computer 4 controls the first rotating shaft 112 to rotate 360° clockwise, and the turntable 111 rotates 360° clockwise at a set angular velocity ω (e.g., 100°/s). At this time, the host computer 4 communicates with the test board 2 to read the positive Z-axis measured angular velocity GyroZ _+100°/S of the gyroscope in the inertial device 21 to be tested; then, the host computer 4 controls the first rotating shaft 112 to rotate 360° counterclockwise, and the turntable 111 rotates 360° counterclockwise at a set angular velocity ω (e.g., 100°/s). At this time, the host computer 4 communicates with the test board 2 to read the negative Z-axis measured angular velocity GyroZ _{-100°/S of the gyroscope in the inertial device 21 to be tested.} ; The host computer 4 calculates the Z-axis sensitivity of the gyroscope in the inertial device 21 to be tested based on the positive Z-axis measured angular velocity GyroZ _+100°/S and the negative Z-axis measured angular velocity GyroZ _-100°/S . The essence of Step 4 is: when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate to move the Z-axis on the test board 2 in the vertical direction, the host computer 4 controls the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be 0Guass, and the host computer 4 controls the first rotating shaft 112 to rotate clockwise or counterclockwise at the set angular velocity ω, the host computer 4 communicates with the test board 2 to read the positive Z-axis measured angular velocity GyroZ _+ω or the negative Z-axis measured angular velocity GyroZ _-ω of the gyroscope in the inertial device 21 to be tested.

Step 5: Based on FIG. 3 (i.e., the test board 2 is located at the first position and points to the second orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0 Guass, the host computer 4 controls the second rotating shaft 113 to rotate counterclockwise by 90°, so that the test board 2 moves from the first position and points to the second orientation to the second position and points to the third orientation (refer to FIG. 4, and obtain the reference coordinate system at C). At this time, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCX _-1g g in the negative direction of the X axis of the accelerometer in the inertial device 21 to be tested, where g is the acceleration of gravity. Wherein, when the test board 2 is located at the second position and points to the third orientation, the first rotating shaft 112 is placed horizontally, the test board 2 is placed vertically, the test board 2 is located on the left side of the first rotating shaft 112, and the positive direction of the X axis is vertically upward, and the positive direction of the Z axis is consistent with the negative direction of the magnetic field H. The essence of Step 5 is that when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the positive direction of the X-axis of the test board 2 fixed on the turntable 111 is vertically upward, and the host computer sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to 0 Gauss, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCX _- in the negative direction of the X-axis of the accelerometer in the inertial device 21 to be tested.

Step 6: In FIG. 4 (i.e., the test board 2 is located at the second position and points to the third position), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0Gauss, the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be positive 1Gauss (or a predetermined positive magnetic field value). At this time, the host computer 4 communicates with the test board 2 to read the Z-axis negative measured magnetic field value Mag _Z-1G of the magnetic sensor in the inertial device 21 to be tested; Then, the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be negative 1Gauss (or a predetermined negative magnetic field value). At this time, the host computer 4 communicates with the test board 2 to read the Z-axis positive measured magnetic field value Mag _Z+1G of the magnetic sensor in the inertial device 21 to be tested; The host computer 4 is based on the Z-axis negative measured magnetic field value Mag _Z-1G and the Z-axis positive measured magnetic field value Mag _Z+1G , calculate the sensitivity of the magnetic sensor in the inertial device 21 to be tested in the Z-axis direction, and then reset the magnetic field H generated by the magnetic field generator 12 in the predetermined space to 0Guass. The essence of Step 6 is: when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so as to make the Z-axis direction on the test board 2 parallel to the direction of the magnetic field H generated by the magnetic field generator 12 in the predetermined space, and the host computer 4 sets the magnetic field H generated by the magnetic field generator 12 in the predetermined space to a predetermined positive or negative magnetic field value, the host computer 4 communicates with the test board 2 to read the negative Z-axis measured magnetic field value Mag _Z- of the magnetic sensor in the inertial device 21 to be tested / or the positive Z-axis measured magnetic field value Mag _Z+ .

Step 7: Based on FIG. 4 (i.e., the test board 2 is located at the second position and points to the third orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0 Guass, the host computer 4 controls the first rotating shaft 112 to rotate counterclockwise by 90°, so that the test board 2 moves from the second position and points to the third orientation (refer to FIG. 4, obtain the reference coordinate system at C) to the second position and points to the fourth orientation (refer to FIG. 5, obtain the reference coordinate system at D). At this time, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCY _+1g in the positive direction of the Y axis of the accelerometer in the inertial device 21 to be tested, where g is the acceleration of gravity. Wherein, when the test board 2 is located at the second position and points to the fourth orientation, the first rotating shaft 112 is placed horizontally, the test board 2 is placed vertically, the test board 2 is located on the left side of the first rotating shaft 112, and the positive direction of the Y axis is vertically downward, and the positive direction of the Z axis is consistent with the negative direction of the magnetic field H. The essence is that when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the positive direction of the Y axis of the test board 2 fixed on the turntable 111 is vertically downward, and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is set to 0 Gauss, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCY ₊ in the positive direction of the Y axis of the accelerometer in the inertial device 21 to be tested.

In FIG5 (i.e., the test board 2 is located at the second position and points to the fourth orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0 Guass, the host computer 4 controls the first rotating shaft 112 to rotate counterclockwise by 90°, so that the test board 2 moves from the second position and points to the fourth orientation (refer to FIG5, obtain the reference coordinate system at D) to the second position and points to the fifth orientation (refer to FIG6, obtain the reference coordinate system at E), at this time, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCX _+1g in the positive direction of the X axis of the accelerometer in the inertial device 21 to be tested, where g is the acceleration of gravity. Wherein, when the test board 2 is located at the second position and points to the fifth orientation, the first rotating shaft 112 is placed horizontally, the test board 2 is placed vertically, the test board 2 is located on the left side of the first rotating shaft 112, and the positive direction of the X axis is vertically downward, and the positive direction of the Z axis is consistent with the negative direction of the magnetic field H. The essence is that when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the positive direction of the X-axis of the test board 2 fixed on the turntable 111 is vertically downward, and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is set to 0 Gauss, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCX ₊ in the positive direction of the X-axis of the accelerometer in the inertial device 21 to be tested.

In FIG6 (i.e., the test board 2 is located at the second position and points to the fifth orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0 Guass, the host computer 4 controls the first rotating shaft 112 to rotate counterclockwise by 90°, so that the test board 2 moves from the second position and points to the fifth orientation (refer to FIG6, obtain the reference coordinate system at E) to the second position and points to the sixth orientation (refer to FIG7, obtain the reference coordinate system at F), at this time, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCY _-1g in the negative direction of the Y axis of the accelerometer in the inertial device 21 to be tested, where g is the acceleration of gravity. Wherein, when the test board 2 is located at the second position and points to the sixth orientation, the first rotating shaft 112 is placed horizontally, the test board 2 is placed vertically, the test board 2 is located on the left side of the first rotating shaft 112, and the positive direction of the Y axis is vertically upward, and the positive direction of the Z axis is consistent with the negative direction of the magnetic field H. The essence is that when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the positive direction of the Y axis of the test board 2 fixed on the turntable 111 is vertically upward, and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is set to 0 Gauss, the host computer 4 communicates with the test board 2 to read the measured acceleration _ACCY- in the negative direction of the Y axis of the accelerometer in the inertial device 21 to be tested.

Step 8: In FIG. 7 (i.e., the test board 2 is located at the second position and points to the sixth orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0 Guass, the host computer 4 controls the second rotating shaft 113 to rotate 360° clockwise at a set angular velocity ω (e.g., 100°/s). At this time, the host computer 4 communicates with the test board 2 to read the X-axis positive measured angular velocity GyroX _+100°/S of the gyroscope in the inertial device 21 to be tested; then, the host computer 4 controls the second rotating shaft 113 to rotate 360° counterclockwise at a set angular velocity ω (e.g., 100°/s). At this time, the host computer 4 communicates with the test board 2 to read the X-axis negative measured angular velocity GyroX _-100°/S of the gyroscope in the inertial device 21 to be tested; the host computer 4 calculates the X-axis positive measured angular velocity GyroX based on the X-axis positive measured angular velocity GyroX _+100°/S and the measured angular velocity GyroX _-100°/S in the negative direction of the X axis calculate the X-axis sensitivity of the gyroscope in the inertial device 21 to be tested. The essence of Step 8 is: when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the X axis on the test board 2 fixed on the turntable 111 is parallel to the second rotating shaft 113, the host computer 4 controls the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be 0Guass, and the host computer 4 controls the second rotating shaft 113 to rotate clockwise or counterclockwise at the set angular velocity ω, the host computer 4 communicates with the test board 2 to read the measured angular velocity GyroX _+ω in the positive direction of the X axis or the measured angular velocity GyroX _-ω in the negative direction of the X axis of the gyroscope in the inertial device to be tested;

Step 9: Based on FIG. 7 (i.e., the test board 2 is located at the second position and points to the sixth orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0 Guass, the host computer 4 controls the first rotating shaft 112 to rotate counterclockwise by 90°, so that the test board 2 moves from the second position and points to the sixth orientation (refer to FIG. 7, obtain the reference coordinate system at F) to the second position and points to the seventh orientation (refer to FIG. 8, obtain the reference coordinate system at G), and the host computer 4 controls the second rotating shaft 113 to rotate clockwise by 360° at a set angular velocity ω (for example, 100°/s). At this time, the host computer 4 communicates with the test board 2 to read the Y-axis positive measured angular velocity GyroY _+100°/S of the gyroscope in the inertial device 21 to be tested. ; Then, the host computer 4 controls the second rotating shaft 113 to rotate 360° counterclockwise at the set angular velocity ω (for example, 100°/s). At this time, the host computer 4 communicates with the test board 2 to read the Y-axis negative measured angular velocity GyroY _-100°/S of the gyroscope in the inertial device 21 to be tested on the test board 2; The host computer 4 calculates the Y-axis sensitivity of the gyroscope in the inertial device 21 to be tested based on the Y-axis positive measured angular velocity GyroY _+100°/S and the Y-axis negative measured angular velocity GyroY _-100°/S . Wherein, when the test board 2 is located at the second position and points to the seventh orientation, the first rotating shaft 112 is placed horizontally, the test board 2 is placed vertically, the test board 2 is located on the left side of the first rotating shaft 112, and the positive direction of the X-axis is vertically upward, and the positive direction of the Z-axis is consistent with the negative direction of the magnetic field H. The essence of Step 9 is: when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the Y-axis on the test board 2 is parallel to the second rotating shaft 113, the host computer 4 controls the magnetic field H generated by the magnetic field generator 12 in the predetermined space to be 0Guass, and the test board 2 controls the second rotating shaft 113 to rotate clockwise or counterclockwise at a set angular velocity ω, the host computer 4 communicates with the test board 2 to read the Y-axis positive measured angular velocity GyroY _+ω or the Y-axis negative measured angular velocity GyroY _-ω of the gyroscope in the inertial device to be tested on the test board 2.

Step 10: At G in FIG8 (i.e., the test board 2 is located at the second position and points to the seventh orientation), and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is 0 Guass, the host computer 4 controls the second rotating shaft 113 to rotate counterclockwise by 90° so that the test board 2 moves from the second position and points to the seventh orientation (refer to FIG8 , obtain the reference coordinate system at G) to the third position and points to the eighth orientation (refer to FIG8 , obtain the reference coordinate system at H), at this time, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCZ _+1g in the positive direction of the Z axis of the accelerometer in the inertial device 21 to be tested, where g is the acceleration of gravity. Wherein, when the test board 2 is located at the third position and points to the eighth orientation, the first rotating shaft 112 is placed vertically, the test board 2 is placed horizontally, the test board 2 is located directly below the first rotating shaft 112, and the positive direction of the Z axis is vertically downward, and the positive direction of the X axis is consistent with the negative direction of the magnetic field H. The essence of Step 10 is that when the host computer 4 controls the first rotating shaft 112 and/or the second rotating shaft 113 to rotate so that the positive direction of the Z axis fixed on the test board 2 is vertically downward, and the magnetic field H generated by the magnetic field generator 12 in the predetermined space is set to 0 Gauss, the host computer 4 communicates with the test board 2 to read the measured acceleration ACCZ ₊ in the positive direction of the Z axis of the accelerometer in the inertial device 21 to be tested.

From the above Step 1 to Step 10, the measured magnetic field data MagX-1G, MagY-1G, MagZ-1G, MagX _+1G , MagY _+1G , MagZ _+1G of the three-axis magnetic sensor in the inertial device 21 to be tested in the XYZ axis direction are obtained; the measured angular velocity data GyroX _+100°/s GyroY _{+ 100°/s , GyroZ +100°/s} GyroX -100°/s, GyroY _{-100 ° /s} GyroZ _{-100 °/s of} the three-axis accelerometer in the XYZ axis direction are obtained. Through calculation, the key indicators of each inertial device to be tested can be obtained, such as sensitivity, to judge the mass production yield.

Among them, the sensitivity calculation method of the magnetic sensor X\Y\Z is: Sen_MagX\Y\Z=(MagX\Y\Z _+1G -MagX\Y\Z _-1G )/2; the sensitivity calculation method of the gyroscope X\Y\Z is: Sen_GyroX\Y\Z=(GyroX\Y\Z _+100°/s -GyroX\Y\Z _-100°/s )/200; the sensitivity calculation method of the accelerometer X\Y\Z is: Sen_ACCX\Y\Z=(ACCX\Y\Z _+1g -ACCX\Y\Z _-1g )/2.

Please refer to FIG. 2 , which is a schematic diagram of the structure of the test board 2 shown in FIG. 1 in one embodiment of the present invention.

Among them, the inertial device 21 to be tested can be welded to the reserved position of the test board 2 by welding. In the specific embodiment shown in FIG2 , a fixed Socket is provided on the test board 2, and there are several sites in the socket. The inertial device 21 to be tested is placed in the site, so that it is convenient to load and unload several inertial devices 21 to be tested, and the reusability and efficiency of the test system are improved. That is to say, the Socket is provided on the test board 2, and the Socket is used to detachably plug the inertial device 21 to be tested. When the inertial device 21 to be tested is plugged into the Socket, the inertial device 21 to be tested and the test board 2 are electrically connected. The state in which the inertial device 21 to be tested is placed in the Socket is not shown in FIG2 , but this is understood by those skilled in the art and will not be repeated here.

When the measurement of a group of inertial devices 21 to be tested is completed, the inertial device 21 to be tested on the test board 2 (there are several sites in the socket, and the inertial device 21 to be tested is placed in the site, and a communication connection can be established with the external controller (for example, the host computer 4) through the test board 2) can be picked up, replaced with a new inertial device 21 to be tested, and a new round of testing can be carried out. In the embodiment of the present invention, preferably, with reference to Figure 2, a reference inertial device 22 is provided at the center of the test board 2, preferably welded to the center of the surface of the test board 2.

The test board 2 is reserved with a communication interface for communicating with an external controller (e.g., the host computer 4), and the communication interface includes a communication interface of the reference inertial device 22 and a communication interface of the inertial device to be tested 21. The reference inertial device 22 is generally not replaced in mass production testing. During the test, its signal (or measured data) and the signal (or measured data) of the inertial device to be tested 21 are transmitted to the external controller (e.g., the host computer 4) in real time to provide an angular velocity reference for the inertial device to be tested 21 during rotation (if the working condition fluctuates, the curve characteristics of the reference inertial device 22 on the test board 2 can be used to extract the stable interval data of the measured data of the inertial device to be tested 21 to calculate the sensitivity parameters), thereby improving the accuracy of the angular velocity sensitivity calculation and the reliability of the test results.

Please continue to refer to Figure 9. The multi-axis integrated MEMS inertial device testing system shown in Figure 9 includes, in addition to the multi-axis integrated MEMS (Micro-Electro-Mechanical System) inertial device testing device 1, the testing board 2 and the host computer 4 shown in Figure 1, a sample wafer 3 to be tested and a good product carrier 5.

The sample wafer 3 to be tested is also called a wafer, and a plurality of inertial devices 21 to be tested are bonded to its substrate. The test board 2 is used to receive a plurality of inertial devices 21 to be tested picked up from the sample wafer 3 to be tested, so as to facilitate the testing of subsequent processes. In this system, the inertial devices 21 to be tested can be picked up from the sample wafer 3 to be tested by manual or intelligent equipment such as a manipulator and loaded into the test board 2. The test board 2 can be fixed on the surface of the turntable 111 of the multi-axis integrated MEMS inertial device measuring device 1 by manual or automatic manipulators (refer to Figures 1-8). The test board 2 is connected to the host computer 4 for communication, and the host computer 4 is connected to the multi-axis integrated MEMS inertial device testing device 1 for communication. The first rotating shaft 112, the second rotating shaft 113 and the single-axis coil 121 of the multi-axis integrated MEMS inertial device testing device 1 are controlled by the host computer 4 to continuously and orderly move (refer to s for the action process). tep1 to step10), the acquisition of three-axis magnetic sensor data and/or three-axis gyroscope data and/or three-axis acceleration data can be realized, and the efficient mass production test of the nine-axis integrated inertial device 21 (3-axis magnetic sensor + 3-axis gyroscope + 3-axis accelerometer) to be tested in this embodiment can be realized at most. While controlling the movement of the two-axis turntable 11 and the single-axis coil 121, the host computer 4 also communicates with the test board 2 in real time, receives the measured data of several inertial devices 21 to be tested, and obtains the yield of the inertial device 21 to be tested based on the real-time received data analysis and processing (including but not limited to calculating the sensitivity index), and displays the position of the good product in the test board 2 in a visual PASS or Fail manner, which is convenient for manual selection of the good product, or the host computer 4 is connected to the intelligent mechanical equipment to control it to automatically take out the good device in a specific position and send it to the good carrier 5 to complete the loading of the good product.

In summary, the multi-axis integrated MEMS inertial device testing device, system and method provided by the present invention can complete the efficient mass production test of up to 9-axis IMU (inertial measurement device) (or the inertial device 21 to be tested) with a set of devices, and can be backward compatible to complete the test of single-function magnetic sensor products, single-function gyroscopes, and single-function accelerometer products. In addition, it can also complete the combined test of multi-axis and multi-function integrated MEMS inertial devices (or the inertial device 21 to be tested) according to the complexity of product integration. Based on the test system architecture of the mass production test device, the test time is short, the equipment cost is low, and the applicability is wide, and it can be efficiently and reliably applied to the mass production test of multi-axis integrated MEMS inertial devices (or the inertial device 21 to be tested).

In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify and vary the above embodiments within the scope of the present invention.

Claims (11)

1. A multi-axis integrated mems inertial device test apparatus, comprising:

A magnetic field generator controlled in a predetermined space to generate a magnetic field H;

The two-axis turntable is arranged in the preset space and comprises a turntable, a first rotating shaft and a second rotating shaft, wherein the turntable is fixed at one end of the first rotating shaft, the second rotating shaft is orthogonal with the first rotating shaft, and the turntable is driven to synchronously rotate when the first rotating shaft is controlled to rotate; the second rotating shaft drives the first rotating shaft and the rotary table to synchronously and circumferentially move by taking the second rotating shaft as a central shaft when being controlled to rotate,

The test board is fixed on the turntable, and the surface of the test board is perpendicular to the first rotating shaft;

The test board is used for placing a plurality of inertial devices to be tested,

Establishing a reference coordinate system on the test board, wherein an X axis and a Y axis are perpendicular to each other and define a plane on which the test board is fixed on the turntable, a Z axis is perpendicular to the plane defined by the X axis and the Y axis, and the orientation of the X axis, the Y axis and the Z axis relative to the test board is unchanged,

When the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so that the positive direction of the Z axis of the test board fixed on the turntable is vertically upward or vertically downward, and the upper computer sets the magnetic field H generated by the magnetic field generator in a preset space to be 0Gauss, the upper computer communicates with the test board so as to read the actually-measured acceleration ACCZ _- of the negative direction of the Z axis or the actually-measured acceleration ACCZ ₊ of the positive direction of the Z axis of the accelerometer in the inertial device to be tested; when the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so that the positive direction of the Y-axis on the test board is vertically upward or vertically downward, and the magnetic field H generated by the magnetic field generator in a preset space is set to be 0Gauss, the upper computer communicates with the test board so as to read the actual measurement acceleration ACCY _- in the negative direction of the Y-axis or the actual measurement acceleration ACCY ₊ in the positive direction of the Y-axis of the accelerometer in the inertial device to be tested; when the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so that the positive direction of the X axis on the test board is vertically upward or vertically downward, and the magnetic field H generated by the magnetic field generator in a preset space is set to be 0Gauss, the upper computer communicates with the test board so as to read the actually measured acceleration ACCX _- of the negative direction of the X axis or the actually measured acceleration ACCX ₊ of the positive direction of the X axis of the accelerometer in the inertial device to be tested; and/or

When the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so that the Y-axis direction on the test board is parallel to the direction of the magnetic field H generated by the magnetic field generator in the preset space, and the magnetic field H generated by the magnetic field generator in the preset space is set to be a preset positive or negative magnetic field value, the upper computer communicates with the test board so as to read the Y-axis positive actually-measured magnetic field value Mag _Y+ or the Y-axis negative actually-measured magnetic field value Mag _Y- of the magnetic sensor in the inertial device to be tested; when the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so that the X-axis direction on the test board is parallel to the magnetic field H generated by the magnetic field generator in a preset space, and the magnetic field H generated by the magnetic field generator in the preset space is set to be a preset positive or negative magnetic field value, the upper computer communicates with the test board so as to read an actually-measured magnetic field value Mag _X+ of the X-axis positive or an actually-measured magnetic field value Mag _X- of the X-axis negative of the magnetic sensor in the inertial device to be tested; when the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so that the Z-axis direction on the test board is parallel to the direction of the magnetic field H generated by the magnetic field generator in a preset space, and the magnetic field H generated by the magnetic field generator in the preset space is set to be a preset positive or negative magnetic field value, the upper computer communicates with the test board so as to read a Z-axis positive actually measured magnetic field value Mag _Z+ or a Z-axis negative actually measured magnetic field value Mag _Z- of a magnetic sensor in the inertial device to be tested; and/or

When the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so that the Z axis on the test board is along the vertical direction, the upper computer sets the magnetic field H generated by the magnetic field generator in a preset space to be 0Gauss, and the upper computer controls the first rotating shaft to rotate clockwise or anticlockwise at a set angular velocity omega, the upper computer communicates with the test board so as to read the Z axis positive actually measured angular velocity GyroZ _+ω or the Z axis negative actually measured angular velocity GyroZ _-ω of the gyroscope in the inertial device to be tested; when the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so that the X axis on the test board is parallel to the second rotating shaft, the upper computer controls the magnetic field H generated by the magnetic field generator in a preset space to be 0Guass, and the upper computer controls the second rotating shaft to rotate clockwise or anticlockwise at a set angular velocity omega, the upper computer communicates with the test board so as to read the X axis positive measured angular velocity GyroX _+ω or X axis negative measured angular velocity GyroX _-ω of the gyroscope in the inertial device to be tested; when the upper computer controls the first rotating shaft and/or the second rotating shaft to rotate so as to enable the Y axis on the test board to be parallel to the second rotating shaft, the upper computer controls the magnetic field H generated by the magnetic field generator in a preset space to be 0Guass, and the upper computer controls the second rotating shaft to rotate clockwise or anticlockwise at a set angular speed omega, the upper computer communicates with the test board so as to read the Y-axis positive measured angular speed GyroY _+ω or the Y-axis negative measured angular speed GyroY _-ω of the gyroscope in the inertial device to be tested on the test board.

2. The multi-axis integrated MEMS inertial device testing apparatus of claim 1,

The magnetic field generator includes a pair of uniaxial coils disposed opposite to and in parallel with each other, a space between the pair of uniaxial coils being the predetermined space;

The two-axis turntable is located between the pair of single-axis coils.

3. A multi-axis integrated micro-electromechanical system inertia device testing system, characterized in that it comprises a testing board and the multi-axis integrated micro-electromechanical system inertia device testing apparatus according to any one of claims 1-2,

The test board is fixed on the turntable, and the surface of the test board is perpendicular to the first rotating shaft;

the test board is used for placing a plurality of inertial devices to be tested.

4. The multi-axis integrated MEMS inertial device testing system of claim 3,

The test board is provided with a socket, the socket is used for detachably plugging the inertial device to be tested, and when the inertial device to be tested is plugged in the socket, the inertial device to be tested is electrically connected with the test board.

5. The system for testing inertial devices of multi-axis integrated MEMS of claim 3 further comprising a host computer,

The upper computer is in communication connection with the two-axis turntable and the magnetic field generator so as to control the first rotating shaft, the second rotating shaft and the magnetic field generator to orderly act;

the upper computer is also in communication connection with the test board, and when the first rotating shaft, the second rotating shaft and the magnetic field generator are controlled to orderly act, the upper computer also reads actual measurement data of a plurality of inertial devices to be tested on the test board in real time;

And the upper computer analyzes and processes the measured data of the inertial devices to be tested so as to judge the yield of each inertial device to be tested.

6. The multi-axis integrated MEMS inertial device testing system of claim 5,

The inertial device to be measured comprises a three-axis magnetic sensor and/or a three-axis gyroscope and/or a three-axis accelerometer;

the measured data of the inertial device to be measured comprises measured magnetic field data of the triaxial magnetic sensor in the XYZ axis direction and/or measured angular velocity data of the triaxial gyroscope in the XYZ axis direction and/or measured acceleration data of the triaxial accelerometer in the XYZ axis direction.

7. The multi-axis integrated MEMS inertial device testing system of claim 6,

Establishing a reference coordinate system on the test board, wherein an X axis and a Y axis are mutually perpendicular and define a plane on which the test board fixed on the turntable is positioned, and a Z axis is perpendicular to the plane defined by the X axis and the Y axis, wherein the orientations of the X axis, the Y axis and the Z axis relative to the test board are unchanged;

the direction of the magnetic field H generated by the magnetic field generator in a predetermined space is along the horizontal direction;

And the directions of the triaxial magnetic sensor, the triaxial gyroscope and the triaxial accelerometer in the inertial device to be detected are the directions of the reference coordinate system.

8. The multi-axis integrated MEMS inertial device testing system of claim 5,

The test board is also used for placing a reference inertial device,

When the upper computer reads the actual measurement data of a plurality of inertial devices to be tested on the test board in real time, the upper computer reads the actual measurement data of the reference inertial devices on the test board at the same time,

The reference inertial device provides an angular velocity reference for the inertial device to be measured in rotation.

9. The multi-axis integrated MEMS inertial device testing system of claim 8,

And the upper computer extracts stable interval data of the measured data of the inertial device to be measured according to the curve characteristic of the reference inertial device, and analyzes and processes the stable interval data to judge the yield of each dry inertial device to be measured.

10. The system of claim 5, further comprising a sample wafer to be tested and a good carrier tape,

The substrate of the sample wafer to be tested is adhered with a plurality of inertial devices to be tested, and the test board receives the inertial devices to be tested picked up from the sample wafer to be tested;

and the good product carrier tape is used for loading the good product to-be-tested inertial devices picked up from the test board.

11. A method of testing a multi-axis integrated mems inertial device mass production test system as claimed in any one of claims 3 to 10, comprising the steps of:

Step 1: the method comprises the steps that a plurality of inertia devices to be tested are loaded in a test board, the test board is fixed on the surface of a rotary table, the test board is located at a first position and points to a first direction, a magnetic field H generated by a magnetic field generator in a preset space is set to be 0Gauss by an upper computer, at the moment, the upper computer is communicated with the test board to read actual measurement acceleration ACCZ _- of an accelerometer in the inertia device to be tested in the negative direction of a Z axis, when the test board is located at the first position and points to the first direction, the first rotating shaft is vertically placed, the test board is horizontally placed, the test board is located right above the first rotating shaft, the positive direction of the Z axis is vertically upwards, and the positive direction of the Y axis is consistent with the positive direction of the magnetic field H;

Step 2: the test board is positioned at a first position and points to a first azimuth, the upper computer sets a magnetic field H generated by the magnetic field generator in a preset space to be a forward preset magnetic field value, and at the moment, the upper computer is communicated with the test board to read a Y-axis forward actually-measured magnetic field value Mag _Y+ of a magnetic sensor in the inertial device to be tested; then, the upper computer sets a preset magnetic field value that the magnetic field H generated by the magnetic field generator in a preset space is negative, and at the moment, the upper computer communicates with the test board to read a Y-axis negative actual measurement magnetic field value Mag _Y- of the magnetic sensor in the inertial device to be tested; the upper computer calculates the sensitivity of the magnetic sensor in the inertial device to be measured in the Y-axis direction based on the Y-axis positive measured magnetic field value Mag _Y+ and the Y-axis negative measured magnetic field value Mag _Y-, and then resets the magnetic field H generated by the magnetic field generator in a preset space to 0Guass;

Step 3: the upper computer controls the first rotating shaft of the two-axis turntable to move circumferentially, so that the turntable rotates anticlockwise by 90 degrees, the test board is enabled to move from a first position to a first position in a pointing direction and point to a second position in the pointing direction, the upper computer sets a magnetic field H generated by the magnetic field generator in a preset space to be a forward preset magnetic field value, and at the moment, the upper computer communicates with the test board to read an X-axis forward actually-measured magnetic field value Mag _X+ of a magnetic sensor in the inertial device to be tested; then, the upper computer sets a preset magnetic field value that the magnetic field H generated by the magnetic field generator in a preset space is negative, and at the moment, the upper computer communicates with the test board to read an actually-measured magnetic field value Mag _X- of the X-axis negative direction of the magnetic sensor in the inertial device to be tested; the upper computer calculates the sensitivity of the magnetic sensor in the inertial device to be measured in the X-axis direction based on the positive measured magnetic field value Mag _X+ of the X-axis and the negative measured magnetic field value Mag _X- of the X-axis, and then resets the magnetic field H generated by the magnetic field generator in a preset space to 0Guass;

step 4: the upper computer controls the first rotating shaft to rotate 360 degrees clockwise, the rotating disc rotates 360 degrees clockwise at a set angular velocity omega, and at the moment, the upper computer communicates with the test board to read the Z-axis forward measured angular velocity GyroZ _+ω of the gyroscope in the inertial device to be tested; then, the upper computer controls the first rotating shaft to rotate anticlockwise by 360 degrees, the rotating disc rotates anticlockwise by 360 degrees at a set angular velocity omega, and at the moment, the upper computer communicates with the test board to read the Z-axis negative measured angular velocity GyroZ _-ω of the gyroscope in the inertial device to be tested; the upper computer calculates the Z-axis sensitivity of the gyroscope in the inertial device 21 to be measured based on the Z-axis positive measured angular velocity GyroZ _+ω and the Z-axis negative measured angular velocity GyroZ _-ω;

step 5, the upper computer controls the second rotating shaft to rotate 90 degrees anticlockwise, so that the test board moves from the first position to the second position in a direction pointing to the second direction and points to the third direction, and at the moment, the upper computer communicates with the test board to read the actually measured acceleration ACCX _- of the accelerometer in the inertial device to be tested in the X-axis negative direction;

Step 6, the upper computer sets a magnetic field H generated by the magnetic field generator in a preset space to be a positive preset magnetic field value, and at the moment, the upper computer communicates with a test board to read a Z-axis negative actually-measured magnetic field value Mag _Z- of a magnetic sensor in the inertial device to be tested; then, the upper computer sets a preset magnetic field value that the magnetic field H generated by the magnetic field generator in a preset space is negative, and at the moment, the upper computer communicates with the test board to read a Z-axis positive actually-measured magnetic field value Mag _Z+ of the magnetic sensor in the inertial device to be tested; the upper computer calculates the sensitivity of the magnetic sensor in the inertial device to be measured in the Z-axis direction based on the Z-axis negative measured magnetic field value MagZ-and the Z-axis positive measured magnetic field value MagZ +, and then resets the magnetic field H generated by the magnetic field generator in a preset space to be 0Guass;

Step 7, the upper computer controls the first rotating shaft to rotate 90 degrees anticlockwise, so that the test board moves from the second position to the second position from the third party, and the test board points to the fourth position, and at the moment, the upper computer communicates with the test board to read the actually measured acceleration ACCY ₊ in the positive direction of the Y axis of the accelerometer in the inertial device to be tested;

The upper computer controls the first rotating shaft to rotate 90 degrees anticlockwise again, so that the test board moves from the second position to the fourth position and points to the fifth position, and at the moment, the upper computer communicates with the test board to read the actually measured acceleration ACCX ₊ of the accelerometer in the positive X-axis direction of the inertial device to be tested on the test board;

The upper computer controls the first rotating shaft to rotate 90 degrees anticlockwise again, so that the test board is shifted from the second position to the fifth position and points to the sixth position, and at the moment, the upper computer communicates with the test board to read the actually measured acceleration ACCY _- in the negative direction of the Y axis of the accelerometer in the inertial device to be tested;

Step 8: the upper computer controls the second rotating shaft to rotate 360 degrees clockwise at a set angular speed omega, and at the moment, the upper computer communicates with the test board to read the X-axis forward measured angular speed GyroX _+ω of the gyroscope in the inertial device to be tested; then, the upper computer controls the second rotating shaft to rotate anticlockwise by 360 degrees at a set angular speed omega, and at the moment, the upper computer communicates with the test board to read the X-axis negative actual angular speed GyroX _-ω of the gyroscope in the inertial device to be tested; the upper computer calculates the X-axis sensitivity of the gyroscope in the inertial device to be measured based on the X-axis positive measured angular velocity GyroX _+ω and the X-axis negative measured angular velocity GyroX _-ω;

Step 9: the upper computer controls the first rotating shaft to rotate 90 degrees anticlockwise, so that the test board moves from a second position to a sixth position and points to a seventh position, the upper computer controls the second rotating shaft to rotate 360 degrees clockwise at a set angular speed omega, and at the moment, the upper computer communicates with the test board to read the Y-axis forward measured angular speed GyroY _+ω of the gyroscope in the inertial device to be tested; then, the upper computer controls the second rotating shaft to rotate anticlockwise by 360 degrees at a set angular speed omega, and at the moment, the upper computer communicates with the test board to read the Y-axis negative actual angular speed GyroY _-ω of the gyroscope in the inertial device to be tested; the upper computer calculates the Y-axis sensitivity of the gyroscope in the inertial device to be measured based on the Y-axis positive measured angular velocity GyroY _+ω and the Y-axis negative measured angular velocity GyroY _-ω;

And step 10, the upper computer controls the second rotating shaft to rotate 90 degrees anticlockwise, so that the test board is moved from the second position to the seventh position and is directed to the eighth position, and at the moment, the upper computer communicates with the test board to read the actually measured acceleration ACCZ ₊ of the accelerometer in the inertial device to be measured in the Z-axis positive direction.