CN216900583U - Liquid medicine recovery system - Google Patents
Liquid medicine recovery system Download PDFInfo
- Publication number
- CN216900583U CN216900583U CN202121818293.6U CN202121818293U CN216900583U CN 216900583 U CN216900583 U CN 216900583U CN 202121818293 U CN202121818293 U CN 202121818293U CN 216900583 U CN216900583 U CN 216900583U
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- liquid
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- liquid medicine
- recovery system
- tank
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- 239000007788 liquid Substances 0.000 title claims abstract description 170
- 239000003814 drug Substances 0.000 title claims abstract description 66
- 238000011084 recovery Methods 0.000 title claims abstract description 32
- 238000004064 recycling Methods 0.000 claims abstract description 15
- 239000002699 waste material Substances 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims 9
- 238000007599 discharging Methods 0.000 claims 1
- 238000001802 infusion Methods 0.000 claims 1
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 13
- 239000000126 substance Substances 0.000 description 10
- 239000000243 solution Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 4
- 230000000087 stabilizing effect Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000012536 packaging technology Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model provides a liquid medicine recovery system, which comprises a new liquid tank and a working unit, wherein liquid medicine is conveyed to the working unit from the new liquid tank through a liquid conveying pipeline, a liquid supply pump and a flow meter are sequentially arranged on the liquid conveying pipeline, an old liquid recovery system is arranged at the output end of the working unit, and the old liquid recovery system is communicated with the output end of the new liquid tank and is used for recovering the old liquid medicine discharged by the working unit and judging whether the old liquid medicine can be recycled or not. According to the utility model, a recycling circulating system is added on the original liquid medicine conveying system, and the concentration and the components of the liquid medicine are ensured to meet the preset standard through a liquid medicine concentration detection device; the recycling can be carried out according to the operation time, and the maximization of the recycling benefit is achieved.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing equipment, in particular to a liquid medicine recovery system.
Background
With the continuous development of semiconductor packaging technology, companies are entering the semiconductor packaging technology and are challenged by increasingly severe cost, and recycling of materials becomes a key point of cost control.
In the semiconductor packaging technology, processes such as development, etching, and photoresist removal are required, and these processes all require the use of a chemical solution, and the apparatuses used therefor are used as liquid-using apparatuses. For example, the developing device comprises a disk for bearing a wafer, and a spraying component arranged above the disk, wherein the spraying component is used for spraying a liquid medicine to the surface of the wafer, and the liquid medicine flows into a groove on the lower surface of the disk after contacting with the wafer and flows out through a liquid outlet pipe communicated with the groove. The existing method is to directly discharge the liquid medicine flowing out of the liquid outlet pipe, which causes waste. Therefore, a system capable of recycling the chemical solution is needed.
Due to the improvement of automation, the wet etching process of semiconductor packaging is changed from the original groove type process to the single chip process, the groove type process has the function of recycling materials, the current design structure of the single chip process does not have the function of recycling materials, the technology is combined with the principle of the groove type process, the safety and the performance optimization of automatic monitoring are considered, and the recycling and full-automatic monitoring of the single chip process materials can be realized.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects in the prior art, and provides a liquid medicine recovery system which is used for carrying out structural transformation on a liquid medicine system of equipment so as to achieve the function of recycling liquid medicine, and meanwhile, the liquid medicine is monitored by a professional liquid medicine concentration analyzer so as to ensure the process stability of the liquid medicine recovery system.
In order to solve the technical problems, the utility model adopts the technical scheme that: the utility model provides a liquid medicine recovery system, includes new cistern and work cell, and the liquid medicine borrows the new cistern of transfer line route to the work cell, in the transfer line has set gradually liquid feed pump and flowmeter on the road, in the work cell output is provided with old liquid recovery system, old liquid recovery system and new cistern output intercommunication for retrieve by work cell exhaust old liquid and judge whether recycle it.
Further, the old liquid recovery system comprises an old liquid tank, a liquid medicine concentration analysis device is arranged between the output end of the working unit and the input end of the old liquid tank, a first three-way valve is arranged between the old liquid tank and the liquid medicine concentration analysis device, and the first three-way valve is controlled by a control center.
Furthermore, a second three-way valve is arranged between the new liquid tank and the liquid supply pump, the output end of the old liquid tank is communicated with the second three-way valve and used for putting the old liquid into the working unit again for use, and the second three-way valve is also controlled by the control center.
The device further comprises a timer, wherein the timer is positioned between the liquid medicine concentration analysis device and the working unit and transmits timing information to the control center.
Furthermore, a bubble removing device is arranged on the liquid conveying pipeline, and the bubble removing device is arranged between the flowmeter and the liquid supply pump and used for removing bubbles in the liquid medicine.
Furthermore, a three-way suck-back valve combination valve is arranged on the liquid conveying pipeline and used for controlling the development liquid not to have redundant liquid drops on the product after being sprayed.
Further, a temperature sensor is arranged between the flowmeter and the three-way suckback valve combination valve and used for monitoring the temperature of the liquid medicine.
Further, a pressure stabilizing valve is arranged between the bubble removing device and the flowmeter.
Further, a filter is arranged in front of the liquid supply pump.
Compared with the prior art, the utility model has the beneficial effects that:
1) a recycling circulation system is added on the original liquid medicine conveying system, and the concentration and the components of the liquid medicine are ensured to meet the preset standard through a liquid medicine concentration detection device;
2) the recycling can be carried out according to the operation time, and the maximization of the recycling benefit is achieved.
Drawings
The disclosure of the present invention is illustrated with reference to the accompanying drawings. It is to be understood that the drawings are designed solely for the purposes of illustration and not as a definition of the limits of the utility model. In the drawings, like reference numerals are used to refer to like parts. Wherein:
fig. 1 schematically shows a schematic configuration diagram of a chemical liquid recovery system according to an embodiment of the present invention.
Fig. 2 schematically shows a schematic configuration diagram of a liquid medicine recovering system according to another embodiment of the present invention.
Reference numbers in the figures: 1-a fresh liquid tank, 2-a second three-way valve, 3-a filter, 4-a liquid supply pump, 5-a defoaming device, 6-a pressure stabilizing valve, 7-a flow meter, 8-a temperature sensor, 9-a three-way suck-back valve combination valve, 10-a working unit, 11-a timer, 12-a liquid medicine concentration analysis device, 13-a first three-way valve, 14-an old liquid tank, 15-a third three-way valve and 16-a waste liquid recovery tank.
Detailed Description
It is easily understood that according to the technical solution of the present invention, a person skilled in the art can propose various alternative structures and implementation ways without changing the spirit of the present invention. Therefore, the following detailed description and the accompanying drawings are merely illustrative of the technical aspects of the present invention, and should not be construed as all of the present invention or as limitations or limitations on the technical aspects of the present invention.
The utility model provides a liquid medicine recovery system, includes fresh liquid groove 1 and operating unit 10, and the liquid medicine is by transfer line route fresh liquid groove 1 transport to operating unit 10, has set gradually liquid feed pump 4 and flowmeter 7 on the transfer line, will be located the liquid medicine of fresh liquid groove 1 and take out and supply the liquid medicine to operating unit 10 by liquid feed pump 4, is provided with filter 3 before liquid feed pump 4, and flowmeter 7 is used for the liquid medicine volume of real-time supervision confession to operating unit 10. Still set gradually between feed pump 4 and flowmeter 7 and remove bubble device 5 and pressure stabilizing valve 6, the existence of bubble device 5 then can remove the interior bubble of liquid medicine in order to guarantee the flow stability of liquid medicine, and the existence of pressure stabilizing valve 6 makes liquid medicine can keep relatively stable pressure when carrying to flowmeter 7, guarantees its flow stability, and then the data that flowmeter 7 surveyed can be relatively accurate.
The liquid conveying pipeline is also provided with a temperature sensor 8 and a three-way suckback valve combination valve 9, the three-way suckback valve combination valve 9 is arranged in front of the input end of the working unit 10 and used for controlling the developing solution not to have redundant liquid drops on a product after being sprayed, and the temperature sensor 8 is used for monitoring the temperature of the liquid medicine in real time and is convenient to regulate and control.
The old liquid recovery system is connected to the output end of the working unit 10 and comprises an old liquid tank 14, a liquid medicine concentration analysis device 12 is arranged between the output end of the working unit 10 and the input end of the old liquid tank 14, a first three-way valve 13 is arranged between the old liquid tank 14 and the liquid medicine concentration analysis device 12 and is controlled by a control center, a second three-way valve 2 is arranged between the new liquid tank 1 and the liquid supply pump 4, the output end of the old liquid tank 14 is communicated with the second three-way valve 2 and is used for putting old liquid into the working unit 10 again, and the second three-way valve 2 is also controlled by the control center.
According to the first embodiment of the present invention, as shown in fig. 1, liquid level measuring devices such as liquid level meters can be disposed in the new liquid tank 1 and the old liquid tank 14, and the liquid level meters can monitor the liquid level information in the new liquid tank 1 and the old liquid tank 14 in real time and transmit the information to the control center. The control center is provided with lower liquid level limits of the new liquid tank 1 and the old liquid tank 14, when the liquid level in the new liquid tank 1 reaches or is lower than the lower liquid level limit, the second three-way valve 2 is switched, the old liquid tank 14 supplies liquid medicine to the working unit 10 through the liquid conveying pipe, and simultaneously the liquid medicine can be supplied to the new liquid tank 1. When the liquid level of the old liquid tank 14 reaches the lower limit of the liquid level or is lower than the lower limit of the liquid level, the second three-way valve 2 is switched again, so that the new liquid tank 1 supplies liquid medicine through the transfusion pipeline, and the operation is repeated. In the process, the liquid medicine concentration analyzing device 12 analyzes the concentration and the components of the old liquid medicine output by the working unit 10 in real time, transmits the analysis result to the control center, and outputs the old liquid medicine to the old liquid tank 14 when the old liquid medicine output by the working unit 10 meets the preset standard; when the old chemical liquid does not meet the predetermined standard, the old chemical liquid is discharged to the waste liquid recovery tank 16.
Since the concentration and the component of the old medical solution have a high probability of not meeting the preset standard when the old medical solution is used for a long time, the timer 11 and the third three-way valve 15 are added in the second embodiment of the present application. As shown in fig. 2, a timer 11 is provided between the operating unit 10 and the chemical solution concentration analyzer 12, and the third three-way valve 3 is controlled to deliver the old chemical solution to the chemical solution concentration analyzer 12 before the timer 11 counts the target time; when the timer 11 reaches the target time, the third three-way valve 3 is controlled to deliver the old chemical to the waste liquid recovery tank 16. In a special case, the chemical solution in the old liquid tank 14 is reused only once and is discharged directly to the waste liquid recovery tank 16 by the third three-way valve 15 without returning to the old liquid tank 14.
In the utility model, the concentration information of the old liquid medicine is analyzed in real time by the liquid medicine concentration analysis device 12, the reuse frequency of the old liquid medicine is limited based on the timer 11, and the use condition of the old liquid medicine is controlled by controlling a plurality of three-way valves by the control center. The utility model does not limit the type of the control center, and only needs to realize corresponding functions of receiving information, judging and controlling.
The liquid medicine recovery system provided by the utility model can recover liquid medicine according to the requirements of different rotating speeds in the process, and meanwhile, the automatic liquid medicine concentration analysis device is used for controlling, so that the process stability is guaranteed, the aim of reducing the cost and increasing the gain is achieved by aiming at the recovery and reutilization of the liquid medicine, and the related cost of semiconductor materials can be reduced by 30% by preliminary estimation.
The technical scope of the present invention is not limited to the above description, and those skilled in the art can make various changes and modifications to the above-described embodiments without departing from the technical spirit of the present invention, and such changes and modifications should fall within the protective scope of the present invention.
Claims (9)
1. A liquid medicine recovery system comprises a fresh liquid tank (1) and a working unit (10), liquid medicine is transported to the working unit (10) from the fresh liquid tank (1) through a liquid transport pipeline, a liquid supply pump (4) and a flowmeter (7) are sequentially arranged on the liquid transport pipeline, and the liquid medicine recovery system is characterized in that an old liquid recovery system is arranged at the output end of the working unit (10) and is communicated with the output end of the fresh liquid tank (1);
old liquid recovery system includes old cistern (14), in be provided with liquid medicine concentration analysis device (12) between work unit (10) output to old cistern (14) input, be provided with first three-way valve (13) between old cistern (14) and liquid medicine concentration analysis device (12), first three-way valve (13) are used for under the old liquid medicine of work unit (10) output accords with the condition of predetermineeing the standard, export old liquid medicine extremely old cistern (14), perhaps under the condition that old liquid medicine is not conform to the predetermined standard, directly discharges old liquid medicine.
2. The medical liquid recycling system according to claim 1, wherein a second three-way valve (2) is disposed between the new liquid tank (1) and the liquid supply pump (4), and the output end of the old liquid tank (14) is communicated with the input end of the second three-way valve (2) for delivering the old medical liquid in the old liquid tank (14) to the liquid supply pump (4) when the liquid level in the new liquid tank (1) drops to the lower limit of the liquid level.
3. The medical fluid recycling system according to claim 2, further comprising a timer (11) and a third three-way valve (15), wherein said timer (11) is located between the medical fluid concentration analyzing device (12) and the working unit (10) for directly discharging the old medical fluid through said third three-way valve (15) in case of counting the target time.
4. The medical liquid recovery system according to claim 3, further comprising a waste liquid recovery tank (16), wherein an input end of the waste liquid recovery tank (16) is connected to an output end of the first three-way valve (13) or the third three-way valve (15) for receiving waste liquid.
5. The medical fluid recovery system according to claim 1, wherein a bubble removing device (5) is further provided on the fluid line, and the bubble removing device (5) is provided between the flow meter (7) and the fluid supply pump (4) to remove bubbles in the medical fluid.
6. The medical liquid recovery system according to claim 1, wherein a three-way suck-back valve combination valve (9) is further disposed on the infusion line.
7. The medical liquid recovery system according to claim 6, wherein a temperature sensor (8) is further disposed between the flow meter (7) and the three-way suckback valve combination valve (9).
8. A medical liquid recovery system according to claim 7, characterized in that a pressure maintaining valve (6) is further arranged between the bubble removing device (5) and the flow meter (7).
9. Medical fluid recycling system according to claim 8, characterized in that a filter (3) is arranged before the fluid supply pump (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121818293.6U CN216900583U (en) | 2021-08-05 | 2021-08-05 | Liquid medicine recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121818293.6U CN216900583U (en) | 2021-08-05 | 2021-08-05 | Liquid medicine recovery system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216900583U true CN216900583U (en) | 2022-07-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121818293.6U Active CN216900583U (en) | 2021-08-05 | 2021-08-05 | Liquid medicine recovery system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216900583U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118919448A (en) * | 2024-07-19 | 2024-11-08 | 吉姆西半导体科技(无锡)股份有限公司 | Liquid supply method, liquid supply device, electronic equipment and computer readable storage medium |
-
2021
- 2021-08-05 CN CN202121818293.6U patent/CN216900583U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118919448A (en) * | 2024-07-19 | 2024-11-08 | 吉姆西半导体科技(无锡)股份有限公司 | Liquid supply method, liquid supply device, electronic equipment and computer readable storage medium |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 210000 No. 8, Linchun Road, Pukou Economic Development Zone, Pukou District, Nanjing, Jiangsu Province Patentee after: Jiangsu Xinde Semiconductor Technology Co.,Ltd. Country or region after: China Address before: 211800 a-11, 69 Shuangfeng Road, Pukou Economic Development Zone, Pukou District, Nanjing City, Jiangsu Province Patentee before: Jiangsu Xinde Semiconductor Technology Co.,Ltd. Country or region before: China |
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| CP03 | Change of name, title or address |