CN104971522B - Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof - Google Patents
Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof Download PDFInfo
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- CN104971522B CN104971522B CN201410146171.5A CN201410146171A CN104971522B CN 104971522 B CN104971522 B CN 104971522B CN 201410146171 A CN201410146171 A CN 201410146171A CN 104971522 B CN104971522 B CN 104971522B
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- pipeline
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- 239000012530 fluid Substances 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000004065 semiconductor Substances 0.000 title claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 110
- 239000002699 waste material Substances 0.000 claims abstract description 10
- 238000004064 recycling Methods 0.000 claims description 8
- 238000009825 accumulation Methods 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 230000008676 import Effects 0.000 description 3
- 239000007921 spray Substances 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention belongs to the field of fluid treatment in a semiconductor treatment system and particularly relates to a fluid bubble removal apparatus in the semiconductor treatment system and a bubble removal method thereof. The fluid bubble removal apparatus includes a liquid container, a liquid pump, a three-way joint, a first controller, a second controller, a first on-off valve, a second on-off valve, a nozzle, a waste liquid recycle barrel and a liquid pump controller. The three-way joint is communicated with the liquid pump and the first on-off valve and the second on-off valve through pipelines. The liquid container is communicated with the liquid pump through pipelines and is used for providing liquid to the bubble removal apparatus. The waste liquid recycle barrel is communicated with the first on-off valve through the pipelines and recycles liquid flown out from the first on-off valve. The nozzle is communicated with the second on-off valve through the pipelines so that liquid flown out from the second on-off valve enters the nozzle. In the method, the switches of the on-off valves and operation of the liquid pump are controlled by the controllers to remove the bubbles in the fluid. The invention can achieve bubble removal of fluid in micro flow rate, ensures stable flow rate of the fluid at an outlet, is simple in added apparatuses and is convenient to control.
Description
Technical field
The invention belongs to the field that in semiconductor processing system, convection cell is processed, specifically a kind of semiconductor processes system
Fluid air bubble eliminating device and its bubble removing method in system.
Background technology
In semiconductor processing system, the fluid of tiny flow quantity uses relatively frequently, because flow is less, therefore to flow
Stability requirement also higher.But it is frequently present of bubble in fluid, the fluctuation of flow can be caused, the fluid of tiny flow quantity is come
Say that these fluctuations do not allow.Especially during spray-bonding craft, once with the presence of bubble, the glued membrane that crystal column surface sprays
Thickness will be uneven, affects product yield.
In order to improve the product yield in these technical processs, the gas removed in fluid becomes a crucial technique
Point, that is, in fluid bubble removing.The bubble removing mode commonly used at present has:
1. toward after filling liquid in container, container seals, and then persistently evacuation is put in the middle of production for a period of time afterwards；
2. increase buffer (buffer) in these fluid circuits, this just can be by mixed gas clean-up in a fluid.
But mode 1, a problem is that less efficient, the single inclined heated plate of needs, can affect productivity ratio.And
Mode 2, for the fluid of big flow, effect can be said to be permissible；And it is inapplicable for the fluid of low discharge, due to rill
The feedway back pressure of amount fluid is relatively low, greatly may will not flow out after fluid entrance buffer, and the cleaning of buffer
It is a difficult problem.
Content of the invention
In order to solve the problems, such as existing remove that gas procedure in fluid exists above-mentioned, it is an object of the invention to provide one
Plant fluid air bubble eliminating device and its bubble removing method in semiconductor processing system.
The purpose of the present invention is achieved through the following technical solutions:
The air bubble eliminating device of the present invention include liquid container, liquid pump, three way cock, the first controller, the first on-off valve,
Nozzle, second controller, the second on-off valve, waste liquor recycling bin and liquid pump controller, wherein three way cock pass through pipeline respectively
With the liquid pump by liquid pump controller controlling switch, the first on-off valve by the first controller controlling switch and by second control
Second on-off valve of device controlling switch is connected, and described liquid container is connected with liquid pump by pipeline, is described bubble removing
Device provides liquid, and described waste liquor recycling bin is connected with the first on-off valve by pipeline, reclaims through described first on-off valve stream
The liquid going out, described nozzle is connected with the second on-off valve by pipeline, enters spray through the liquid that described second on-off valve flows out
Mouth.
Wherein: three joints of described three way cock are respectively inlet, air vent and liquid outlet, this three way cock is different
Footpath threeway, that is, described inlet and liquid outlet are joint, a diameter of inlet of described air vent and the liquid outlet of same diameter
More than two times of diameter；Straight up, straight down, described inlet is located at air vent and liquid outlet to liquid outlet to described air vent
Between；Pipeline between described three way cock and the first on-off valve is the vertical pipeline perpendicular to horizontal plane, described first break-make
Valve is located at the surface of three way cock.
The step of bubble removing method of the present invention is divided into:
Readiness for operation, the first controller controls the first on-off valve to be in open mode, and second controller controls second
On-off valve is closed, and liquid pump controller controls liquid pump feed flow, by between described first on-off valve and three way cock
Pipeline fill out hydraulically full after, described liquid pump quits work, and the first on-off valve is closed, and surplus liquid enters described devil liquor recovery
Bucket；
Working condition, described second on-off valve is opened, and liquid pump controller controls liquid pump feed flow, and liquid is logical through second
Disconnected valve enters described nozzle, and the bubble in liquid rises to the bottom accumulation of described first on-off valve；
Exhaust condition, this exhaust condition is identical with described readiness for operation, and the first on-off valve is opened, and the second on-off valve closes
Close, liquid pump controller controls liquid pump feed flow, the gas of the bottom accumulation of the first on-off valve is discharged with liquid；
Wherein: during described readiness for operation, the liquid pump feed flow time is 2～5 seconds, closes described liquid pump afterwards
And first on-off valve；During described working condition, because the pipeline between the first on-off valve and three way cock is in Job readiness
Hydraulically full in state procedure, bubble can rise to the bottom of the first on-off valve always and accumulate, and enters the second on-off valve
Do not contain bubble in liquid, and flow supplies flow quantity identical with described liquid pump；Described exhaust condition is in each shape that works
Carry out before state once it is ensured that the pipeline between the first on-off valve and described three way cock described in when work starts is hydraulically full.
Advantages of the present invention with good effect is:
1. the air bubble eliminating device of the present invention adopts multiple automatic valves, and structure is simple, high degree of automation.
2. straight up, the pipeline between three way cock and the first on-off valve is vertical to the air vent of three way cock of the present invention
, it is easy to institute's bubbles in liquid and rise and discharge.
3. bubble removing method of the present invention can be not take up the single time realize tiny flow quantity fluid bubble remove, and protect
The stability of flow of card fluid.
Brief description
Fig. 1 is the overall structure diagram of the present invention；
Fig. 2 is the structural representation of three way cock in Fig. 1；
Wherein: 1 is liquid container, 2 is liquid pump, and 3 is three way cock, and 4 is the first controller, and 5 is the first on-off valve, 6
For nozzle, 7 is second controller, and 8 is the second on-off valve, and 9 is waste liquor recycling bin, and 10 is liquid pump controller, and 11 is inlet,
12 is air vent, and 13 is liquid outlet.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
Invention is only related to fluid circuit part in semiconductor processing system, that is, only convection cell does bubble removing process, this
A little fluids are usually cleanout fluid, deionized water, photoresist, developer solution, trimming liquid or etching liquid, but are not limited to this, Ren Heying
For the fluid of semiconductor processing system, range of flow micro fluid between 35ml/ minute between 0.1 μ l/ minute, all can make
Remove bubble removing with the method.
As shown in Figure 1 and Figure 2, air bubble eliminating device of the present invention includes liquid container 1, liquid pump 2, three way cock 3, first control
Device 4 processed, the first on-off valve 5, nozzle 6, second controller 7, the second on-off valve 8, waste liquor recycling bin 9 and liquid pump controller 10,
Three joints of wherein three way cock 3 are respectively inlet 11, air vent 12 and liquid outlet 13, and air vent 12 straight up, goes out
Straight down, inlet 11 is located in the middle of air vent 12 and liquid outlet 13 liquid mouth 13.The inlet 11 of three way cock 3 passes through pipeline
Outlet with liquid pump 2 is connected, and the import of liquid pump 2 is connected with liquid container 1 by pipeline, and this liquid pump 2 is by liquid
Pump controller 10 controls；First on-off valve 5 is controlled, is located at the surface of three way cock 3 by the first controller 4, three way cock's 3
Air vent 12 is connected with the import of the first on-off valve 5 by pipeline, and pipeline and devil liquor recovery are passed through in the outlet of the first on-off valve 5
Bucket 9 is connected；The liquid outlet 13 of three way cock 3 is connected with the import of the second on-off valve 8 by pipeline, this second on-off valve 8
Controlled by second controller 7, the outlet of the second on-off valve 8 is connected with nozzle 6 by pipeline.
Three way cock 3 is reducer tee, and that is, inlet 11 and liquid outlet 13 are connecing of same diameter (internal-and external diameter all same)
(external diameter of air vent 12 is inlet 11 to more than two times of head, a diameter of inlet 11 of air vent 12 and liquid outlet 13 diameter
With more than two times of liquid outlet 13 external diameter, the internal diameter of air vent 12 is more than two times of inlet 11 and liquid outlet 13 internal diameter, and
Identical with the multiple of external diameter)；It is 1/8 that such as glue spraying commonly uses pipeline ", then the caliber of inlet and liquid outlet is 1/8 ", air vent
At least 1/4 ".Pipeline between first on-off valve 5 and three way cock 3 is the vertical pipeline perpendicular to horizontal plane, while pipeline
Length is between 20mm to 50mm.
The bubble removing method of air bubble eliminating device of the present invention, step is divided into:
Readiness for operation, the pipeline between the first on-off valve 5 and three way cock 3 is filled out hydraulically full；In the process,
Second controller 7 controls the second on-off valve 8 to be closed, and the first controller 4 controls the first on-off valve 5 to be in open shape
State, liquid pump controller 10 controls liquid pump 2 feed flow, and liquid will enter the first on-off valve 5 and three way cock by three way cock 3
Pipeline between 3, unnecessary liquid is discharged into waste liquor recycling bin 9；Service time is 2～5 seconds (present invention is 2 seconds), closes afterwards
Close liquid pump 2 and the first on-off valve 5.
Working condition, the first controller 4 controls the first on-off valve 5 to be closed, and second controller 7 controls second to lead to
Disconnected valve 8 is in open mode, and liquid pump controller 10 controls liquid pump 2 feed flow, and liquid will enter nozzle through the second on-off valve 8
6, the bubble containing in liquid will rise in three way cock 3, because the pipeline between the first on-off valve 5 and three way cock 3 fills
Full liquid, bubble can rise to the bottom of the first on-off valve 5 always, and accumulates herein, and enters the liquid of the second on-off valve 8
In do not contain bubble, and flow is identical with the flow that liquid pump 2 exports.
Exhaust condition, this state is identical with readiness for operation, and the second control unit device 7 controls the second on-off valve 8 to be in pass
Closed state, the first controller 4 controls the first on-off valve 5 to be in open mode, and liquid pump controller 10 controls liquid pump 2 feed flow,
Liquid will enter the pipeline between the first on-off valve 5 and three way cock 3 by three way cock 3, and service time is 2 seconds, closes afterwards
Close liquid pump 2 and the first on-off valve 5.Exhaust condition is to carry out before each working condition once it is ensured that the when work starts
Pipeline between one on-off valve 5 and three way cock 3 is hydraulically full.
First and second controller 4,7 of the present invention is commercial products, purchases in Japanese smc company, model syj314-
5lz；Liquid pump controller 10 is commercial products, purchases in vici company of the U.S., model cp3-cm1-p；Liquid pump 2 is commercial
Product, purchases in vici company of the U.S., model cp3-8182-625d.
Claims (4)
1. in a kind of semiconductor processing system fluid air bubble eliminating device bubble removing method it is characterised in that: include liquid container
(1), liquid pump (2), three way cock (3), the first controller (4), the first on-off valve (5), nozzle (6), second controller (7),
Second on-off valve (8), waste liquor recycling bin (9) and liquid pump controller (10), wherein three way cock (3) respectively pass through pipeline with by
The liquid pump (2) of liquid pump controller (10) controlling switch, the first on-off valve (5) by the first controller (4) controlling switch and
It is connected by second on-off valve (8) of second controller (7) controlling switch, described liquid container (1) passes through pipeline and liquid pump
(2) it is connected, provides liquid for described air bubble eliminating device, described waste liquor recycling bin (9) passes through pipeline and the first on-off valve (5) phase
The liquid that connection, recovery are flowed out through described first on-off valve (5), described nozzle (6) is connected with the second on-off valve (8) by pipeline
Liquid entrance nozzle (6) that is logical, flowing out through described second on-off valve (8), the step of bubble removing method is divided into:
Readiness for operation, the first controller (4) controls the first on-off valve (5) to be in open mode, and second controller (7) controls
Second on-off valve (8) is closed, and liquid pump controller (10) controls liquid pump (2) feed flow, by described first on-off valve
(5) pipeline and three way cock (3) between fill out hydraulically full after, described liquid pump (2) quits work, the first on-off valve (5) close
Close, surplus liquid enters described waste liquor recycling bin (9)；
Working condition, described second on-off valve (8) is opened, and liquid pump controller (10) controls liquid pump (2) feed flow, and liquid passes through
Second on-off valve (8) enters described nozzle (6), and the bubble in liquid rises to the bottom accumulation of described first on-off valve (5)；
Exhaust condition, this exhaust condition is identical with described readiness for operation, and the first on-off valve (5) is opened, the second on-off valve (8)
Close, liquid pump controller (10) controls liquid pump (2) feed flow, the gas of the bottom accumulation of the first on-off valve (5) is arranged with liquid
Go out.
2. the bubble removing method as described in claim 1 it is characterised in that: liquid pump (2) during described readiness for operation
The feed flow time is 2～5 seconds, closes described liquid pump (2) and the first on-off valve (5) afterwards.
3. the bubble removing method as described in claim 1 it is characterised in that: during described working condition, due to the first break-make
Pipeline between valve (5) and three way cock (3) is hydraulically full during readiness for operation, and bubble can rise to first always
The bottom of on-off valve (5) is simultaneously accumulated, and enters and do not contain bubble in the liquid of the second on-off valve (8), and flow and described liquid
Body pump (2) supplies flow quantity identical.
4. the bubble removing method as described in claim 1 it is characterised in that: described exhaust condition is before each working condition
Carry out once it is ensured that the pipeline between the first on-off valve (5) and described three way cock (3) described in when work starts is hydraulically full.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410146171.5A CN104971522B (en) | 2014-04-11 | 2014-04-11 | Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410146171.5A CN104971522B (en) | 2014-04-11 | 2014-04-11 | Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104971522A CN104971522A (en) | 2015-10-14 |
| CN104971522B true CN104971522B (en) | 2017-01-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410146171.5A Active CN104971522B (en) | 2014-04-11 | 2014-04-11 | Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107050932A (en) * | 2017-06-06 | 2017-08-18 | 利穗科技(苏州)有限公司 | Double buffering type bubble trap |
| CN107999334B (en) * | 2017-12-26 | 2019-12-03 | 武汉华星光电半导体显示技术有限公司 | A kind of high viscosity liquid is for arranging device |
| CN109580321B (en) * | 2018-11-27 | 2021-05-18 | 迪瑞医疗科技股份有限公司 | Liquid path bubble removing device and method |
| CN110898289A (en) * | 2019-12-27 | 2020-03-24 | 南微医学科技股份有限公司 | Pressure pump and pressure pump control system |
| CN114248555B (en) * | 2021-12-02 | 2023-02-28 | 镭德杰标识科技武汉有限公司 | Ink supply system with high integration |
| CN114914178B (en) * | 2022-05-18 | 2025-03-28 | 长江存储科技有限责任公司 | Semiconductor cleaning system, cleaning method and forming method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102258886A (en) * | 2010-05-27 | 2011-11-30 | 亚泰半导体设备股份有限公司 | Device for removing liquid bubbles |
| CN202259530U (en) * | 2011-09-21 | 2012-05-30 | 宁德新能源科技有限公司 | Device for removing bubbles in liquid |
-
2014
- 2014-04-11 CN CN201410146171.5A patent/CN104971522B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102258886A (en) * | 2010-05-27 | 2011-11-30 | 亚泰半导体设备股份有限公司 | Device for removing liquid bubbles |
| CN202259530U (en) * | 2011-09-21 | 2012-05-30 | 宁德新能源科技有限公司 | Device for removing bubbles in liquid |
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| Publication number | Publication date |
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| CN104971522A (en) | 2015-10-14 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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