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CN216645258U - Object carrying device of measuring device and measuring device - Google Patents

Object carrying device of measuring device and measuring device Download PDF

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Publication number
CN216645258U
CN216645258U CN202121557992.XU CN202121557992U CN216645258U CN 216645258 U CN216645258 U CN 216645258U CN 202121557992 U CN202121557992 U CN 202121557992U CN 216645258 U CN216645258 U CN 216645258U
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stage
carrier
level
table top
measuring device
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叶静芳
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Suzhou University
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Suzhou University
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Abstract

本申请实施例提供一种测量装置的载物器以及一种测量装置。其中,载物器包括载物台,所述载物台用于放置待测元件;调节装置,所述调节装置用于调节所述载物台的倾斜角度;至少一个水平仪,所述至少一个水平仪固定于所述载物台。本申请实施例中,通过在载物台上设置至少一个水平仪,可以方便快捷的调节确认载物台的水平状态,提高测量效率,且无需额外使用双面反射镜作为辅助测量用具。

Figure 202121557992

Embodiments of the present application provide an object carrier of a measuring device and a measuring device. Wherein, the object carrier includes a stage, which is used to place the component to be tested; an adjusting device, which is used to adjust the inclination angle of the stage; at least one level, the at least one level fixed on the stage. In the embodiment of the present application, by arranging at least one level on the stage, the level state of the stage can be adjusted and confirmed conveniently and quickly, the measurement efficiency can be improved, and there is no need to additionally use a double-sided mirror as an auxiliary measurement tool.

Figure 202121557992

Description

一种测量装置的载物器以及一种测量装置Object carrier of a measuring device and a measuring device

技术领域technical field

本申请涉及测量技术领域,尤其涉及一种测量装置的载物器以及一种测量装置。The present application relates to the technical field of measurement, and in particular, to a carrier of a measurement device and a measurement device.

背景技术Background technique

对于包含有载物器的测量装置,为了保证测量结果的准确性,载物器的载物台需要保持水平。以测量三棱镜顶角的装置为例,其包含有载物器,载物器设置有载物台,载物台用于放置待测的光学元件三棱镜。为了保证三棱镜顶角测量结果的准确性,载物台需要保持水平。现有的测量三棱镜顶角的装置是通过在载物台上放置一个双面反射镜,调节载物台的倾斜角度并通过望远镜来观测反射面反射回来的反射像以确定载物台处在水平状态。然而,通过上述装置来调节确认载物台的水平状态很不方便,不利于测量效率,并且会用到额外的双面反射镜作为辅助工具,增加测量装置的用具数量。For the measuring device including the object carrier, in order to ensure the accuracy of the measurement results, the stage of the object carrier needs to be kept level. Taking the device for measuring the apex angle of a triangular prism as an example, it includes an object carrier, and the object carrier is provided with an object stage, and the object stage is used to place the triangular prism of the optical element to be measured. In order to ensure the accuracy of the measurement of the vertex angle of the triangular prism, the stage needs to be kept level. The existing device for measuring the apex angle of a triangular prism is to place a double-sided mirror on the stage, adjust the inclination angle of the stage, and observe the reflection image reflected by the reflective surface through a telescope to confirm that the stage is horizontal. state. However, it is inconvenient to adjust and confirm the level state of the stage through the above device, which is not conducive to the measurement efficiency, and additional double-sided mirrors are used as auxiliary tools to increase the number of tools of the measurement device.

实用新型内容Utility model content

鉴于上述问题,提出了本申请,以便解决上述问题或至少部分解决上述问题的测量装置的载物器以及测量装置。In view of the above-mentioned problems, the present application is made in order to solve the above-mentioned problems or at least partially solve the above-mentioned problems, a carrier for a measurement device and a measurement device.

于是,本申请第一方面提供了一种测量装置的载物器。该载物器包括:Therefore, a first aspect of the present application provides a carrier of a measuring device. The carrier includes:

载物台,所述载物台用于放置待测元件;a stage, which is used to place the component to be tested;

调节装置,所述调节装置用于调节所述载物台的倾斜角度;an adjustment device, the adjustment device is used to adjust the tilt angle of the stage;

至少一个水平仪,所述至少一个水平仪固定于所述载物台。At least one spirit level, the at least one spirit level is fixed to the stage.

本申请的第二方面提供一种测量装置,应用于测量三棱镜顶角。该装置包括本申请第一方面的载物器,待测元件为三棱镜,三棱镜放置于所述载物器的所述载物台,所述测量装置还包括:A second aspect of the present application provides a measuring device, which is applied to measure the apex angle of a triangular prism. The device includes the object carrier of the first aspect of the present application, the component to be measured is a triangular prism, and the triangular prism is placed on the object stage of the object carrier, and the measurement device further includes:

平行光管,用于产生平行光,所述平行光管对准所述三棱镜顶角;a collimator light pipe for generating parallel light, and the collimator light pipe is aligned with the vertex angle of the triangular prism;

望远镜,所述望远镜能够围绕所述三棱镜移动,用于接收平行光以确定所述平行光的行进方向;a telescope, which can be moved around the triangular prism for receiving parallel light to determine the traveling direction of the parallel light;

数据读取单元,用于读取所述望远镜的角度位置参数。The data reading unit is used for reading the angular position parameter of the telescope.

本申请实施例提供的技术方案中,通过在载物台上设置至少一个水平仪来配合调节装置,可以方便快捷的调节确认载物台的水平状态,提高测量效率,且无需额外使用双面反射镜作为辅助测量用具。In the technical solutions provided by the embodiments of the present application, by arranging at least one level on the stage to cooperate with the adjustment device, the level state of the stage can be adjusted and confirmed conveniently and quickly, the measurement efficiency is improved, and there is no need to use additional double-sided mirrors as an auxiliary measuring tool.

附图说明Description of drawings

为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.

图1为本申请提供的测量装置的示意图;1 is a schematic diagram of a measuring device provided by the application;

图2为图1中上台面的局部放大示意图;Fig. 2 is the partial enlarged schematic diagram of the upper table top in Fig. 1;

图3为图1中上台面的另一实施方式的局部放大示意图;Fig. 3 is a partial enlarged schematic view of another embodiment of the upper table top in Fig. 1;

图4为本申请提供的测量原理的示意图。FIG. 4 is a schematic diagram of the measurement principle provided by the present application.

具体实施方式Detailed ways

下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述。显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of this application.

需要说明的是,本文中的“第一”、“第二”等描述,是用于区分不同的消息、设备、模块等,不代表先后顺序,也不限定“第一”和“第二”是不同的类型。It should be noted that the descriptions such as "first" and "second" in this document are used to distinguish different messages, devices, modules, etc., and do not represent a sequence, nor do they limit "first" and "second" are different types.

图1至图3示出了一种测量装置的载物器,包括载物台、调节装置20和至少一个水平仪。其中,载物台用于放置待测元件,调节装置20用于调节所述载物台的倾斜角度,所述至少一个水平仪固定于所述载物台。根据所述至少一个水平仪的指示结果,可以方便快捷的确定载物台是否处于水平状态,如果载物台没有处于水平状态,则可通过调节装置调节载物台的倾斜角度,如果载物台已经处于水平状态,则停止调节,可将待测元件放置于载物台,进行后续测量步骤。Figures 1 to 3 show a carrier of a measuring device, comprising a stage, an adjustment device 20 and at least one spirit level. Wherein, the object stage is used to place the component to be tested, the adjusting device 20 is used to adjust the inclination angle of the object stage, and the at least one level is fixed on the object stage. According to the indication result of the at least one level, it is convenient and quick to determine whether the stage is in a horizontal state. If the stage is not in a horizontal state, the inclination angle of the stage can be adjusted by the adjusting device. If it is in a horizontal state, the adjustment is stopped, and the component to be tested can be placed on the stage for subsequent measurement steps.

在一具体实例中,所述至少一个水平仪内嵌在载物台的支撑平面以下,通过此种结构设计,在不减小载物台支撑面积的情况下实现了水平仪的设置。需要说明的是,支撑平面即为载物台与待测元件接触的平面。In a specific example, the at least one level is embedded below the support plane of the stage. Through this structural design, the level can be set without reducing the support area of the stage. It should be noted that the support plane is the plane in which the stage is in contact with the component to be tested.

在一实施例中,水平仪的设置数量可仅为一个,如图2所示,即载物台仅设置了第一水平仪301。优选地,第一水平仪301的设置位置的中心与载物台的中心位置(如图2中的O)重叠。In one embodiment, the number of level gauges may be only one, as shown in FIG. 2 , that is, only the first level gauge 301 is set on the stage. Preferably, the center of the setting position of the first level 301 overlaps with the center position of the stage (O in FIG. 2 ).

在另一实施例中,所述至少一个水平仪为三个水平仪,即载物台设置了第一水平仪301、第二水平仪302和第三水平仪303。如图3所示,第一水平仪301、第二水平仪302和第三水平仪303围绕载物台的中心(如图3中的O)彼此呈120度的排布设置。由于制作工艺限制,载物台的各个部位并不是理想中的位于统一平面,因此通过在此种多个水平仪的排布设计,可以在调节时平衡载物台各个部位的水平状态,从而得到一个载物台的最佳水平平衡状态。In another embodiment, the at least one level is three levels, that is, the stage is provided with a first level 301 , a second level 302 and a third level 303 . As shown in FIG. 3 , the first level 301 , the second level 302 and the third level 303 are arranged around the center of the stage (O in FIG. 3 ) at 120 degrees to each other. Due to the limitation of the manufacturing process, the various parts of the stage are not ideally located on a uniform plane. Therefore, through the arrangement design of such multiple levels, the horizontal state of each part of the stage can be balanced during adjustment, so as to obtain a Optimum horizontal balance of the stage.

可选地,载物器还包括底座50,载物台包括下台面102和上台面101,下台面102与底座50固定连接,上台面101与底座50可移动连接,调节装置20连接下台面102和上台面101,调节装置20通过调整上台面101与下台面102之间的位置关系来调节载物台的倾斜角度。Optionally, the object carrier further includes a base 50 , the object stage includes a lower stage 102 and an upper stage 101 , the lower stage 102 is fixedly connected to the base 50 , the upper stage 101 is movably connected to the base 50 , and the adjusting device 20 is connected to the lower stage 102 With the upper table 101 , the adjusting device 20 adjusts the inclination angle of the stage by adjusting the positional relationship between the upper table 101 and the lower table 102 .

可选地,调节装置20为三个螺丝钉,三个螺丝钉垂直于下台面102设置,下台面102相应地设置有螺丝孔,三个螺丝钉可分别通过螺丝孔可上下移动,以对上台面101进行不同程度的抵顶,以分别调整载物台的上台面各个部分的高度,使得载物台达到水平状态。具体地,三个螺丝钉在上台面的投影点的连线构成等边三角形,以更好地对上台面101的各部位进行调节。需要说明的是,调节装置20也可为其他的可位移元件,并不以螺丝钉为限。Optionally, the adjusting device 20 is three screws, the three screws are arranged perpendicular to the lower table 102, the lower table 102 is correspondingly provided with screw holes, and the three screws can move up and down through the screw holes respectively, so as to perform the adjustment on the upper table 101. Different degrees of contact are used to adjust the height of each part of the upper surface of the stage, so that the stage can reach a horizontal state. Specifically, the line connecting the projection points of the three screws on the upper table surface forms an equilateral triangle, so as to better adjust each part of the upper table surface 101 . It should be noted that the adjusting device 20 can also be other displaceable elements, and is not limited to screws.

本申请还提供一种测量装置,应用于测量三棱镜顶角,所述测量装置包括载物器,载物器包括载物台、调节装置20和至少一个水平仪。其中,载物台用于放置待测元件三棱镜,调节装置用于调节所述载物台的倾斜角度,所述至少一个水平仪固定于载物台。根据所述至少一个水平仪的指示结果,可以方便快捷的确定载物台是否处于水平状态,如果载物台没有处于水平状态,则可通过调节装置调节载物台的倾斜角度,如果载物台已经处于水平状态,则停止调节,将待测元件三棱放置于载物台。测量装置还包括:产生平行光的平行光管70,平行光管70对准所述三棱镜顶角;望远镜80,望远镜80能够围绕三棱镜移动,用于接收平行光以确定所述平行光的行进方向;数据读取单元(未图示),用于读取望远镜80的角度位置参数。需要说明的是,数据读取单元为现有技术,例如数据读取单元为设置在测量装置上的刻度盘,但并不以此为限,在此不作过多阐述。The present application also provides a measuring device, which is applied to measure the apex angle of a triangular prism. The measuring device includes an object carrier, and the object carrier includes an object stage, an adjustment device 20 and at least one spirit level. Wherein, the stage is used to place the triangular prism of the component to be tested, the adjusting device is used to adjust the inclination angle of the stage, and the at least one level is fixed on the stage. According to the indication result of the at least one level, it is convenient and quick to determine whether the stage is in a horizontal state. If the stage is not in a horizontal state, the inclination angle of the stage can be adjusted by the adjusting device. If it is in a horizontal state, stop the adjustment, and place the triangular edge of the component to be tested on the stage. The measuring device further includes: a collimator light pipe 70 for generating parallel light, and the collimator light pipe 70 is aligned with the vertex angle of the triangular prism; the telescope 80, which can move around the triangular prism, is used to receive the parallel light to determine the traveling direction of the parallel light ; The data reading unit (not shown) is used to read the angular position parameters of the telescope 80 . It should be noted that the data reading unit is in the prior art, for example, the data reading unit is a dial set on the measuring device, but it is not limited to this, and will not be elaborated here.

在一实施例中,转动望远镜80(如图4所示),望远镜80在T1角度和T2角度能够接收到所述平行光管射出的所述平行光,根据T1、T2数值,可以计算出所述三棱镜顶角的数值α,即α=Φ/2=|T2-T1|/2。In one embodiment, by rotating the telescope 80 (as shown in FIG. 4 ), the telescope 80 can receive the parallel light emitted by the collimator at the T1 angle and the T2 angle. The numerical value α of the apex angle of the triangular prism is described, that is, α=Φ/2=|T2-T1|/2.

综上,本申请实施例提供的技术方案中,通过在载物台上设置至少一个水平仪来配合调节装置,可以方便快捷的调节确认载物台的水平状态,提高测量效率,且无需额外使用双面反射镜作为辅助测量用具。To sum up, in the technical solutions provided by the embodiments of the present application, by setting at least one level on the stage to cooperate with the adjustment device, the level state of the stage can be adjusted and confirmed conveniently and quickly, the measurement efficiency is improved, and there is no need to use additional dual Surface mirrors are used as auxiliary measuring tools.

以上各个实施例中的技术方案、技术特征在与本相冲突的情况下均可以单独,或者进行组合,只要未超出本领域技术人员的认知范围,均属于本申请保护范围内的等同实施例。The technical solutions and technical features in the above embodiments can be used alone or combined in the case of conflict with the present invention, as long as they do not exceed the cognitive scope of those skilled in the art, they all belong to the equivalent embodiments within the protection scope of the present application .

最后应说明的是:以上实施例仅用以说明本实用新型的技术方案,而非对其限制;尽管参照前述实施例对本实用新型进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本实用新型各实施例技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model, but not to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions recorded in the foregoing embodiments, or to perform equivalent replacements to some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit of the technical solutions of the embodiments of the present invention. and range.

Claims (7)

1. A carrier for a measuring device, comprising:
the object stage is used for placing a component to be tested;
the adjusting device is used for adjusting the inclination angle of the object stage; at least one level secured to the stage; the at least one level is three levels arranged at 120 degrees around the center of the object stage.
2. The carrier of claim 1, wherein the at least one level is embedded below a support plane of the carrier.
3. The carrier of claim 1, further comprising a base, wherein the carrier includes a lower table top and an upper table top, the lower table top is fixedly connected to the base, the upper table top is movably connected to the base, the adjustment device connects the lower table top and the upper table top, and the adjustment device adjusts the tilt angle of the carrier by adjusting the positional relationship between the upper table top and the lower table top.
4. The carrier of claim 3, wherein the adjustment means is three screws.
5. The carrier of claim 4, wherein the three screws are perpendicular to the lower deck.
6. The carrier as claimed in claim 4, wherein the lower deck is correspondingly provided with screw holes through which the three screws can be moved up and down, respectively.
7. The carrier of claim 4, wherein the three screws form an equilateral triangle when viewed in a projected position on the top deck.
CN202121557992.XU 2021-07-09 2021-07-09 Object carrying device of measuring device and measuring device Expired - Fee Related CN216645258U (en)

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Granted publication date: 20220531