CN215404490U

CN215404490U - Vacuum coating equipment

Info

Publication number: CN215404490U
Application number: CN202121299926.7U
Authority: CN
Inventors: 陈春奇; 陈卓; 许进; 周强
Original assignee: Shenzhen Hengjie Vacuum Technology Co ltd
Current assignee: Shenzhen Hengjie Vacuum Technology Co ltd
Priority date: 2021-06-10
Filing date: 2021-06-10
Publication date: 2022-01-04
Anticipated expiration: 2031-06-10

Abstract

The utility model discloses vacuum coating equipment which comprises a vacuum box, wherein two vertically symmetrical limiting slide rails are fixedly arranged at the left end and the rear end of the vacuum box, a sealing door is connected between the two limiting slide rails in a sliding manner, a sealing gasket is fixedly arranged at one end, close to the vacuum box, of the sealing door, an external component is arranged at one end, far away from the vacuum box, of the limiting slide rail at the lower side, a mounting frame is fixedly arranged at the front end of the vacuum box, a control end is fixedly arranged at the other end of the mounting frame, handles are fixedly arranged at the left end and the right end of the control end, a coating cabin access door is rotatably connected to the right part of the rear end of the vacuum box, and vacuumizing equipment is fixedly arranged at the rear end of the vacuum box. According to the vacuum coating equipment, the workpiece to be coated is placed and taken outside the vacuum box, the operation space is large, the operation is easy, the coating operation can be performed uninterruptedly, the large-batch coating of the workpiece is facilitated, the coating quality is high, and the practicability is high.

Description

Vacuum coating equipment

Technical Field

The utility model relates to the technical field of vacuum application, in particular to vacuum coating equipment.

Background

Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit it on an object to be coated (referred to as a substrate, a substrate or a base) is called vacuum coating. The prior vacuum coating equipment has the following disadvantages: 1. most of the existing vacuum coating equipment is provided with a placing component inside a vacuum box, so that a workpiece to be coated is inconvenient to place, and the coating equipment cannot perform coating operation when the coated workpiece is taken, which is not beneficial to coating of large-batch workpieces; 2. the storage amount of the placing components in the existing vacuum coating equipment is small, so that the one-time coating quantity of the coating equipment is small, and the coating yield is not improved; 3. most of the existing vacuum coating equipment is not provided with a cleaning function, namely, dust or adhesion substances are possibly adhered to the surface of a workpiece, so that the coating quality of the workpiece is influenced; 4. the control end of the existing vacuum coating equipment is inconvenient to use.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide vacuum coating equipment which can effectively solve the problems in the background technology.

In order to achieve the purpose, the utility model adopts the technical scheme that:

the utility model provides a vacuum coating equipment, includes the vacuum chamber, the equal fixed mounting in vacuum chamber left end and rear end has two longitudinal symmetry's spacing slide rail, two common sliding connection has the sealing door between the spacing slide rail, the sealing door is close to the one end fixed mounting of vacuum chamber has sealed the pad, the downside the one end that vacuum chamber was kept away from to spacing slide rail is provided with external subassembly, vacuum chamber front end fixed mounting has the mounting bracket, mounting bracket other end fixed mounting has the control end, the equal fixed mounting of control end left end and right-hand member has the handle, vacuum chamber rear end right part rotates and is connected with coating film storehouse access door, vacuum chamber rear end fixed mounting has the evacuation equipment, the evacuation equipment extends to the vacuum chamber inside, vacuum chamber rear end left part rotates and is connected with clean storehouse access door.

Preferably, the opening has all been opened to vacuum box left end front portion and right-hand member front portion, vacuum box inner chamber lower wall middle part fixed mounting has the baffle, vacuum box inner chamber lower wall right part fixed mounting has air supply and manipulator, vacuum box inner chamber lower wall left part fixed mounting has the coating machine, the anterior fixed mounting of vacuum box inner chamber lower wall has the transmission band, the transmission band is located the place ahead of manipulator, air supply and coating machine, vacuum box inner chamber upper wall fixed mounting has last spacing spout, the transmission band upper end is provided with places the subassembly, place the subassembly upper end and extend to in the supreme spacing spout.

Preferably, the placing component comprises a base, a hanging plate is fixedly mounted in the middle of the upper end of the base, a plurality of through holes which are communicated with each other are formed in the front end of the hanging plate and distributed in a rectangular array mode, a plurality of hanging rods are fixedly mounted at the front end and the rear end of the hanging plate and distributed in a rectangular array mode, a top plate is fixedly mounted at the upper end of the hanging plate and connected with an upper limiting sliding groove in a sliding mode, and the width of the end face of the base is smaller than the width of a transmission band.

Preferably, the external component comprises two mounting plates, the two mounting plates are symmetrically distributed in the front and back direction, the two mounting plates are movably connected with a roller in common, the lower ends of the two mounting plates are fixedly provided with two supporting blocks which are symmetrical in left and right, and the upper parts of the outer surfaces of the rollers are flush with the upper end surfaces of the conveying belts.

Preferably, the manipulator execution end is fixedly provided with an air nozzle, and the air nozzle is communicated with an air source.

Preferably, the placement member does not contact the opening.

Compared with the prior art, the utility model has the following beneficial effects:

1. the utility model relates to a vacuum coating device which realizes the placing and taking of a workpiece to be coated through arranging a vacuum box, a conveying belt, a placing component, an external component and an upper limiting chute, when in use, the placing component is initially positioned on the external component on the right side, a worker places the workpiece to be coated on a hanging rod, then opens a sealing door on the right side and pushes the placing component onto the conveying belt, then closes the sealing door on the right side, the conveying belt is started through a control end, the conveying belt drives the placing component to move leftwards, so that the workpiece to be coated is sequentially cleaned and coated, after the coating is finished, the sealing door on the left side is opened, the conveying belt moves the placing component to the external component on the left side, at the moment, the worker can repeat the operation on the other placing component on which the workpiece to be coated, in the utility model, the placing and taking of the workpiece to be coated are positioned outside the vacuum box, the operation space is large, the operation is easy, the film coating operation can be carried out continuously, and the film coating of workpieces in large batch is facilitated;

2. according to the vacuum coating equipment, the placing component is arranged to place the workpiece to be coated, the hanging rods on the front side and the back side are arranged to place the workpiece, the one-time placing amount of the workpiece is increased, the shielding of the mounting plate on film particles is reduced by arranging the opening, and the coating efficiency of the workpiece is improved;

3. according to the vacuum coating equipment, the workpiece is cleaned by arranging the air source, the mechanical arm and the air nozzle, so that dust and adhesive substances adhered to the surface of the workpiece are removed, and the coating quality of the workpiece is improved;

4. according to the vacuum coating equipment, the control end is fixed by the mounting frame, and the control end and control circuits of live equipment such as a transmission belt, an air source, a manipulator, a coating machine, vacuumizing equipment and the like are arranged in the inner cavity of the mounting frame, so that messy and damage of the control circuits are avoided, an operator can conveniently grasp the control end when using the control end by arranging the handle, and the operation comfort is improved.

Drawings

FIG. 1 is a schematic view of the overall structure of a vacuum coating apparatus according to the present invention;

FIG. 2 is a rear view of the overall structure of a vacuum coating apparatus according to the present invention;

FIG. 3 is a schematic view of the internal structure of a vacuum deposition apparatus according to the present invention;

FIG. 4 is a schematic view of the overall structure of a placement module of a vacuum deposition apparatus according to the present invention;

fig. 5 is a schematic view of the overall structure of an external component of a vacuum coating apparatus according to the present invention.

In the figure: 1. a vacuum box; 2. a limiting slide rail; 3. a sealing door; 4. a gasket; 5. an external component; 6. a mounting frame; 7. a control end; 8. a grip; 9. a coating bin access door; 10. vacuumizing equipment; 11. cleaning a bin access door; 21. an opening; 22. a partition plate; 23. a gas source; 24. a manipulator; 25. a conveyor belt; 26. an upper limiting chute; 27. placing the component; 28. a film coating machine; 31. a base; 32. hanging the plate; 33. a through hole; 34. a hanging rod; 35. a top plate; 41. mounting a plate; 42. a roller; 43. a support block; 51. an air tap.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the utility model easy to understand, the utility model is further described with the specific embodiments.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1-5, a vacuum coating equipment, including vacuum box 1, vacuum box 1 left end and the equal fixed mounting in rear end have two longitudinal symmetry's spacing slide rail 2, common sliding connection has sealing door 3 between two spacing slide rail 2, sealing door 3 is close to vacuum box 1's one end fixed mounting has sealed pad 4, the one end that vacuum box 1 was kept away from to spacing slide rail 2 of downside is provided with external subassembly 5, vacuum box 1 front end fixed mounting has mounting bracket 6, mounting bracket 6 other end fixed mounting has

control end

7, 7 left ends of control end and the equal fixed mounting of right-hand member have handle 8, vacuum box 1 rear end right part is rotated and is connected with coating film storehouse access door 9, vacuum box 1 rear end fixed mounting has evacuation equipment 10, evacuation equipment 10 extends to inside vacuum box 1, vacuum box 1 rear end left part is rotated and is connected with clean storehouse access door 11.

Opening 21 has all been opened to 1 left end front portion of vacuum box and right-hand member front portion, 1 inner chamber lower wall middle part fixed mounting of vacuum box has baffle 22, 1 inner chamber lower wall right part fixed mounting of vacuum box has air supply 23 and manipulator 24, 1 inner chamber lower wall left part fixed mounting of vacuum box has coating machine 28, the anterior fixed mounting of 1 inner chamber lower wall of vacuum box has transmission band 25, transmission band 25 is located manipulator 24, the place ahead of air supply 23 and coating machine 28, 1 inner chamber upper wall fixed mounting of vacuum box has last spacing spout 26, transmission band 25 upper end is provided with places subassembly 27, it extends to supreme spacing spout 26 to place subassembly 27 upper end, air supply 23, transmission band 25, manipulator 24 and transmission band 25 all with control end 7 electric connection, manipulator 24 can control the on-off state of air cock 51.

Place subassembly 27 and include base 31, base 31 upper end middle part fixed mounting has link plate 32, link plate 32 front end is opened has the through-hole 33 that link up around a plurality of, a plurality of through-hole 33 is rectangular array and distributes, the equal fixed mounting of link plate 32 front end and rear end has a plurality of peg 34, a plurality of peg 34 is rectangular array and distributes, link plate 32 upper end fixed mounting has roof 35, roof 35 and last spacing spout 26 sliding connection, terminal surface width is less than the width of transmission band 25 under base 31, peg 34 can change the adjustment according to the appearance of taking the coating film work piece, the skew takes place when base 31 removes along with transmission band 25 is avoided in the setting of roof 35, it can set up a plurality ofly according to the demand to place subassembly 27.

The external component 5 comprises two mounting plates 41, the two mounting plates 41 are symmetrically distributed front and back, a roller 42 is movably connected between the two mounting plates 41, two support blocks 43 which are symmetrical left and right are fixedly mounted at the lower ends of the two mounting plates 41, the upper part of the outer surface of the roller 42 is flush with the upper end surface of the transmission belt 25, and the roller 42 is matched with the base 31.

An air nozzle 51 is fixedly arranged at the execution end of the manipulator 24, the air nozzle 51 is communicated with the air source 23, the air source 23 and the air nozzle 51 are both in the prior art, and the workpiece is cleaned by blowing air out of the air nozzle 51.

The placing member 27 does not contact the opening 21, and the workpiece placed on the placing member 27 cannot collide with the opening 21.

It should be noted that the utility model is a vacuum coating device, the vacuum box 1, the transmission belt 25, the placing component 27, the external component 5 and the upper limiting chute 26 jointly realize the placing and taking of the workpiece to be coated, when in use, the placing component 27 is initially positioned on the external component 5 on the right side, a worker places the workpiece to be coated on the hanging rod 34, then opens the sealing door 3 on the right side, and pushes the placing component 27 onto the transmission belt 25, then closes the sealing door 3 on the right side, the transmission belt 25 is started through the control end 7, the transmission belt 25 drives the placing component 27 to move leftwards, so that the workpiece to be coated sequentially passes through the air nozzle 51 and the coating machine 28, when passing through the air nozzle 51, the manipulator 24 controls the air nozzle 51 to move, the air flow sprayed by the air nozzle 51 washes the surface of the workpiece, removes dust and adhesion substances adhered to the surface of the workpiece, the coating quality of the workpiece is improved, and the workpiece is coated when passing through the coating machine 28, after coating, the left sealing door 3 is opened, the placing component 27 is moved to the left external component 5 by the conveying belt 25, at the moment, a worker can repeat the operation on the other placing component 27 for placing a workpiece to be coated, in the utility model, the placing and taking of the workpiece to be coated are both positioned outside the vacuum box 1, the operation space is large, the operation is easy, coating operation can be carried out uninterruptedly, large-batch coating of workpieces is facilitated, the placing amount of the disposable workpieces of the placing component 27 is increased by the design of the hanging rods 34 on the front side and the back side, the control circuit is placed through the inner cavity of the mounting frame 6, the control circuit is prevented from being damaged, an operator can conveniently grasp the control end 7 when using the control end 7 through the handle 8, and the operation comfort is improved.

The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. A vacuum coating equipment, comprising a vacuum box (1), characterized in that: the left end and the rear end of the vacuum box (1) are fixedly installed with two upper and lower symmetrical limit slide rails (2), and the two A sealing door (3) is slidably connected between the limit slide rails (2), and a sealing gasket (4) is fixedly installed at one end of the sealing door (3) close to the vacuum box (1). One end of the slide rail (2) away from the vacuum box (1) is provided with an external component (5), the front end of the vacuum box (1) is fixedly mounted with a mounting bracket (6), and the other end of the mounting bracket (6) is fixedly mounted There is a control end (7), the left end and the right end of the control end (7) are fixedly installed with a handle (8), and the right part of the rear end of the vacuum box (1) is rotatably connected with a coating chamber inspection door (9), so The rear end of the vacuum box (1) is fixedly installed with a vacuum pumping device (10), the vacuum pumping device (10) extends into the interior of the vacuum box (1), and the left part of the rear end of the vacuum box (1) is rotatably connected with a cleaning device (10). Access door (11).

2. A vacuum coating equipment according to claim 1, characterized in that: openings (21) are opened at the front of the left end and the front of the right end of the vacuum box (1), and the inner cavity of the vacuum box (1) is provided with openings (21). A partition plate (22) is fixedly installed in the middle of the lower wall, a gas source (23) and a manipulator (24) are fixedly installed in the right part of the lower wall of the inner cavity of the vacuum box (1), and the lower wall of the inner cavity of the vacuum box (1) is fixedly installed with a gas source (23) and a manipulator (24). A coating machine (28) is fixedly installed on the left part, and a conveyor belt (25) is fixedly installed in the front part of the lower wall of the inner cavity of the vacuum box (1). ) and the front of the coating machine (28), the upper wall of the inner cavity of the vacuum box (1) is fixedly installed with an upper limit chute (26), the upper end of the conveyor belt (25) is provided with a placement component (27), the The upper end of the placing assembly (27) extends into the upper limit chute (26).

3. A vacuum coating equipment according to claim 2, characterized in that: the placing assembly (27) comprises a base (31), and a hanging plate (32) is fixedly installed in the middle of the upper end of the base (31), so The front end of the hanging plate (32) is provided with a plurality of through holes (33) that pass through the front and rear, the plurality of the through holes (33) are distributed in a rectangular array, and the front and rear ends of the hanging plate (32) are fixedly installed with a plurality of through holes (33). hanging rods (34), a plurality of the hanging rods (34) are distributed in a rectangular array, a top plate (35) is fixedly installed on the upper end of the hanging plate (32), and the top plate (35) is connected to the upper limit chute (26). ) sliding connection, the width of the lower end face of the base (31) is smaller than the width of the transmission belt (25).

4 . The vacuum coating equipment according to claim 1 , wherein the external component ( 5 ) comprises a mounting plate ( 41 ), and two mounting plates ( 41 ) are provided. The mounting plates (41) are symmetrically distributed in the front and rear, a roller (42) is movably connected between the two mounting plates (41), and two symmetrical left and right are fixedly mounted on the lower ends of the two mounting plates (41). A support block (43), the upper part of the outer surface of the roller (42) is flush with the upper end surface of the conveyor belt (25).

5. A vacuum coating equipment according to claim 2, characterized in that: the actuator end of the manipulator (24) is fixedly installed with a gas nozzle (51), and the gas nozzle (51) communicates with the gas source (23) .

6. A vacuum coating equipment according to claim 2, characterized in that: the placing component (27) is not in contact with the opening (21).