CN213933620U - Polarized light source and surface defect detection device - Google Patents
Polarized light source and surface defect detection device Download PDFInfo
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- CN213933620U CN213933620U CN202022088717.XU CN202022088717U CN213933620U CN 213933620 U CN213933620 U CN 213933620U CN 202022088717 U CN202022088717 U CN 202022088717U CN 213933620 U CN213933620 U CN 213933620U
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Abstract
The utility model provides a convenient operation and can effectively restrain surface defect detection device and polarized light source that strong reflection of light on high reflecting material product surface disturbed. Including support (1) it has a plurality of lamp plates (2), every to surround the equipartition on support (1) be provided with a plurality of light sources (3) on lamp plate (2), every lamp plate (2) the correspondence of the surface top of light source (3) is provided with first vibration-damping sheet (4), every first vibration-damping sheet (4) correspond the setting with this first vibration-damping sheet (4) respectively lamp plate (2) parallel, every lamp plate (2) reach first vibration-damping sheet (4) set up for the slope for the horizontal plane. The utility model discloses a problem of high reflection of light has been solved to the high angle illumination of polarized light, fundamentally because the polarization characteristic of light can effectively eliminate the specular reflection of high reflection of light object, and the scattered light that surface defect brought can't be eliminated to improve the regional SNR of defect, reduced machine vision system's the rate of examining that leaks. The utility model discloses can be applied to the test field.
Description
Technical Field
The utility model relates to a surface defect detection area especially relates to a polarized light source and surface defect detection device.
Background
With the development of industry 4.0 and the popularization of intelligent manufacturing, machine vision AOI detection equipment plays an increasingly important role, and especially with the development of 3C electronics and semiconductor industries, the application of a machine vision detection technology on a production line is increasingly wide. In the field of machine vision measurement, surface defect detection of materials such as glass cover plates, metal surfaces, transparent films and the like becomes a difficult point in the industry due to the high reflectivity characteristic of the surfaces. The surface defect detection mainly refers to the detection of defects such as spots, pits, scratches, chromatic aberration, defects and the like on the surface of a workpiece, and due to the diversity and complexity of samples, if interference exists on a detection optical path, the omission detection of product defects is easily caused.
Aiming at the surface defect detection of high-reflectivity material products such as glass surfaces and metal surfaces, the prior art adopts a common light source for illumination, if low-angle lighting illumination is adopted, the background is dark, and the background is bright, but due to the low-angle lighting relationship, part of defects such as tiny point defects, scratches and the like can be difficultly shot by an imaging system through illumination, so that detection omission is easily caused at the moment; if high-angle illumination is adopted, the background is bright and the defect is dark, but due to the high light-reflecting characteristic of the product surface, the bright area is easy to cause overexposure so as to cause the defect area to be covered, and at the moment, the omission is also easy to cause. Therefore, due to the high reflectivity characteristic of the material surface of the product, the problem that the local part of the product is too bright is easily caused by the conventional visual detection method, and the problem that the local light intensity is saturated when the surface of the product is imaged at the moment, so that the defect of the product is missed to be detected. Therefore, the prior art is difficult to solve the problem of high light reflection of glass metal surfaces and the like.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that overcome prior art not enough, provide a convenient operation and can effectively restrain the strong reflection of light interference's on high reflecting material product surface defect detection device to and the polarized light source on the device, this polarized light source simple structure can provide the light source of different angles and polarization.
Technical scheme that polarized light source adopted is, it includes the support it has a plurality of lamp plates, every to encircle the equipartition on the support be provided with a plurality of lamp sources on the lamp plate, every the lamp plate the correspondence of the surperficial top in lamp source is provided with first vibration-damping sheet, every first vibration-damping sheet corresponds the setting with this first vibration-damping sheet respectively the lamp plate parallels, every the lamp plate reaches first vibration-damping sheet sets up for the slope for the horizontal plane.
Be located a plurality of pieces the lamp plate encircles the central point that sets up and puts the department, the support sets up to cavity.
The inclination angle of each lamp panel and the first polaroid relative to the horizontal plane is 0-90 degrees.
The lamp plate reaches the quantity of first polaroid sheet all sets up to eight, eight the lamp plate reaches first polaroid sheet evenly continuous distribution in 360 spaces.
The lamp source is LED lamp beads, and the direction of each first polaroid sheet is perpendicular to the optical axis of the corresponding LED lamp beads on the lamp panel.
And the lamp source on each lamp panel is controlled to be switched on and switched off by an independent switch.
The lamp plate reaches first polaroid is isosceles trapezoid, first polaroid is horizontal polaroid or perpendicular polaroid.
The utility model provides a surface defect detection device who contains above-mentioned polarized light source, it still includes second polaroid and imaging module, the second polaroid sets up imaging module's incident light way, arbitrary one the lamp source during operation of lamp plate, correspond with this lamp plate item first polaroid all the time with the polarization direction mutually perpendicular of second polaroid, a plurality of the lamp plate encircles a center pin setting, the second polaroid sets up on the center pin, imaging module's optical axis with the center pin coincidence.
The lamp panel is characterized in that an objective table is arranged on one side, provided with a lamp source, of the lamp panel, the objective table is perpendicular to the central axis and located under the imaging module, the objective table is driven by the XY axis moving module to move in a translation mode on the horizontal plane, and the incident lens of the imaging module is right opposite to the objective table.
The utility model has the advantages that: the utility model adopts a novel polarized light source structure, all lamp panels divide 360 degrees scope into the sector of corresponding figure, the light source of each lamp panel is controlled alone and is lighted in turn, there is a first polaroid before the lamp source of each sector, the first polaroid direction of polarization of each sector is different, each sector combination forms an annular light source, each sector light source shines in proper order and polishes the illumination on the surface of the product to be measured; the camera lens forms a set of imaging module, imaging module is located the product surface that awaits measuring directly over, its optical axis and the coincidence of annular light source symmetry axis, set up the second polaroid that can change polarization angle before the imaging module, can appear the polarized light illumination of different polarization states when each sector light source lights the first polaroid in front of each other in turn, the polarization angle of the second polaroid before the adjustment imaging module is perpendicular with illumination sector polarized light polarization angle this moment, can obtain the polarization image of a sector. Similarly, the lamp source of each sector is sequentially lightened, and the polarization angle of the second polaroid in front of the imaging module is correspondingly adjusted, so that the polarization images corresponding to other sectors can be obtained; and performing image fusion on the polarization images of all the sectors to obtain a multi-polarization image containing all the defect information, and performing defect detection algorithm analysis and calculation on the image to obtain a defect detection result. The event the utility model discloses in, polarized light source simple structure can provide the light source of different angles and polarization, and convenient operation just can effectively restrain the strong reflection of light interference on high reflecting material product surface, has greatly improved the efficiency to strong reflection of light surface defect detection. The utility model eliminates the reflected light interference of the surface to be measured through polarized light, and improves the signal-to-noise ratio of the defect to be measured; after the polarized light in multiple directions is used for illumination, various defects can be highlighted, all the defects can be highlighted after the images are fused, and analysis, calculation and processing can be conveniently carried out by a software algorithm, so that the omission ratio of the surface defects of the product is reduced.
Drawings
FIG. 1 is a schematic diagram of the detection of highly reflective surface defects using polarized light;
FIG. 2 is a simplified schematic diagram of the present invention;
FIG. 3 is a block diagram of the polarized light source in a first state;
FIG. 4 is a block diagram of the polarized light source in a second state;
FIG. 5 is a cross-sectional structural view of the polarized light source in a third state;
fig. 6 is a sectional structural view of the polarized light source in a fourth state.
Detailed Description
The utility model discloses utilized the principle that polarized light detected high reflection of light surface defect, this principle is shown as figure 1. The details are as follows.
The light that the light source sent does not have polarization characteristic for natural light, and the light becomes the polarized light of P direction behind the polarizer, and after the polarized light of P direction was through normal high reflection of light surface reflection back, the light still was the polarized light of P direction, and is perpendicular with the P direction owing to the analyzer is the S direction behind the analyzer, so the polarized light of P direction can't see through the analyzer and form an image on imaging system this moment, and the reflected light of normal high reflection of light surface is filtered this moment. However, when the polarized light in the P direction passes through the defect surface of the highly reflective surface, the polarized light in the P direction is scattered on the defect surface, and the scattering can cause a depolarization phenomenon, so the light reflected by the defect surface of the surface to be measured is not the polarized light in the pure P direction any more, but also contains the polarized light in the S direction, when the reflected light passes through the analyzer, the polarized light in the P direction is filtered, and the polarized light in the S direction is imaged on the imaging system through the analyzer, so the defect surface can be clearly imaged on the imaging system, and the reflected light in the normal surface is filtered, so the signal-to-noise ratio of the defect surface is greatly improved.
The present invention will be described in detail below.
As shown in fig. 2 to 6, polarized light source includes support 1 it has a plurality of lamp plates 2, every to surround the equipartition on the support 1 be provided with a plurality of light sources 3 on the lamp plate 2, in this embodiment, what the lamp plate adopted is the PCB board, what the light source adopted is the LED light source. Every lamp plate 2 the correspondence of the surperficial top of lamp source 3 is provided with first polaroid 4, every first polaroid 4 corresponds the setting with this first polaroid 4 respectively lamp plate 2 parallels, every lamp plate 2 reaches first polaroid 4 sets up for the slope for the horizontal plane. Be located a plurality of the central point that lamp plate 2 encircles the setting puts the department, support 1 sets up to cavity, in this embodiment, puts the department at this central point and sets up to cavity hole 8. This is convenient for the product surface's that awaits measuring reflection of light ray gets into in the imaging module smoothly through this cavity hole 8. The inclination angle of each of the lamp panel 2 and the first polarizing film 4 with respect to the horizontal plane is 0 to 90 degrees. In this embodiment, the inclination angle of each of the lamp panel 2 and the first polarizer 4 with respect to the horizontal plane is set to be 30 ° to 60 °. More specifically, the angle is set to 60 °. The lamp plate 2 reaches the quantity of first vibration-damping sheet 4 all sets up to eight, eight the lamp plate 2 reaches first vibration-damping sheet 4 evenly distributes in 360 spaces in succession. The lamp source 3 is an LED lamp bead, and the direction of each first polaroid 4 is perpendicular to the optical axis of the corresponding LED lamp bead on the lamp panel 2. And the lamp source 3 on each lamp panel 2 is controlled to be switched on and switched off by an independent switch. The lamp plate 2 reaches first polaroid 4 is isosceles trapezoid, first polaroid 4 is horizontal polaroid or perpendicular polaroid.
Surface defect detection device who has contained above-mentioned polarized light source still includes second polaroid 5 and imaging module 6, second polaroid 5 sets up imaging module 6's incident light way, arbitrary piece 3 during operation in the lamp source of lamp plate 2, correspond with 2 items of this lamp plate first polaroid 4 all the time with second polaroid 5's polarization direction mutually perpendicular, a plurality of lamp plate 2 encircles a center pin a and sets up, second polaroid 5 sets up on the center pin a, imaging module 6's optical axis with center pin a coincides. The lamp panel 2 is characterized in that an objective table 7 is arranged on one side, provided with a lamp source, of the lamp panel 2, the objective table 7 is perpendicular to the central axis and located under the imaging module 6, the objective table 7 is driven by the XY axis moving module to move in a translation mode on the horizontal plane, and an incident lens of the imaging module 6 is arranged right opposite to the objective table 7.
The method for detecting the surface defects of the product to be detected by using the surface defect detection device comprises the following steps:
a. placing and fixing a product to be detected on an object stage 7, and driving the object stage 7 to move in the horizontal direction through the XY-axis moving module so that the area to be detected of the product to be detected is positioned on the central shaft;
b. sequentially starting a plurality of polarized light sources to irradiate the surface of a product to be measured, and adjusting the polarization angle of the second polarizer 5 to be vertical to the polarization angle of the first polarizer 4 of the started polarized light source when starting one polarized light source each time;
c. the imaging module 6 respectively collects a polarization image when each polarization light source is started once;
d. carrying out image fusion on the collected polarization state images to obtain a multi-polarization state image containing all defect information of a to-be-detected region of a to-be-detected product;
e. d, analyzing and calculating the image obtained in the step d by using a defect detection algorithm to obtain a defect detection result of the area to be detected;
f. driving the objective table 7 to move in the horizontal direction, enabling the next area to be detected of the product to be detected to be located on the central shaft, and repeating the steps b-e to obtain a defect detection result of the area to be detected;
g. and f, repeating the step f until the surface defect detection of the whole product to be detected is completed.
The utility model discloses in, the region at lamp plate place is called the sector. Become the linear polarization light behind the first polaroid of light that the sector light source sent, light after the product surface reflection that awaits measuring or scattering is behind the second polaroid, formation of image on imaging module camera + camera lens, the polarization direction of second polaroid is through the adjustment back and the polarization direction mutually perpendicular of first polaroid, and the reflection light through the surface that awaits measuring this moment is filtered, and only the scattering light through the defect surface is detected by imaging module, so the utility model discloses can carry out clear formation of image to surface defect under the condition of filtering reflection light.
The utility model discloses the work flow is luminous for first sector light source, and light illuminates the product surface that awaits measuring through the first polaroid of first sector, adjusts the polarization direction of second polaroid and the polarization direction mutually perpendicular of the first polaroid of first sector, and the first polarization state image is shot to the formation of image module. The light source of the first sector is turned off, the light source of the second sector is turned on to emit light, the light passes through the first polaroid of the second sector to illuminate the surface of a product to be measured, the polarization direction of the second polaroid is adjusted to be perpendicular to the polarization direction of the first polaroid of the second sector, the imaging module shoots images of the second polarization state, and in the same way, eight polarization state images with different polarization angles and different lighting directions are finally shot.
The eight images with different polarization states are subjected to image fusion, and each image carries defect information with different directions and different polarization states, so that each defect can be highlighted through the image after the image fusion, the surface defect algorithm can analyze and calculate conveniently, and the type and the size of the defect can be obtained. Some defects are sensitive to light with a certain polarization state in one direction, but are not sensitive to light with other polarization states in other directions, so that only polarized light in the direction can highlight the defects, and polarized light in other directions cannot highlight the defects. Therefore, all defects can be highlighted in the eight images after the images are imaged by the polarized light illumination in the eight directions, and all defects can be displayed in the fused images after the images are fused.
The utility model discloses an octahedral polarized light source, the illumination of polishing of the high reflection of light surface that awaits measuring is carried out with different polarization from different directions, and the specular reflection on object surface can fundamentally be eliminated and interference, utilizes the depolarization attitude characteristic on defect surface simultaneously, has improved surface defect's SNR to can effectual reduction surface defect's the hourglass rate of examining.
Claims (9)
1. A polarized light source, characterized by: it includes support (1) it has a plurality of lamp plates (2), every to surround the equipartition on support (1) be provided with a plurality of light sources (3) on lamp plate (2), every lamp plate (2) the correspondence of the surface top of light source (3) is provided with first vibration-damping sheet (4), every first vibration-damping sheet (4) correspond the setting with this first vibration-damping sheet (4) respectively lamp plate (2) parallel, every lamp plate (2) reach first vibration-damping sheet (4) set up for the slope for the horizontal plane.
2. A polarized light source according to claim 1, wherein: be located a plurality of blocks central point that lamp plate (2) encircle the setting puts the department, support (1) sets up to cavity.
3. A polarized light source according to claim 1, wherein: the inclination angle of each lamp panel (2) and the first polaroid (4) relative to the horizontal plane is 0-90 degrees.
4. A polarized light source according to claim 1, wherein: the lamp plate (2) and the quantity of first polaroid sheet (4) all set up to eight, eight lamp plate (2) and first polaroid sheet (4) evenly continuous distribution in 360 spaces.
5. A polarized light source according to claim 1, wherein: the lamp source (3) is an LED lamp bead, and the direction of each first polaroid sheet (4) is perpendicular to the optical axis of the corresponding LED lamp bead on the lamp panel (2).
6. A polarized light source according to claim 1, wherein: and each lamp source (3) on the lamp panel (2) is controlled to be switched on and off by an independent switch.
7. A polarized light source according to claim 1, wherein: the lamp plate (2) and the first polaroid sheet (4) are isosceles trapezoids, and the first polaroid sheet (4) is a horizontal polaroid sheet or a vertical polaroid sheet.
8. A surface defect inspection apparatus comprising a polarized light source according to claim 2, wherein: surface defect detection device still includes second polaroid (5) and imaging module (6), second polaroid (5) set up on the incident light way of imaging module (6), arbitrary one lamp source (3) during operation of lamp plate (2), correspond with this lamp plate (2) item first polaroid (4) all the time with the polarization direction mutually perpendicular of second polaroid (5), a plurality of lamp plate (2) encircle a center pin (a) and set up, second polaroid (5) set up on center pin (a), the optical axis of imaging module (6) with center pin (a) coincidence.
9. The surface defect detecting apparatus according to claim 8, wherein: the lamp panel is characterized in that an objective table (7) is arranged on one side, provided with a lamp source, of the lamp panel (2), the objective table (7) is perpendicular to the central axis and located under the imaging module (6), the objective table (7) is driven by the XY axis moving module to move in a translation mode on the horizontal plane, and an incident lens of the imaging module (6) is arranged right opposite to the objective table (7).
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| CN202022088717.XU CN213933620U (en) | 2020-09-22 | 2020-09-22 | Polarized light source and surface defect detection device |
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| CN202022088717.XU CN213933620U (en) | 2020-09-22 | 2020-09-22 | Polarized light source and surface defect detection device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112129764A (en) * | 2020-09-22 | 2020-12-25 | 珠海市运泰利自动化设备有限公司 | Polarized light source, surface defect detection method and device |
| CN114279346A (en) * | 2021-12-18 | 2022-04-05 | 上海精测半导体技术有限公司 | Optical measurement device, optical measurement method, and photoacoustic film thickness measurement system |
| CN114324369A (en) * | 2022-03-11 | 2022-04-12 | 北京新研创能科技有限公司 | Bipolar plate surface scratch detection system and method |
| CN114397242A (en) * | 2021-12-14 | 2022-04-26 | 珠海市奥德维科技有限公司 | Light source for light supplement |
| CN115018837A (en) * | 2022-08-08 | 2022-09-06 | 聚时科技(深圳)有限公司 | Method for detecting solder ball of semiconductor chip |
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2020
- 2020-09-22 CN CN202022088717.XU patent/CN213933620U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112129764A (en) * | 2020-09-22 | 2020-12-25 | 珠海市运泰利自动化设备有限公司 | Polarized light source, surface defect detection method and device |
| CN114397242A (en) * | 2021-12-14 | 2022-04-26 | 珠海市奥德维科技有限公司 | Light source for light supplement |
| CN114397242B (en) * | 2021-12-14 | 2022-12-09 | 珠海市奥德维科技有限公司 | Light source for light supplement |
| CN114279346A (en) * | 2021-12-18 | 2022-04-05 | 上海精测半导体技术有限公司 | Optical measurement device, optical measurement method, and photoacoustic film thickness measurement system |
| CN114279346B (en) * | 2021-12-18 | 2024-04-16 | 上海精测半导体技术有限公司 | Optical measurement device, optical measurement method, and photoacoustic film thickness measurement system |
| CN114324369A (en) * | 2022-03-11 | 2022-04-12 | 北京新研创能科技有限公司 | Bipolar plate surface scratch detection system and method |
| CN114324369B (en) * | 2022-03-11 | 2022-06-07 | 北京新研创能科技有限公司 | Bipolar plate surface scratch detection system and method |
| CN115018837A (en) * | 2022-08-08 | 2022-09-06 | 聚时科技(深圳)有限公司 | Method for detecting solder ball of semiconductor chip |
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