CN112129764A - Polarized light source, surface defect detection method and device - Google Patents
Polarized light source, surface defect detection method and device Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Abstract
The invention provides a surface defect detection method, a surface defect detection device and a polarized light source, which are convenient to operate and can effectively inhibit strong reflection interference on the surface of a high-reflection material product. The invention is provided with a polarized light source and a surface defect detection device, eliminates the mirror reflection of a high-reflection object by utilizing the polarization characteristic of light, but keeps the scattered light caused by surface defects, obtains a plurality of polarized images through an imaging module, fuses the polarized images into an image containing all defect information, and performs defect detection algorithm analysis and calculation on the image to obtain the defect detection result of the area to be detected; the invention adopts polarized light high-angle illumination, fundamentally solves the problem of high reflection, and can effectively eliminate the specular reflection of a high-reflection object due to the polarization characteristic of light, but can not eliminate scattered light caused by surface defects, thereby improving the signal-to-noise ratio of a defect area and reducing the omission factor of a machine vision system. The invention can be applied to the field of testing.
Description
Technical Field
The invention relates to the field of surface defect detection, in particular to a polarized light source, a surface defect detection method and a surface defect detection device.
Background
With the development of industry 4.0 and the popularization of intelligent manufacturing, machine vision AOI detection equipment plays an increasingly important role, and especially with the development of 3C electronics and semiconductor industries, the application of a machine vision detection technology on a production line is increasingly wide. In the field of machine vision measurement, surface defect detection of materials such as glass cover plates, metal surfaces, transparent films and the like becomes a difficult point in the industry due to the high reflectivity characteristic of the surfaces. The surface defect detection mainly refers to the detection of defects such as spots, pits, scratches, chromatic aberration, defects and the like on the surface of a workpiece, and due to the diversity and complexity of samples, if interference exists on a detection optical path, the omission detection of product defects is easily caused.
Aiming at the surface defect detection of high-reflectivity material products such as glass surfaces and metal surfaces, the prior art adopts a common light source for illumination, if low-angle lighting illumination is adopted, the background is dark, and the background is bright, but due to the low-angle lighting relationship, part of defects such as tiny point defects, scratches and the like can be difficultly shot by an imaging system through illumination, so that detection omission is easily caused at the moment; if high-angle illumination is adopted, the background is bright and the defect is dark, but due to the high light-reflecting characteristic of the product surface, the bright area is easy to cause overexposure so as to cause the defect area to be covered, and at the moment, the omission is also easy to cause. Therefore, due to the high reflectivity characteristic of the material surface of the product, the problem that the local part of the product is too bright is easily caused by the conventional visual detection method, and the problem that the local light intensity is saturated when the surface of the product is imaged at the moment, so that the defect of the product is missed to be detected. Therefore, the prior art is difficult to solve the problem of high light reflection of glass metal surfaces and the like.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects of the prior art, and provide a surface defect detection method which is convenient to operate and can effectively inhibit strong reflection interference on the surface of a high-reflection material product, and a polarized light source and a surface defect detection device applied to the method.
The technical scheme adopted by the polarized light source is that the polarized light source comprises a support, a plurality of lamp panels are uniformly distributed on the support in a surrounding manner, each lamp panel is provided with a plurality of light sources, first polarizing films are correspondingly arranged above the surfaces of the light sources of each lamp panel, each first polarizing film is respectively parallel to the lamp panel correspondingly arranged with the first polarizing film, and each lamp panel and the first polarizing films are obliquely arranged relative to a horizontal plane.
Be located a plurality of pieces the lamp plate encircles the central point that sets up and puts the department, the support sets up to cavity.
The inclination angle of each lamp panel and the first polaroid relative to the horizontal plane is 0-90 degrees.
The lamp plate reaches the quantity of first polaroid sheet all sets up to eight, eight the lamp plate reaches first polaroid sheet evenly continuous distribution in 360 spaces.
The lamp source is LED lamp beads, and the direction of each first polaroid sheet is perpendicular to the optical axis of the corresponding LED lamp beads on the lamp panel.
And the lamp source on each lamp panel is controlled to be switched on and switched off by an independent switch.
The lamp plate reaches first polaroid is isosceles trapezoid, first polaroid is horizontal polaroid or perpendicular polaroid.
The utility model provides a surface defect detection device who contains above-mentioned polarized light source, it still includes second polaroid and imaging module, the second polaroid sets up imaging module's incident light way, arbitrary one the lamp source during operation of lamp plate, correspond with this lamp plate item first polaroid all the time with the polarization direction mutually perpendicular of second polaroid, a plurality of the lamp plate encircles a center pin setting, the second polaroid sets up on the center pin, imaging module's optical axis with the center pin coincidence.
The lamp panel is characterized in that an objective table is arranged on one side, provided with a lamp source, of the lamp panel, the objective table is perpendicular to the central axis and located under the imaging module, the objective table is driven by the XY axis moving module to move in a translation mode on the horizontal plane, and the incident lens of the imaging module is right opposite to the objective table.
The method for detecting the defects of the surface of the product by using the surface defect detection device comprises the following steps:
a. placing and fixing a product to be detected on an objective table, and driving the objective table to move in the horizontal direction through the XY-axis moving module so that a region to be detected of the product to be detected is located on the central shaft;
b. sequentially starting a plurality of polarized light sources to irradiate the surface of a product to be detected, and adjusting the polarization angle of the second polarizer to be vertical to the polarization angle of the first polarizer of the started polarized light sources when starting one polarized light source each time;
c. the imaging module respectively collects a polarization image when each polarization light source is started once;
d. carrying out image fusion on the collected polarization state images to obtain a multi-polarization state image containing all defect information of a to-be-detected region of a to-be-detected product;
e. d, analyzing and calculating the image obtained in the step d by using a defect detection algorithm to obtain a defect detection result of the area to be detected;
f. driving the objective table to move in the horizontal direction, enabling the next area to be detected of the product to be detected to be located on the central shaft, and repeating the steps b-e to obtain a defect detection result of the area to be detected;
g. and f, repeating the step f until the surface defect detection of the whole product to be detected is completed.
The invention has the beneficial effects that: the novel polarized light source structure is adopted, all lamp panels divide a 360-degree range into a corresponding number of sectors, the light source of each lamp panel is independently controlled and is lighted in turn, a first polarizing film is arranged in front of the light source of each sector, the polarization direction of the first polarizing film of each sector is different, each sector is combined to form an annular light source, and each sector light source sequentially irradiates the surface of a product to be tested to perform lighting illumination; the camera lens forms a set of imaging module, imaging module is located the product surface that awaits measuring directly over, its optical axis and the coincidence of annular light source symmetry axis, set up the second polaroid that can change polarization angle before the imaging module, can appear the polarized light illumination of different polarization states when each sector light source lights the first polaroid in front of each other in turn, the polarization angle of the second polaroid before the adjustment imaging module is perpendicular with illumination sector polarized light polarization angle this moment, can obtain the polarization image of a sector. Similarly, the lamp source of each sector is sequentially lightened, and the polarization angle of the second polaroid in front of the imaging module is correspondingly adjusted, so that the polarization images corresponding to other sectors can be obtained; and performing image fusion on the polarization images of all the sectors to obtain a multi-polarization image containing all the defect information, and performing defect detection algorithm analysis and calculation on the image to obtain a defect detection result. Therefore, the polarized light source has a simple structure, can provide light sources with different angles and polarization, is convenient to operate, can effectively inhibit strong reflection interference on the surface of a high-reflection material product, and greatly improves the efficiency of detecting the defects of the strong reflection surface. The invention eliminates the reflected light interference of the surface to be measured through polarized light, and improves the signal-to-noise ratio of the defect to be measured; after the polarized light in multiple directions is used for illumination, various defects can be highlighted, all the defects can be highlighted after the images are fused, and analysis, calculation and processing can be conveniently carried out by a software algorithm, so that the omission ratio of the surface defects of the product is reduced.
Drawings
FIG. 1 is a schematic diagram of the detection of highly reflective surface defects using polarized light;
FIG. 2 is a simplified schematic of the present invention;
FIG. 3 is a block diagram of the polarized light source in a first state;
FIG. 4 is a block diagram of the polarized light source in a second state;
FIG. 5 is a cross-sectional structural view of the polarized light source in a third state;
fig. 6 is a sectional structural view of the polarized light source in a fourth state.
Detailed Description
The present invention utilizes the principle of polarized light to detect highly reflective surface defects, which is shown in fig. 1. The details are as follows.
The light that the light source sent does not have polarization characteristic for natural light, and the light becomes the polarized light of P direction behind the polarizer, and after the polarized light of P direction was through normal high reflection of light surface reflection back, the light still was the polarized light of P direction, and is perpendicular with the P direction owing to the analyzer is the S direction behind the analyzer, so the polarized light of P direction can't see through the analyzer and form an image on imaging system this moment, and the reflected light of normal high reflection of light surface is filtered this moment. However, when the polarized light in the P direction passes through the defect surface of the highly reflective surface, the polarized light in the P direction is scattered on the defect surface, and the scattering can cause a depolarization phenomenon, so the light reflected by the defect surface of the surface to be measured is not the polarized light in the pure P direction any more, but also contains the polarized light in the S direction, when the reflected light passes through the analyzer, the polarized light in the P direction is filtered, and the polarized light in the S direction is imaged on the imaging system through the analyzer, so the defect surface can be clearly imaged on the imaging system, and the reflected light in the normal surface is filtered, so the signal-to-noise ratio of the defect surface is greatly improved.
The present invention will be described in detail below.
As shown in fig. 2 to 6, the polarized light source of the present invention includes a support 1, a plurality of lamp panels 2 are uniformly distributed on the support 1, each lamp panel 2 is provided with a plurality of light sources 3, in this embodiment, the lamp panels are PCB boards, and the light sources are LED light sources. Every lamp plate 2 the correspondence of the surperficial top of lamp source 3 is provided with first polaroid 4, every first polaroid 4 corresponds the setting with this first polaroid 4 respectively lamp plate 2 parallels, every lamp plate 2 reaches first polaroid 4 sets up for the slope for the horizontal plane. Be located a plurality of the central point that lamp plate 2 encircles the setting puts the department, support 1 sets up to cavity, in this embodiment, puts the department at this central point and sets up to cavity hole 8. This is convenient for the product surface's that awaits measuring reflection of light ray gets into in the imaging module smoothly through this cavity hole 8. The inclination angle of each of the lamp panel 2 and the first polarizing film 4 with respect to the horizontal plane is 0 to 90 degrees. In this embodiment, the inclination angle of each of the lamp panel 2 and the first polarizer 4 with respect to the horizontal plane is set to be 30 ° to 60 °. More specifically, the angle is set to 60 °. The lamp plate 2 reaches the quantity of first vibration-damping sheet 4 all sets up to eight, eight the lamp plate 2 reaches first vibration-damping sheet 4 evenly distributes in 360 spaces in succession. The lamp source 3 is an LED lamp bead, and the direction of each first polaroid 4 is perpendicular to the optical axis of the corresponding LED lamp bead on the lamp panel 2. And the lamp source 3 on each lamp panel 2 is controlled to be switched on and switched off by an independent switch. The lamp plate 2 reaches first polaroid 4 is isosceles trapezoid, first polaroid 4 is horizontal polaroid or perpendicular polaroid.
Surface defect detection device who has contained above-mentioned polarized light source still includes second polaroid 5 and imaging module 6, second polaroid 5 sets up imaging module 6's incident light way, arbitrary piece 3 during operation in the lamp source of lamp plate 2, correspond with 2 items of this lamp plate first polaroid 4 all the time with second polaroid 5's polarization direction mutually perpendicular, a plurality of lamp plate 2 encircles a center pin a and sets up, second polaroid 5 sets up on the center pin a, imaging module 6's optical axis with center pin a coincides. The lamp panel 2 is characterized in that an objective table 7 is arranged on one side, provided with a lamp source, of the lamp panel 2, the objective table 7 is perpendicular to the central axis and located under the imaging module 6, the objective table 7 is driven by the XY axis moving module to move in a translation mode on the horizontal plane, and an incident lens of the imaging module 6 is arranged right opposite to the objective table 7.
The method for detecting the surface defects of the product to be detected by using the surface defect detection device comprises the following steps:
a. placing and fixing a product to be detected on an object stage 7, and driving the object stage 7 to move in the horizontal direction through the XY-axis moving module so that the area to be detected of the product to be detected is positioned on the central shaft;
b. sequentially starting a plurality of polarized light sources to irradiate the surface of a product to be measured, and adjusting the polarization angle of the second polarizer 5 to be vertical to the polarization angle of the first polarizer 4 of the started polarized light source when starting one polarized light source each time;
c. the imaging module 6 respectively collects a polarization image when each polarization light source is started once;
d. carrying out image fusion on the collected polarization state images to obtain a multi-polarization state image containing all defect information of a to-be-detected region of a to-be-detected product;
e. d, analyzing and calculating the image obtained in the step d by using a defect detection algorithm to obtain a defect detection result of the area to be detected;
f. driving the objective table 7 to move in the horizontal direction, enabling the next area to be detected of the product to be detected to be located on the central shaft, and repeating the steps b-e to obtain a defect detection result of the area to be detected;
g. and f, repeating the step f until the surface defect detection of the whole product to be detected is completed.
In the invention, the area where the lamp panel is located is called a sector. Light emitted by the sector light source is changed into linearly polarized light after passing through the first polaroid, light reflected or scattered by the surface of a product to be detected passes through the second polaroid and then is imaged on the camera and the lens of the imaging module, the polarization direction of the second polaroid is adjusted to be perpendicular to the polarization direction of the first polaroid, the reflected light passing through the surface to be detected is filtered, and only the scattered light passing through the surface of a defect is detected by the imaging module.
The working process of the embodiment of the invention is that the light source of the first sector emits light, the light passes through the first polaroid of the first sector to illuminate the surface of the product to be measured, the polarization direction of the second polaroid is adjusted to be vertical to the polarization direction of the first polaroid of the first sector, and the imaging module shoots the first polarization state image. The light source of the first sector is turned off, the light source of the second sector is turned on to emit light, the light passes through the first polaroid of the second sector to illuminate the surface of a product to be measured, the polarization direction of the second polaroid is adjusted to be perpendicular to the polarization direction of the first polaroid of the second sector, the imaging module shoots images of the second polarization state, and in the same way, eight polarization state images with different polarization angles and different lighting directions are finally shot.
The eight images with different polarization states are subjected to image fusion, and each image carries defect information with different directions and different polarization states, so that each defect can be highlighted through the image after the image fusion, the surface defect algorithm can analyze and calculate conveniently, and the type and the size of the defect can be obtained. Some defects are sensitive to light with a certain polarization state in one direction, but are not sensitive to light with other polarization states in other directions, so that only polarized light in the direction can highlight the defects, and polarized light in other directions cannot highlight the defects. Therefore, all defects can be highlighted in the eight images after the images are imaged by the polarized light illumination in the eight directions, and all defects can be displayed in the fused images after the images are fused.
The invention adopts an octahedral polarized light source to carry out the lighting illumination of the high-reflection surface to be detected in different polarization states from different directions, can fundamentally eliminate the specular reflection interference of the object surface, and simultaneously improves the signal-to-noise ratio of the surface defect by utilizing the depolarization state characteristic of the defect surface, thereby effectively reducing the omission ratio of the surface defect.
Claims (10)
1. A polarized light source, characterized by: it includes support (1) it has a plurality of lamp plates (2), every to surround the equipartition on support (1) be provided with a plurality of light sources (3) on lamp plate (2), every lamp plate (2) the correspondence of the surface top of light source (3) is provided with first vibration-damping sheet (4), every first vibration-damping sheet (4) correspond the setting with this first vibration-damping sheet (4) respectively lamp plate (2) parallel, every lamp plate (2) reach first vibration-damping sheet (4) set up for the slope for the horizontal plane.
2. A polarized light source according to claim 1, wherein: be located a plurality of blocks central point that lamp plate (2) encircle the setting puts the department, support (1) sets up to cavity.
3. A polarized light source according to claim 1, wherein: the inclination angle of each lamp panel (2) and the first polaroid (4) relative to the horizontal plane is 0-90 degrees.
4. A polarized light source according to claim 1, wherein: the lamp plate (2) and the quantity of first polaroid sheet (4) all set up to eight, eight lamp plate (2) and first polaroid sheet (4) evenly continuous distribution in 360 spaces.
5. A polarized light source according to claim 1, wherein: the lamp source (3) is an LED lamp bead, and the direction of each first polaroid sheet (4) is perpendicular to the optical axis of the corresponding LED lamp bead on the lamp panel (2).
6. A polarized light source according to claim 1, wherein: and each lamp source (3) on the lamp panel (2) is controlled to be switched on and off by an independent switch.
7. A polarized light source according to claim 1, wherein: the lamp plate (2) and the first polaroid sheet (4) are isosceles trapezoids, and the first polaroid sheet (4) is a horizontal polaroid sheet or a vertical polaroid sheet.
8. A surface defect inspection apparatus comprising a polarized light source according to claim 2, wherein: surface defect detection device still includes second polaroid (5) and imaging module (6), second polaroid (5) set up on the incident light way of imaging module (6), arbitrary one lamp source (3) during operation of lamp plate (2), correspond with this lamp plate (2) item first polaroid (4) all the time with the polarization direction mutually perpendicular of second polaroid (5), a plurality of lamp plate (2) encircle a center pin (a) and set up, second polaroid (5) set up on center pin (a), the optical axis of imaging module (6) with center pin (a) coincidence.
9. The surface defect detecting apparatus according to claim 8, wherein: the lamp panel is characterized in that an objective table (7) is arranged on one side, provided with a lamp source, of the lamp panel (2), the objective table (7) is perpendicular to the central axis and located under the imaging module (6), the objective table (7) is driven by the XY axis moving module to move in a translation mode on the horizontal plane, and an incident lens of the imaging module (6) is arranged right opposite to the objective table (7).
10. A method for defect inspection of a surface of a product using the surface defect inspection apparatus of claim 9, the method comprising the steps of:
a. placing and fixing a product to be detected on an objective table (7), and driving the objective table (7) to move in the horizontal direction through the XY-axis moving module so that a region to be detected of the product to be detected is located on the central shaft;
b. sequentially starting a plurality of polarized light sources to irradiate the surface of a product to be measured, and adjusting the polarization angle of the second polarizer (5) to be vertical to the polarization angle of the first polarizer (4) of the started polarized light sources when starting one polarized light source each time;
c. the imaging module (6) respectively collects a polarization image when each polarization light source is started once;
d. carrying out image fusion on the collected polarization state images to obtain a multi-polarization state image containing all defect information of a to-be-detected region of a to-be-detected product;
e. d, analyzing and calculating the image obtained in the step d by using a defect detection algorithm to obtain a defect detection result of the area to be detected;
f. driving the objective table (7) to move in the horizontal direction, enabling the next area to be detected of the product to be detected to be located on the central shaft, and repeating the steps b-e to obtain the defect detection result of the area to be detected;
g. and f, repeating the step f until the surface defect detection of the whole product to be detected is completed.
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| CN114089584A (en) * | 2021-10-27 | 2022-02-25 | 广东博智林机器人有限公司 | Anti-dazzle shooting device and construction robot |
| CN114166860A (en) * | 2021-12-01 | 2022-03-11 | 浙江久立特材科技股份有限公司 | Lighting device and imaging method for visual detection of defects on outer surface of steel pipe |
| CN114813579A (en) * | 2022-04-15 | 2022-07-29 | 安徽唯嵩光电科技有限公司 | Method and device capable of eliminating glare on surface of high-light-reflection fruits and vegetables |
| CN117041712A (en) * | 2023-10-08 | 2023-11-10 | 深圳市信润富联数字科技有限公司 | Light source integrated camera and detection method |
| CN118655081A (en) * | 2024-08-20 | 2024-09-17 | 杭州径上科技有限公司 | An underwater surface defect detection system |
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