CN213001559U - Equipment for stabilizing air quantity and air pressure and pressure control mechanism arranged in equipment - Google Patents
Equipment for stabilizing air quantity and air pressure and pressure control mechanism arranged in equipment Download PDFInfo
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- CN213001559U CN213001559U CN202021865848.8U CN202021865848U CN213001559U CN 213001559 U CN213001559 U CN 213001559U CN 202021865848 U CN202021865848 U CN 202021865848U CN 213001559 U CN213001559 U CN 213001559U
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- 230000007246 mechanism Effects 0.000 title claims abstract description 70
- 230000000087 stabilizing effect Effects 0.000 title claims abstract description 17
- 239000003638 chemical reducing agent Substances 0.000 claims description 40
- 239000000306 component Substances 0.000 claims description 24
- 238000007789 sealing Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 239000008358 core component Substances 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 6
- 238000004140 cleaning Methods 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 230000003631 expected effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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Abstract
The utility model provides equipment for stabilizing air quantity and pressure and a pressure control mechanism arranged in the equipment, which achieves the purpose of cleaning the surface of a wafer by controlling the air quantity and the air pressure; comprises a device for stabilizing air quantity and air pressure and a pressure control mechanism; the equipment for stabilizing air volume and air pressure comprises a pressure control mechanism, a fan system, an air duct system, a control system and a rack; the pressure control mechanisms are arranged on the upper layer of the rack; each pressure control mechanism is fixedly connected with the air duct system; the air duct system is communicated with the pressure control mechanism and the fan system; the control system is electrically connected with the pressure control mechanism and the fan system respectively; the utility model has the advantages that: the method has the advantages of replacing factory work, providing sufficient air exchange efficiency for wafer processing, controlling the air pressure more accurately than the factory work, and reducing the influence of chamber pressure fluctuation on the process.
Description
Technical Field
The utility model relates to a semiconductor production technical field especially relates to an equipment of stable amount of wind pressure and pressure control mechanism of inside setting thereof.
Background
The FEC (Fan Exhaust control) wind pressure control system has the working principle of providing wind volume for a fan system, controls a pressure control mechanism through a PID algorithm and an absolute value motor according to specific process requirements, and controls the wind volume and the wind pressure by changing the opening and closing area.
The existing wet-method semiconductor equipment needs sufficient ventilation efficiency when processing the wafer to ensure the cleanness of the surface of the wafer; the purpose of cleaning the surface of the wafer can be achieved by controlling the air quantity and the air pressure; at present, most equipment on the market adopts direct connection plant service, and accurate pressure control cannot be achieved. Mechanical movement during production can cause multiple chamber pressure fluctuations that affect the process.
SUMMERY OF THE UTILITY MODEL
The utility model provides an equipment of stable amount of wind pressure and the pressure control mechanism of inside setting thereof reaches the clean purpose in wafer surface through control amount of wind and wind pressure.
The utility model provides equipment for stabilizing air quantity and air pressure and a pressure control mechanism arranged in the equipment, which comprises equipment for stabilizing air quantity and air pressure and a pressure control mechanism;
an apparatus for stabilizing air volume and air pressure comprises a pressure control mechanism 1, a fan system 2, an air duct system 3, a control system 4 and a frame 5;
a plurality of pressure control mechanisms 1 are arranged, and the plurality of pressure control mechanisms 1 are fixedly arranged on the upper layer of the frame 5; each pressure control mechanism 1 is fixedly connected with an air duct system 3; the air duct system 3 is communicated with the pressure control mechanism 1 and the fan system 2; the upper part of the air duct system 3 is provided with a plurality of pressure control mechanism connecting ports 31 which are respectively in one-to-one correspondence with the pressure control mechanisms 1; the lower part of the air duct system 3 is provided with an air duct base 32 which is fixedly connected with the fan system 2; the control system 4 is electrically connected with the pressure control mechanism 1 and the fan system 2 respectively.
Preferably, the pressure control mechanisms 1 are fixed at the edge of the upper layer of the frame 5.
A pressure control mechanism is arranged inside the equipment for stabilizing air volume and air pressure, and comprises an outer shell 12, an air cavity and an air port 112 which are arranged at the bottom, a rotary inner core 111 and components, a servo motor 16 and components, and a planetary reducer 17 and components;
the housing 12 is disposed around the outside of the pressure control mechanism; the tuyere 112 is arranged at the outer side of the bottom of the pressure control mechanism; the upper part of the air cavity is provided with a rotary inner core 111 and a component, and the rotary inner core 111 is fixed on the mechanism by the rotary inner core component; the planetary reducer 17 and the components are fixed on the rotating inner core 111 and the components, and the planetary reducer component fixes the planetary reducer 17; the servo motor (16) and the component are arranged on the planetary reducer 17 and the component.
Preferably, the tuyere 112 has a square shape.
Preferably, a sealing ring 11 is further arranged between the bottom of the wind cavity and the shell 12.
Preferably, the rotating core assembly includes a bearing 13 fixed on top of the rotating core 111; and a bearing seat 110 clamped outside the bearing 13; and a coupling 15 fixedly connected with the rotary core 111.
Preferably, the planetary reducer assembly comprises a reducer supporting block 19 and a reducer fixing plate 18; the reducer supporting block 19 is fixedly connected with the bearing seat 110 and the reducer fixing plate 18; the planetary reducer 17 is fixedly mounted on the reducer fixing plate 18.
Preferably, the servo motor assembly comprises a locating plate 14; the positioning sheet 14 is used for positioning the position of the servo motor; the servo motor 16 is arranged on the top of the structure and drives the mechanism to rotate.
The utility model has the advantages that: the method has the advantages of replacing factory work, providing sufficient air exchange efficiency for wafer processing, controlling the air pressure more accurately than the factory work, and reducing the influence of chamber pressure fluctuation on the process.
Drawings
FIG. 1 is a schematic structural diagram of an apparatus for stabilizing air volume and air pressure;
FIG. 2 is a schematic view of a pressure control mechanism;
FIG. 3 is a schematic diagram of the control system connections;
in the figure, the position of the upper end of the main shaft,
1. a pressure control mechanism; 11. the device comprises a sealing ring, a sealing ring 12, a shell, a bearing 13, a bearing 14, a positioning sheet 15, a coupling 16, a servo motor 17, a planetary reducer 18, a reducer fixing plate 19, a reducer supporting block 110, a bearing seat 111, a rotating inner core 112 and an air opening;
2. a fan system;
3. an air duct system;
4. a control system;
5. and a frame.
Detailed Description
The present invention will now be described in detail with reference to the drawings, which are provided for illustrative and explanatory purposes only and should not be construed as limiting the scope of the present invention in any way.
The utility model provides equipment for stabilizing air quantity and air pressure and a pressure control mechanism arranged in the equipment, which comprises equipment for stabilizing air quantity and air pressure and a pressure control mechanism;
an apparatus for stabilizing air quantity and air pressure comprises,
the pressure control mechanism 1 is a main mechanism for controlling pressure, and controls the opening and closing area through a PID algorithm and an absolute value motor so as to control the air volume and the air pressure. The wind pressure can be controlled at 300 +/-10 Pa (common process pressure).
And the fan system 2 is used for providing an air volume source for the equipment.
And the air duct system 3 is communicated with the fan and the pressure control system and is used for collecting liquid which is possibly condensed or liquefied.
And the control system 4 is used for controlling the frequency of the fan and achieving the pressure required by the process conditions. And a PID algorithm is provided, and the pressure control mechanism is controlled to rotate to adjust the pressure. Controlling the accumulated liquid possibly existing in the air duct system and discharging in time.
A frame 5 for placing the pressure control mechanism 1, the fan system 2 and the air guide system 3,
a plurality of pressure control mechanisms 1 are arranged, and the plurality of pressure control mechanisms 1 are fixedly arranged on the upper layer of the frame 5; each pressure control mechanism 1 is fixedly connected with an air duct system 3; the air duct system 3 is communicated with the pressure control mechanism 1 and the fan system 2; the upper part of the air duct system 3 is provided with a plurality of pressure control mechanism connecting ports 31 which are respectively in one-to-one correspondence with the pressure control mechanisms 1; the lower part of the air duct system 3 is provided with an air duct base 32 which is fixedly connected with the fan system 2; the control system 4 is electrically connected with the pressure control mechanism 1 and the fan system 2 respectively.
In the present embodiment, the pressure control mechanisms 1 are fixed at the edge of the upper layer of the machine frame 5.
A pressure control mechanism is arranged inside the equipment for stabilizing air volume and air pressure, and comprises an outer shell 12, an air cavity and an air port 112 which are arranged at the bottom, a rotary inner core 111 and components, a servo motor 16 and components, and a planetary reducer 17 and components;
the housing 12 is disposed around the outside of the pressure control mechanism; the air port 112 is arranged at the outer side of the bottom of the pressure control mechanism and is connected with the pressure control mechanism connecting port 31; the upper part of the air cavity is provided with a rotary inner core 111 and a component, and the rotary inner core 111 is fixed on the mechanism by the rotary inner core component; the planetary reducer 17 and the components are fixed on the rotating inner core 111 and the components, and the planetary reducer component fixes the planetary reducer 17; the servo motor 16 and the components are arranged on the planetary reducer 17 and the components.
Preferably, in this embodiment, the tuyere 112 has a square shape.
In the embodiment, a sealing ring 11 is preferably further disposed between the bottom of the wind cavity and the outer shell 12. For sealing.
Preferably, in this embodiment, the rotating inner core assembly includes a bearing 13 fixed on the top of the rotating inner core 111 for positioning and rotating the rotating inner core 111; and a bearing seat 110 clamped outside the bearing 13 for fixing and positioning the bearing; and a coupling 15 fixedly connected with the rotating inner core 111 for avoiding coaxiality errors. The rotary inner core 111 is used for rotationally adjusting the opening degree.
Preferably, in this embodiment, the planetary reducer assembly includes a reducer support block 19 and a reducer fixing plate 18; the reducer supporting block 19 is fixedly connected with the bearing seat 110 and the reducer fixing plate 18; the planetary reducer 17 is fixedly mounted on the reducer fixing plate 18. The planetary reducer 17 serves to increase torque to prevent overload.
Preferably, in this embodiment, the servo motor assembly includes a positioning plate 14; the positioning sheet 14 is used for positioning the position of the servo motor; the servo motor 16 is arranged on the top of the structure and drives the mechanism to rotate.
The fan system 2 discharges air, and the fan frequency is controlled through the control system 4. The control system 4 also controls the rotation adjustment pressure of the pressure control mechanism 1 by a PID operator. Controlling the accumulated liquid possibly existing in the wind guide system and discharging in time.
The pressure fluctuation range of the current technology is 60pa, and the pressure fluctuation is stabilized within 10pa by using the device (expected effect).
When the plant capacity is insufficient, for example, the equipment is installed at the tail end of the plant exhaust, the equipment can play the role of plant exhaust, and stable pressure and air volume are provided for the equipment.
It should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The above-mentioned embodiments of the present invention do not limit the scope of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (8)
1. An apparatus for stabilizing air volume and air pressure comprises a pressure control mechanism (1), a fan system (2), an air duct system (3), a control system (4) and a frame (5);
it is characterized in that the preparation method is characterized in that,
a plurality of pressure control mechanisms (1) are arranged, and the plurality of pressure control mechanisms (1) are fixedly arranged on the upper layer of the frame (5); each pressure control mechanism (1) is fixedly connected with the air duct system (3); the air duct system (3) is communicated with the pressure control mechanism (1) and the fan system (2); the upper part of the air duct system (3) is provided with a plurality of pressure control mechanism connecting ports (31) which are respectively in one-to-one correspondence with the pressure control mechanisms (1); an air duct base (32) is arranged at the lower part of the air duct system (3) and is fixedly connected with the fan system (2); and the control system (4) is respectively electrically connected with the pressure control mechanism (1) and the fan system (2).
2. An apparatus for stabilizing wind volume and wind pressure according to claim 1, wherein said pressure control mechanisms (1) are fixed at the edge of the upper layer of said frame (5).
3. A pressure control mechanism is arranged in equipment for stabilizing air volume and air pressure and is characterized by comprising an outer shell (12), an air cavity and an air port (112) which are arranged at the bottom, a rotary inner core (111) and a component, a servo motor (16) and a component, and a planetary reducer (17) and a component;
the housing (12) is wrapped and arranged outside the pressure control mechanism; the air port (112) is arranged on the outer side of the bottom of the pressure control mechanism; the upper part of the air cavity is provided with a rotary inner core (111) and a component, and the rotary inner core component fixes the rotary inner core (111) on the mechanism; the planetary reducer (17) and the assembly are fixed on the rotating inner core (111) and the assembly, and the planetary reducer assembly fixes the planetary reducer (17); the servo motor (16) and the component are arranged on the planetary reducer (17) and the component.
4. A pressure control mechanism as claimed in claim 3, wherein the tuyere (112) is square.
5. A pressure control mechanism according to claim 3, characterised in that a sealing ring (11) is arranged between the bottom of the wind chamber and the housing (12).
6. A pressure control mechanism according to claim 3, characterized in that the rotating core assembly comprises a bearing (13) fixed on top of the rotating core (111); and a bearing seat (110) clamped outside the bearing (13); and a coupling (15) fixedly connected with the rotating inner core (111).
7. The pressure control mechanism of claim 6, wherein the planetary reducer assembly comprises a reducer support block (19) and a reducer fixing plate (18); the speed reducer supporting block (19) is fixedly connected with the bearing seat (110) and the speed reducer fixing plate (18); the planetary speed reducer (17) is fixedly mounted on the speed reducer fixing plate (18).
8. A pressure control mechanism as claimed in claim 7, characterised in that the servo motor assembly comprises a locating tab (14); the positioning sheet (14) is used for positioning the position of the servo motor; the servo motor (16) is arranged at the top of the structure, and the driving mechanism rotates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021865848.8U CN213001559U (en) | 2020-09-01 | 2020-09-01 | Equipment for stabilizing air quantity and air pressure and pressure control mechanism arranged in equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021865848.8U CN213001559U (en) | 2020-09-01 | 2020-09-01 | Equipment for stabilizing air quantity and air pressure and pressure control mechanism arranged in equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213001559U true CN213001559U (en) | 2021-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021865848.8U Active CN213001559U (en) | 2020-09-01 | 2020-09-01 | Equipment for stabilizing air quantity and air pressure and pressure control mechanism arranged in equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114101212A (en) * | 2020-09-01 | 2022-03-01 | 盛奕半导体科技(无锡)有限公司 | Equipment for stabilizing air quantity and air pressure and pressure control mechanism arranged in equipment |
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2020
- 2020-09-01 CN CN202021865848.8U patent/CN213001559U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114101212A (en) * | 2020-09-01 | 2022-03-01 | 盛奕半导体科技(无锡)有限公司 | Equipment for stabilizing air quantity and air pressure and pressure control mechanism arranged in equipment |
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