CN210383885U - Flexible wearable sensor and corresponding wearable equipment thereof - Google Patents
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Abstract
本实用新型提供了一种尺寸小巧、柔性程度高且输出能力高的柔性可穿戴传感器以及相应的可穿戴设备，其中的柔性可穿戴传感器包括：依次设置的第一电极层、第一摩擦层、间隔层、第二电极层以及第二摩擦层，第一摩擦层和第二摩擦层中均含有至少由硅橡胶组成的柔性混合材料，间隔层采用柔性材料制备而成，第一摩擦层的内表面和第二摩擦层的内表面相对应的区域上均形成有由多个凸起结构排布而成的凸起部分，且该两个内表面相对设置，第一电极层覆盖在第一摩擦层的外表面上，间隔层具有与第一摩擦层的内表面上的凸起部分对应的中空部分，第二电极层覆盖在第二摩擦层的内表面上。
The utility model provides a flexible wearable sensor with small size, high flexibility and high output capability and a corresponding wearable device, wherein the flexible wearable sensor comprises: a first electrode layer, a first friction layer, The spacer layer, the second electrode layer and the second friction layer, the first friction layer and the second friction layer both contain a flexible mixed material composed of at least silicone rubber, the spacer layer is made of a flexible material, and the inner part of the first friction layer is The surface and the area corresponding to the inner surface of the second friction layer are both formed with convex parts arranged by a plurality of convex structures, and the two inner surfaces are arranged opposite to each other, and the first electrode layer covers the first friction layer. On the outer surface of the layer, the spacer layer has hollow portions corresponding to the raised portions on the inner surface of the first friction layer, and the second electrode layer covers the inner surface of the second friction layer.
Description
Technical Field
The utility model relates to a flexible wearable sensor of flexible wearable sensor and corresponding wearable equipment thereof especially relates to a flexible wearable sensor and corresponding wearable equipment that small in size, flexibility degree are high and output capacity is high.
Background
With the development of scientific technology, wearable electronic products and artificial electronic skins which are integrated with communication technology, interaction technology and the like and can carry out information acquisition and transmission are more and more concerned by people, and the motion, various physiological indexes and the like of a human body can be monitored.
For this reason, at present, triboelectric, piezoelectric, piezoresistive, and capacitive force-electricity coupling mechanisms are commonly used in flexible sensors in the above electronic products. Piezoresistive and capacitive sensors require an external power supply for energy supply, so that the fitting of the sensor and a human body is limited, and the stability is further influenced.
Therefore, the self-powered sensor which is a sensing device capable of generating an electrical excitation signal without external power supply is one of the approaches for effectively solving the trouble of a rigid battery.
However, the current sensors have certain defects in flexibility or acquisition sensitivity.
For example, wearable devices for measuring pressure are mostly in the form of small optical circuits or force-sensitive elements plus rubber wristbands. Patent [ CN103582451A ] adopts an optical method to measure pulse signals, but cannot directly measure pressure signals of pulse beats. Patent No. CN203619542U discloses a pulse sensor based on piezoelectric effect, which has a significant reduction in thickness, but the thickness of the whole device is still large and not completely flexible. The devices designed by patents [ CN107994803A ] and [ CN205195598U ] utilize the triboelectric effect, but the structural size is large and the application direction is a nano generator. Patent [ CN103107737 ] designs that the piezoelectric friction composite nano generator is similar to the utility model in structure, but its structural design is complicated and can not detect pressure, only is fit for as power-electricity conversion device.
Generally speaking, these sensors have the defects of large size, incomplete flexibility, low output capacity and the like, so that the sensors cannot be better applied to flexible wearable devices, particularly in the field of medical sensing systems.
SUMMERY OF THE UTILITY MODEL
The utility model relates to a solve above-mentioned problem and go on, aim at provides a flexible wearable sensor and corresponding wearable equipment that small in size, flexibility degree are high and output capacity is high.
The utility model discloses a realize above-mentioned purpose, adopted following scheme:
the utility model provides a flexible wearable sensor, a serial communication port, include: the first electrode layer, the first friction layer, the spacing layer, the second electrode layer and the second friction layer are sequentially arranged, wherein the first friction layer and the second friction layer both contain flexible mixed materials at least composed of silicon rubber, the spacing layer is made of flexible materials, protruding parts formed by arranging a plurality of protruding structures are formed on regions corresponding to the inner surfaces of the first friction layer and the second friction layer, the two inner surfaces are oppositely arranged, the first electrode layer covers the outer surface of the first friction layer, the spacing layer is provided with a hollow part corresponding to the protruding parts on the inner surface of the first friction layer, and the second electrode layer covers the inner surface of the second friction layer.
The utility model provides a flexible wearable sensor still has such characteristic, wherein, the homogeneous mixing has granule or fibrous material in the silicon rubber.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, protruding structure is any one in pyramid structure, cube structure, strip structure, frustum structure and the spherical structure.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, when protruding structure was any one in pyramid structure, cube structure, bar structure and the frustum structure, the scope of the longest one side length was 5um-500um in all the side lengths that six views of every protruding structure included, and when protruding structure was the globular structure, the scope of its diameter was 5um-500 um.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, the scope of a longest side length is 100um-300um, and the scope of diameter is 100um-300 um.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, the thickness scope of first frictional layer and second frictional layer is 90um-200 um.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, the thickness scope of first frictional layer and second frictional layer is 100um-150 um.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, the thickness scope of wall is 2um-500 um.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, the thickness scope of wall is 100um-300 um.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, the material of first electrode layer and second electrode layer is any one or two kinds in conductive metal and the electrically conductive nano wire.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, the material of wall is the polymer organic material.
The utility model provides a flexible wearable sensor still has such characteristic, and wherein, the thickness scope of first electrode layer and second electrode layer is 50-500 nm.
The flexible wearable sensor provided by the utility model is also characterized in that the first friction layer is a square with the size range of 1-5 cm; the spacing layer is a square with the size range of 1-5 cm; the second friction layer is square with a size ranging from 1 to 10 cm.
The utility model also provides a wearable sensor equipment, wherein, adopt foretell flexible wearable sensor as the sensor.
Utility model with the functions and effects
The utility model provides a flexible wearable sensor, because flexible wearable sensor is including the first electrode layer that sets gradually, first frictional layer, the wall, second electrode layer and second frictional layer, and all contain the flexible mixed material of constituteing by silicon rubber at least in first frictional layer and the second frictional layer, and the internal surface of first frictional layer and the internal surface of second frictional layer set up relatively, and all be formed with the bulge that is arranged by a plurality of protruding structure arrays on the corresponding region of these two internal surfaces, simultaneously, because the wall that adopts flexible material preparation to form has the hollow part that corresponds with the bulge on the internal surface of piezoelectric layer, so through the hollow part of wall, when can produce deformation under the exogenic action, can contact the bulge of first frictional layer and second frictional layer and carry out the friction electrification, the contact friction area is increased by each convex structure, so that the output performance of the flexible wearable sensor is greatly improved, the acquisition sensitivity of the flexible wearable sensor is high, and the flexible wearable sensor can be applied to the field of medical sensing systems for pulse beat acquisition; and because the first friction layer and the second friction layer are used as the flexible substrates and have the electrification function respectively, namely the flexible substrates and the electrification are combined into a whole, the overall thickness and the mass of the flexible wearable sensor can be greatly reduced, the size of the flexible wearable sensor can be as small as possible, and the flexibility degree is high.
Correspondingly, adopt the utility model provides a flexible wearable sensor can optimize corresponding structure and size of a dimension greatly under the prerequisite of guaranteeing the performance as the wearable equipment of sensor to can improve the holistic flexibility of wearable equipment, thereby change with human skin integration.
Drawings
Fig. 1 is an exploded schematic view of a flexible wearable sensor according to an embodiment;
FIG. 2 is a side view of a flexible wearable sensor according to the embodiment of FIG. 1;
fig. 3 is a schematic diagram illustrating the result of performing an output performance test on the flexible wearable sensor provided in the embodiment when the thicknesses of the spacer layers are different.
Detailed Description
The invention will be further described with reference to the following specific examples. For the specific methods or materials used in the embodiments, those skilled in the art can make routine replacement selections according to the existing technologies based on the technical idea of the present invention, and not limited to the specific descriptions of the embodiments of the present invention.
Examples
The wearable device provided by the embodiment adopts the flexible wearable sensor as the sensor.
Fig. 1 is an exploded schematic view of a flexible wearable sensor according to an embodiment;
fig. 2 is a side view of a flexible wearable sensor according to the embodiment of fig. 1.
As shown in fig. 1 and fig. 2, the flexible wearable sensor 100 provided by the present embodiment includes a first electrode layer 10, a first friction layer 20, a spacing layer 30, a second electrode layer 40, and a second friction layer 50, which are sequentially attached to each other.
In order to be worn properly and to make better contact with the skin of the human body, the first frictional layer 20, the spacer layer 30 and the second frictional layer 50 are required to be flexible.
Both the first friction layer 20 and the second friction layer 50 contain a flexible hybrid material composed of at least silicone rubber, also in order to give the first friction layer 20 and the second friction layer 50 the flexibility described above. In addition, the inventors of the present invention have also found that when the silicone rubber has a granular material or fibrous substance therein, the overall output performance of the current of the flexible wearable sensor 100 can be increased.
The inner surface of the first friction layer 20 and the inner surface of the second friction layer 50 are oppositely arranged, and the corresponding areas of the two inner surfaces are both provided with a convex part 2 formed by arraying a plurality of convex structures 1.
Thus, the convex parts 2 formed by the array arrangement of the convex structures 1 can enable the first friction layer 20 and the second friction layer 50 to deform to generate relative sliding and extrusion when the first friction layer 20 is in contact with the second friction layer 50 through the vibration or bending action generated by external force, so as to generate friction signals, and meanwhile, the existence of the convex structures 1 can improve the contact surface area between the first friction layer 20 and the second friction layer 50, so as to generate more friction electrification. Therefore, the flexible wearable pressure sensor 100 can overcome the power supply problem of an external power supply of an active device and the defects of low output voltage of a piezoelectric nano device and low output current of a friction nano device, thereby achieving high output performance and realizing high-sensitivity sensing of a slight signal.
In addition, the protruding structure 1 is any one of a pyramid structure, a cube structure, a strip structure, a frustum structure and a spherical structure, and can increase the final output performance.
In addition, the present inventors have also found that if the protruding structures 1 are too large, which adversely affects the friction effect of the first and second friction layers 20 and 50, and then reduces the current output, the output (voltage/current) of the large-sized structures is small compared to the small-sized structures, so the size of the protruding structures 1 cannot be too large, and for this reason, the six views of each protruding structure 1 in the present embodiment include the longest one of all the side lengths in the range of 5um to 500um, preferably 100um to 300 um; when the protrusion structure 1 is a spherical structure, the diameter thereof ranges from 5um to 500um, preferably from 100um to 300 um. The six views refer to the front view, the rear view, the left view, the right view, the bottom view and the top view which are common in engineering drawings; all the side lengths included in the six views are sets made among the side lengths of the views, for example, each view is a triangle, each view is three side lengths, and all the side lengths of the six views are 18 side lengths in total; the longest of all the side lengths means the side length with the longest length in the set of all these side lengths. Of course, it is understood that the side length with the longest length does not mean one, sometimes only one, sometimes several, and sometimes all are the longest if the left and right side lengths are the same length.
The spacing layer 30 is made of a flexible material, so that the spacing layer has certain flexibility. In this embodiment, the spacer layer 30 is made of a polymer organic material.
The spacer layer 30 is disposed between the first friction layer 20 and the second friction layer 50, and has a hollow portion 31 corresponding to the convex portion 2 on the inner surface of the first friction layer 20. The distance layer 30 functions to contact and separate the first friction layer 20 and the second friction layer 50 by deformation between the first friction layer and the second friction layer 50 by flexibility thereof: the protruding portions 2 of the first frictional layer 20 are exposed to contact with the protruding portions 2 of the second frictional layer 50 when an external force is applied, thereby generating electricity by friction therebetween, and the first frictional layer 20 and the second frictional layer 50 are separated or spaced apart from each other by restoring the original shape after the external force is removed.
The first electrode layer 10 is covered on the outer surface of the first friction layer 20; the second electrode layer 40 covers the inner surface of the second friction layer 50. The electricity generated by the friction of the first friction layer 20 is led out through the conducting wire on the first electrode layer 10, and the electricity generated by the friction of the second friction layer 40 is led out through the conducting wire on the second electrode layer 40.
In this embodiment, the first electrode layer 10 and the second electrode layer 40 are made of one or both of a conductive metal and a conductive nanowire.
In addition, the thicknesses of the first friction layer 20, the spacing layer 30 and the second friction layer 50 cannot be too thick, so that the overall flexibility can be maintained, but cannot be too thin, so that the effect is influenced, in the embodiment, the thicknesses of the first friction layer 20 and the second friction layer 50 are both 100um to 150um, preferably 90um to 200 um; the thickness of the spacer layer 30 is in the range of 2um to 500um, preferably 100um to 300um, and the inventors have found through studies that the larger the thickness of the spacer layer 30 is in this range, the better the output performance is.
In the present embodiment, similarly, in order to ensure the electric power generating effect while maintaining the overall flexibility, the thicknesses of the first electrode layer 10 and the second electrode layer 40 are as small as possible, and preferably 500nm or less.
The preparation method of the flexible wearable sensor 100 provided by the embodiment includes the following steps:
step 1.1, forming a plurality of patterns for forming each concave structure, which are used for removing the photoresist and exposing the oxide layer, on the wafer after the oxide layer covered with the photoresist is developed by a photoetching technology;
and step 1.2, immersing the substrate treated in the step 1.1 in BOE solution buffer oxide etching liquid for 8 minutes to corrode an oxide layer on the surface of the pattern.
Wherein, BOE solution (buffer oxide etching solution): 49% aqueous HF solution: 40% aqueous NH4F solution ═ 1: 6 (volume ratio) are mixed.
Step 1.3, putting the substrate treated in the step 1.2 into an acetone solution to remove the photoresist;
and step 1.4, putting the substrate treated in the step 1.3 into a TMAH (tetramethylammonium hydroxide) solution, and reacting for 30-90 minutes in a water bath heating environment at 70-90 ℃ to obtain the silicon wafer template with the concave part. In this step, the structure type of the formed concave structure can be controlled by controlling the reaction time in the water bath heating environment as required, thereby finally controlling the specific structure type of the formed convex structure 1.
Curing agents such as polycondensation-type two-component silicone rubber (RTV-2) crosslinking agents.
According to the requirement, granular materials or fiber substances can be uniformly mixed in the silicon rubber to increase the final output performance, at the moment, in order to ensure that the prepared piezoelectric layer has sufficient flexibility and can also ensure that a certain intensity of current is generated, the mass ratio of the granular materials or the fiber substances to the silicon rubber needs to meet a certain condition, and in the embodiment, the range of the mass ratio of the granular materials or the fiber substances to the silicon rubber is preferably 10:100-80: 100.
3.1, sputtering a layer of metal film with the thickness of 50-300nm on one surface of the silica gel template with the concave structure obtained in the step 1;
and 3.2, uniformly spin-coating (namely spin-coating) the material for the film prepared in the step 2 on the surface of the metal film with the concave structure to obtain a mixed film layer with the thickness of 90-200um, and heating and curing. In theory, the thickness of the hybrid film layer may be thicker, but the greater the thickness, the less flexible the overall device. To obtain a mixed film layer of this thickness range, therefore: spin-coating the material for thin film by using a spin coater, wherein the spin speed is set to 500-. In addition, the heat curing is as follows: and placing the mixture on a 50 ℃ baking table for heating and curing for 3-8 hours.
And 3.3, soaking the heated and cured silica gel template in an acid solution, and after the metal film reacts with the acid, corroding the metal film, so that the mixed film is automatically separated from the silicon wafer template to obtain a mixture film with a convex part, wherein the convex part is actually the convex structure array corresponding to each concave structure one by one after the concave structures are separated from the reverse mold.
The thickness of the metal film sputtered in step 3.1 is in the range of 50-300nm, because the metal film is etched away by the acid solution in step 3.3, so that the metal film is too thick and wasted, but not too thin, because the metal film is too thin and can not completely cover the recessed structure.
And 4, shearing and attaching, namely respectively shearing the mixture film obtained in the step 3 to obtain a first friction layer and a second friction layer, sputtering a smooth surface of the first friction layer to obtain a first electrode layer, sputtering a surface with a convex structure of the second friction layer to obtain a second electrode layer, shearing an elastic material to obtain a spacing layer with a hollow part, and attaching the first electrode layer, the first friction layer, the spacing layer, the second electrode layer and the second friction layer in sequence to obtain the flexible wearable sensor. Wherein, smooth surface means the surface without convex structure.
In addition, in this embodiment, the first friction layer obtained by cutting is a square thin film with a size ranging from 1 to 5cm, and correspondingly, the spacing layer is a square thin film with a size ranging from 1 to 5cm, and the hollow portion is sized to expose the convex portion on the inner surface of each of the first friction layer and the second friction layer. In addition, the second rubbed layer obtained by shearing is a square film with a size ranging from 1 to 10cm, generally larger than the size of the first rubbed layer and the spacer layer, which facilitates the final encapsulation.
Carry out the flexibility test to foretell flexible wearable sensor, specifically do: a, bending the flexible wearable sensor; and b, comparing the flexible wearable sensor with the size of the pentagonal coin.
As a result, it can be seen that the flexible wearable sensor can achieve almost 180 ° bending, so the flexible wearable sensor provided by the embodiment has good flexibility; by comparing the size with the coin, it is shown that the flexible wearable sensor provided by the present embodiment is very small in size.
Fig. 3 is a schematic diagram illustrating the result of performing an output performance test on the flexible wearable sensor provided in the embodiment when the thicknesses of the spacer layers are different.
Carrying out spacer layer thickness output performance test on the flexible wearable sensor;
the spacer layer 30 was set to different thicknesses and tested: the spacer layers are set to 10um, 20um, 30um, 40um and 50um, respectively, and then a simulation plot of potential development is generated all after the same force.
The result is shown in fig. 3, where the thickness dimension of the corresponding spacer layer is indicated at the top and the lowest and uppermost potentials at the right are added, i.e. the potential peak-to-peak value: for example, when the thickness of the spacing layer is 30um, 3E-5m in the figure represents a thickness of 3e-5m, i.e. 30um, the lowest and the highest potential on the right side of the figure are added, i.e. 13.5+ 9.27-22.77, i.e. the potential peak-to-peak value. As can be seen from fig. 3, as the thickness of the spacer layer increases, the peak-to-peak value of the generated potential increases, and thus, the output voltage of the flexible wearable sensor has a positive correlation with the thickness of the spacer layer.
Examples effects and effects
The flexible wearable sensor provided by the embodiment comprises a first electrode layer, a first friction layer, a spacing layer, a second electrode layer and a second friction layer which are sequentially arranged, wherein the first friction layer and the second friction layer both contain flexible mixed materials at least composed of silicon rubber, the inner surface of the first friction layer and the inner surface of the second friction layer are oppositely arranged, and convex parts formed by arranging a plurality of convex structures in an array mode are formed on corresponding areas of the two inner surfaces, meanwhile, the spacing layer prepared by adopting the flexible materials is provided with a hollow part corresponding to the convex part on the inner surface of the piezoelectric layer, so that the first friction layer and the second friction layer can be contacted to conduct friction electrification when deformation can be generated under the action of external force through the hollow part of the spacing layer, and the contact friction area is increased due to the convex part, therefore, the output performance of the flexible wearable sensor is greatly improved, and the first friction layer and the second friction layer have the electrification function while being used as the flexible substrates, namely the flexible substrates and the electrification are combined into a whole, so that the overall thickness and the quality of the flexible wearable sensor can be greatly reduced, the size of the flexible wearable sensor can be as small as possible, and the flexibility degree is high.
Correspondingly, adopt the flexible wearable sensor that this embodiment provided as the wearable equipment of sensor, can optimize corresponding structure and size of a dimension greatly under the prerequisite of guaranteeing the performance to can improve wearable equipment's holistic flexibility, thereby change with human skin integration.
Claims (13)
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109700440A (en) * | 2018-12-18 | 2019-05-03 | 中北大学 | Flexible wearable sensor and its corresponding wearable device and preparation method |
| CN111664973A (en) * | 2020-07-10 | 2020-09-15 | 成都柔电云科科技有限公司 | Flexible pressure sensor and preparation method thereof |
| CN112472033A (en) * | 2020-12-11 | 2021-03-12 | 西安建筑科技大学 | Multi-layer ion skin finger joint movement angle measuring system and method |
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2018
- 2018-12-18 CN CN201822129323.7U patent/CN210383885U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109700440A (en) * | 2018-12-18 | 2019-05-03 | 中北大学 | Flexible wearable sensor and its corresponding wearable device and preparation method |
| CN111664973A (en) * | 2020-07-10 | 2020-09-15 | 成都柔电云科科技有限公司 | Flexible pressure sensor and preparation method thereof |
| CN111664973B (en) * | 2020-07-10 | 2025-06-24 | 成都柔电云科科技有限公司 | A flexible pressure sensor and a method for preparing the same |
| CN112472033A (en) * | 2020-12-11 | 2021-03-12 | 西安建筑科技大学 | Multi-layer ion skin finger joint movement angle measuring system and method |
| CN112472033B (en) * | 2020-12-11 | 2024-04-05 | 西安建筑科技大学 | Multi-layer ionic skin finger joint movement angle measurement system and method |
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