CN111366273B - Adhesive vertical micro-capacitive flexible mechanical sensor and its manufacturing method and application - Google Patents
Adhesive vertical micro-capacitive flexible mechanical sensor and its manufacturing method and application Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
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Abstract
The invention discloses a vertical micro-capacitance type flexible mechanical sensor capable of being applied, and a manufacturing method and application thereof. The capacitive flexible mechanical sensor comprises a flexible substrate, a sensitive layer and at least two electrodes, wherein the sensitive layer is arranged on the surface of the flexible substrate, the sensitive layer comprises a capacitive microplate arranged on the surface of the flexible substrate and a nanowire conductive network layer arranged on the surface of the capacitive microplate, the capacitive microplate comprises a first capacitive microplate and a second capacitive microplate which are respectively provided with a first spiral structure and a second spiral structure, the first spiral structure and the second spiral structure are matched to form a three-dimensional double-spiral micro-nano structure, and a polymer dielectric layer is further distributed between the first capacitive microplate and the second capacitive microplate. The capacitance micro-polar plate in the flexible mechanical sensor provided by the invention can realize selective response to higher sensitivity of pressure and shearing force due to the adoption of the fingerprint-imitating 'vortex' micro-nano structure, and has the advantages of high precision, high reliability, long service life and the like.
Description
Technical Field
The invention relates to a mechanical sensor, in particular to an attachable vertical micro-capacitance type flexible mechanical sensor and a manufacturing method and application thereof, and belongs to the technical field of micro-electro-mechanical systems.
Background
In recent years, the technology of artificial limbs has been greatly developed, but the refusal and abandoning rate of the artificial limbs is still high, and the main reason is the lack of safe and effective tactile perception feedback and bionic compliance control functions. As the forefront touch sensor for sensing information sources, the accuracy and the identification degree of signal detection and the fusion with human physiological signals are the information basis that a wearer can establish basic control actions such as natural human hand compliance grasping, holding, twisting and the like through a rear-end nerve feedback channel, and become one research focus in the field. With the rising and rapid development of flexible electronic technology in recent years, the prosthetic hand can realize the natural touch sensing function similar to the flexible skin of a human body by utilizing the advantages of light weight, thinness, good conformality with curved surfaces and the like of the flexible electronic sensor.
At present, the flexible electronic sensor research mainly aims at pressure sensing sensitivity, stability and the like, but solves the problem of effective resolution of a touch position and a touch mode, and particularly, the accurate identification of pressure and shearing force (namely static friction force and sliding friction force) is an important challenge in the field of flexible sensors. The reported research works mainly adopt a pressure sensing array and assist in a signal processing technology, and have the problems of large data acquisition quantity, poor intuitiveness, complex signal processing mode and the like, which are too complex for application to bionic skin of a bionic prosthetic hand or a robot, and can not be directly applied to perception of the prosthetic hand. There is no report on a single flexible sensor device capable of distinguishing pressure and shear force, which is a challenge, because it is generally reported that the response modes or modes of the sensitive materials or micro-nano structures adopted by the flexible mechanical sensor to the pressure and the shear force are identical.
Disclosure of Invention
The invention mainly aims to provide an attachable vertical micro-capacitance type flexible mechanical sensor with a fingerprint-like 'vortex-pattern' micro-nano structure, and a manufacturing method and application thereof, thereby overcoming the defects in the prior art.
In order to achieve the purpose of the invention, the technical scheme adopted by the invention comprises the following steps:
the embodiment of the invention provides an attachable vertical micro-capacitance type flexible mechanical sensor, which comprises a flexible substrate, a sensitive layer and at least two electrodes, wherein the sensitive layer is arranged on the surface of the flexible substrate, and the at least two electrodes are arranged on the sensitive layer at intervals;
The sensing layer comprises a capacitance microplate arranged on the surface of the flexible substrate and a nanowire conductive network layer arranged on the surface of the capacitance microplate, the capacitance microplate comprises a first capacitance microplate and a second capacitance microplate which are respectively provided with a first spiral structure and a second spiral structure, the first spiral structure and the second spiral structure are matched to form a three-dimensional double-spiral micro-nano structure imitating fingerprint spiral, and a polymer dielectric layer is further distributed between the first capacitance microplate and the second capacitance microplate.
Further, the heights of the first capacitor microplates and the second capacitor microplates are 10-50 μm, the widths thereof are 5-20 μm, the number of spiral turns is 10-50, and the distance between the first capacitor microplates and the second capacitor microplates is more than 30 μm and less than or equal to 100 μm.
Further, the nanowire conductive network layer comprises a metal nanowire three-dimensional network conductive film which is formed by interweaving a plurality of metal nanowires and has a three-dimensional network interconnection structure.
Further, the metal nanowire includes any one or a combination of two or more of silver nanowire, copper nanowire, gold nanowire, and nickel nanowire, but is not limited thereto.
Further, the thickness of the three-dimensional network conductive film of the metal nanowire is 2-10 mu m.
Further, the flexible substrate, the sensitive layer and the polymer dielectric layer are combined into a whole, and the nanowire conductive network layer and the surface of the capacitor micro-polar plate form a continuous integrated interface structure.
Further, the electrode is an electrode wire, one end of the electrode wire is electrically combined with the nanowire conductive network layer, and the other end of the electrode wire is led out from the surface of the nanowire conductive network layer.
Further, the material of the polymer dielectric layer includes any one or a combination of more than two of thermoplastic elastomer, polyvinyl alcohol, polydimethylsiloxane and polyimide, but is not limited thereto.
Further, the material of the flexible substrate includes any one or a combination of more than two of polyvinyl alcohol, polydimethylsiloxane, polyethylene terephthalate, polyimide and polyethylene, but is not limited thereto.
Further, the thickness of the flexible substrate is 20-300 mu m.
Further, the capacitive microplates and the flexible substrate are integrally formed, the capacitive microplates are made of the same material as the flexible substrate, and the capacitive microplates are made of any one or a combination of more than two of polyvinyl alcohol, polydimethylsiloxane, polyethylene terephthalate, polyimide and polyethylene, but are not limited to the above.
Further, the thickness of the capacitive flexible mechanical sensor is 190-500 mu m.
The embodiment of the invention also provides a manufacturing method of the attachable vertical micro-capacitance type flexible mechanical sensor, which comprises the following steps:
Providing a template with a patterned groove on the surface, wherein the patterned groove comprises a first groove and a second groove which are respectively provided with a first spiral structure and a second spiral structure, and the first spiral structure and the second spiral structure are matched to form a three-dimensional double-spiral micro-nano structure imitating fingerprint spiral patterns;
Applying a metal nanowire dispersion liquid on the surface of the template to form a metal nanowire three-dimensional network conductive film;
removing the three-dimensional network conductive film of the metal nanowire on the template surface except the patterned groove, so that the three-dimensional network conductive film of the metal nanowire remained in the first groove and the second groove is used as a nanowire conductive network layer;
Coating a prepolymer for forming a capacitor microplate and a flexible substrate on the surface of a template, solidifying the prepolymer to form the capacitor microplate and the flexible substrate, and separating the flexible substrate, the capacitor microplate and a nanowire conductive network layer which are combined with each other from the template, wherein the capacitor microplate is integrally formed on the surface of the flexible substrate, the nanowire conductive network layer is arranged on the surface of the capacitor microplate so as to construct a sensitive layer, and the capacitor microplate comprises a first capacitor microplate and a second capacitor microplate which respectively have a first spiral structure and a second spiral structure, and the first spiral structure and the second spiral structure are matched to form a three-dimensional double-spiral micro-nano structure imitating fingerprint spiral;
and filling a polymer dielectric material at least between the first capacitance micro-polar plate and the second capacitance micro-polar plate, thereby forming a polymer dielectric layer.
Further, the manufacturing method specifically comprises the steps of coating the metal nanowire dispersion liquid with the solubility of 1-10wt% on the surface of the template, and then drying to form the metal nanowire three-dimensional network conductive film with the three-dimensional network interconnection structure.
Further, the manufacturing method specifically comprises the step of removing the three-dimensional network conductive film of the metal nanowire on the template surface except the patterned groove in a mechanical stripping mode, so that the three-dimensional network conductive films of the metal nanowire in the first groove and the second groove are reserved.
Further, the manufacturing method specifically comprises the steps of coating a polymer dielectric material on the surface of the flexible substrate with the sensitive layer combined on the surface, and then curing the polymer dielectric material to form the polymer dielectric layer.
Furthermore, the manufacturing method further comprises the steps of respectively electrically combining the nanowire conductive network layers on the surfaces of the first electrode plate and the second electrode plate with one end of at least one electrode wire, and leading out the other end of the electrode wire from the surface of the nanowire conductive network layer.
Further, the depth of the first groove and the second groove is 10-50 μm, the width of the first groove and the second groove is 5-20 μm, the number of spiral turns is 10-50, and the distance between the first groove and the second groove is more than 30 μm and less than or equal to 100 μm.
The embodiment of the invention also provides a tactile nerve pulse signal imitation circuit system which comprises the attachable vertical micro-capacitance type flexible mechanical sensor and a functional circuit used for forming signal conversion by being connected with the attachable vertical micro-capacitance type flexible mechanical sensor.
Furthermore, the attachable vertical micro-capacitance type flexible mechanical sensor and the functional circuit are also connected with a power supply to form a working loop, and the circuit system is used for converting a voltage telephone signal output by the sensor into a pulse signal with a frequency characteristic.
Compared with the prior art, the invention has the advantages that:
1) According to the invention, a vertical micro-capacitive structure flexible mechanical sensor with a double-spiral micro-nano structure electrode plate is constructed through the accurate sensing mode of a human finger fingerprint-imitated 'spiral' micro-nano structure on the position and mode of an object, a theoretical mechanism of a deformation response mode of the spiral micro-nano structure under the action of radial vertical pressure, tangential static friction and sliding friction is established, and the accurate sensing and identification capability of a single bionic micro-nano structure flexible mechanical sensor on the pressure, static friction and sliding friction is realized under the condition of no complex signal analysis or algorithm;
2) The embodiment of the invention provides an attachable capacitive flexible mechanical sensor which has the characteristics of light weight, softness and the like, can be processed into various shapes, has the advantages of being wearable and attachable, and particularly has the advantages that the electrode plate can realize selective response to high sensitivity of pressure and shearing force due to the adoption of a fingerprint-imitating 'vortex-pattern' micro-nano structure, and has the advantages of high precision, high reliability, long service life and the like;
3) The preparation process of the attachable vertical micro-capacitance type flexible mechanical sensor provided by the embodiment of the invention is simple and controllable, and the raw materials are cheap and easy to obtain, so that the sensor is suitable for large-scale industrial production;
4) The embodiment of the invention also constructs a circuit system for simulating the tactile nerve pulse signals, realizes the conversion of different sensing response signals into specific pulse frequency electric signals through circuit signal processing, meets the requirement of matching with the nerve pulse signals, provides a powerful method for further fusion of the sensing signals and the human physiological signals, provides a signal basis for human-computer interface interaction and control, and completes the ultrasensitive sensing boundary of the artificial limb 'human-machine' fusion.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art;
FIGS. 1a, 1b, 1c, and 1d are pictorial representations of actual optical photographs of a vertical micro-capacitive flexible mechanical sensor with an applied fingerprint-like "spiral" micro-nano structure, respectively, in accordance with an exemplary embodiment of the present invention;
FIGS. 1c and 1d are schematic diagrams of the internal structure of a vertical micro-capacitive flexible mechanical sensor with fingerprint-like "spiral" micro-nano structure, respectively, according to an exemplary embodiment of the present invention;
FIG. 1e, FIG. 1f, FIG. 1g, FIG. 1h are respectively a double-helix micro-nano structure electron microscope image of an imitated "spiral" micro-nano structure of a vertical micro-capacitive flexible mechanical sensor with an imitated fingerprint "spiral" micro-nano structure, which can be applied to the vertical micro-capacitive flexible mechanical sensor according to an exemplary embodiment of the invention;
FIG. 1i is a schematic diagram of a vertical micro-capacitive flexible mechanical sensor with fingerprint-like "spiral" micro-nano structure, which is applicable in an exemplary embodiment of the present invention;
FIG. 2 is a graph of the selective response performance of an attachable vertical micro-capacitive flexible mechanical sensor with a fingerprint-like "spiral" micro-nano structure to pressure, stiction, and sliding friction in an exemplary embodiment of the invention;
Fig. 3a, 3b and 3c are graphs showing accurate sensing of pressure, static friction and sliding friction of a vertical micro-capacitive flexible mechanical sensor with an applied fingerprint-like "spiral" micro-nano structure according to an exemplary embodiment of the present invention;
FIG. 4 is a schematic diagram of a library of actual optical photographs of simulated haptic nerve impulse signal circuitry in an exemplary embodiment of the present invention;
Fig. 5a and 5b are diagrams of pulse signal results after conversion of a simulated haptic nerve pulse signal circuit system according to an exemplary embodiment of the present invention.
Detailed Description
In view of the shortcomings in the prior art, the inventor of the present invention has long studied and practiced in a large number of ways to propose the technical scheme of the present invention.
The inventor of the present application has found in long-term research and extensive practice that natural human hands are able to properly perform the critical basic sensory functions of bearing objects (pressure), sensing whether an object is caught on a finger (dynamic friction) or held (static friction), possibly thanks to the selective performance response of the finger's "spiral" textured micro-nano structure to pressure, shear forces. The simple and elegant natural micro-nano structure design with strong functions is a perfect bionic object with extremely excellent performance pursued by the flexible sensor for realizing the bionic electronic skin function of a prosthetic hand or a robot aiming at realizing the human-like function. The inventors of the present application have thus proposed the technical solution of the present application.
The technical scheme, the implementation process, the principle and the like are further explained as follows.
Referring to fig. 1i, in one aspect, an embodiment of the present invention provides an attachable vertical micro-capacitive flexible mechanical sensor, which includes a flexible substrate 10, a sensitive layer and at least two electrodes 21, wherein the sensitive layer is disposed on a surface of the flexible substrate 10, and the at least two electrodes 21 are disposed on the sensitive layer at intervals;
The sensing layer comprises a capacitance micro-polar plate 11 arranged on the surface of a flexible substrate 10 and a nanowire conductive network layer 20 arranged on the surface of the capacitance micro-polar plate, the capacitance micro-polar plate 11 comprises a first capacitance micro-polar plate and a second capacitance micro-polar plate which are respectively provided with a first spiral structure and a second spiral structure, the first spiral structure and the second spiral structure are matched to form a three-dimensional double-spiral micro-nano structure imitating fingerprint spiral, a polymer dielectric layer 30 is further distributed between the first capacitance micro-polar plate and the second capacitance micro-polar plate, the flexible substrate 10, the sensing layer and the polymer dielectric layer 30 are combined into a whole, and the nanowire conductive network layer 20 and the surface of the capacitance micro-polar plate 11 form a continuous integrated interface structure.
Specifically, the electrode 21 is an electrode wire, one end of the electrode wire is electrically combined with the nanowire conductive network layer 20, and the other end of the electrode wire is led out from the surface of the nanowire conductive network layer 20.
Specifically, the attachable vertical micro-capacitive flexible mechanical sensor further comprises an encapsulation layer 40 for encapsulating the flexible mechanical sensor, wherein the material and the thickness of the encapsulation layer 40 can be made of the existing known materials, and the thickness is set according to design requirements.
Specifically, the capacitor microplates 11 and the flexible substrate 10 are integrally formed, and it can be understood that the capacitor microplates are three-dimensional vertical micro-nano structures formed on the surface of the flexible substrate, that is, the flexible substrate is a flexible substrate with a microstructure, wherein the heights of the first capacitor microplates and the second capacitor microplates are 10-50 μm, the widths of the first capacitor microplates and the second capacitor microplates are 5-20 μm, the number of spiral turns is 10-50, the distance between the first capacitor microplates and the second capacitor microplates is greater than 30 μm and less than or equal to 100 μm, and the thickness of the flexible substrate is 20-300 μm.
Specifically, the nanowire conductive network layer 20 includes a three-dimensional network conductive film of metal nanowires having a three-dimensional network interconnection structure and formed by interweaving a plurality of metal nanowires, wherein the metal nanowires include any one or a combination of more than two of silver nanowires, copper nanowires, gold nanowires and nickel nanowires, but not limited thereto, and the thickness of the three-dimensional network conductive film of metal nanowires is 2-10 μm
Specifically, the material of the polymer dielectric layer 30 includes any one or a combination of two or more of thermoplastic elastomer, polyvinyl alcohol, polydimethylsiloxane and polyimide, but is not limited thereto.
When the attachable capacitive flexible mechanical sensor provided by the embodiment of the invention works, a compression or bending or stretching deformation state can be formed in the double-spiral capacitive micro-polar plate, so that the capacitive flexible mechanical sensor has a selective identification response function on pressure and shearing force (namely static friction force and sliding friction force) to form a fingerprint-imitating 'vortex-pattern' three-dimensional double-spiral micro-nano structure.
In addition, on the basis that the attachable vertical micro-capacitance type flexible mechanical sensor provided by the embodiment of the invention can distinguish different mechanical types, the response signals can be converted into corresponding characteristic frequency signals through circuit conversion, so that the response signals correspond to nerve signals of action sensing areas such as human hand grasping/holding and the like, and man-machine interface interaction is realized.
Correspondingly, the embodiment of the invention also provides a tactile nerve pulse signal imitation circuit system which comprises the attachable vertical micro-capacitance type flexible mechanical sensor and a functional circuit used for forming signal conversion by being connected with the attachable vertical micro-capacitance type flexible mechanical sensor.
Furthermore, the attachable vertical micro-capacitance type flexible mechanical sensor and the functional circuit are also connected with a power supply to form a working loop.
The embodiment of the invention provides a manufacturing method of an attachable vertical micro-capacitance type flexible mechanical sensor, which specifically comprises the following steps:
S1, manufacturing a silicon template with a double-spiral groove structure (namely the patterning groove, which is the same as the patterning groove), fixing the silicon template on a hot plate, heating at a constant temperature of 55-85 ℃, spraying a metal nanowire ethanol solution with a solubility of 1-10% on the surface of the silicon template with the double-spiral groove structure, heating to volatilize ethanol immediately, and forming a metal nanowire three-dimensional network conductive film on the surface of the silicon template with the double-spiral groove structure by the rest metal nanowire, wherein the thickness of the metal nanowire three-dimensional network conductive film is 2-10 mu m; the double-spiral groove structure comprises a first groove and a second groove which are respectively provided with a first spiral structure and a second spiral structure, wherein the first spiral structure and the second spiral structure are matched to form a three-dimensional double-spiral micro-nano structure imitating fingerprint spiral patterns, the depth of the first groove and the second groove is 10-50 mu m, the width of the first groove and the second groove is 5-20 mu m, the number of spiral turns is 10-50, the distance between the first groove and the second groove is more than 30 mu m and less than or equal to 100 mu m, and the metal nanowire can be any one or the combination of more than two of silver nanowires, copper nanowires, gold nanowires and nickel nanowires;
S2, stripping the metal nanowire three-dimensional network conductive film on the surface of the silicon template except the region of the double-spiral groove structure by using mechanical force, and only leaving the metal nanowire three-dimensional network conductive film on the inner wall and the bottom of the double-spiral groove structure, wherein the metal nanowire three-dimensional network conductive films left in the first groove and the second groove respectively form nanowire conductive network layers;
S3, spin-coating a flexible substrate material prepolymer on the surface of the silicon template, heating the flexible substrate material prepolymer at 60-85 ℃ for 1-3 hours to enable the flexible substrate material prepolymer to be solidified to form a flexible substrate, and then stripping the flexible substrate from the silicon template to obtain the flexible substrate of the three-dimensional double-spiral micro-nano structure capacitor micro-polar plate with the imitated vortex micro-nano structure, wherein the structure of the flexible substrate is shown in the figure 1C and the figure 1 d; the nano wire conductive network layer is formed on the surface of the capacitor microplates to construct a sensitive layer, the capacitor microplates comprise a first capacitor microplate and a second capacitor microplate which are respectively provided with a first spiral structure and a second spiral structure, the heights of the first capacitor microplate and the second capacitor microplate are 10-50 mu m, the widths of the first capacitor microplate and the second capacitor microplate are 5-20 mu m, the spiral turns are 10-50 circles, the distance between the first capacitor microplate and the second capacitor microplate is more than 30 mu m and less than or equal to 100 mu m, the thickness of the flexible substrate is 20-300 mu m, the flexible substrate, the first capacitor microplate and the second capacitor microplate are of an integrated structure formed by once multiplexing, and the flexible substrate and the capacitor microplate can be made of any one or more than two of polyvinyl alcohol, polydimethylsiloxane, polyethylene terephthalate, polyimide and polyethylene;
s4, spin-coating a polymer dielectric layer material on the surface of the flexible substrate with the three-dimensional double-helix micro-nano structure capacitor micro-polar plate, and placing the flexible substrate in an oven to be heated for 1-3 hours at a constant temperature of 35-65 ℃ for curing, so as to form a polymer dielectric layer, wherein the polymer dielectric layer, a metal nanowire three-dimensional network conductive film and the flexible substrate form a continuous integrated interface structure, and all the components are integrated into a whole structure, the structure is shown in figures 1e, 1f, 1g and 1h, and the polymer dielectric layer material is any one or more than two of thermoplastic elastomer (TPE), polyvinyl alcohol, polydimethylsiloxane and polyimide;
s5, electrode wires are respectively led out from the tail end of a nanowire conductive network layer of the device in the step S4, the electrode wires and the nanowire conductive network layer are adhered by conductive silver paste, then a flexible mechanical sensor of a complete imitated vortex micro-nano structure is obtained, as shown in fig. 1a and 1b, the selective response capability of the capacitive flexible mechanical sensor formed by the manufacturing method to pressure, static friction force and sliding friction force is shown in fig. 2, and the accurate sensing practical application performance diagrams of the capacitive flexible mechanical sensor with the imitated fingerprint vortex micro-nano structure to pressure, static friction force and sliding friction force are shown in fig. 3a, 3b and 3c respectively.
Example 1
1) Ultrasonically cleaning a silicon template with a double-spiral groove structure prepared by a mask, photoetching and etching processing method with deionized water and ethanol/acetone for 3 times respectively, and then drying, wherein the dimension of the double-spiral structure is 25 mu m in depth and 15 mu m in width, the distance between spiral grooves is 70 mu m, and the number of spiral turns is 30 circles;
2) Fixing the dried silicon template on a heating plate, maintaining a heating temperature at 85 ℃, spraying silver nanowire/ethanol dispersion liquid with a solubility of 1.5% on the surface of the template, forming a layer of silver nanowire three-dimensional network structure conductive film on the surface of the silicon template after ethanol is volatilized, removing silver nanowires outside the double-spiral groove by using a mechanical stripping mode, and only leaving the silver nanowire conductive film on the inner side wall and the bottom of the double-spiral groove structure as a nanowire conductive network layer;
3) Then, spin-coating Polydimethylsiloxane (PDMS) prepolymer on the silicon template, placing the silicon template in an 80 ℃ oven for heating and curing for 2 hours, and then stripping the cured PDMS from the surface of the silicon template to prepare a flexible substrate with a silver nanowire three-dimensional network structure conductive film and a three-dimensional double-helix micro-nano structure capacitance micro-polar plate with a spiral-pattern imitation micro-nano structure on the surface, wherein the silver nanowire three-dimensional network structure conductive film is arranged on the surface of the capacitance micro-polar plate to form a sensitive layer;
4) After two electrodes are led out from the surface of the silver nanowire three-dimensional network structure conductive film, fixing the flexible substrate with the electrode and the sensitive layer on a spin coater, spin-coating thermoplastic elastomer (TPE)/cyclohexane dispersion liquid on the substrate, and solidifying for 3-4 hours at room temperature to form, thus obtaining the attachable vertical micro-capacitance flexible mechanical sensor with the fingerprint-like 'vortex-pattern' micro-nano structure.
The response performance of the assembled flexible mechanical sensor to different force types is tested, the test result is shown in figure 2, the flexible device has selective response capability to pressure, static friction force and sliding friction force, the device is applied to fingers, the response to the object to be gripped and the sliding of the object can be realized, the flexible sensor is connected with a rear-end signal processing circuit (shown in figure 4) and a power supply to construct a simulated touch nerve pulse signal circuit system, further, the output voltage telephone signal of the sensor is converted into a pulse signal with frequency characteristics, and the pulse signal result after the simulated touch nerve pulse signal circuit system is converted is shown in figures 5a and 5 b.
Comparative example 1
The manufacturing method of the capacitive flexible mechanical sensor in the comparative example is basically the same as the method flow in the embodiment 1, namely
Under the same conditions as in the embodiment 1, the metal nanowire used for constructing the nanowire conductive network layer of the sensitive layer is replaced by a common conductive material, so that the capacitive flexible mechanical sensor is constructed, and performance test is carried out on the capacitor, namely the capacitor constructed by the comparison 1 is not resistant to stress strain, namely under the condition of pressure shearing force, the common conductive material is broken or falls off from the surface of a micro-nano structure (namely a capacitive micro-polar plate) due to the fact that the common conductive material does not have the flexibility of the metal nanowire conductive network, so that the device is invalid or the recycling performance is poor (1-3 times of device is invalid), and the recycling stability of the metal nanowire conductive network in the embodiment 1 can reach more than 100 times.
The embodiment of the invention provides a three-dimensional double-spiral micro-nano structure capable of being applied with an imitation 'spiral-strip' micro-nano structure in a vertical micro-capacitive flexible mechanical sensor, which can realize selective response of a constructed device to pressure and shearing force so as to distinguish mechanical signals, for example, as can be clearly seen from figure 2, the pressure of the device is unresponsive, the response value to static friction force becomes larger, the response value to sliding friction force becomes smaller, and therefore, the type of force can be determined according to positive and negative values of the response, if other interdigital structures are adopted, the device can not distinguish the force signals basically because the devices have the same response trend (upward or downward) to all the forces (pressure and shearing force), and for the research background in the application, the prosthetic hand needs to distinguish the pressure and the shearing force so as to distinguish whether a grasping object is grasped or dropped.
Compared with the prior art, the invention constructs the vertical micro-capacitance structure flexible mechanical sensor with the double-spiral micro-nano structure electrode plate through the accurate sensing mode of the human-simulated hand fingerprint 'spiral' micro-nano structure on the object position and mode, establishes the theoretical mechanism of the deformation response mode of the spiral micro-nano structure under the action of radial vertical pressure, tangential static friction and sliding friction, realizes the accurate sensing and identification capability of the single bionic micro-nano structure flexible mechanical sensor on the pressure, static friction and sliding friction without complex signal analysis or algorithm conditions, and further provides the characteristics of thinness, softness and the like of the attachable capacitive flexible mechanical sensor, has the advantages of being wearable and attachable, particularly, the electrode plate adopts the spiral micro-nano structure, can realize the selective response to the pressure and the shearing force with higher sensitivity, and simultaneously has the advantages of high precision, high reliability, long service life and the like.
It should be understood that the above embodiments are merely for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the present invention and implement the same according to the present invention without limiting the scope of the present invention. All equivalent changes or modifications made in accordance with the spirit of the present invention should be construed to be included in the scope of the present invention.
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| CN114323357B (en) * | 2021-11-23 | 2022-12-23 | 四川大学 | Spiral capacitive pressure sensor |
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