CN210051433U - Measuring device for normal random micro-vibration of throttler - Google Patents

Abstract

The utility model discloses a measuring device of flow controller normal direction random micro vibration. The utility model discloses a laser vibrometer, inductance micrometer head, X-Y two dimension translation platform, spacing subassembly, high accuracy marble platform, industrial computer and display screen. The throttler is placed on the high-precision marble platform and limited by a limiting component; the inductance micrometer head is vertically fixed on the upper surface of the throttler; and adjusting the X-Y two-dimensional translation table to enable the laser beam of the laser vibration meter to fall on each point to be measured in sequence, measuring the normal random micro-vibration of each point to be measured of the throttle after the ventilation is stable, and measuring the thickness of the air film by using an inductance micrometer. The right-angle ball limiting blocks in the limiting assemblies limit the position of the throttler, and the balls are in point contact with the side face of the throttler, so that friction force of the throttler during normal vibration is reduced. The utility model discloses simultaneous measurement flow controller normal direction random micro vibration and air film thickness, the precision is high.

Description

A measuring device for normal random micro-vibration of restrictor

technical field

The utility model relates to the field of vibration measurement of a throttle, in particular to a measuring device for normal random micro-vibration of a throttle.

Background technique

In the existing devices, where the linear or rotary motion is involved, the gas static pressure lubrication technology is usually used. In my country, the overall restrictor technology is mostly used in gas static pressure lubrication, that is, a restrictor is formed by arranging orifices on the overall inner surface of the receiving part (sleeve or guide frame) of the ultra-precision motion pair matching pair. The orifice flows out, forming a lubricating gas film between the moving pairs. The motion pair can achieve frictionless translational sliding through this lubricating gas film.

However, during the throttling process, the restrictor will generate fluid-structure coupled micro-vibration, which is characterized by random vibration, and the magnitude is between picometers and nanometers, and the normal vibration characteristics of different points on the restrictor are different. When the nano-scale motion is required, the error caused by vibration will become an important source of error. Therefore, measuring the random micro-vibration at different points on the throttle is helpful for the motion pair to avoid the random resonance area and improve the positioning accuracy.

In addition, the characteristics of the normal random micro-vibration of the restrictor are related to the air source pressure, the distribution of the orifice, the diameter of the orifice, the normal force of the restrictor, etc., and the above influencing factors are ultimately related to the thickness of the gas film, so Measuring the thickness of the gas film while measuring the normal random micro-vibration of the restrictor is beneficial to analyze the vibration characteristics and the influencing factors of the normal random micro-vibration of the restrictor. Therefore, a measuring device for the normal direction and random micro-vibration of the restrictor is required.

SUMMARY OF THE INVENTION

Aiming at the deficiencies of the prior art, the utility model provides a measuring device for the normal random micro-vibration of the restrictor.

The above purpose is not achieved, and the technical scheme adopted by the present utility model is as follows:

A measuring device for normal random micro-vibration of a restrictor, comprising a laser vibrometer for measuring the normal random micro-vibration at a certain point of the restrictor; Initial air film thickness; X-Y two-dimensional translation stage is used to realize the movement of high-precision marble platform relative to the laser vibrometer in the X and Y directions. The high-precision marble platform is used to install limit components and place throttling Limiting components, used to limit the position of different sizes of throttle, prevent the throttle from sliding after ventilation, and avoid the position of the current measurement point deviate from the laser beam; industrial computer and display, used to control the X-Y two-dimensional translation stage , which records, analyzes and displays data from laser vibrometers and electrical micrometer heads.

Further, the limit component includes 4 right-angle ball limit blocks, 4 square ejector rods, 2 fixed screws, and 2 movable screws that can move in the X direction along the small slide rail. Its specific structure and installation position are as follows: there are 2 parallel grooves on the high-precision marble platform, and 2 small slide rails are respectively fixed in the 2 grooves by screws; On the rail; 2 fixing screws are installed in the two slots respectively, and they are located on the left side of the small slide rail; each right-angle ball stop The fixed screw is fixed on the screw, and the fixed position can be adjusted according to the width of the restrictor; by changing the position of the moving screw on the small slide rail, the distance between the moving screw and the fixed screw in the same slot can be changed to change 2 The distance between the corresponding right-angle ball stop blocks defines the positions of the throttles of different lengths; through the above structure, the position of the square top rod in the screw and the moving screw on the small slide rail are adjusted according to the size of the throttle. , so that the four right-angle ball stop blocks fit exactly on the four corners of the restrictor, so as to limit the position of the restrictor and prevent the restrictor from sliding after ventilation. After the adjustment is completed, use the Screws fix the square ejector rod and the moving screw.

Further, the square ejector rod and the right-angle ball stopper do not contact the high-precision marble plane, which prevents the right-angle ball limiter from blocking the air film outlet; the square ejector pin can prevent the right-angle ball limiter from tilting; Right-angle ball limit block, its structure is to install balls in right-angle sheet metal grooves. When it defines the position of the restrictor, the balls are in point contact with the side of the restrictor, so as to reduce the normal vibration of the restrictor frictional force experienced.

A method for measuring normal random micro-vibration of a restrictor. First, a reflective film is attached to the point to be measured on the upper surface of the restrictor, and it is placed on a high-precision marble platform, and the limit is adjusted according to the size of the restrictor. component, which defines the position of the restrictor; the electric sensor head is fixed vertically downward on the square mandrel with the set screw, and the square mandrel is fixed on the rotatable screw rod through the set screw, and the angle of the rotatable screw rod is adjusted. and the position of the square ejector rod in the rotatable screw rod, so that the electric sensing micro head vertically contacts the upper surface of the restrictor, and record the reading of the electric sensing head x ₁ at this time; the laser vibration measurement is controlled by the industrial computer and the host computer program The instrument moves in the X direction, and the high-precision marble platform moves in the Y direction, so that the laser beam of the laser vibrometer falls vertically on the center point of the reflective film; the air inlet of the restrictor is connected to the air inlet pipe through the air pipe quick joint; Stable air pressure, after the normal vibration of the restrictor is stable, that is, after the prominent frequency points in the amplitude-frequency curve of the data measured by the laser vibrometer basically do not change with time, start to record the normal direction of the restrictor measured by the laser vibrometer. Random micro-vibration data, at the same time, the current reading x ₂ is recorded by the electric sensing micro-head, and the thickness of the gas film is Δx=x ₁ -x ₂ ; if all measurement points on the upper surface of the restrictor are measured, the measurement is over. After finishing, the industrial computer and the host computer program control the laser vibrometer to move in the X direction, and the high-precision marble platform moves in the Y direction, so that the laser beam of the laser vibrometer falls vertically on the center point on the reflective film of the next measurement point. Carry out the measurement until all the points to be measured are completed; record and analyze the normal random micro-vibration data of the restrictor and the thickness of the air film, and display them on the display screen.

Beneficial effects of the present utility model: In the present utility model, when measuring the normal random micro-vibration of the throttle, a right-angle ball limit block is used to limit the position of the throttle, and the structure is to install the ball in the right-angle sheet metal groove, When it defines the position of the restrictor, the ball is in point contact with the side of the restrictor, which can reduce the frictional force of the restrictor during normal vibration and make the measurement result more accurate; by moving the laser vibrometer or The high-precision marble platform on which the restrictor is placed can measure the vibration data of the same restrictor at different points to be measured, and obtain the two-dimensional distribution characteristics of the normal random micro-vibration of the restrictor. In addition, the utility model can not only measure the normal random micro-vibration of the restrictor, but also measure the thickness of the gas film. The method has high precision and high measurement efficiency.

Description of drawings

Fig. 1 is the overall device diagram of the present utility model;

Fig. 2 is the structure diagram of the restrictor limiting assembly in the present utility model;

Fig. 3 is the structure diagram of the right-angle ball stop block in the present utility model;

Fig. 4 is the working flow chart of the utility model to complete one measurement.

Detailed ways

In order to make the technical means, creative features, achieved goals and effects of the present invention easy to understand and understand, the present invention will be further described below with reference to the accompanying drawings.

As shown in Figure 1 to Figure 3, the utility model includes 1, a display screen, 2, an industrial computer, 3, a working platform, 4, a laser vibrometer, 5, a laser beam, 6, an X-axis displacement guide rail, 7, an advance Trachea, 8, high-precision marble platform, 9, Y-axis linear module, 10, cam structure, 11, rotatable screw, 12, square ejector rod 5, 13, electric micrometer head, 14, fixed screw 1, 15 , Square ejector bar 1, 16, Moving screw 1, 17, Square ejector bar 2, 18, Reflective film, 19, Small slide rail 1, 20, Right-angle ball limit block, 21, Square ejector bar 3, 22, fixed screw 2, 23, square ejector rod 4, 24, moving screw 2, 25, small slide rail 2, 26, restrictor, 27, trachea quick connector, 28, right-angle sheet metal groove, 29, ball .

As shown in Figure 1, because the normal random micro-vibration of the restrictor is in the order of picometers to nanometers, and the vibration frequency distribution is wide, the high-performance laser vibrometer (4) of Polyrex was selected for measurement. Model It is OFV505/5000, the frequency range is DC ~ 24MHz, and the displacement resolution is better than 0.05pm, which meets the measurement requirements.

The X-Y two-dimensional translation stage shown in FIG. 1 is not limited to the specific structure shown in FIG. 1 , and it only needs to be able to realize the movement of the restrictor relative to the laser vibrometer in the X-Y direction.

As shown in Figure 1 and Figure 2, the specific implementation steps are as follows:

Step 1: First, stick a reflective film (18) on the upper surface of the restrictor (26) to be measured, and place it on a high-precision marble platform (8). According to the width of the restrictor, adjust the square top rod 1 (15), the square top rod 2 (17), the square top rod 3 (21), and the square top rod 4 (23) respectively on the fixed screw 1 (14) , the position of moving screw 1 (16), fixed screw 2 (22), and moving screw 2 (24); adjust the position of moving screw 1 (16) and moving screw 2 (24) according to the length of the restrictor 1 (19), the position on the small slide rail 2 (25); through the above adjustment, make 4 right-angle ball bearings fit on the 4 corners of the throttle, limit the position of the throttle, and use the set screw Fixed square ejector rod and moving screw;

Step 2: According to the position defined by the restrictor, adjust the angle of the rotatable screw (11) and the position of the square ejector rod 5 (12) supporting the electrical micro-sensing head (13) in the rotatable screw (11), so that the The electric micrometer head (13) is in vertical contact with the upper surface of the restrictor (26), and the electric micrometer head (13) is fixed on the square ejector rod 5 (12) by means of a set screw. The square ejector pin 5 (12) ) is fixed on the rotatable screw rod (11) by a set screw, the rotatable screw rod (11) is fixed at an angle by the cam mechanism (10), and the reading x ₁ of the electric micrometer head (13) is recorded at this time;

Step 3: The laser vibrometer (4) is vertically fixed on the slider of the X-axis displacement guide rail (6), and can move along the X-axis; the laser vibrometer (4) is controlled by the industrial computer (2) and the host computer program Moving along the X direction, the high-precision marble platform (8) moves along the Y direction, so that the laser beam (5) of the laser vibrometer (4) falls vertically on the center point of the reflective film (18);

Step 4: the air inlet of the restrictor is connected to the air inlet pipe (7) through the air pipe quick joint (27); the air inlet pipe (7) is supplied with a stable air pressure, and after the normal vibration of the restrictor (26) is stabilized, the laser After the prominent frequency points in the amplitude-frequency curve of the data measured by the vibrometer (4) basically do not change with time, start to record the normal random micro-vibration data of the restrictor measured by the laser vibrometer, and at the same time record the current reading by the electric sensing microhead x ₂ , the thickness of the gas film is Δx=x ₂ -x ₁ . Record and analyze the normal random micro-vibration data and air film thickness of the restrictor, and display them on the display screen;

Step 5: The laser vibrometer (4) is controlled by the industrial computer (2) and the host computer program to move in the X direction, and the high-precision marble platform (8) moves in the Y direction, so that the laser beam ( 5) Vertically fall on the center point on the reflective film of the next measurement point, and measure until all the points to be measured are completed.

Fig. 3 shows the structure diagram of the right-angle ball stop block in the utility model, which is composed of right-angle sheet metal grooves (28) and 4 balls. When it defines the position of the restrictor, the ball is tangent to the side of the restrictor, so the contact between the ball and the side of the restrictor is a point contact, so as to reduce the frictional force of the restrictor during normal vibration and avoid The restrictor slips due to ventilation, causing the laser beam of the laser vibrometer to deviate from the current measurement point.

Figure 4 shows the working flow chart of one cycle. First, stick the reflective film on the test point on the upper surface of the restrictor, and place it on the high-precision marble platform; secondly, use the limit component to limit the restrictor Position on the high-precision marble plane; secondly, fix the electric micrometer head according to the position of the restrictor, make it vertically contact with the upper surface of the restrictor, record the reading x ₁ of the electric micrometer head at this time; then, start the measuring device , adjust the XY two-dimensional translation stage, so that the laser beam of the laser vibrometer falls on the reflective film of the first point to be measured; then, the trachea is fed with a stable air pressure, and the recording starts after the normal vibration of the restrictor is stable. The normal random micro-vibration data of the throttle measured by the laser vibrometer, and the current reading x ₂ recorded by the electric sensing micro-head, the gas film thickness is Δx=x ₁ -x ₂ ; if all the points to be measured on the upper surface of the throttle are If all measurements are completed, end the measurement, otherwise, adjust the XY two-dimensional translation stage so that the laser beam of the laser vibrometer falls vertically on the center point of the reflective film of the next measurement point for measurement until all the points to be measured are measured. The normal random micro-vibration data and gas film thickness of the restrictor are recorded, analyzed, and displayed on the display screen.

The above are only the preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited to this. The changes or replacements should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims (3)

1. a measuring device for normal random micro-vibration of a choke, is characterized in that: comprise a laser vibrometer, for measuring the normal random micro-vibration of a certain point of the choke; The stable initial air film thickness after the flow device is vented; the X-Y two-dimensional translation stage is used to realize the movement of the high-precision marble platform relative to the laser vibrometer in the X and Y directions. The high-precision marble platform is used for installation limit Position assembly and placement of the restrictor; limit assembly, used to limit the position of the restrictors of different sizes, to prevent the restrictor from sliding after ventilation, and to avoid the position of the current measurement point from deviating from the laser beam; industrial computer and display, used for Control the X-Y two-dimensional translation stage, record, analyze and display the data measured by the laser vibrometer and the electric micrometer head. 2. A measuring device for normal random micro-vibration of a throttle according to claim 1, characterized in that: the limit assembly comprises 4 right-angle ball limit blocks, 4 square ejector rods, 2 fixed screws and 2 movable screws that can move in the X direction along the small slide rails. The specific structure and installation position are as follows: There are two parallel grooves on the high-precision marble platform, and the two small slide rails are respectively fixed by screws. 2 slots; 2 moving screws are respectively fixed on 2 small slide rails by set screws; 2 fixed screws are respectively installed in two slots, and they are located on the left side of The position block is connected with a square ejector rod through threads; the square ejector rod is fixed on the screw rod by a set screw, and the fixed position can be adjusted according to the width of the restrictor; by changing the position of the moving screw rod on the small slide rail Change the distance between the moving screw and the fixed screw in the same groove, thereby changing the distance between the two corresponding right-angle ball stop blocks to limit the positions of the throttles with different lengths; through the above structure, according to the throttle Adjust the position of the square ejector rod in the screw rod and the position of the moving screw rod on the small slide rail, so that the four right-angle ball limit blocks just fit on the four corners of the restrictor, so as to limit the joint size. Adjust the position of the flow restrictor to prevent the restrictor from sliding after ventilation. After the adjustment is completed, use the set screw to fix the square mandrel and the moving screw. 3. A measuring device for normal random micro-vibration of a choke according to claim 1, characterized in that: the square ejector rod and the right-angle ball limit block in the limit assembly do not contact the high-precision marble plane , to prevent the right-angle ball limit block from blocking the air film outlet; the square ejector rod can avoid the right-angle ball limit block from tilting; the right-angle ball limit block is structured in a right-angle sheet metal Balls are installed in the grooves. When it defines the position of the restrictor, the balls are in point contact with the side of the restrictor, so as to reduce the frictional force of the restrictor when it vibrates in the normal direction.

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