CN105157661A - Large travel submicron plane precision measuring system - Google Patents

Abstract

The invention is a large-stroke submicron-level plane precision measurement system. Including base, sliding table, magnetic seat, upper cover of air bearing sliding table, grating ruler, limit switch induction seat, servo motor, side plate of air bearing sliding table, etc., joints, upper cover of air bearing sliding table, side plate of air bearing sliding table Composed of air flotation slide assembly, the slide is installed on the base, the upper cover of the air flotation slide is installed on the top of the slide, the side plates of the air flotation slide are fixed on both sides of the upper cover of the air flotation slide, and installed on the air flotation slide The gas from the joint on the side plate of the table can be guided to the gap between the air flotation slide assembly, the base and the slide table. The top surface of the board is in adsorption contact, the micrometer probe is fixed on the magnetic base, the active synchronous pulley is installed on the output shaft of the servo motor, the limit switch induction seat and the grating ruler are fixed on the slide table, and the two limit switch films are fixed on the The two sides of the cover plate on the air flotation slide table. The invention is simple in operation, convenient and practical, and has high measurement precision.

Description

A measurement system for sub-micron planar accuracy with large stroke

technical field

The invention is a large-stroke submicron-level plane precision measurement system, in particular a low-cost large-stroke sub-micron-level plane precision measurement system, which belongs to the innovative technology of the large-stroke submicron-level plane precision measurement system.

Background technique

The three-coordinate measuring instrument in the factory can not only measure the straightness and flatness of the workpiece, but also measure the relevant parameters of the curved surface. However, it is most widely used in factories to measure the straightness and flatness of workpieces. The measurement accuracy is generally around 4 microns. From a certain point of view, the error value is already relatively large.

Contents of the invention

The object of the present invention is to provide a large-stroke submicron-level plane precision measurement system in consideration of the above problems. The invention can ensure higher and more precise accuracy of straightness and flatness of measured workpieces. And the operation is simple, the price is low, convenient and practical.

The technical solution of the present invention is: a large-stroke sub-micron level plane precision measurement system, including a base, a sliding table, a timing belt, a micrometer probe, a magnetic base, a joint, an upper cover plate of an air-floating sliding table, a grating ruler, a limit Switch induction seat, servo motor, air flotation slide table side plate, limit switch film, micrometer data processing display unit, human-computer interaction interface, drive controller, including joints, air flotation slide table upper cover plate, air flotation slide table side plate The air flotation slide assembly is composed, the slide is installed on the base, the upper cover of the air flotation slide is installed on the top of the slide, the side plates of the air flotation slide are fixed on both sides of the upper cover of the air flotation slide, and the side of the air flotation slide The two sides of the board and the slide table are in contact with each other, and the side plate of the air flotation slide table is also in contact with the base. The joint is installed on the side plate of the air flotation slide table. The gap between the seat and the sliding table, the magnetic seat is adsorbed on the top surface of the upper cover plate of the air flotation slide table through the attraction force of the magnet, the bottom surface of the magnetic seat is in contact with the top surface of the upper cover plate of the air flotation slide table, and the micrometer probe is fixed on the On the magnetic base, and the micrometer probe can change the measurement position along with the sliding table, the active synchronous pulley is installed on the output shaft of the servo motor, the driven synchronous pulley is installed on the tensioning mechanism, and the synchronous belt passes through the sliding table The set groove is wound around the active synchronous pulley and the driven synchronous pulley to form a belt transmission pair. The limit switch induction seat is fixed in the groove set by the slide table, and the grating ruler is fixed on the side of the groove set by the slide table. , two limit switch films are fixed on both sides of the upper cover of the air flotation slide table, the signal output end of the reading head of the grating ruler and the sensor seat of the limit switch is connected with the input and output signal line B of the drive controller, and the data of the micrometer The signal input end of the processing and analysis unit is connected with the output signal line of the micrometer probe, and the data processing and display unit and the drive controller of the micrometer are connected with the human-computer interaction interface.

Due to the homogenization of the straightness error of the air flotation system device itself and the compensation and correction function of the software analysis system, the present invention can ensure that the straightness and flatness of the workpiece measured can be guaranteed to be around 0.4 microns, which is better than the three-coordinate The results measured by the measuring instrument are more accurate. At the same time, the price of the platform system device is cheaper than that of the three-coordinate measuring instrument, which means that it can achieve low-cost and high-precision measurement results. The present invention is a kind of ingenious design, excellent performance, convenient and practical measuring system for large stroke plane accuracy. The large-stroke planar precision measuring system of the invention is simple to operate, convenient and practical, and has high measuring precision.

Description of drawings

Fig. 1 is a structural representation of the present invention;

Fig. 2 is a partial enlarged view of the magnetic base installed on the upper cover plate of the air bearing slide in Fig. 1;

Fig. 3 is a partial enlarged view of the connection between the synchronous pulley and the servo motor in Fig. 1;

Fig. 4 is a schematic structural view of the tensioning mechanism of the present invention fixed on the slide baffle by bolts;

Fig. 5 is a structural schematic diagram of the present invention measuring the extension plate fixed on the upper cover plate of the air flotation slide by bolts;

Fig. 6 is a structural schematic diagram of the connection between the data processing display unit and the drive controller of the micrometer and the human-computer interaction interface of the present invention.

Detailed ways

Example:

The schematic diagram of the structure of the present invention is shown in Figure 1. The large-stroke submicron-level plane precision measurement system of the present invention includes a base 1, a slide table 2, a timing belt 4, a micrometer probe 5, a magnetic base 8, and a joint 9 , Upper cover plate 10 of air-floating slide table, fixed connecting plate of grating ruler reading head 11, grating ruler 13, limit switch induction seat 14, servo motor 15, slide table baffle plate 17, air-floating slide table side plate 18, limit switch film 23. Micrometer data processing display unit 24, man-machine interface 25, drive controller 26, in which the joint 9, the upper cover plate 10 of the air flotation slide table, and the side plate 18 of the air flotation slide table form the air flotation slide table assembly, and the slide table is equipped with 2 pieces Located on the base 1, the upper cover plate 10 of the air-floating slide table is installed on the top of the slide table 2, and the side plates 18 of the air-floating slide table are fixed on both sides of the upper cover plate 10 of the air-floating slide table, and the side plates 18 of the air-floating slide table are connected with the slide table. The two sides of platform 2 are in contact with the gap, and the side plate 18 of the air flotation slide table and the base 1 are also in contact with the gap. The joint 9 is installed on the side plate 18 of the air flotation slide table. Guide to the gap between the air bearing slide assembly and the base 1 and between the air bearing slide assembly and the slide 2, and make the gap between the air bearing slide assembly and the slide 2 and the base 1 under the condition of the joint 9 being ventilated. It is filled with high-pressure gas, and in the process of gas overflowing into the air, an air film and air suspension support are formed, so that the air flotation slide table components are supported by air suspension on the slide table 2 and base 1, and relatively free and frictionless air suspension sliding, which belongs to Air-suspension outsourcing type air-floating slide rail platform, the magnetic base 8 is adsorbed on the top surface of the upper cover plate 10 of the air-floating slide table through its own magnet attraction, and the bottom surface of the magnetic base 8 is in adsorption contact with the top surface of the upper cover plate 10 of the air-floating slide table , the micrometer probe 5 is fixed on the magnetic base 8, the micrometer probe 5 can freely change the measurement position along with the slide table 2, the active synchronous pulley 16 is installed on the output shaft of the servo motor 15, and the driven synchronous pulley is installed On the tensioning mechanism 3, and the synchronous belt 4 passes through the two grooves set in the slide table 2, and winds around the driving synchronous pulley 16 and the driven synchronous pulley to form a belt transmission pair, and the limit switch induction seat 14 It is fixed in the groove provided by the slide table 2, and the grating ruler 13 is fixed on the side of the groove provided by the slide table 2. The signal output end of the reading head and the limit switch induction seat 14 is connected with the input and output signal line B of the drive controller 26, and the signal input end A of the micrometer data processing analysis unit 24 is connected with the signal line output by the micrometer probe 5 Connection, the micrometer data processing display unit 24 and the drive controller 26 are connected with the human-computer interaction interface 25 .

In this embodiment, a step 20 is provided on the upper cover plate 10 of the air-floating slide platform, and one side of the magnetic base 8 is in contact with the edge face of the step 20 provided on the upper cover plate 10 of the air-floating slide platform. This can better ensure that the position of the magnetic base 8 in the direction perpendicular to the guide rail remains constant. The upper cover plate 10 of the air bearing slide table is installed on the top of the slide table 2 through bolts 21 .

In this embodiment, the above-mentioned limit switch sensing seat 14 is fixed in the groove of the slide table 2 by bolts, and the grating ruler 13 is fixed on the side of the groove provided by the slide table 2 through the grating ruler reading head fixing connecting plate 11 .

In this embodiment, the above-mentioned two limit switch films 23 are symmetrically fixed on both sides of the upper cover plate 10 of the air bearing slide table by bolts 22 .

In this embodiment, the above-mentioned servo motor 15 is fixed on the slide baffle 17 by bolts, the slide baffle 17 is fixed on the base 1 by bolts 19 , and the slide 2 is fixed on the base 1 by bolts. Slider 2 is a bar-shaped marble slide, and base 1 is a marble base.

In this embodiment, the above-mentioned side plates 18 of the air bearing slide are fixed on both sides of the upper cover plate 10 of the air bearing slide by bolts.

In this embodiment, the servo motor 15 is fixed on the slide baffle 17 by bolts; the tension mechanism 3 is fixed on the slide baffle 17 by bolts 30 . The tension of the synchronous belt 4 is adjusted by the tension mechanism 3 .

In this embodiment, the two ends of the synchronous belt 4 are fixed on the upper cover plate 10 of the air-floating slide table through the pressing blocks 12 , and the pressing blocks 12 are fixed on both sides of the upper cover plate 10 of the air-bearing sliding table through bolts 31 . The servo motor 15 drives the synchronous belt 4 to move, and the synchronous belt 4 drives the upper cover plate 10 of the air-floating slide table to move. That is to say, the synchronous belt 4 can drive the upper air bearing slide assembly to move along the slide 2 under the drive of the servo motor 15 .

In this embodiment, the above-mentioned micrometer probe 5 is fixed on the magnetic base 8 through the polished rod 7 and the connecting knob 6, wherein the polished rod 7 is fixed on the magnetic base 8, and the micrometer probe 5 is mounted on the polished rod 7 through the connecting knob 6 . The micrometer probe 5 can freely change the measurement position along with the slide table 2. In addition, the micrometer probe 5 is equipped with a micrometer probe 27.

In this embodiment, the above-mentioned joint 9 is a quick joint. In addition, a measurement extension plate 28 is installed on the upper cover plate 10 of the air bearing slide table. The measurement extension plate 28 is fixed on the upper cover plate 10 of the air flotation slide table by bolts 29 . After the measurement extension board 28 is added, the micrometer probe 5 can largely cover the flatness and straightness of workpieces with relatively large dimensions. Also make a step on the measurement extension plate 28, a side surface of the magnetic base 8 is in contact with the edge face of the step provided on the measurement extension plate 28, when the magnetic base 8 is fixed, the position can be determined, so that the It can ensure that the position of the magnetic base 8 in the direction perpendicular to the guide rail is fixed.

The working principle of the present invention is: feed high-pressure gas into the joint 9, the gas passes through the internal air guide pipeline and throttling system, enters the matching gap between the side plate 18 of the air flotation slide table and the slide table 2, and the gas passes through the air flotation slide table The matching gap between the side plate 18 and the base 1 finally overflows to the atmosphere to form an air suspension support. At this time, the air flotation slide assembly composed of the joint 9, the upper cover plate 10 of the air flotation slide table, and the side plate 18 of the air flotation slide table is just It can be suspended and supported by high-pressure gas. At the same time, the gap between the air flotation slide assembly and the slide 2, which is composed of the joint 9, the upper cover plate 10 of the air flotation slide, and the side plate 18 of the air flotation slide, is filled with gas. 9. The air flotation slide assembly composed of the upper cover plate 10 of the air flotation slide and the side plate 18 of the air flotation slide is supported by air suspension isolation to achieve the effect of air suspension. Finally, the air suspension support can be realized between the air flotation slide assembly composed of the joint 9, the upper cover plate 10 of the air flotation slide table, and the side plate 18 of the air flotation slide table, and the fixed assembly composed of the base 1 and the slide table 2. The effect of friction motion and error averaging.

After assembling and adjusting the operating accuracy of the entire measuring device system, the workpiece to be measured can be placed on the base 1, and the micrometer of the micrometer probe 5 can be adjusted by controlling the servo motor 15 and manually adjusting the connection knob 6 The relative position of the probe 27 and the workpiece is in a state of slight contact, and then the signal is input to the servo motor 15 through the human-computer interaction device 25 and its drive controller 26, so that the micrometer probe 27 of the micrometer probe 5 Moving along the surface of the workpiece to be measured, the micrometer processing and display unit 24 records the input signal, and transmits the data to the human-computer interaction device 25 through the processing and display unit 24. After relevant data processing and analysis, it can Measure the straightness of the workpiece to be measured on this line. By adjusting the position of the micrometer probe 27 several times, the straightness of different positions of the workpiece can be measured. The position and the reciprocating motion of the micrometer probe 27, combined with the human-computer interaction device 25 and the error database prepared earlier can accurately measure the straightness and flatness of the workpiece.

When the size of the workpiece is relatively large, the measurement extension plate 28 is installed, and the straightness and flatness of the large workpiece can be measured in conjunction with the probe.

The principle that the present invention reaches sub-micron measurement accuracy is:

(1) Hardware error averaging

The large-stroke submicron-level plane accuracy measurement system of the present invention can be used to measure the straightness and flatness of the workpiece, because the air-floating guide rail platform used in the present invention itself is used as the slide table 2 of the guide rail. The straightness is about 3 microns, However, because the slide rail is an air-floating slide rail platform, after error averaging, the air-floating slide assembly composed of the joint 9, the upper cover plate 10 of the air-floating slide, and the side plate 18 of the air-floating slide can be positioned on the slide 2 in the pitch direction. The straightness with the left and right yaw directions can reach less than 1 micron, about 0.6-0.8 microns. Therefore, when the air bearing slide assembly is used as the mobile platform, the straightness and flatness of the workpiece can be tested with high precision.

The present invention can measure the straightness and flatness of small-scale workpieces when the measuring extension plate 28 is not added. When the size of the workpiece was relatively large, the measurement extension plate 28 was loaded onto, and the straightness and straightness of the large workpiece could be measured after adding the measurement extension plate 28.

(2) Software error compensation

After assembling all the accessories above the plan, remove the magnetic base 8, the polished rod 7 and the micrometer probe 27 of the micrometer probe 5, and add a counterweight of the same weight on the slide table, and use a laser interferometer to Or the laser scale measures the straightness of the air-floating slide assembly when it moves along the slide 2 and the positioning accuracy of the air-floating slide assembly driven by the servo motor driven by the control system, and stores the obtained values of the straightness and positioning accuracy When the platform is used to measure the workpiece, the data in the database is mobilized by the analysis software to correct the measured straightness data and flatness data. This process is software compensation.

When the straightness and flatness of the workpiece are measured by the measuring system device of the present invention, high-precision measurement can be performed through the error air flotation homogenization of the hardware and the error compensation and correction of the software, and the straightness and flatness of the measured workpiece can be guaranteed. The accuracy of the flatness can be guaranteed to be below 1 micron, which is more accurate than the results measured by the coordinate measuring machine. At the same time, the price of the platform system device is cheaper than that of the three-coordinate measuring instrument, which means that it can achieve low-cost and high-precision measurement results. The present invention is a kind of ingenious design, excellent performance, convenient and practical measuring system for large stroke plane accuracy. The large-stroke planar precision measuring system of the invention is simple to operate, convenient and practical, and has high measuring precision.

Claims (10)

1. a Long Distances submicron order plane precision measuring system, it is characterized in that including pedestal, slide unit, Timing Belt, dial gauge is popped one's head in, magnetic support, joint, air supporting slide unit upper cover plate, grating scale, limit switch sense base, servomotor, air supporting slide unit side plate, limit switch film, dial gauge data processing display unit, human-computer interaction interface, driving governor, its center tap, air supporting slide unit upper cover plate, air supporting slide unit side plate composition air supporting slide unit assembly, slide unit is installed on pedestal, the top of air supporting slide unit upper cover plate installing slide unit, air supporting slide unit side plate is fixed on the both sides of air supporting slide unit upper cover plate, and the both sides of air supporting slide unit side plate and slide unit touch and also touch between air supporting slide unit side plate and pedestal, joint is installed on air supporting slide unit side plate, the high pressure gas physical efficiency that joint passes into guides to the gap between air supporting slide unit assembly and pedestal and slide unit, magnetic support is adsorbed in the end face of air supporting slide unit upper cover plate by magnet attractive force, the bottom surface of magnetic support and the attracting attachment of end face of air supporting slide unit upper cover plate are touched, dial gauge probe is fixed on magnetic support, and dial gauge probe can convert measuring position along with slide unit, active synchronization belt wheel is arranged on the output shaft of servomotor, driven synchronous pulley is arranged on strainer, and Timing Belt is through groove set in slide unit, V belt translation pair is formed on active synchronization belt wheel and driven synchronous pulley, limit switch sense base is fixed in the groove set by slide unit, grating scale is fixed on the groove side set by slide unit, two limit switch films are fixed on the both sides of air supporting slide unit upper cover plate, the read head of grating scale and the signal output part of limit switch sense base are connected with the input/output signal line B of driving governor, the output signal line that signal input part and the dial gauge of dial gauge Data Management Analysis unit are popped one's head in is connected, dial gauge data processing display unit and driving governor are connected with human-computer interaction interface.

2. Long Distances submicron order plane precision measuring system according to claim 1, is characterized in that above-mentioned air supporting slide unit upper cover plate is provided with step 20, and the faceted pebble of the step that magnetic support has a side to be provided with air supporting slide unit upper cover plate contacts.

3. Long Distances submicron order plane precision measuring system according to claim 1, is characterized in that above-mentioned grating scale is fixed on the groove side set by slide unit by grating ruler reading head fixed connecting plate.

4. Long Distances submicron order plane precision measuring system according to claim 1, is characterized in that above-mentioned two limit switch films symmetry is fixed on the both sides of air supporting slide unit upper cover plate.

5. Long Distances submicron order plane precision measuring system according to claim 1, it is characterized in that above-mentioned servomotor is fixed on slide unit baffle plate, slide unit baffle plate is fixed on pedestal.

6. Long Distances submicron order plane precision measuring system according to claim 5, is characterized in that above-mentioned strainer is fixed on slide unit baffle plate.

7. Long Distances submicron order plane precision measuring system according to claim 1, is characterized in that the two ends of above-mentioned Timing Belt are fixed on air supporting slide unit upper cover plate by briquetting.

8. the large-range plane accuracy measurement system according to any one of claim 1 to 7, it is characterized in that above-mentioned dial gauge probe is fixed on magnetic support by polished rod and connection knob, dial gauge is popped one's head in and arbitrarily can convert measuring position along with slide unit 2, dial gauge probe is equiped with dial gauge probe.

9. large-range plane accuracy measurement system according to claim 8, is characterized in that above-mentioned joint is rapid-acting coupling.

10. large-range plane accuracy measurement system according to claim 8, is characterized in that above-mentioned air supporting slide unit upper cover plate is also equiped with measurement extension plate.