CN209402387U - A kind of micromotion platform and multidimensional fine motion system - Google Patents
A kind of micromotion platform and multidimensional fine motion system Download PDFInfo
- Publication number
- CN209402387U CN209402387U CN201822164447.9U CN201822164447U CN209402387U CN 209402387 U CN209402387 U CN 209402387U CN 201822164447 U CN201822164447 U CN 201822164447U CN 209402387 U CN209402387 U CN 209402387U
- Authority
- CN
- China
- Prior art keywords
- pedestal
- slide unit
- magnetic yoke
- micromotion platform
- mover assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000033001 locomotion Effects 0.000 title claims abstract description 29
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 81
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 9
- 238000013461 design Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Linear Motors (AREA)
Abstract
The utility model relates to a kind of micromotion platform and multidimensional fine motion systems.The micromotion platform includes ironless linear motors, pedestal and slide unit；Wherein, the ironless linear motors include stator module and do the mover assembly of linear reciprocating motion relative to stator module；The stator module is mounted on the base, and the stator module includes the magnetic yoke for being parallel to pedestal setting, is symmetrically arranged with magnet array on the magnetic yoke two wall surfaces opposite with pedestal；The mover assembly is between magnetic yoke and pedestal, and gap of the one side between magnetic yoke and pedestal is pierced by；The slide unit is slidably matched on the base, and the side that the side of the slide unit and mover assembly are pierced by gap between magnetic yoke and pedestal is assembled together, and the slide unit is configured as: doing linear reciprocating motion under the driving of mover assembly.One technical effect of the utility model are as follows: the magnet array of stator module side is directly anchored on pedestal, conducive to the height for reducing micromotion platform.
Description
Technical field
The utility model relates to motion platform fields, more specifically, the utility model relates to a kind of micromotion platforms and more
Tie up fine motion system.
Background technique
In recent years, with the fast development of science and technology and becoming increasingly popular for microelectronic product, people start increasingly
Pay attention to the exploitation and application of microelectronic product.And the processing of microelectronic product is usually directed to more accurate processing technology, is adding
Micromotion platform is usually used in work.Based on this, micromotion platform is answered extensively in recent years as the process equipment of microelectronic product
With, and show fast-developing trend.Many scholars are also in constantly research micromotion platform.
Currently, micromotion platform on the market is to be combined to constitute by components such as miniature rotating electric machine and lead screws mostly, it is whole
The structure of a device is complex, size is also bigger, but response speed is slow, has in actual application apparent
Defect.And for the micromotion platform for possessing higher kinematic accuracy, wherein mostly using piezoelectric ceramics, Magnetic driving, friction-driven
The methods of realize, although response speed is relatively fast, that there are costs of manufacture is high, control mode is complicated and maintenance not
Problems, the these problems such as facilitate to also limit its application in processing.
It can be seen that be highly desirable to develop new departure of micromotion platform, with solve it is existing in the prior art at least
One problem.
Utility model content
One purpose of the utility model is to provide a kind of new solution of micromotion platform.
First aspect according to the present utility model provides a kind of micromotion platform, comprising:
Ironless linear motors, the ironless linear motors include stator module and do relative to stator module reciprocal straight
The mover assembly of line movement；
Pedestal, the stator module are mounted on the base, and the stator module includes the magnetic for being parallel to pedestal setting
Yoke is symmetrically arranged with magnet array on the magnetic yoke two wall surfaces opposite with pedestal；The mover assembly be located at magnetic yoke with
Between pedestal, and gap of the one side between magnetic yoke and pedestal is pierced by；
For the slide unit of erection load, the slide unit is slidably matched on the base, the side of the slide unit and mover
The side that component is pierced by gap between magnetic yoke and pedestal is assembled together, and the slide unit is configured as: in the driving of mover assembly
Under do linear reciprocating motion.
Optionally, it is also respectively provided with supporting element at the both ends of magnetic yoke and pedestal, the magnetic yoke is supported on the support
On part, the supporting element is configured as: for separating magnetic yoke and pedestal, so as to be formed between magnetic yoke and pedestal for mover group
The gap that part passes through.
Optionally, the first step for positioning the magnet array in a first direction is provided on the pedestal, with
And the second step for positioning the magnet array in a second direction.
Optionally, the magnet array includes multiple magnet blocks arranged side by side, and is led between two adjacent magnet blocks
Separator is crossed to separate.
Optionally, the micromotion platform further includes sensor, and the sensor is mounted on a side of the pedestal
On, the sensor is configured as: for detecting the position of slide unit.
Optionally, the sensor is linear encoder；Wherein, the reading head of the linear encoder is assemblied in pedestal
On, the grid ruler of the linear encoder is assemblied on slide unit.
Optionally, the micromotion platform, further includes a pair of of limited block, and the pair of limited block is fixed on pedestal and is provided with
On the side of sensor；The side of the slide unit is provided with the block matched with a pair of of limited block, when slide unit is in mover assembly
Driving under when doing linear reciprocating motion, block moves back and forth between a pair of of limited block, between the block, a pair of of limited block
It is configured as: for limiting start position, the final position of slide unit movement.
Optionally, holding tank is provided on the pedestal, the ironless linear motors are located in the holding tank；It is described
The two sides of holding tank are respectively arranged with guide rail, and the guide rail is provided at least one cunning in being oppositely arranged on the guide rail
Block, the slide unit fixed setting is on the slide block.
Optionally, it is provided with mould group mounting hole on the pedestal, corresponds to pedestal upper mold group mounting hole on the slide unit
Position is provided with load mounting hole.
The second aspect according to the present utility model provides a kind of multidimensional fine motion system, including at least two above-mentioned timess
A kind of micromotion platform, multiple micromotion platforms are in be superposed up and down.
Micromotion platform provided by the embodiment of the utility model, is driven using ironless linear motors, have structure simply with
And the characteristics of fast response time.Moreover, the magnet array of the stator module side in ironless linear motors is directly installed on bottom
On seat, which can save a magnetic yoke, can reduce the size of stator module in the height direction, so as to effectively drop
The whole height of humble moving platform.
By the detailed description referring to the drawings to the exemplary embodiment of the utility model, the utility model it is other
Feature and its advantage will become apparent.
Detailed description of the invention
The attached drawing for constituting part of specification describes the embodiments of the present invention, and uses together with the description
In explanation the principles of the present invention.
Fig. 1 is the structural schematic diagram of micromotion platform provided by the embodiment of the utility model.
Fig. 2 is the structural exploded view of micromotion platform provided by the embodiment of the utility model.
Fig. 3 is the structural schematic diagram of the pedestal of micromotion platform provided by the embodiment of the utility model.
Fig. 4 is the structural schematic diagram of two-dimensional micromotion system provided by the embodiment of the utility model.
Description of symbols:
1- pedestal, 101- holding tank, the first limiting stand of 102-, the second limiting stand of 103-, 104- mould group mounting hole, 2- sensing
Device, 3- limited block, 4- stator module, 401- magnetic yoke, 402- magnet block, 5- supporting element, 6- slide unit, 601- block, 602- load
Mounting hole, 7- guide rail, 8- mover assembly, 9- sliding block, 10- grid ruler.
Specific embodiment
The various exemplary embodiments of the utility model are described in detail now with reference to attached drawing.It should also be noted that unless another
It illustrates outside, the component and the positioned opposite of step, numerical expression and numerical value otherwise illustrated in these embodiments is unlimited
The scope of the utility model processed.
Be to the description only actually of at least one exemplary embodiment below it is illustrative, never as to this is practical
Novel and its application or any restrictions used.
Technology and equipment known to person of ordinary skill in the relevant may be not discussed in detail, but in appropriate situation
Under, the technology and equipment should be considered as part of specification.
It is shown here and discuss all examples in, any occurrence should be construed as merely illustratively, without
It is as limitation.Therefore, other examples of exemplary embodiment can have different values.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, then in subsequent attached drawing does not need that it is further discussed.
With reference to Fig. 1 and Fig. 2, the utility model embodiment provides a kind of micromotion platform, including ironless linear motors,
Pedestal 1 and slide unit 6.Wherein, ironless linear motors include stator module 4 and do reciprocating linear fortune relative to stator module 4
Dynamic mover assembly 8.Stator module 4 is mounted on pedestal 1, and stator module 4 includes the magnetic yoke 401 for being parallel to the setting of pedestal 1, magnetic
Magnet array is symmetrically arranged on two wall surfaces opposite with pedestal 1 of yoke 401.Mover assembly 8 is located at magnetic yoke 401 and pedestal 1
Between, and gap of the one side between magnetic yoke 401 and pedestal 1 is pierced by.Slide unit 6 can be used for carry load, and the slide unit 6 sliding is matched
It closes on pedestal 1, and the side of slide unit 6 and mover assembly 8 are pierced by the side in gap between magnetic yoke 401 and pedestal 1 and are assemblied in one
It rises, which is configured as: doing linear reciprocating motion under the driving of mover assembly 8.
Micromotion platform provided by the embodiment of the utility model, using ironless linear motors as driving source.With it is existing
It is compared using the structure of rotating electric machine plus screw rod, the structure of whole device is simpler, is also easy to control.In the utility model
In micromotion platform, the magnet array of the stator module side in ironless linear motors is directly installed on pedestal, the design
A magnetic yoke can be saved, can reduce the size of stator module in the height direction, so as to which micromotion platform is effectively reduced
Whole height, that is, be conducive to reduce micromotion platform size.Moreover, its slide unit for being used for carry load can be directly in mover group
Linear reciprocating motion is done under the driving of part, has the characteristics that motor imagination is fireballing.In addition, being adopted in the utility model micromotion platform
With ironless linear motors, the motor have in operation slotless power, without magnetic attraction, movement is steady and is not likely to produce vibration
The characteristics of.
The micromotion platform of the utility model is also respectively provided with support at the both ends of magnetic yoke 401 and pedestal 1 with reference to Fig. 1
Part 5, magnetic yoke 401 are supported on supporting element 5.Supporting element 5 is configured as: for separating magnetic yoke 401 and pedestal 5, so that magnetic
The gap passed through for mover assembly 8 is formed between yoke 401 and pedestal 1.The wherein side of mover assembly 8 is from magnetic yoke 401 and pedestal 1
Between gap in be pierced by and be assembled together with the slide unit of top 6, mover assembly 8 can suspend in this gap at this time, and
Linear reciprocating motion is done in this gap.Wherein, the size phase of the gap size between magnetic yoke 401 and pedestal 1 and mover assembly 8
It closes, i.e., wants that lower mover assembly 8 can be accommodated in the gap.In the utility model, magnetic yoke is supported on pedestal using supporting element, is propped up
The setting position of support member is more flexible, is applicable to the magnetic yoke of support various sizes.
Wherein, magnetic yoke 401 and pedestal 1 can be made of permeability magnetic material well known in the art, such as can use metal
Permeability magnetic material, the utility model to this with no restriction.
Wherein, the shapes and sizes of each supporting element 5 are identical.In a specific embodiment of the utility model, support
Part 5 is using the supporting block of cubic, and the supporting element of the structure is convenient to be connect with magnetic yoke 401, pedestal 1, the stability after connection
Preferably, and not it will increase cost of manufacture.
Wherein, supporting element 5 can be combined together with magnetic yoke 401, pedestal 1 using dismountable mode, with easy to disassemble,
So as to preferably be suitable for various sizes of magnetic yoke.Supporting element 5 and magnetic yoke 401, pedestal 1 can also be consolidated using fastener
Fixed connection, which have the characteristics that at low cost, good convenient for operation and stability.Further, fastener can for example be adopted
With the fastener well known in the art such as rivet, screw, bolt.Certainly, supporting element 5 and magnetic yoke 401, pedestal 1 can also use glue
The connection types well known in the art such as bonding, welding are combined together.
In addition, can also be connected in other manners between magnetic yoke 401 and pedestal 1, as long as making magnetic yoke 401 and pedestal 1
Can be separated from one another, so as to be formed with the gap passed through for mover assembly 8, the utility model between magnetic yoke 401 and pedestal 1
With no restriction to this.
Stator module 4 provided by the embodiment of the utility model, magnet array therein include multiple magnet blocks 402.
In a specific embodiment of the utility model, with reference to Fig. 2, each magnet array includes multiple is arranged side by side
Magnet block 402, and can be separated by separator between two adjacent magnet blocks 402.The design of separator realizes
Additional designs magnet mounting tool is not necessarily to when magnet block is installed, it is simpler easily and fast and very clever when installing magnet block
It is living.Optionally, separator therein can use standard-sized thin slice or club, can also use well known in the art
The separator of other structures, the utility model are without limitation.Also, the size of separator can be according to need between magnet block
The spacing flexible setting to be spaced, the utility model are without limitation.
Certainly, in magnet array magnet block 402 arrangement mode, can be adjusted flexibly according to actual needs, this is practical new
Type to this with no restriction.
With reference to Fig. 1 and Fig. 2, mover assembly 8 provided by the embodiment of the utility model may include substrate, and be encapsulated in
Multiple coils in the substrate.Substrate is between magnetic yoke 401 and pedestal 1, and one side is between magnetic yoke 401 and pedestal 1
Gap is pierced by, and the side being pierced by substrate is formed with mounting portion, which is configured as: being used for mover assembly 8 and is slided
Platform 6 links together.Entire slide unit 6 is located at the top of ironless linear motors, can drive slide unit when mover assembly 8 moves
6 move together.Wherein, mounting portion for example can using mounting plate or mounting rack etc., the utility model to this with no restriction.
In the utility model, using the design being packaged in multiple coils jointly in substrate, its object is to: utilize substrate
To support multiple coils.In fact, the installation part being arranged on it for connecting slide unit is relatively difficult since coil is relatively soft,
And the rigidity of coil can be reinforced using the design of substrate, conducive to the mounting portion being arranged on it for connecting slide unit, so as to reality
The connection of existing mover assembly 8 and slide unit 6.
Optionally, when encapsulating multiple coils in substrate, multiple coils can be made to be arranged side by side and be sequentially connected.When
So, multiple coils can also arrange post package in substrate in other manners, the utility model to this with no restriction.
Optionally, the quantity of coil can be according to the demand flexible setting to ironless linear motors thrust size, this reality
With it is novel to this with no restriction.
Optionally, the shape of coil for example can be runway type coil, square coil or square coil etc., can also be with
According to the demand flexible choice to ironless linear motors thrust size, the utility model to this with no restriction.
With reference to Fig. 1 and Fig. 2, it is provided with holding tank 101 on the pedestal 1 of the utility model, ironless linear motors are located at
In the holding tank 101.It is respectively arranged with guide rail 7 in the two sides of holding tank 101, and guide rail 7 is set on guide rail 7 in being oppositely arranged
It is equipped at least one sliding block 9, slide unit 6 is fixed on sliding block 9.When the mover assembly 8 in ironless linear motors relative to
When stator module 4 generates movement, mover assembly 8, which can directly drive slide unit 6, can do linear reciprocating motion, have motor imagination
Fireballing feature.
With reference to Fig. 3, for positioning the magnet array in a first direction is provided on the pedestal 1 of the utility model
One step 102, and the second step 103 for positioning the magnet array in a second direction.The design can effectively be determined
The position of position magnet array, it is convenient that magnet array is installed on pedestal 1.
With reference to Fig. 1-Fig. 3, it is additionally provided with mould group mounting hole 104 on the pedestal 1 of the utility model, corresponds on slide unit 6
The position of pedestal upper mold group mounting hole 104 is provided with load mounting hole 602.Specifically: the mould group mounting hole 104 on pedestal 1
With the load mounting hole 602 on slide unit 6 be in one-to-one relationship, and mould group mounting hole 104 and load 602 ruler of mounting hole
Very little, shape is adapted, and is installed together in order to be superimposed multiple micromotion platforms up and down.
In a specific embodiment of the utility model, with reference to Fig. 1-Fig. 3, respectively it is arranged on four angles of pedestal 1
One mould group mounting hole 104, it is corresponding that a load mounting hole 602 is respectively set on four angles of slide unit 6.
With reference to Fig. 1 and Fig. 2, the micromotion platform of the utility model, further includes: sensor 2, and the sensor 2 can pacify
In a side of pedestal 1.The sensor 2 is configured as: for detecting the position of slide unit 6.At one of the utility model
In specific embodiment, sensor 2 uses linear encoder, wherein the reading head of linear encoder is assembled on pedestal 1,
The grid ruler 10 of linear encoder is assembled on slide unit 6.Reading head is arranged on pedestal 1, grid ruler 10 is arranged in slide unit 6
On, this design can make reading head fixed, and the cable of reading head can be avoided that reading head because repeating without relative motion
The case where bending causes cable contact bad and fracture.Certainly, sensor 2 can also use other sensings well known in the art
Device, such as: displacement sensor etc., the utility model is without limitation.
With reference to Fig. 1 and Fig. 2, the micromotion platform of the utility model, further includes: a pair of of limited block 3, and this is to limited block 3
Pedestal 1 is fixed on to be provided on the side of sensor 2.Also, it is additionally provided with block 601 in the side of slide unit 6, when slide unit 6 is sliding
When on pedestal 1, block 601 is located between a pair of of limited block 3 for dynamic cooperation.It is reciprocal when being done under driving of the slide unit 6 in mover assembly 8
When linear motion, block 601 moves back and forth between a pair of of limited block 3, is configured as between block 601, a pair of of limited block 3:
For limiting start position, the final position of the movement of slide unit 6, the phenomenon that slide unit 6 slips can be effectively prevented.
In the utility model, sensor 2 and limited block 3 are mounted on the same side of pedestal 1 by design, can effectively save pedestal
1 size in the direction of the width.In identical thrust, the width of pedestal 1 can be effectively reduced, it is flat so as to reduce entire fine motion
The width dimensions of platform.Height dimension in conjunction with the utility model micromotion platform above-mentioned is also smaller than existing micromotion platform, it is seen then that
The micromotion platform of the utility model has the advantages that size is lesser.
On the other hand, the utility model embodiment additionally provides a kind of multidimensional fine motion system, above-mentioned including at least two
Any micromotion platform.In assembly, multiple micromotion platforms are superimposed installation up and down, the movement of multiple directions may be implemented.
In a specific embodiment of the utility model, with reference to Fig. 4, by two micromotion platforms in superposition installation up and down
Two-dimensional micromotion system is formed together.The slide unit 6 of one of micromotion platform and the pedestal 1 of another micromotion platform are connected to one
It rises.
Although being described in detail by some specific embodiments of the example to the utility model, this field
It is to be understood by the skilled artisans that above example merely to be illustrated, rather than in order to limit the scope of the utility model.This
Field it is to be understood by the skilled artisans that can not depart from the scope of the utility model and spirit in the case where, to above embodiments
It modifies.The scope of the utility model is defined by the following claims.
Claims (10)
1. a kind of micromotion platform characterized by comprising
Ironless linear motors, the ironless linear motors include stator module and do reciprocating linear fortune relative to stator module
Dynamic mover assembly；
Pedestal, the stator module are mounted on the base, and the stator module includes the magnetic yoke for being parallel to pedestal setting, institute
It states and is symmetrically arranged with magnet array on magnetic yoke two wall surfaces opposite with pedestal；The mover assembly be located at magnetic yoke and pedestal it
Between, and gap of the one side between magnetic yoke and pedestal is pierced by；
For the slide unit of erection load, the slide unit is slidably matched on the base, the side of the slide unit and mover assembly
The side for being pierced by gap between magnetic yoke and pedestal is assembled together, and the slide unit is configured as: doing under the driving of mover assembly
Linear reciprocating motion.
2. micromotion platform according to claim 1, which is characterized in that be also respectively provided at the both ends of magnetic yoke and pedestal
Supporting element, the magnetic yoke are supported on the supporting element, and the supporting element is configured as: for magnetic yoke and pedestal to be separated,
So as to form the gap passed through for mover assembly between magnetic yoke and pedestal.
3. micromotion platform according to claim 1, which is characterized in that be provided on the pedestal in a first direction
Position the first step of the magnet array, and the second step for positioning the magnet array in a second direction.
4. micromotion platform according to claim 1, which is characterized in that the magnet array includes multiple magnetic arranged side by side
Iron block, and separated between two adjacent magnet blocks by separator.
5. micromotion platform according to claim 1, which is characterized in that further include sensor, the sensor is mounted on institute
It states in a side of pedestal, the sensor is configured as: for detecting the position of slide unit.
6. micromotion platform according to claim 5, which is characterized in that the sensor is linear encoder；
Wherein, the reading head of the linear encoder is assemblied on pedestal, and the grid ruler of the linear encoder is assemblied on slide unit.
7. micromotion platform according to claim 5, which is characterized in that further include a pair of of limited block, the pair of limited block
Pedestal is fixed on to be provided on the side of sensor；
The side of the slide unit is provided with the block matched with a pair of of limited block, when slide unit done under the driving of mover assembly it is past
When linear motion, block moves back and forth between a pair of of limited block, is configured as: using between the block, a pair of of limited block
Start position, final position in limitation slide unit movement.
8. micromotion platform according to claim 1, which is characterized in that be provided with holding tank, the iron-free on the pedestal
Core linear motor is located in the holding tank；
The two sides of the holding tank are respectively arranged with guide rail, and the guide rail is in being oppositely arranged, be provided on the guide rail to
A few sliding block, the slide unit fixed setting is on the slide block.
9. micromotion platform according to claim 1, which is characterized in that mould group mounting hole is provided on the pedestal, it is described
Position on slide unit corresponding to pedestal upper mold group mounting hole is provided with load mounting hole.
10. a kind of multidimensional fine motion system, which is characterized in that flat including at least two described in any item fine motions of claim 1-9
Platform, multiple micromotion platforms are in be superposed up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822164447.9U CN209402387U (en) | 2018-12-21 | 2018-12-21 | A kind of micromotion platform and multidimensional fine motion system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822164447.9U CN209402387U (en) | 2018-12-21 | 2018-12-21 | A kind of micromotion platform and multidimensional fine motion system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209402387U true CN209402387U (en) | 2019-09-17 |
Family
ID=67895589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822164447.9U Active CN209402387U (en) | 2018-12-21 | 2018-12-21 | A kind of micromotion platform and multidimensional fine motion system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209402387U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111641322A (en) * | 2020-06-30 | 2020-09-08 | 歌尔股份有限公司 | Vibration device and electronic apparatus |
| US20240178727A1 (en) * | 2022-11-25 | 2024-05-30 | Aac Technologies (Nanjing) Co., Ltd. | Direct drive transmission system |
| WO2024108737A1 (en) * | 2022-11-25 | 2024-05-30 | 瑞声科技（南京）有限公司 | Direct drive transmission system |
-
2018
- 2018-12-21 CN CN201822164447.9U patent/CN209402387U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111641322A (en) * | 2020-06-30 | 2020-09-08 | 歌尔股份有限公司 | Vibration device and electronic apparatus |
| US20240178727A1 (en) * | 2022-11-25 | 2024-05-30 | Aac Technologies (Nanjing) Co., Ltd. | Direct drive transmission system |
| WO2024108737A1 (en) * | 2022-11-25 | 2024-05-30 | 瑞声科技（南京）有限公司 | Direct drive transmission system |
| JP7645039B2 (en) | 2022-11-25 | 2025-03-13 | エーエーシー テクノロジーズ （ナンジン） カンパニーリミテッド | Direct Drive Transmission System |
| US12289018B2 (en) * | 2022-11-25 | 2025-04-29 | Aac Technologies (Nanjing) Co., Ltd. | Direct drive transmission system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209402387U (en) | A kind of micromotion platform and multidimensional fine motion system | |
| CN101610054B (en) | Planar motor adopting three-dimensional permanent magnet array | |
| CN100479985C (en) | XYZ-axes table | |
| CN202052684U (en) | Force-control type electromagnet and permanent magnet compound excitation vibration table | |
| CN103226295A (en) | Lithography machine silicon wafer bench micro-motion workbench | |
| CN101834550B (en) | Positioning device based on maglev planar motor | |
| CN106272364A (en) | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform | |
| CN102205308A (en) | Force-controlled electromagnetic permanent magnetic composite excitation vibration platform | |
| CN103309176A (en) | Six-freedom-degree micropositioner with lifting vacuum claw | |
| CN104009674B (en) | Six-degree-of-freedom short-stroke magnetic levitation workbench | |
| CN106393070A (en) | Antisymmetric parallel connection direct drive motion decoupling high-precision servo platform | |
| CN100553107C (en) | Permanent magnet suspending plane electromotor | |
| CN204835879U (en) | Two side C types do not have iron core linear motor motion module | |
| CN209057094U (en) | A kind of linear motor mould group | |
| CN112880953B (en) | Vibration test device and vibration test method | |
| CN102324867B (en) | Linear platform using compound bending vibration biped linear ultrasonic vibrator | |
| CN102723296A (en) | XY motion platform driven by double-layer linear motor | |
| CN101610022B (en) | Planar motor adopting groove-type coil | |
| CN110497363B (en) | Modularized macro-micro combined three-degree-of-freedom micro-clamping platform and using method thereof | |
| CN102800368B (en) | Positioning method of initial zero position of air floatation planar motor | |
| CN209072290U (en) | Alinco assembled device | |
| TW200402924A (en) | Motor system for positioning a load | |
| CN118539786A (en) | Micro-motion stage based on diamond vibrator ultrasonic drive | |
| CN102163572B (en) | A six-degree-of-freedom positioning device | |
| CN101800460B (en) | Short stroke DC planar motor with integrated winding structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |