CN106272364A - A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform - Google Patents

Abstract

The invention discloses a symmetrical parallel direct-drive motion decoupling high-precision servo platform, which includes a base, a moving plate, a first guide rail and a second guide rail, the first guide rail and the second guide rail are fixed on the base, and the first The guide rail and the second guide rail are perpendicular to each other, and the motion plate can slide along the first guide rail and the second guide rail; linear drive devices are arranged on the first guide rail and the second guide rail, and slide rails are arranged on the side of the motion plate, and the The slide rail is slidingly matched with the linear drive device; the linear drive device on the first guide rail drives the moving plate to move in the X direction, and the linear drive device on the second guide rail drives the moving plate to move in the Y direction, thus realizing the movement in the XY direction Decoupling. Two space vertical intersecting long guide rails fixed on the base increase the overall rigidity of the motion platform, further reduce the torque caused by the deviation of the driving force of the parallel motion platform from the mass center of the motion plate, and effectively restrain the torsion of the motion plate in the horizontal plane .

Description

A Symmetrical Parallel Direct Drive Motion Decoupling High Precision Servo Platform

technical field

The invention relates to a motion servo platform, in particular to a two-degree-of-freedom symmetrical parallel direct drive motion decoupling high-precision servo platform.

Background technique

With the continuous development of human science and technology and industrial technology, and the continuous improvement of creativity, the manufacturing industry has gradually developed towards the microscopic field. In order to meet human needs, the fields of modern machining, nanotechnology, advanced optical devices, integrated circuit manufacturing and precision machinery require devices or parts to be smaller and smaller in size and higher in precision. Therefore, ultra-precision servo technology has gradually become the core technology of emerging industries such as information storage, precision imaging, precision machinery manufacturing, and semiconductor equipment. Operating systems and equipment. Therefore, establishing a high-precision motion servo platform has great theoretical and practical significance for both scientific research and industrial manufacturing.

Most of the two-dimensional motion platforms currently used in the market are serial two-dimensional planar motion platforms. The transmission platform is mostly driven by a rotating motor plus a ball screw. The specific structure is that the bottom rotating motor converts the rotary motion into a straight line through the screw Movement, so as to drive the upper rotary drive motor and the flat plate to move together, but this kind of rotary motor drive has problems such as driving gaps, the load mass of the bottom rotary motor is greater than the load mass of the upper motor, etc., ignoring people's further improvement of equipment positioning accuracy, speed and The appeal of acceleration is inherently asymmetrical in design. The parallel platform has its unique advantages in terms of interchangeability and high-speed high-acceleration trajectory tracking control due to its high symmetry and completely independent motion decoupling mechanism.

The voice coil motor is a power device that uses the interaction of magnetic poles in the magnetic field generated by the permanent magnetic field or the energized coil conductor to convert electrical energy into mechanical energy and generate regular linear and limited swing angles. It not only theoretically has the advantages of infinite resolution, no lag, high acceleration, high response, high speed, small size, convenient control, good mechanical properties, etc., it can avoid the shortcomings of the gap in the transmission link of the rotating motor drive, It is an ideal power device in the field of precision machinery manufacturing.

Contents of the invention

The purpose of the present invention is to overcome the shortcomings of the above-mentioned prior art and provide a symmetrical parallel direct-drive motion decoupling high-precision servo platform with small mass, large load capacity, high interchangeability and high precision.

To achieve the above object, the present invention adopts the following technical solutions:

A symmetrical parallel direct-drive motion decoupling high-precision servo platform, including a base, a moving plate, a first guide rail and a second guide rail, the first guide rail and the second guide rail are fixed on the base, and the first guide rail and the The second guide rails are perpendicular to each other, and the moving plate can slide along the first guide rail and the second guide rail; a linear drive device is arranged on the first guide rail and the second guide rail, and a slide rail is arranged on the side of the moving plate, and the slide rail Sliding fit with linear drive;

The linear drive device on the first guide rail drives the moving plate to move in the X direction, and the linear drive device on the second guide rail drives the moving plate to move in the Y direction, so as to realize the decoupling of the two moving directions of XY.

Through the layout of the first guide rail and the second guide rail perpendicular to each other, and the two guide rails are respectively equipped with linear drive devices, the two linear drive devices work separately, which can decouple the motion of the motion plate on the two-dimensional motion plane; the two linear drives The device works at the same time, which can make the sports flat board do plane motion in the two-dimensional motion plane.

The linear drive device is fixed on the base, and a thrust connecting frame is arranged between the linear drive device and the slide rail. The linear driving device directly acts on the thrust connecting frame, and the thrust connecting frame transmits the thrust of the linear driving device to the moving plate, thereby driving the moving plate to move.

One end of the thrust connecting frame is connected with the linear drive device, the other end of the thrust connecting frame is fixedly connected with the slider, and the slider is matched with the slide rail. A slider is provided at the end of the thrust connecting frame, and the slider cooperates with the slide rail arranged on the moving plate, which can not only transmit the thrust to the moving plate to drive it to move along the direction when the linear drive device in one direction is working, but also can move in the other direction. When the one-way linear drive device is working, it does not affect the movement of the sports plate.

The bottom of the thrust connecting frame is relatively slidingly matched with the first guide rail or the second guide rail. The thrust connection frame slides along the first guide rail or the second guide rail, and the linear drive device pushes the thrust connection frame to move when working, and then transmits the motion to the motion plate.

Displacement sensors are fixed on the moving plate and the slider. The displacement sensor is used to measure the displacement of the motion plate in the X direction or the Y direction.

The displacement sensor is a linear grating ruler, including a scale grating and a reading head. The scale grating is fixed on the slider, and the reading head is fixed on the moving plate. The output signal line of the linear grating ruler is connected from the reading head. The linear grating ruler is used to detect the displacement, which has the characteristics of large detection range, high detection accuracy and fast response speed, and can more accurately and quickly measure the movement displacement of the moving plate.

The slide rails are arranged horizontally and symmetrically on the four sides of the sports plate. The "symmetrical parallel connection" in the present invention is reflected in the symmetrical layout of the guide rails on the four sides of the moving platform. The guide rails are arranged horizontally and symmetrically on the four sides of the moving platform. Jointly supporting the motion platform increases the support stiffness of the motion platform, and at the same time realizes the decoupling of the two-dimensional motion of the motion platform.

The first guide rail and the second guide rail are provided with a supporting connecting frame on the side opposite to the linear drive device, and the supporting connecting frame is relatively slidably matched with the sliding rail on the side of the moving plate. The support connecting frame can support the sports tablet, and at the same time, when the sports tablet is moving, setting the supporting connecting frame can make the sports tablet move more stable and reliable, and ensure the precision of the sports tablet.

The bottom of the supporting connecting frame is relatively slidably matched with the first guide rail or the second guide rail. The supporting connecting frame moves with the moving plate and slides on the first guide rail or the second guide rail.

The first guide rail is arranged at a lower position in the groove of the base, and the second guide rail is arranged at a higher position on the base; or the first guide rail is arranged at a higher position on the base, so The second guide rail is arranged at a lower position in the groove of the base. The first guide rail and the second guide rail are arranged at different heights, so that the first guide rail and the second guide rail will not affect each other's work, and the accurate movement of the moving plate along the first guide rail and the second guide rail is guaranteed.

Preferably, the linear drive device is a voice coil motor. The voice coil motor has the characteristics of high precision and high frequency response, which can avoid the problems in the driving of the rotating motor, and is an ideal power device in the field of precision machinery.

The voice coil motor adopts the structure of external permanent magnet and internal electromagnetic, and the permanent magnet part is used as the stator, and the electromagnetic part is used as the mover, and there is a gap between the stator and the mover.

The slider is a ball linear guide rail slider, and the first guide rail, the second guide rail and the slide rail are all ball linear guide rails. It is set so that the ball linear guide can bear pressure and lateral (left and right) forces at the same time.

Working principle of the present invention is:

Through the relative sliding cooperation between the slide rail and the slider, the thrust connecting frame, the supporting connecting frame and the moving plate are connected to form a whole. The linear drive device on the first guide rail pushes the moving plate to move in the X direction, and the linear drive on the second guide rail The device pushes the motion plate to move in the Y direction, so as to realize the decoupling of the two motion directions of XY.

The linear drive devices on the first guide rail and the second guide rail work at the same time, and the moving plate moves in the XY plane.

The beneficial effects of the present invention are:

1. The voice coil motor with external permanent magnet and internal electromagnetic has a good linear relationship between its output force and input current and is easy to control.

2. The voice coil motor is directly driven to reduce the error caused by the transmission of the intermediate link. The positioning accuracy of the platform is high, and the driving force is large, so that greater motion acceleration and speed can be obtained.

3. Two thrust connecting frames and two supporting connecting frames are arranged symmetrically, and the motion plate is connected with two space vertically intersecting long guide rails on the base to form a whole, so as to realize the symmetrical support of the motion plate similar to a simply supported beam, effectively restraining the The precision error in the vertical direction of the motion plate; it is driven by two axial vertical voice coil motors in the same horizontal plane, which realizes the motion decoupling of the motion platform in the two-dimensional motion plane.

4. Two vertically intersecting long guide rails fixed on the base increase the overall rigidity of the motion platform, further reduce the torque caused by the deviation of the driving force of the parallel motion platform from the mass center of the motion plate, and effectively restrain the movement of the motion plate in the horizontal plane. twist.

5. Ball linear guides and guide rail sliders are used as motion decoupling components to make the platform compact, and molded products from well-known manufacturers can be selected to reduce the cumulative error caused by self-processing.

6. Platform symmetrical parallel structure, easy to process, low manufacturing cost and high interchangeability.

Description of drawings

Fig. 1 is an axonometric view of a symmetrical parallel direct-drive motion decoupling high-precision servo platform provided by the present invention;

Fig. 2 is the front view of the symmetrical parallel direct-drive motion decoupling high-precision servo platform provided by the present invention;

Fig. 3 is a left view of the symmetrical parallel direct-drive motion decoupling high-precision servo platform provided by the present invention;

Fig. 4 is a top view of the symmetrical parallel direct-drive motion decoupling high-precision servo platform provided by the present invention;

In the figure, 1 base, 2 first support connecting frame, 3 first long guide rail, 4 first long guide rail slider, 5 short slide rail, 6 motion plate, 7 second thrust connecting frame, 8 second voice coil motor , 9 second voice coil motor fixing frame, 10 first displacement sensor, 11 short slide rail slider, 12 first thrust connecting frame, 13 first voice coil motor, 14 first voice coil motor fixing frame, 15 second displacement Sensor, 16 second long guide rails, 17 second support connecting frames, 18 second long guide rail sliders.

detailed description

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will combine the accompanying drawings of the embodiments of the present invention, and on the basis of considering factors such as platform structure optimization and manufacturing process, to analyze the technical aspects of the embodiments of the present invention The program is clearly and completely described. Of course, the embodiments described with reference to the accompanying drawings are only exemplary, and are intended to explain the present invention, and should not be construed as excessively limiting the present invention.

In the present invention, terms such as "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "side", "bottom" etc. indicate The orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, and is only a relative term determined for the convenience of describing the structural relationship of the various components or elements of the present invention, and does not specifically refer to any component or element in the present invention, and cannot be understood as a reference to the present invention. Invention Limitations.

In the present invention, the terms "first" and "second" are only used to distinguish parts or elements in different directions, and cannot be interpreted as indicating or implying the quantity of a certain technical feature.

In the present invention, terms such as "fixed", "connected", "connected" and "posted" should be understood in a broad sense, indicating that they can be fixedly connected, integrally connected or detachably connected; they can be directly connected, It can also be connected indirectly through an intermediary. For relevant researchers or technical personnel in the field, the specific meanings of the above terms in the present invention can be determined according to specific situations, and should not be construed as limitations on the present invention.

As shown in FIG. 1 , FIG. 1 is an axonometric view of a symmetrical parallel direct-drive motion decoupling high-precision servo platform of the present invention. The present invention adopts a symmetrically arranged simply supported beam support structure, and the moving plate 6 is connected to the short slide rail slider 11 and the first long guide rail slider 4 respectively through the first thrust connecting frame 12, the first supporting connecting frame 2 and the The second thrust connecting frame 7 and the second supporting connecting frame 17 connected by the short slide rail slider 11 and the second long guide rail slider 18 are integrally formed, and are fixed on the first voice coil motor fixing frame 14 by the first The voice coil motor 13 pushes the first thrust connecting frame 12, and then pushes the moving plate 6 to move in the X movement direction, and the second voice coil motor 8 fixed on the second voice coil motor fixing frame 9 pushes the second thrust connecting frame 7 , and then push the motion plate 6 to move in the Y motion direction, so as to realize the motion decoupling of the two XY motion directions.

Both voice coil motors adopt the structure of external permanent magnet and internal electromagnetic, and the permanent magnet part is fixed on the first voice coil motor fixing frame 14 and the second voice coil motor fixing frame 9 respectively as the stator, and the electromagnetic part is fixed on the moving element respectively In the first thrust connection frame 12 and the second thrust connection frame 7, the signal wire of the voice coil motor is directly connected from the voice coil motor mover, and the signal wire is fixed.

The short slide rails 5 include four short slide rails 5 fixed on the sides of the moving plate 6 by bolts and arranged symmetrically horizontally; the moving plate 6 is connected with four short slide rails 5 arranged transversely symmetrically. The long guide rail includes the first long guide rail 3 fixed at the low position in the groove of the base 1 and the second long guide rail 16 arranged at a high position vertically intersecting with the first long guide rail 3 in space; The guide rail slider 4 is matched with the first long guide rail 3, and the second long guide rail slider 18 is matched with the second long guide rail 16 to realize free sliding in the guide rail direction.

The first thrust connecting frame 12 is integrated with the first voice coil motor 13 , the short slide rail slider 11 arranged on the left side of the moving plate and the first long guide rail slider 4 .

The second thrust connecting frame 7 is integrated with the second voice coil motor 8 , the short slide rail slider 11 and the second long guide rail slider 18 arranged on the front side of the moving plate.

The first support connecting frame 2 is integrally connected with the short slide rail slider 11 and the first long guide rail slider 4 arranged on the right side of the sports panel.

The second support connecting frame 17 is integrally connected with the short slide rail slider 11 and the second long guide rail slider 18 arranged on the rear side of the sports panel.

The first displacement sensor 10 is a linear grating ruler including a scale grating and a reading head, and the scale grating ruler is fixed on the side of the short slide rail slide block 11 connected with the second thrust connecting frame 7, and the reading head is fixed on the moving plate 6 side; the second displacement The sensor 15 is also a linear grating ruler and includes a scale grating and a reading head. The scale grating ruler is fixed on the side of the short slide rail slide block 11 connected with the first thrust connecting frame 12, and the reading head is fixed on the side of the moving plate 6.

The first long guide rail slider 4, the second long guide rail slider 18, and the short slide rail slider 11 are ball linear guide rail sliders.

The first long guide rail 3, the second long guide rail 16, and the short slide rail 5 are ball linear guides.

As shown in Figure 2, Figure 2 is a front view of the symmetrical parallel direct-drive motion decoupling high-precision servo platform of the present invention, from which the movement of the platform in the X direction can be clearly seen. The first voice coil motor fixing frame 14 is fixed on the base 1 by bolts, and the first voice coil motor 13 is connected to the first thrust connecting frame 12 by bolts. When the voice coil motor 13 is working, the first thrust connecting frame 12 passes through a short The sliding block 11 of the slide rail drives the moving plate 6 to move along the X-axis direction. The second displacement sensor 15 comprises a linear grating ruler and a reading head, and the linear grating ruler is fixed on the side of the short slide rail slide block 11 that links to each other with the first thrust connecting frame 12, and the reading head is fixed on the moving plate 6 side, and the output signal of the sensor passes through and Signal line output for readhead connection.

As shown in Figure 3, Figure 3 is a left view of the symmetrical parallel direct drive motion decoupling high-precision servo platform of the present invention, from which the movement of the platform in the Y direction can be clearly seen. The second voice coil motor fixing frame 9 is fixed on the base 1 by bolts, and the second voice coil motor 8 is connected with the second thrust connecting frame 7 by bolts. When the second voice coil motor 8 works, the second thrust connecting frame 7 The moving plate 6 is driven to move along the Y-axis direction by the short slide rail slider 11 . The first displacement sensor 10 comprises a linear grating ruler and a reading head, and the linear grating ruler is fixed on the side of the short slide rail slide block 11 connected with the second thrust connecting frame 12, and the reading head is fixed on the side of the moving plate 6, and the output signal of the sensor is passed through and Signal line output for readhead connection.

As shown in Figure 4, Figure 4 is a top view of the symmetrical parallel direct drive motion decoupling high-precision servo platform of the present invention, from which the decoupling motion in the XY plane of the platform can be clearly seen. The first voice coil motor 13 and the second voice coil motor 8 are respectively fixedly connected to the first thrust connection frame 12 and the second thrust connection frame 7 through bolts. In the Y direction, the second voice coil motor 8 drives the second thrust connection bracket 7 to slide between the second long guide rail 16 and the second long guide rail slider 18, and then the moving plate 6 moves in the Y direction together; A voice coil motor 13 drives the second thrust connection bracket 7 to realize sliding between the first long guide rail 3 and the first long guide rail slider 4, and then the moving plate 6 moves in the X direction together with it, realizing the movement in two directions Decoupling; when the two voice coil motors work at the same time, the motion plate 6 moves in the XY plane.

The invention can solve the problems of backlash, friction, large load mass and insufficient rigidity caused by the bottom rotating motor through the ball screw and other transmission pairs in the traditional two-dimensional motion platform, and solve the problems of air flotation or The vertical error of the magnetic levitation support and the torsion error caused by the deviation of the driving force from the center of mass of the moving plate can reduce and solve the problems of the vertical accuracy error and the torsion of the moving plate in the horizontal plane of a similar cantilever beam parallel double drive platform . The platform is directly driven by two vertically arranged voice coil motors, and is jointly supported by two space vertically intersecting long guide rails fixed on the base and four symmetrically arranged guide rails on the side of the moving plate, with compact structure, small load and interchangeability It has the characteristics of high height, large stroke, high precision and motion decoupling. The entire platform is supported by a symmetrical arrangement. This type of support similar to simply supported beams effectively suppresses the impact of the vibration caused by the platform movement on the vertical accuracy, improves the stiffness and load capacity of the moving platform, and suppresses the vertical vibration of the moving plate and the horizontal plane. Internal torsion enhances the interchangeability of motion platform components and reduces manufacturing costs.

Through the above detailed description of the embodiments of the present invention, it can be understood that the above embodiments are only exemplary, mainly used to explain and describe the present invention, but not as a limitation of the present invention, in the spirit of the present invention and the protection of the claims Within the scope, any modifications and changes made to the present invention fall within the protection scope of the present invention. Ordinary scientific researchers and technicians in the field can partially modify, deform and replace the above-mentioned embodiments within the scope of the present invention without departing from the purpose and principle of the present invention.

Claims (10)

1. symmetric parallel directly drives a mobile decoupling high-precision servo platform, it is characterized in that, including pedestal, exercise stress, first Guide rail and the second guide rail, described first guide rail and the second guide rail be each attached on pedestal, and the first guide rail and the second guide rail mutual Vertically, exercise stress can be along the first guide rail and the second slide；All it is equipped with straight on described first guide rail and the second guide rail Line driving means, described exercise stress sidepiece arranges slide rail, and described slide rail is slidably matched with linear drive apparatus；Described slide rail exists Four side horizontal symmetry of exercise stress are laid；

Linear drive apparatus on first guide rail drives exercise stress to move in X-direction, the linear drive apparatus on the second guide rail Drive exercise stress to move in the Y direction, thus realize the mobile decoupling of two directions of motion of XY.

2. servo platform as claimed in claim 1, is characterized in that, described linear drive apparatus is fixed on base, described directly Thrust link it is provided with between line driving means and slide rail.

3. servo platform as claimed in claim 2, is characterized in that, described thrust link one end is with linear drive apparatus even Connecing, the thrust link other end is affixed with slide block, and slide block matches with slide rail.

4. servo platform as claimed in claim 2, is characterized in that, lead with the first guide rail or second bottom described thrust link Rail is slidably matched relatively.

5. servo platform as claimed in claim 3, is characterized in that, described exercise stress and slide block are fixed with displacement sensing Device.

6. servo platform as claimed in claim 5, is characterized in that, institute's displacement sensors is linear grating chi, including scale Grating and read head, scale grating is fixed on slide block, and read head is fixed on exercise stress, the output of described linear grating chi Holding wire picks out from read head.

7. servo platform as claimed in claim 1, is characterized in that, on described first guide rail and the second guide rail with linear drives The side of device opposition arranges support connecting frame, and support connecting frame is relative with the slide rail of exercise stress sidepiece to be slidably matched.

8. servo platform as claimed in claim 7, is characterized in that, lead with the first guide rail or second bottom described support connecting frame Rail is slidably matched relatively.

9. servo platform as claimed in claim 1, is characterized in that, described linear drive apparatus is voice coil motor；Described slide block For ball straight-line guide rail slide block, described first guide rail, the second guide rail and slide rail are ball line slideway.

10. servo platform as claimed in claim 1, is characterized in that, described first guide rail is relatively low in being laid in the groove of pedestal Position, described second guide rail is laid on pedestal at higher position；Or, described first guide rail is laid in high bit on pedestal Putting place, described second guide rail is laid in the groove of pedestal at lower position.