CN107328366A - Two-dimensional nano compliant motion platform and its grating measuring method - Google Patents

Abstract

The invention discloses a kind of two-dimensional nano compliant motion platform and its grating measuring method, the two-dimensional nano compliant motion platform includes：Pedestal；Terminal platform；X is to connecting rod and Y-direction connecting rod；Two X are to flexible guide；Two Y-direction flexible guides；Two X decouple part to flexibility；Two Y-direction flexibility decoupling parts；X is to driver and Y-direction driver；X is to grating sensor；Y-direction grating sensor.Two-dimensional nano compliant motion platform according to embodiments of the present invention has the advantages that precision height, cost are low and easy to install.

Description

Two-dimensional nano flexible motion platform and its grating measurement method

technical field

The invention relates to the field of direct measurement of a large-stroke two-dimensional nano-flexible motion platform by using a grating sensor, in particular to a two-dimensional nano-flexible motion platform and a grating measurement method thereof.

Background technique

The two-dimensional nano-flexible motion platform in the related art, for the displacement measurement requiring micro-nano precision, allows the deviation in the non-moving direction within 200 microns, and cannot directly apply the grating sensor to simultaneously realize the large-stroke measurement in two directions. In addition, the two-stage measurement method has many factors affecting the measurement accuracy, and the installation of the sensor is inconvenient, while the laser interferometer method has high cost and complicated installation.

Contents of the invention

The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the present invention proposes a two-dimensional nano-flexible motion platform, which has the advantages of high precision, low cost, and convenient installation and use.

The invention also proposes a grating measurement method of a two-dimensional nanometer flexible motion platform.

In order to achieve the above object, a two-dimensional nano flexible motion platform is proposed according to an embodiment of the first aspect of the present invention, the two-dimensional nano flexible motion platform includes: a base; a terminal platform, the terminal platform is located on the base The inner side of the outer edge of the X-direction connecting rod and the Y-direction connecting rod, the X-direction connecting rod is oriented along the X-direction and the Y-direction connecting rod is oriented along the Y-direction; two X-direction flexible guides, two of the The X-direction flexible guides are respectively connected to the two ends of the X-direction connecting rod so that the two X-direction flexible guides move synchronously, and each of the X-direction flexible guides is connected to the base; two Y-direction flexible guides are connected to each other; To the flexible guide, the two Y-direction flexible guides are respectively connected with the two ends of the Y-direction connecting rod so that the two Y-direction flexible guides move synchronously, and each of the Y-direction flexible guides is connected with the Y-direction flexible guide The base is connected; two X-direction flexible decoupling parts are respectively connected to the two ends of the X-direction connecting rod so that the two X-direction flexible decoupling parts are synchronized Movement, the two X-direction flexible decoupling parts are respectively connected with the two X-direction flexible guide parts, and the two X-direction flexible decoupling parts are respectively connected with the opposite side walls of the terminal platform; two The Y-direction flexible decoupling parts, the two Y-direction flexible decoupling parts are respectively connected with the two ends of the Y-direction connecting rod so that the two Y-direction flexible decoupling parts move synchronously, and the two Y-direction flexible decoupling parts The flexible decoupling parts are respectively connected with the two Y-direction flexible guide parts, and the two Y-direction flexible decoupling parts are respectively connected with the opposite side walls of the terminal platform; the X-direction driver and the Y-direction driver, the The X-direction driver is connected to one of the two X-direction flexible guides, the Y-direction driver is connected to one of the two Y-direction flexible guides; the X-direction grating sensor, the X-direction grating sensor respectively It is detachably connected with the terminal platform and the X-direction flexible guide, and at least a part moves together with the X-direction flexible guide; the Y-direction grating sensor is connected with the terminal platform and the Y-direction grating sensor respectively. The Y-direction flexible guide is detachably connected and at least a part moves together with the Y-direction flexible guide.

The two-dimensional nano-flexible motion platform according to the embodiment of the present invention has the advantages of high precision, low cost, and convenient installation and use.

In addition, the two-dimensional nano-flexible motion platform according to the above-mentioned embodiments of the present invention may also have the following additional technical features:

According to an embodiment of the present invention, the X-direction grating sensor includes an X-direction glass ruler and an X-direction reading head, and the X-direction glass ruler is installed on the terminal platform close to one side edge of the X-direction flexible guide , the X-direction reading head is installed on the X-direction flexible guide close to one end of the terminal platform; the Y-direction grating sensor includes a Y-direction glass ruler and a Y-direction reading head, and the Y-direction glass ruler is installed on The edge of one side of the terminal platform close to the Y-direction flexible guide, and the Y-direction reading head is installed on one end of the Y-direction flexible guide close to the terminal platform. This facilitates the arrangement of the X-direction grating sensor and the Y-direction grating sensor.

Further, the X-direction glass ruler is installed on the upper surface of the terminal platform, the X-direction reading head is installed on the upper surface of the X-direction flexible guide; the Y-direction glass ruler is installed on the terminal platform The upper surface of the Y-direction reading head is installed on the upper surface of the Y-direction flexible guide. In this way, it is convenient for the user to read the data of the X-direction grating sensor and the Y-direction grating sensor.

Optionally, one of the X-direction flexible guide and the X-direction grating sensor is provided with an X-direction positioning rib and the other is provided with an X-direction positioning groove, and the X-direction positioning rib is detachable fit in the X-direction positioning groove; one of the Y-direction flexible guide and the Y-direction grating sensor is provided with a Y-direction positioning rib and the other is provided with a Y-direction positioning groove, and the Y-direction The positioning rib is detachably fitted in the X-direction positioning groove. In this way, the grating sensor can be positioned by using the positioning rib and the positioning groove.

According to yet another embodiment of the present invention, the two X-direction flexible guides are arranged symmetrically in the X direction, the two Y-direction flexible guides are symmetrically arranged in the Y direction, and the two X-direction flexible decoupling The X direction is arranged symmetrically, and the two Y-direction flexible decoupling parts are arranged symmetrically in the Y direction. In this way, the consistency of each component of the two-dimensional nano-flexible motion platform can be further improved.

According to yet another embodiment of the present invention, each of the X-direction flexible guides includes an X-direction inner leaf spring, an X-direction outer leaf spring, and an X-direction rigid connector, and the two X-direction inner leaf springs are connected to the X-direction respectively. The two ends of the X-direction connecting rod are connected, the X-direction outer leaf spring is located on the outside of the X-direction inner leaf spring and are connected to the base, the X-direction inner leaf spring and the X-direction outer leaf spring Connected through the X-direction rigid connectors, each of the Y-direction flexible guides includes a Y-direction inner leaf spring, a Y-direction outer leaf spring and a Y-direction rigid connector, and the two Y-direction inner leaf springs are respectively connected to the Y-direction Both ends of the Y-direction connecting rod are connected, the Y-direction outer leaf spring is located outside the Y-direction inner leaf spring and are connected to the base, the Y-direction inner leaf spring and the Y-direction outer plate The springs are connected through the Y-direction rigid connectors. In this way, the flexible connection of the X-direction flexible guide, the Y-direction flexible guide, the base, the X-direction flexible decoupling part and the Y-direction flexible decoupling part can be realized.

Further, the height of the X-direction inner leaf spring and the Y-direction inner leaf spring in the vertical direction is lower than the X-direction outer leaf spring and the Y-direction outer leaf spring. In this way, the inner leaf spring avoids the X-direction flexible decoupling part and the Y-direction flexible decoupling part.

Optionally, the base includes: a base plate; four internal connection bosses, the four inner connection bosses are arranged at intervals on the upper surface of the base plate, and the two ends of each of the X-direction inner leaf springs are respectively It is connected with two adjacent inner connecting bosses, and the two ends of each said Y-direction inner leaf spring are respectively connected with two adjacent inner connecting bosses; four outer connecting bosses, four The outer connecting bosses are arranged at intervals on the upper surface of the base plate and are located outside the four inner connecting bosses, and the two ends of each of the X-direction outer leaf springs are respectively connected to the adjacent two outer connecting bosses. The connecting bosses are connected, and the two ends of each Y-direction outer leaf spring are respectively connected with two adjacent outer connecting bosses. This can facilitate the connection of the leaf spring to the base.

According to another embodiment of the present invention, each of the X-direction flexible decoupling members includes two X-direction outward parallel leaf springs, two X-direction parallel leaf springs and two X-direction rigid connecting plates, the two The X-outward parallel leaf springs are all connected to the same side edge of the terminal platform, and the two X-inward parallel leaf springs are located inside the two X-outward parallel leaf springs and connected to the two X-outward parallel leaf springs. The parallel leaf springs are arranged in parallel, and the two X-direction parallel leaf springs are connected to the corresponding X-direction flexible guides, and the two X-direction outward parallel leaf springs respectively pass through the two X-direction rigid connecting plates Connected with the two X-inward parallel leaf springs, each Y-direction flexible decoupling member includes two Y-direction outward parallel leaf springs, two Y-inward parallel leaf springs and two Y-direction rigid connecting plates, The two Y-outward parallel leaf springs are connected to the same side edge of the terminal platform, and the two Y-inward parallel leaf springs are located inside the two Y-outward parallel leaf springs and are connected to the two Y-outward parallel leaf springs. The Y-outward parallel leaf springs are arranged in parallel, and the two Y-inward parallel leaf springs are connected to the corresponding Y-direction flexible guides, and the two Y-outward parallel leaf springs respectively pass through the two Y-direction flexible guides. The rigid connecting plate is connected with the two Y-inward parallel leaf springs. This can ensure that the X-direction flexible decoupling member and the Y-direction flexible decoupling member have good structural strength and flexibility.

According to the embodiment of the second aspect of the present invention, a grating measurement method of a two-dimensional nano flexible motion platform is proposed, and the grating measurement method of the two-dimensional nano flexible motion platform includes the following steps:

Using the X-direction grating sensor to measure the displacement of the terminal platform in the X direction, and using the Y-direction grating sensor to measure the displacement of the terminal platform in the Y direction;

The plane displacement of the terminal platform is calculated according to the detection values of the X-direction grating sensor and the Y-direction grating sensor.

The grating measurement method of the two-dimensional nano-flexible motion platform according to the embodiment of the present invention has the advantages of high precision, low cost, and convenient use.

Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Description of drawings

The above and/or additional aspects and advantages of the present invention will become apparent and comprehensible from the description of the embodiments in conjunction with the following drawings, wherein:

Fig. 1 is a schematic structural diagram of a two-dimensional nano-flexible motion platform according to an embodiment of the present invention.

Fig. 2 is a schematic structural diagram of a two-dimensional nano-flexible motion platform according to an embodiment of the present invention.

Fig. 3 is a schematic structural diagram of a two-dimensional nano-flexible motion platform according to an embodiment of the present invention.

Fig. 4 is a schematic structural diagram of a two-dimensional nano-flexible motion platform according to an embodiment of the present invention.

Fig. 5 is a schematic diagram of a partial structure of a two-dimensional nano-flexible motion platform according to an embodiment of the present invention.

Fig. 6 is a schematic diagram of a partial structure of a two-dimensional nano-flexible motion platform according to an embodiment of the present invention.

Fig. 7 is a schematic diagram of a partial structure of a two-dimensional nano-flexible motion platform according to an embodiment of the present invention.

Reference signs: two-dimensional nano flexible motion platform 1, base 100, base plate 110, inner connection boss 120, outer connection boss 130, terminal platform 200, X-direction connecting rod 310, Y-direction connecting rod 320, X-direction flexible Guide piece 410, X-direction inner leaf spring 411, X-direction outer leaf spring 412, X-direction rigid connector 413, X-direction positioning groove 414, Y-direction flexible guide 420, Y-direction inner leaf spring 421, Y-direction outer leaf spring 422, Y direction rigid connector 423, Y direction positioning groove 424, X direction flexible decoupling member 510, X direction outward parallel leaf spring 511, X direction inward parallel leaf spring 512, X direction rigid connecting plate 513, Y direction flexible decoupling Coupling 520, Y-outward parallel leaf spring 521, Y-inward parallel leaf spring 522, Y-direction rigid connecting plate 523, X-direction driver 610, Y-direction driver 620, X-direction grating sensor 710, X-direction glass ruler 711, X-direction The reading head 712, the X-direction positioning rib 713, the Y-direction grating sensor 720, the Y-direction glass ruler 721, the Y-direction reading head 722, and the Y-direction positioning rib 723.

detailed description

Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

The following describes the two-dimensional nano-flexible motion platform 1 according to the embodiment of the present invention with reference to the accompanying drawings.

As shown in Figures 1-7, the two-dimensional nano-flexible motion platform 1 according to the embodiment of the present invention includes a base 100, a terminal platform 200, an X-direction connecting rod 310, a Y-direction connecting rod 320, an X-direction flexible guide 410, Y-direction flexible guide 420, X-direction flexible decoupling member 510, Y-direction flexible decoupling member 520, X-direction driver 610, Y-direction driver 620, X-direction grating sensor 710 and Y-direction grating sensor 720 (X direction and Y direction As shown by the arrows in Figure 1-Figure 4 and Figure 7). What needs to be understood here is that the X direction and the Y direction are only for the convenience of expression, and do not limit the actual installation direction of the two-dimensional nano flexible motion platform 1 .

The terminal platform 200 is located inside the outer edge of the base 100 . The X-direction link 310 is oriented in the X-direction and the Y-direction link 320 is oriented in the Y-direction. The two X-direction flexible guides 410 are respectively connected to two ends of the X-direction connecting rod 310 so that the two X-direction flexible guides 410 move synchronously, and each X-direction flexible guide 410 is connected to the base 100 . The two Y-direction flexible guides 420 are respectively connected to two ends of the Y-direction connecting rod 320 so that the two Y-direction flexible guides 420 move synchronously, and each Y-direction flexible guide 420 is connected to the base 100 . The two X-direction flexible decoupling parts 510 are respectively connected with the two ends of the X-direction connecting rod 310 so that the two X-direction flexible decoupling parts 510 move synchronously. The guide pieces 410 are connected, and the two X-direction flexible decoupling pieces 510 are respectively connected to opposite side walls of the terminal platform 200 . The two Y-direction flexible decoupling parts 520 are respectively connected with the two ends of the Y-direction connecting rod 320 so that the two Y-direction flexible decoupling parts 520 move synchronously. The guide pieces 420 are connected, and the two Y-direction flexible decoupling pieces 520 are respectively connected to opposite side walls of the terminal platform 200 . The X-direction driver 610 is connected to one of the two X-direction flexible guides 410 , and the Y-direction driver 620 is connected to one of the two Y-direction flexible guides 420 . The X-direction grating sensor 710 is detachably connected to the terminal platform 200 and the X-direction flexible guide 410 respectively, and at least a part thereof moves together with the X-direction flexible guide 410 . The Y-direction grating sensor 720 is detachably connected to the terminal platform 200 and the Y-direction flexible guide 420 , and at least a part thereof moves together with the Y-direction flexible guide 420 .

According to the two-dimensional nano flexible motion platform 1 according to the embodiment of the present invention, through the two-dimensional nano flexible motion platform 1 according to the embodiment of the present invention, by setting the X-direction flexible decoupling member 510 and the Y-direction flexible decoupling member 520, the X The elastic deformation of the flexible decoupling member 510 and the Y-direction flexible decoupling member 520 realizes the decoupling of the movement of the terminal platform 200 in two directions, so that the high-precision movement of the terminal platform 200 can be realized.

Moreover, compared with the two-dimensional nano-flexible motion platform in the related art, when the terminal platform is moving, the guiding and decoupling mechanisms on both sides are prone to inconsistent motion, which may easily lead to inconsistent axial forces on the decoupling parts. As a result, parasitic motion occurs on the terminal platform 200 , causing a large error in the displacement of the terminal platform 200 . By setting the X-direction connecting rod 310 and the Y-direction connecting rod 320, when the terminal platform 200 moves along the X-direction, since the X-direction connecting rod 310 connects the two X-direction flexible guides 410 together, the X-direction flexible guides 410 can be restrained. The rotation of 410 greatly improves the precision of the movement of the terminal platform 200 in the X direction. When the terminal platform 200 moves in the Y direction, since the Y-direction connecting rod 320 connects the two Y-direction flexible guides 420 together, the rotation of the Y-direction flexible guides 420 can be restrained, and the terminal platform 200 can greatly improve the stability of the Y-direction movement. precision.

In addition, by setting the X-direction grating sensor 710 and the Y-direction grating sensor 720, the X-direction grating sensor 710 and the Y-direction grating sensor 720 can be used to directly perform large-scale two-dimensional measurement of the terminal platform 200. The flexible motion platform does not need to use other sensors for intermediate compensation, which is convenient for improving the measurement accuracy of the two-dimensional nano flexible motion platform 1 and for improving the working reliability of the platform 1 .

At the same time, the X-direction grating sensor 710 and the Y-direction grating sensor 720 are used to directly measure the terminal platform 200 in two dimensions with a large stroke. Compared with the two-dimensional nano-flexible motion platform in the related art, it is convenient to reduce the cost of the two-dimensional nano-flexible motion platform 1 , it is convenient to improve the installation and use of the platform 1, and it is convenient to improve the user's comfort in use.

Further, since at least a part of the X-direction grating sensor 710 moves together with the X-direction flexible guide 410 , at least a part of the Y-direction grating sensor 720 moves together with the Y-direction flexible guide 420 . In this way, it can be ensured that the parts of the sensor will not be separated or collided, and it is convenient to directly measure the movement of the terminal platform 200 .

Therefore, the two-dimensional nano-flexible motion platform 1 according to the embodiment of the present invention has the advantages of high precision, low cost, and convenient installation and use.

The following describes the two-dimensional nano-flexible motion platform 1 according to a specific embodiment of the present invention with reference to the accompanying drawings.

In some specific embodiments of the present invention, as shown in FIGS. Rod 320, X-direction flexible guide 410, Y-direction flexible guide 420, X-direction flexible decoupling member 510, Y-direction flexible decoupling member 520, X-direction driver 610, Y-direction driver 620, X-direction grating sensor 710 and Y-direction to the grating sensor 720.

Specifically, as shown in FIG. 1 and FIG. 7, the X-direction grating sensor 710 includes an X-direction glass ruler 711 and an X-direction reading head 712, and the X-direction glass ruler 711 is installed on the terminal platform 200 near the X-direction flexible guide 410. On the side edge, the X-direction reading head 712 is installed on the end of the X-direction flexible guide 410 close to the terminal platform 200 . The Y-direction grating sensor 720 includes a Y-direction glass ruler 721 and a Y-direction reading head 722. The Y-direction glass ruler 721 is installed on the terminal platform 200 near the side edge of the Y-direction flexible guide 420, and the Y-direction reading head 722 is installed on the Y-direction. One end of the flexible guide 420 is close to the terminal platform 200 . This facilitates the setting of the X-direction grating sensor 710 and the Y-direction grating sensor 720 , and facilitates two-dimensional measurement of the terminal platform 200 with a large distance.

More specifically, as shown in FIGS. 1 and 7 , the X-direction glass ruler 711 is installed on the upper surface of the terminal platform 200 , and the X-direction reading head 712 is installed on the upper surface of the X-direction flexible guide 410 . The Y-direction glass ruler 721 is installed on the upper surface of the terminal platform 200 , and the Y-direction reading head 722 is installed on the upper surface of the Y-direction flexible guide 420 . In this way, it is convenient for the user to read the data of the X-direction grating sensor 710 and the Y-direction grating sensor 720 , which is convenient for the user to use.

Optionally, as shown in Figure 1, one of the X-direction flexible guide 410 and the X-direction grating sensor 710 is provided with an X-direction positioning rib 713 and the other is provided with an X-direction positioning groove 414, and the X-direction positioning protrusion The rib 713 is detachably fit in the X-direction positioning groove 414 . One of the Y-direction flexible guide 420 and the Y-direction grating sensor 720 is provided with a Y-direction positioning rib 723 and the other is provided with a Y-direction positioning groove 424, and the Y-direction positioning rib 723 is detachably matched to the X-direction positioning Inside the groove 424. In this way, the grating sensor can be positioned by using the positioning rib and the positioning groove, which facilitates the switching of the position of the grating sensor.

Specifically, the measurement scheme proposed by the present invention is as follows: two sets of grating sensors are used to directly realize the motion measurement of the terminal platform 200 . First, install and fix the X-direction glass ruler 711 and the Y-direction glass ruler 721 of the X-direction grating sensor 710 and the Y-direction grating sensor 720 respectively on the terminal platform 200 near the X-direction flexible guide 410 and the Y-direction flexible guide 420 , then install and fix the X-direction reading head 712 and the Y-direction reading head 722 of the X-direction grating sensor 710 and the Y-direction grating sensor 720 respectively on the X-direction flexible guide 410 and the Y-direction flexible guide 420, and carry out the two Close adjustment. By adopting the above-mentioned sensor installation method, when the terminal platform 200 moves in a large stroke, the X-direction reading head 712 and the Y-direction reading head 722 of the X-direction grating sensor 710 and the Y-direction grating sensor 720 follow the X-direction flexible guide 410 and the Y-direction respectively. Moving together to the flexible guide 420 can ensure that the X-direction glass ruler 711, the Y-direction glass ruler 721, the X-direction reading head 712, and the Y-direction reading head 722 of the X-direction grating sensor 710 and the Y-direction grating sensor 720 are in the non-moving direction. There will be no separation or collision, so that the direct motion measurement of the terminal platform 200 can be realized.

Compared with the related art two-dimensional nano-flexible motion platform, the two-dimensional nano-flexible motion platform 1 does not need a capacitive sensor to compensate the motion error between the flexible guide and the terminal platform 200, and converts it into an offset in the measurement direction of the vertical grating sensor. After calculation, when the movement of the terminal platform 200 reaches the maximum stroke, the movement displacement error between the flexible guide and the terminal platform 200 will not exceed 10 microns, which is far smaller than the maximum deviation of the maximum non-moving direction allowed by the grating sensor in use. displacement (200 microns). Therefore, the solution for directly measuring the terminal motion platform proposed by the present invention can ensure that the grating sensor can also perform real-time measurement in the case of large-stroke motion, and solves the problem that the large-stroke motion of the terminal platform cannot be measured in the related art.

According to theoretical analysis, the measurement error of the grating measurement scheme proposed by the present invention only comes from the deviation of the flexible guide in the direction perpendicular to the movement. After calculation, the displacement of the flexible guide in the two-dimensional nano flexible motion platform 1 perpendicular to the motion direction will be less than 0.04% of the motion displacement of the terminal platform 200 in the same direction, far smaller than the motion error between the flexible guide and the terminal platform 200 in the motion direction . By changing some structural dimension parameters of the platform, such as the length and thickness of the short leaf spring, better measurement results can be obtained and the stiffness of the platform can be improved at the same time.

1-7 show the two-dimensional nano flexible motion platform 1 according to the present invention. As shown in Figures 1-4, two X-direction flexible guides 410 are arranged symmetrically in the X direction, two Y-direction flexible guides 420 are symmetrically arranged in the Y direction, and two X-direction flexible decoupling members 510 are arranged in the X direction. The two Y-direction flexible decoupling pieces 520 are arranged symmetrically in the upward direction. In this way, the consistency of each component of the two-dimensional nano-flexible motion platform 1 can be further improved, thereby further facilitating the improvement of the motion precision of the platform 1 .

Specifically, as shown in FIG. 4 , each X-direction flexible guide 410 includes an X-direction inner leaf spring 411, an X-direction outer leaf spring 412 and an X-direction rigid connector 413, and the two X-direction inner leaf springs 411 are connected to the X direction respectively. It is connected to both ends of the connecting rod 310. The X-direction outer leaf spring 412 is located on the outside of the X-direction inner leaf spring 411 and is connected to the base 100. The X-direction inner leaf spring 411 and the X-direction outer leaf spring 412 are rigidly connected in the X direction. Each Y-direction flexible guide member 420 includes a Y-direction inner leaf spring 421, a Y-direction outer leaf spring 422 and a Y-direction rigid connector 432. The two ends are connected. The Y-direction outer leaf spring 422 is located outside the Y-direction inner leaf spring 421 and both are connected to the base 100 . In this way, the flexible connection of the X-direction flexible guide 410 , the Y-direction flexible guide 420 , the base 100 , the X-direction flexible decoupling member 510 and the Y-direction flexible decoupling member 520 can be realized, which is convenient for driving the terminal platform 200 to move precisely.

More specifically, as shown in FIGS. 3 and 4 , the X-inner leaf spring 411 and the Y-inner leaf spring 421 are lower in the vertical direction than the X-outer leaf spring 412 and Y-outer leaf spring 422 . This can facilitate the inner plate spring to avoid the X-direction flexible decoupling member 510 and the Y-direction flexible decoupling member 520, thereby facilitating the setting of the two-dimensional nano-flexible motion platform 1 and reducing the overall thickness of the two-dimensional nano-flexible motion platform 1 .

Optionally, as shown in FIGS. 3 and 4 , the base 100 includes a base plate 110 , four inner connection bosses 120 and four outer connection bosses 130 . Four inner connection bosses 120 are arranged at intervals on the upper surface of the base plate 110, the two ends of each X-direction inner leaf spring 411 are respectively connected with two adjacent inner connection bosses 1120, each Y-direction inner leaf spring 421 The two ends are respectively connected with two adjacent inner connection bosses 120 . The four outer connection bosses 130 are arranged at intervals on the upper surface of the base plate 110 and are located outside the four inner connection bosses 120. The two ends of each Y-direction outer leaf spring 422 are respectively connected with two adjacent outer connecting bosses 130 . This can facilitate the connection of the leaf spring to the base 100 .

Specifically, as shown in FIG. 3 , each X-direction flexible decoupling member 510 includes two X-direction parallel leaf springs 511, two X-direction parallel leaf springs 512, and two X-direction rigid connecting plates 513. The X-outward parallel leaf springs 511 are all connected to the same side edge of the terminal platform 200, and the two X-inward parallel leaf springs 512 are located inside the two X-outward parallel leaf springs 511 and connected to the two X-outward parallel leaf springs 511. Arranged in parallel, the two X-inward parallel leaf springs 512 are connected to the corresponding X-direction flexible guides 410, and the two X-outward parallel leaf springs 511 are respectively connected to the two X-inward parallel plates through two X-direction rigid connecting plates 513. The leaf springs 512 are connected, and each Y-direction flexible decoupling member 520 includes two Y-direction outward parallel leaf springs 521, two Y-direction parallel leaf springs 522 and two Y-direction rigid connecting plates 523, and the two Y-direction outward parallel The leaf springs 521 are all connected to the same side edge of the terminal platform 200, and the two Y-inward parallel leaf springs 522 are located inside the two Y-outward parallel leaf springs 521 and are arranged in parallel with the two Y-outward parallel leaf springs 521. Each Y-inward parallel leaf spring 522 is connected to the corresponding Y-direction flexible guide 420, and the two Y-outward parallel leaf springs 521 are respectively connected to the two Y-inward parallel leaf springs 522 through two Y-direction rigid connecting plates 523. . This can ensure that the X-direction flexible decoupling member 510 and the Y-direction flexible decoupling member 520 have good structural strength and flexibility, and ensure that the X-direction flexible decoupling member 510 and the Y-direction flexible decoupling member 520 have a positive impact on the two-dimensional nano-flexible motion platform 1. motion decoupling effect.

Optionally, the X-direction driver 610 and the Y-direction driver 620 are voice coil motors or piezoelectric ceramics. This can facilitate the precise movement of the driving terminal platform 200 .

Specifically, as shown in FIGS. 1-4 , the X-direction flexible decoupling member 510 , the Y-direction flexible decoupling member 520 , the X-direction outer leaf spring 412 and the Y-direction outer leaf spring 422 have the same height in the vertical direction. This can further facilitate the precise movement of the driving terminal platform 200 .

More specifically, as shown in FIG. 4 , the terminal platform 200, the X-direction flexible decoupling member 510, the Y-direction flexible decoupling member 520, the X-direction outer leaf spring 412 and the Y-direction outer leaf spring 422 in the vertical direction same height. This can further facilitate the precise movement of the driving terminal platform 200 .

Optionally, as shown in FIG. 4 , the X-direction connecting rod 310 , the Y-direction connecting rod 320 , the X-direction inner leaf spring 411 and the Y-direction inner leaf spring 421 have the same height in the vertical direction. This can facilitate the X-direction connecting rod 310 and the Y-direction connecting rod 320 to avoid the terminal platform 200, thereby facilitating the installation of the two-dimensional nano-flexible motion platform 1 .

The grating measurement method of the two-dimensional nano flexible motion platform 1 according to the embodiment of the present invention is described below. The grating measurement method of the two-dimensional nano-flexible motion platform 1 according to the embodiment of the present invention comprises the following steps:

Use the X-direction grating sensor 710 to measure the displacement of the terminal platform 200 in the X direction, and use the Y-direction grating sensor 720 to measure the displacement of the terminal platform 200 in the Y direction;

According to the detection values of the X-direction grating sensor 710 and the Y-direction grating sensor 720 , the plane displacement of the terminal platform 200 is calculated.

The grating measurement method of the two-dimensional nano-flexible motion platform 1 according to the embodiment of the present invention has the advantages of high precision, low cost, and convenient use.

Other configurations and operations of the two-dimensional nano-flexible motion platform 1 according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", The orientation or positional relationship indicated by "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or element Must be in a particular orientation, be constructed in a particular orientation, and operate in a particular orientation, and therefore should not be construed as limiting the invention. In addition, the features defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

In the description of this specification, reference to the terms "one embodiment," "some embodiments," "exemplary embodiments," "example," "specific examples," or "some examples" is intended to mean that the implementation A specific feature, structure, material, or characteristic described by an embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the invention is defined by the claims and their equivalents.

Claims (10)

1. A two-dimensional nano flexible motion platform, characterized in that, comprising: base; a terminal platform located inboard of the outer edge of the base; an X-direction connecting rod and a Y-direction connecting rod, the X-direction connecting rod being oriented along the X-direction and the Y-direction connecting rod being oriented along the Y-direction; Two X-direction flexible guides, the two X-direction flexible guides are respectively connected to the two ends of the X-direction connecting rod so that the two X-direction flexible guides move synchronously, and each of the X-direction flexible guides the guide is connected to the base; Two Y-direction flexible guides, the two Y-direction flexible guides are respectively connected to the two ends of the Y-direction connecting rod so that the two Y-direction flexible guides move synchronously, each of the Y-direction flexible guides the guide is connected to the base; Two X-direction flexible decoupling parts, the two X-direction flexible decoupling parts are respectively connected to the two ends of the X-direction connecting rod so that the two X-direction flexible decoupling parts move synchronously, and the two X-direction flexible decoupling parts The X-direction flexible decoupling parts are respectively connected to the two X-direction flexible guide parts, and the two X-direction flexible decoupling parts are respectively connected to the opposite side walls of the terminal platform; Two Y-direction flexible decoupling parts, the two Y-direction flexible decoupling parts are respectively connected to the two ends of the Y-direction connecting rod so that the two Y-direction flexible decoupling parts move synchronously, and the two Y-direction flexible decoupling parts The Y-direction flexible decoupling parts are respectively connected to the two Y-direction flexible guide parts, and the two Y-direction flexible decoupling parts are respectively connected to the opposite side walls of the terminal platform; An X-direction driver and a Y-direction driver, the X-direction driver is connected to one of the two X-direction flexible guides, and the Y-direction driver is connected to one of the two Y-direction flexible guides; An X-direction grating sensor, the X-direction grating sensor is detachably connected to the terminal platform and the X-direction flexible guide, and at least a part moves together with the X-direction flexible guide; A Y-direction grating sensor, the Y-direction grating sensor is detachably connected to the terminal platform and the Y-direction flexible guide, and at least a part moves together with the Y-direction flexible guide. 2. The two-dimensional nano flexible motion platform according to claim 1, wherein the X-direction grating sensor comprises an X-direction glass ruler and an X-direction reading head, and the X-direction glass ruler is installed on the terminal platform Near the edge of one side of the X-direction flexible guide, the X-direction reading head is installed on the X-direction flexible guide near the end of the terminal platform; the Y-direction grating sensor includes a Y-direction glass ruler and a Y-direction To the reading head, the Y-direction glass ruler is installed on the terminal platform close to one side edge of the Y-direction flexible guide, and the Y-direction read head is installed on the Y-direction flexible guide near the terminal one end of the platform. 3. The two-dimensional nano-flexible motion platform according to claim 2, wherein the X-direction glass ruler is installed on the upper surface of the terminal platform, and the X-direction reading head is installed on the X-direction flexible guide The upper surface of the piece; the Y-direction glass ruler is installed on the upper surface of the terminal platform, and the Y-direction reading head is installed on the upper surface of the Y-direction flexible guide. 4. The two-dimensional nano-flexible motion platform according to claim 1, wherein one of the X-flexible guide and the X-ray grating sensor is provided with an X-direction positioning rib and the other is provided with There is an X-direction positioning groove, and the X-direction positioning rib is detachably fitted in the X-direction positioning groove; one of the Y-direction flexible guide and the Y-direction grating sensor is provided with a Y-direction positioning protrusion rib and the other is provided with a Y-direction positioning groove, and the Y-direction positioning convex rib is detachably fitted in the X-direction positioning groove. 5. two-dimensional nano-flexible motion platform according to claim 1, is characterized in that, two described X are symmetrically arranged to X upwards to flexible guide, and two described Y are symmetrically arranged to Y upward to flexible guide, The two X-direction flexible decoupling parts are arranged symmetrically in the X direction, and the two Y-direction flexible decoupling parts are arranged symmetrically in the Y direction. 6. two-dimensional nano-flexible motion platform according to claim 1, is characterized in that, each described X to flexible guide comprises X to inner leaf spring, X to outer leaf spring and X to rigid connector, two The X-direction inner leaf spring is respectively connected to both ends of the X-direction connecting rod, the X-direction outer leaf spring is located outside the X-direction inner leaf spring and is connected to the base, and the X-direction The inner leaf spring and the X-direction outer leaf spring are connected through the X-direction rigid connector, each of the Y-direction flexible guides includes a Y-direction inner leaf spring, a Y-direction outer leaf spring and a Y-direction rigid connector. The two Y-inward leaf springs are respectively connected to both ends of the Y-direction connecting rod, and the Y-outward leaf springs are located on the outside of the Y-inward leaf springs and are connected to the base. The inboard leaf spring and the Y-outboard leaf spring are connected through the Y-direction rigid connecting piece. 7. two-dimensional nano-flexible motion platform according to claim 6, is characterized in that, described X is to the height in vertical direction of inner leaf spring and described Y to inner leaf spring lower than described X to outer plate spring and the Y-outboard leaf spring. 8. two-dimensional nano flexible motion platform according to claim 6, is characterized in that, described base comprises: Substrate; Four internal connection bosses, the four inner connection bosses are arranged at intervals on the upper surface of the base plate, and the two ends of each X-direction inner leaf spring are connected to the adjacent two inner connection bosses respectively. connected, the two ends of each said Y-direction inner leaf spring are respectively connected with two adjacent inner connecting bosses; Four outer connection bosses, the four outer connection bosses are arranged at intervals on the upper surface of the base plate and located outside the four inner connection bosses, and the two ends of each of the X-direction outer leaf springs are respectively It is connected with two adjacent outer connecting bosses, and the two ends of each Y-direction outer leaf spring are respectively connected with two adjacent outer connecting bosses. 9. The two-dimensional nano-flexible motion platform according to claim 1, wherein each said X-direction flexible decoupling member comprises two X-outward parallel leaf springs, two X-inward parallel leaf springs and two Two X-direction rigid connecting plates, the two X-outward parallel leaf springs are connected to the same side edge of the terminal platform, and the two X-inward parallel leaf springs are located between the two X-outward parallel leaf springs and parallel to the two X-outward parallel leaf springs, the two X-inward parallel leaf springs are connected to the corresponding X-direction flexible guides, and the two X-outward parallel leaf springs The two X-direction rigid connecting plates are respectively connected to the two X-direction parallel leaf springs, and each Y-direction flexible decoupling member includes two Y-direction outward parallel leaf springs, two Y-direction parallel leaf springs, and two Y-direction parallel leaf springs. A leaf spring and two Y-direction rigid connecting plates, the two Y-direction parallel leaf springs are connected to the same side edge of the terminal platform, and the two Y-inward parallel leaf springs are located between the two Y-direction The inner side of the outer parallel leaf spring is arranged parallel to the two Y-outward parallel leaf springs, the two Y-inward parallel leaf springs are connected to the corresponding Y-direction flexible guides, and the two Y-direction The outer parallel leaf springs are respectively connected to the two Y-direction inward parallel leaf springs through the two Y-direction rigid connecting plates. 10. A grating measurement method of the two-dimensional nano-flexible motion platform according to any one of claims 1-9, characterized in that, comprising the following steps: Using the X-direction grating sensor to measure the displacement of the terminal platform in the X direction, and using the Y-direction grating sensor to measure the displacement of the terminal platform in the Y direction; The plane displacement of the terminal platform is calculated according to the detection values of the X-direction grating sensor and the Y-direction grating sensor.