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CN208779995U - a soaking plate - Google Patents

a soaking plate Download PDF

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Publication number
CN208779995U
CN208779995U CN201820975529.9U CN201820975529U CN208779995U CN 208779995 U CN208779995 U CN 208779995U CN 201820975529 U CN201820975529 U CN 201820975529U CN 208779995 U CN208779995 U CN 208779995U
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CN
China
Prior art keywords
plate
conduit
evaporation
working medium
evaporation plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820975529.9U
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Chinese (zh)
Inventor
赵雨亭
黄浩东
田中轩
马瑞鑫
王长宏
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Guangdong University of Technology
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Guangdong University of Technology
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Priority to CN201820975529.9U priority Critical patent/CN208779995U/en
Application granted granted Critical
Publication of CN208779995U publication Critical patent/CN208779995U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

本实用新型公开一种均热板,包括蒸发板、冷凝板和连接板,蒸发板与冷凝板正对设置,连接板用于将蒸发板与冷凝板连接以形成密闭腔室,且密闭腔室内填充有工质,蒸发板上设置有用于输送工质的槽道,槽道沿蒸发板周向分布,且槽道由蒸发板的中心向边缘发散。本实用新型提供的均热板,蒸发板和冷凝板设置仿生叶脉多边形微通道结构,在蒸发板槽道壁面和支撑柱周围覆盖亲液性能吸液芯,使得壁面具有亲液性能,提高槽道吸液芯的毛细性能,加快槽道吸液芯的吸液速度;在冷凝板槽道壁面和支撑柱周围覆盖疏液性能材质,从而实现由冷凝板边缘向中央渐进疏液,加快工质在主槽道的向下循环速度,从而缩短工质回流路程,加快工质回流速度,提高散热效益。

The utility model discloses a soaking plate, comprising an evaporation plate, a condensation plate and a connecting plate. The evaporation plate and the condensing plate are arranged facing each other, and the connecting plate is used for connecting the evaporation plate and the condensation plate to form a closed chamber, and the closed chamber is Filled with working medium, the evaporation plate is provided with channels for conveying the working medium, the channels are distributed along the circumference of the evaporation plate, and the channels diverge from the center of the evaporation plate to the edge. In the soaking plate, the evaporation plate and the condensation plate provided by the utility model, the bionic leaf vein polygonal micro-channel structure is arranged, and the lyophilic performance liquid absorbing core is covered on the channel wall of the evaporation plate and around the support column, so that the wall surface has the lyophilic performance, and the channel is improved. The capillary performance of the liquid-absorbing wick accelerates the liquid-absorbing speed of the channel liquid-absorbing wick; the liquid-repellent material is covered on the channel wall of the condensation plate and around the support column, so as to realize the gradual liquid-repellent from the edge of the condensation plate to the center, and speed up the working fluid in the cooling plate. The downward circulation speed of the main channel can shorten the return path of the working medium, speed up the return speed of the working medium, and improve the heat dissipation efficiency.

Description

A kind of soaking plate
Technical field
The utility model relates to heat dissipation from microelectronic devices technical field, in particular to a kind of soaking plate.
Background technique
With the rapid development of Electronic Encapsulating Technology, the integrated level and performance of electronic chip are continuously improved, and lead to chip Power constantly continues to increase.The mean heat flux on current chip surface has been over 100W/cm2, and have and continue growing Trend.Meanwhile " hot spot " problem that the generally existing amount of localized heat of chip after the completion of chip package is high, it will lead to chip part temperature Degree sharply increases, and influences chip stability.
It is increased for temperature in the solution for leading to chip failure, both comprising conventional chillings sides such as air-cooled, liquid cooling, heat pipes Formula also has the heat sinkings modes such as semiconductor cooling, the heat dissipation of micro jet flow technology, liquid metal heat radiation, carbon fibre material. Traditional heat sink conception is not able to satisfy due to that by structure, space, cost, can safeguard, the restriction of many factors such as noise The requirement of following high heat flux density electronic element radiating, and novel heat dissipation technology cannot still obtain due to technology is immature etc. To large-scale application.
Flat-plate heat pipe is a kind of heat sinking medium designed according to heat pipe working principle, primary structure have shell, Liquid-sucking core, working medium etc., its working principle is that when heat passes through the evaporating area of flat-plate heat pipe by heat source, in the cavity of rough vacuum It is interior, worker quality liquid ebullition, gasification, under the action of pressure difference, gas flow condensing zone, condensation heat to the cold, and in capillary force It is back to evaporating area along liquid-sucking core under effect, and the heat of cryosurface is taken away by other radiating modes outside flat-plate heat pipe.Although Working principle is similar, but compared with the heat transfer type of heat pipe one-dimensional linear, the heat transfer type of flat-plate heat pipe is two-dimensional surface upload Heat, therefore there is better heat transfer property and uniform temperature.However existing flat-plate heat pipe working medium reflux relies primarily on liquid-sucking core and mentions The capillary force of confession, the capillary limitation and the boiling limit of heat exchange are smaller, additionally, due to the presence of liquid-sucking core, condense close to cryosurface Liquid working substance afterwards cannot flow back at once and on the liquid-sucking core that is full of near cryosurface, so that heat transfer resistance increases, furthermore burn Knot liquid sucting core structure itself needs to consume mass energy, and sintering quality is difficult to control.
Therefore, how a kind of quickening radiator liquid working medium back-flow velocity is provided, the heat dissipation of electronic chip of heat exchange efficiency is improved Device is those skilled in the art's technical problem urgently to be resolved.
Utility model content
The purpose of the utility model is to provide a kind of soaking plates, can be improved radiator liquid working medium back-flow velocity, for fever It measures high integrated chip and relatively reliable sinking path and higher radiating efficiency is provided.
In order to solve the above technical problems, the utility model provides a kind of soaking plate, including evaporation plate, cold plate and connection Plate, the evaporation plate and the cold plate face are arranged, and the connecting plate is for the evaporation plate to be connect with the cold plate To form airtight chamber, and it is filled with working medium in the airtight chamber, is provided in the evaporation plate for conveying the working medium Conduit, the conduit is circumferentially distributed along the evaporation plate, and the conduit from the center of the evaporation plate to edge dissipate.
Preferably, the cavity of the evaporation plate being provided centrally with for accommodating the working medium.
Preferably, the condensation part for condensing the working medium after phase transformation, and the condensation are provided on the cold plate Portion and the cavity face are arranged.
Preferably, the conduit includes transport conduit and capillary channel, and the head end and the cavity of the transport conduit connect Logical, the end of the transport conduit is connected to the capillary channel.
Preferably, the conduit further includes the connecting channel for connecting the adjacent capillary channel.
Preferably, be additionally provided with conveying conduit and time capillary channel on the cold plate, the head end of the conveying conduit with The end of the condensation part connection, the conveying conduit is connected to the secondary capillary channel.
It preferably, further include the composite liquid sucking core for being arranged on the transport conduit inner wall and having lyophily performance.
Preferably, the thickness of the composite liquid sucking core is successively decreased from the center of the evaporation plate to edge.
It preferably, further include the composite hydrophobic layer for being arranged on the conveying conduit inner wall and having lyophoby performance.
Preferably, the support column for the center drainage to the evaporation plate is additionally provided in the evaporation plate.
Soaking plate provided by the utility model mainly includes evaporation plate, cold plate and connecting plate, evaporation plate and cold plate Face setting, connecting plate are filled with working medium for connecting evaporation plate with cold plate to form airtight chamber in airtight chamber, The conduit for transferring working medium is provided in evaporation plate, conduit is circumferentially distributed along evaporation plate, and conduit from the center of evaporation plate to Edge diverging.Soaking plate provided by the utility model, evaporation plate are arranged bionical vein structure polygon microchannel structure, are evaporating The copper particle deposition that board slot road wall surface and the electrochemical displacement with lyophily performance of support column surrounding covering nanostructure are formed Layer constitutes composite liquid sucking core, and deposit thickness successively decreases by conduit series increase, due to evaporation plate conduit wall surface sedimentary Porous microstructure improves the capillary performance of groove liquid sucking core, accelerates the imbibition of groove liquid sucking core so that wall surface has lyophily performance Speed, and then adopting heat pipes for heat transfer performance is promoted, improve the smooth groove liquid sucking core capillary pressure of tradition, while retaining conduit partial straight lines The excellent permeance property of structure accelerates working medium circulation speed;Nano junction is covered in cold plate conduit wall surface and support column surrounding The nickel coating with lyophoby performance of structure is successively decreased by cold plate center as series increases nickel plating layer thick, step by step to realize From cold plate edge to the progressive lyophoby in center, strengthen the dropwise condensation of vaporization working medium using lyophobic surface, reduces heat transfer resistance, add Circulation rate of the fast working medium in main channel.On the whole, working medium is evaporated to cold plate projection section, due to cold plate support column week It encloses to the progressive lyophoby of central condensing zone, accelerates projection section steam and flow to support column, due to the effect of gravity and capillary attraction, make It obtains working medium liquefaction and evaporation plate is flowed to by support column, since evaporation plate support column surrounding is to the progressive lyophily of boiling section, work can be accelerated Matter flows to boiling section by boss microchannel, so as to shorten boss working medium reflux distance, accelerates working medium back-flow velocity, improves heat dissipation Benefit.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is a kind of integrally-built explosive view of specific embodiment provided by the utility model;
Fig. 2 is evaporation plate structural schematic diagram shown in FIG. 1;
Fig. 3 is cold plate structural schematic diagram shown in FIG. 1;
Fig. 4 is the distribution schematic diagram of composite liquid sucking core shown in Fig. 2;
Fig. 5 is the distribution schematic diagram of composite hydrophobic layer shown in Fig. 3.
Wherein, in Fig. 1-Fig. 5:
Evaporation plate -1, cold plate -2, connecting plate -3, composite liquid sucking core -4, composite hydrophobic layer -5, cavity -11, fortune Defeated conduit -12, capillary channel -13, connecting channel -14, support column -15, condensation part -21 convey conduit -22, secondary hair Stria road -23 are connected to conduit -24.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1, Fig. 2 and Fig. 3 are please referred to, Fig. 1 is a kind of overall structure of specific embodiment provided by the utility model Explosive view;Fig. 2 is evaporation plate structural schematic diagram shown in FIG. 1;Fig. 3 is cold plate structural schematic diagram shown in FIG. 1.
In a kind of specific embodiment provided by the utility model, soaking plate mainly includes evaporation plate 1, cold plate 2 With connecting plate 3, evaporation plate 1 and 2 face of cold plate are arranged, and connecting plate 3 is used to for evaporation plate 1 connecting with cold plate 2 close to be formed Closed chamber room, and working medium is filled in airtight chamber, the conduit for transferring working medium is provided in evaporation plate 1, conduit is along evaporation plate 1 It is circumferentially distributed, and conduit is dissipated from the center of evaporation plate 1 to edge.
Wherein, in the present embodiment, evaporation plate 1, cold plate 2 and connecting plate 3 are using the copper sheet with a thickness of 0.4mm~1mm Or aluminium sheet, it can also be other materials, be subject to and be able to carry out stable carry out heat radiation working medium circulation, do not do specific limit herein It is fixed;Evaporation plate 1, cold plate 2 can be circle, can also be other shapes, and concrete shape is determined according to user's technique, such as Square, such as rectangle, are not specifically limited herein;Evaporation plate 1 is connect to form airtight chamber by connecting plate 3 with cold plate 2, close It is filled with heat radiation working medium, such as pure water, such as methanol, such as ethyl alcohol, such as acetone in closed chamber room, certainly can also be other Heat radiation working medium, is subject to the cooling requirements that can satisfy electronic chip, is not specifically limited herein;It is arranged in evaporation plate 1 useful In the conduit of transferring working medium, and conduit is circumferentially distributed along evaporation plate 1, is set with the center of evaporation plate 1 to the diverging of 1 edge of evaporation plate It sets.
Specifically, heat radiation working medium is evaporated to 2 boss of cold plate through evaporation plate 1 in actual heat radiation working medium reflux course Accelerate projection section steam since 2 support column of cold plate, 15 surrounding is to the progressive lyophoby of central condensing zone and flow to support column in part 15, due to the effect of gravity and composite liquid sucking core capillary attraction, so that working medium liquefaction flows to evaporation plate 1 by support column 15, by In 1 support column of evaporation plate, 15 surrounding to the progressive lyophily of boiling section, working medium can be accelerated by boss microchannel and flow to boiling section, thus Shorten boss working medium reflux distance, accelerates working medium back-flow velocity, improve heat sinking benefit.This flat-plate heat pipe passes through to evaporation plate 1, cold Solidifying plate 2,15 surrounding boss of support column carry out super close, lyophobic surface and are modified, and enhanced water evaporation condensation rate improves evaporating area and condensation The heat exchange property in area guides and accelerates working medium back-flow velocity to improve overall heat exchange ability, optimizes heat dissipation effect.
It can accelerate heat radiation working medium back-flow velocity to optimize soaking plate in above-described embodiment, improve the excellent of heat exchange efficiency Point is provided with the condensation part 21 for condensing the working medium after phase transformation on cold plate 2, and condensation part 21 and 11 face of cavity are arranged, Condensation part 21 is connect with support column 15, and support column 15 extends to cavity 11.Condensation part 21 and 11 face of cavity are arranged, it is ensured that The liquid that condensation part 21 condenses is arrived at right above cavity 11 with less path, when shortening heat radiation working medium reflux by support column 15 Between, improve radiating efficiency.
Further, conduit includes transport conduit 12 and capillary channel 13, and the head end of transport conduit 12 is connected to cavity 11, The end of transport conduit 12 is connected to capillary channel 13.Transport the tool of the coated with nanometre structure of conduit 12 and capillary channel 13 The copper particle deposition layer for having the electrochemical displacement of lyophily performance to be formed, in evaporation plate 1, thickness presses conduit to this sedimentary from inside to outside Series increase is successively decreased, and ensure that evaporation plate 1 can be such that liquid flows at faster speed to support column 15, accelerates heat dissipation work The back-flow velocity of matter improves radiating efficiency.
Further, conduit further includes the connecting channel 14 for connecting adjacent capillary channel 13.With above-mentioned transport conduit 12 act on simultaneously, and transport conduit 12, capillary channel 13 and connecting channel 14 form the polygon microchannel of bionical vein structure Structure accelerates heat radiation working medium back-flow velocity, improves radiating efficiency.
Further, conveying conduit 22 and time capillary channel 23 are additionally provided on cold plate 2, convey the head end of conduit 22 with Condensation part 21 is connected to, and the end and time capillary channel 23 for conveying conduit 22 be connected tos, conveying conduit 22 and secondary capillary channel 23 and Connection conduit 24 forms the polygon microchannel structure of bionical vein structure, accelerates heat radiation working medium back-flow velocity, improves heat dissipation effect Rate.
Fig. 4 and Fig. 5 are please referred to, Fig. 4 is the distribution schematic diagram of composite liquid sucking core shown in Fig. 2;Fig. 5 is shown in Fig. 3 multiple Close the distribution schematic diagram of hydrophobic layer.
It should be noted that the electrochemical displacement with lyophily performance of 1 coated with nanometre structure of evaporation plate was formed Copper particle deposition layer constitutes composite liquid sucking core 4, the composite hydrophobic layer with lyophoby performance of 2 coated with nanometre structure of cold plate 5, composite hydrophobic layer 5 is preferably nickel coating.
Further, transport on 12 inner wall of conduit and have the composite liquid sucking core 4 of lyophily performance;The thickness of composite liquid sucking core 4 Degree is successively decreased from the center of evaporation plate 1 to edge;Convey on 22 inner wall of conduit and have the composite hydrophobic layer 5 of lyophoby performance.Lyophily The design of the composite hydrophobic layer 5 of the composite liquid sucking core 4 and lyophoby performance of performance, can make the liquid evaporated through evaporation plate 1 exist After cold plate 2 condenses, support column 15 is flowed back at faster speed, and similarly, support column 15 is to be become from lyophoby from top to bottom Lyophily, it is ensured that condensed liquid quickly flows back, and the composite liquid sucking core 4 in evaporation plate 1 has lyophily performance, with more Big suction sucks back the coolant liquid of top, is drained in cavity 11, accelerates radiating efficiency.
Further, the cavity 11 of evaporation plate 1 being provided centrally with for accommodating working medium.The limited choosing of the liquid filled ratio of cavity 11 Be selected as 35%~45%, be with 40% it is best, have enough working medium be evaporated, it may have enough spaces are evaporated, It ensure that heat dissipation effect;It should be noted that the indoor vacuum degree of chamber is 12.33kPa, the speed of evaporation is improved, guarantees working medium Rapid evaporation condensation, carries out heat exchange cycle.
In conclusion soaking plate provided by the present embodiment mainly includes evaporation plate, cold plate and connecting plate, evaporation plate with The setting of cold plate face, connecting plate are filled for connecting evaporation plate with cold plate to form airtight chamber, and in airtight chamber There is working medium, the conduit for transferring working medium is provided in evaporation plate, conduit is circumferentially distributed along evaporation plate, and conduit is by evaporation plate Center is dissipated to edge.Bionical vein structure polygon microchannel structure is arranged in soaking plate provided by the utility model, evaporation plate, In the copper that the electrochemical displacement with lyophily performance of evaporation plate conduit wall surface and support column surrounding covering nanostructure is formed Grain sedimentary constitutes composite liquid sucking core, and deposit thickness successively decreases by conduit series increase, since evaporation plate conduit wall surface is heavy The porous microstructure of lamination improves the capillary performance of groove liquid sucking core so that wall surface has lyophily performance, accelerates groove liquid sucking core Rate of liquid aspiration, and then promote adopting heat pipes for heat transfer performance, improve the smooth groove liquid sucking core capillary pressure of tradition, while retaining conduit portion The permeance property for dividing linear structure excellent accelerates working medium circulation speed;It is covered in cold plate conduit wall surface and support column surrounding The nickel coating with lyophoby performance of nanostructure is successively decreased by cold plate center as series increases nickel plating layer thick step by step, from And realize from cold plate edge to the progressive lyophoby in center, strengthen the dropwise condensation of vaporization working medium using lyophobic surface, reduces heat transfer Thermal resistance accelerates working medium in the circulation rate of main channel.On the whole, working medium is evaporated to cold plate projection section, due to cold plate Support column surrounding accelerates projection section steam and flows to support column, due to gravity and capillary attraction to the progressive lyophoby of central condensing zone Effect so that working medium liquefaction by support column flows to evaporation plate, since evaporation plate support column surrounding is to the progressive lyophily of boiling section, It can accelerate working medium and boiling section is flowed to by boss microchannel, so as to shorten boss working medium reflux distance, accelerate working medium back-flow velocity, Improve heat sinking benefit.
The foregoing description of the disclosed embodiments can be realized professional and technical personnel in the field or using originally practical new Type.Various modifications to these embodiments will be readily apparent to those skilled in the art, and determine herein The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause This, the present invention will not be limited to the embodiments shown herein, and is to fit to and principles disclosed herein The widest scope consistent with features of novelty.

Claims (10)

1. a kind of soaking plate, which is characterized in that including evaporation plate (1), cold plate (2) and connecting plate (3), the evaporation plate (1) Be arranged with the cold plate (2) face, the connecting plate (3) be used to for the evaporation plate (1) connecting with the cold plate (2) with Airtight chamber is formed, and is filled with working medium in the airtight chamber, is provided on the evaporation plate (1) for conveying the working medium Conduit, the conduit is circumferentially distributed along the evaporation plate (1), and the conduit is from the center of the evaporation plate (1) to edge Diverging.
2. soaking plate according to claim 1, which is characterized in that evaporation plate (1) is provided centrally with for accommodating The cavity (11) of the working medium.
3. soaking plate according to claim 2, which is characterized in that be provided on the cold plate (2) for condensing phase transformation The condensation part (21) of the working medium afterwards, and the condensation part (21) and the cavity (11) face are arranged.
4. soaking plate according to claim 3, which is characterized in that the conduit includes transport conduit (12) and capillary channel (13), the head end of transport conduit (12) is connected to the cavity (11), the end of transport conduit (12) and the hair Stria road (13) connection.
5. soaking plate according to claim 4, which is characterized in that the conduit further includes for connecting the adjacent capillary The connecting channel (14) of conduit (13).
6. soaking plate according to claim 4, which is characterized in that be additionally provided with conveying conduit on the cold plate (2) (22) it is connected to time capillary channel (23), the head end of conveying conduit (22) with the condensation part (21), the conveying conduit (22) end is connected to the secondary capillary channel (23).
7. soaking plate according to claim 6, which is characterized in that further include being arranged on transport conduit (12) inner wall And the composite liquid sucking core (4) with lyophily performance.
8. soaking plate according to claim 7, which is characterized in that the thickness of the composite liquid sucking core (4) is by the evaporation Successively decrease to edge at the center of plate (1).
9. soaking plate according to claim 8, which is characterized in that further include being arranged on conveying conduit (22) inner wall And the composite hydrophobic layer (5) with lyophoby performance.
10. soaking plate described in -9 any one according to claim 1, which is characterized in that be additionally provided on the evaporation plate (1) Support column (15) for from the center drainage to the evaporation plate (1).
CN201820975529.9U 2018-06-22 2018-06-22 a soaking plate Expired - Fee Related CN208779995U (en)

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Application Number Priority Date Filing Date Title
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108444324A (en) * 2018-06-22 2018-08-24 广东工业大学 A kind of soaking plate
CN110740614A (en) * 2019-10-14 2020-01-31 Oppo广东移动通信有限公司 Vapor chamber and preparation method thereof and electronic equipment
TWI699508B (en) * 2019-06-11 2020-07-21 大陸商深圳興奇宏科技有限公司 Flow path type two-phase flow radiator
CN111486734A (en) * 2020-04-01 2020-08-04 浙江理工大学 Vapor chamber and manufacturing method thereof
CN111578756A (en) * 2020-04-02 2020-08-25 南方科技大学 Gradient wettability loop heat pipe
WO2023035294A1 (en) * 2021-09-13 2023-03-16 江苏大学 Bionic sweat gland and bionic skin
CN115823917A (en) * 2022-11-21 2023-03-21 哈尔滨工业大学 A Vapor Chamber Visualization Device with Coexistence of Evaporation and Condensation

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108444324A (en) * 2018-06-22 2018-08-24 广东工业大学 A kind of soaking plate
CN108444324B (en) * 2018-06-22 2024-06-11 广东工业大学 Soaking plate
TWI699508B (en) * 2019-06-11 2020-07-21 大陸商深圳興奇宏科技有限公司 Flow path type two-phase flow radiator
CN110740614A (en) * 2019-10-14 2020-01-31 Oppo广东移动通信有限公司 Vapor chamber and preparation method thereof and electronic equipment
CN110740614B (en) * 2019-10-14 2020-07-07 Oppo广东移动通信有限公司 Vapor chamber and preparation method thereof and electronic equipment
CN111486734B (en) * 2020-04-01 2021-03-23 浙江理工大学 Manufacturing method of vapor chamber
CN111486734A (en) * 2020-04-01 2020-08-04 浙江理工大学 Vapor chamber and manufacturing method thereof
CN111578756A (en) * 2020-04-02 2020-08-25 南方科技大学 Gradient wettability loop heat pipe
WO2023035294A1 (en) * 2021-09-13 2023-03-16 江苏大学 Bionic sweat gland and bionic skin
GB2615655A (en) * 2021-09-13 2023-08-16 Univ Jiangsu Bionic sweat gland and bionic skin
US12090648B2 (en) 2021-09-13 2024-09-17 Jiangsu University Bionic sweat gland and bionic skin
CN115823917A (en) * 2022-11-21 2023-03-21 哈尔滨工业大学 A Vapor Chamber Visualization Device with Coexistence of Evaporation and Condensation
CN115823917B (en) * 2022-11-21 2025-06-13 哈尔滨工业大学 A steam chamber visualization device with coexistence of evaporation and condensation

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