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CN208521025U - A kind of low infrared transmittivity cutoff filter - Google Patents

A kind of low infrared transmittivity cutoff filter Download PDF

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Publication number
CN208521025U
CN208521025U CN201821230580.3U CN201821230580U CN208521025U CN 208521025 U CN208521025 U CN 208521025U CN 201821230580 U CN201821230580 U CN 201821230580U CN 208521025 U CN208521025 U CN 208521025U
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China
Prior art keywords
low
coating
infrared
filter
infrared cut
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CN201821230580.3U
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Chinese (zh)
Inventor
奂微微
冯海亮
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Hubei Five Party Au Optronics Co
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Hubei Five Party Au Optronics Co
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Abstract

本实用新型公开的属于红外截止滤光片技术领域,具体为一种低红外透过率红外截止滤光片,包括基材,所述基材的上表面通过电子束蒸镀镀有氟化镁薄膜层,所述氟化镁薄膜层的上表面通过电子束蒸镀交替镀有高折射材料镀层和低折射材料镀层,该低红外透过率红外截止滤光片的制备方法的具体制备步骤如下:S1:基材表面镀氟化镁薄膜层,S2:高、低折射率材料交替镀膜,本方案重新设计红外截止滤光片的镀膜膜系,优化镀膜工艺,降低红外截止滤光片在930‑950nm波段的透过率,达到与生物识别功能产品搭配使用。

The utility model discloses and belongs to the technical field of infrared cut-off filters, in particular to a low-infrared transmittance infrared cut-off filter, comprising a base material, the upper surface of which is deposited with magnesium fluoride by electron beam evaporation The thin film layer, the upper surface of the magnesium fluoride thin film layer is alternately plated with a high-refractive material coating and a low-refractive material coating by electron beam evaporation, and the specific preparation steps of the preparation method of the low-infrared transmittance infrared cut-off filter are as follows : S1: Magnesium fluoride thin film coating on the surface of the substrate, S2: Alternate coating of high and low refractive index materials, this scheme redesigns the coating film system of the infrared cut filter, optimizes the coating process, and reduces the infrared cut filter at 930 ‑950nm transmittance, which can be used with biometric products.

Description

A kind of low infrared transmittivity cutoff filter
Technical field
The utility model relates to cutoff filter technical field, specially a kind of low infrared transmittivity infrared cutoff filter Mating plate.
Background technique
The transmitance of infrared light district is to measure a weight of mobile phone camera module group cutoff filter optical quality Index is wanted, is especially proposed more with transmitance of the cutoff filter of bio-identification function being used cooperatively to infrared light district High requirement.In the 930-950nm wave band that bio-identification optical filter generallys use, at present in industry cutoff filter can The transmitance of light-exposed wave band requires generally in Tavg≤0.5%;Tmax≤1%, and the practical transmitance of product is general in industry In Tavg≤0.03%, Tmax≤0.05%.Due to the use of bio-identification infrared band, this transmitance cannot Meet the requirement of camera imaging.
Utility model content
The purpose of this utility model is to provide a kind of low infrared transmittivity cutoff filters, to solve above-mentioned background In the current industry proposed in technology cutoff filter visible light wave range transmitance require generally Tavg≤ 0.5%;Tmax≤1%, and the practical transmitance of product is generally in Tavg≤0.03%, Tmax≤0.05% in industry.Due to The problem of use of bio-identification infrared band, this transmitance is no longer satisfied the requirement of camera imaging.
To achieve the above object, the utility model provides the following technical solutions: a kind of low infrared transmittivity infrared cutoff filter The upper surface of mating plate, including substrate, the substrate is coated with magnesium fluoride film layer, the magnesium fluoride film layer by electron beam evaporation plating Upper surface high-refraction material coating and low refractive material coating are alternately coated with by electron beam evaporation plating.
Preferably, the substrate is smalt substrate.
Preferably, the high-refraction material coating and low refractive material coating are respectively silica coating and five oxidations three Titanium coating.
Preferably, the thickness of coating of the high-refraction material coating is 20nm-200nm.
Preferably, the low refractive material coating with a thickness of 80nm-250nm.
Compared with prior art, the utility model has the beneficial effects that this programme redesigns cutoff filter Membrane system is plated, coating process is optimized, cutoff filter is reduced in the transmitance of 930-950nm wave band, reaches and know with biology Other functional product collocation uses.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model;
Fig. 2 is the preparation flow figure of the utility model;
Fig. 3 is the lab diagram of the utility model embodiment.
In figure: 1 substrate, 2 magnesium fluoride film layers, 3 high-refraction material coating, 4 low refractive material coating.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to Fig. 1, the utility model provides a kind of technical solution: a kind of low infrared outer light cutoff filter of infrared transmittivity The upper surface of piece, including substrate 1, substrate 1 is coated with magnesium fluoride film layer 2, the upper table of magnesium fluoride film layer 2 by electron beam evaporation plating Face is alternately coated with high-refraction material coating 3 and low refractive material coating 4 by electron beam evaporation plating.
Wherein, substrate 1 is smalt substrate, and high-refraction material coating 3 and low refractive material coating 4 are respectively silica Coating and titanium pentoxide coating, the thickness of coating of high-refraction material coating 3 are 20nm-200nm, low refractive material coating 4 With a thickness of 80nm-250nm.
Specific preparation process is as follows (as shown in Figure 2) for the preparation method of the low infrared transmittivity cutoff filter:
S1: magnesium fluoride film layer 2 is plated in 1 surface of substrate: in 1 surface of substrate magnesium fluoride film by way of electron beam evaporation plating Layer 2, stands magnesium film layer 2 to be fluorinated for the substrate 1 after plated film and forms;
S2: high-index material and low-index material successively high and low refractive index material alternate plating: are passed through into electron beam The mode of vapor deposition is plated on the substrate 1 after plating magnesium fluoride film layer 2 in step sl, and high-index material and low-index material exist Electron beam evaporation plating is carried out under vacuum state, and to the processing of plated film rear surface.
As shown in figure 3, triangle endpoint is the transmission of the transmission spectrum curve of 0 ° of angle in 920-960nm wave band Rate;Circular end points are the transmitance of the transmission spectrum curve of 30 ° of angles in 920-960nm wave band.
0 ° of practical transmitance is in Tavg=0.00013%, Tmax=0.0002%;And 30 ° of practical transmitances are in Tavg= 0.0002%, Tmax=0.00039%.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (5)

1.一种低红外透过率红外截止滤光片,包括基材(1),其特征在于:所述基材(1)的上表面通过电子束蒸镀镀有氟化镁薄膜层(2),所述氟化镁薄膜层(2)的上表面通过电子束蒸镀交替镀有高折射材料镀层(3)和低折射材料镀层(4)。1. A low-infrared transmittance infrared cut-off filter, comprising a base material (1), characterized in that: the upper surface of the base material (1) is plated with a magnesium fluoride film layer (2) by electron beam evaporation. ), the upper surface of the magnesium fluoride thin film layer (2) is alternately coated with a high-refractive material coating layer (3) and a low-refractive material coating layer (4) by electron beam evaporation. 2.根据权利要求1所述的一种低红外透过率红外截止滤光片,其特征在于:所述基材(1)为蓝玻璃基材。2 . The infrared cut-off filter with low infrared transmittance according to claim 1 , wherein the base material ( 1 ) is a blue glass base material. 3 . 3.根据权利要求1所述的一种低红外透过率红外截止滤光片,其特征在于:所述高折射材料镀层(3)和低折射材料镀层(4)分别为二氧化硅镀层和五氧化三钛镀层。3. a kind of low-infrared transmittance infrared cut-off filter according to claim 1, is characterized in that: described high-refractive material coating (3) and low-refractive material coating (4) are respectively silicon dioxide coating and Titanium pentoxide coating. 4.根据权利要求1所述的一种低红外透过率红外截止滤光片,其特征在于:所述高折射材料镀层(3)的镀层厚度为20nm-200nm。4 . The infrared cut-off filter with low infrared transmittance according to claim 1 , wherein the coating thickness of the high-refractive material coating layer ( 3 ) is 20 nm-200 nm. 5 . 5.根据权利要求1所述的一种低红外透过率红外截止滤光片,其特征在于:所述低折射材料镀层(4)的厚度为80nm-250nm。5. The low-infrared transmittance infrared cut-off filter according to claim 1, wherein the thickness of the low-refractive material coating (4) is 80nm-250nm.
CN201821230580.3U 2018-08-01 2018-08-01 A kind of low infrared transmittivity cutoff filter Active CN208521025U (en)

Priority Applications (1)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108761613A (en) * 2018-08-01 2018-11-06 湖北五方光电股份有限公司 A kind of low infrared transmittivity cutoff filter and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108761613A (en) * 2018-08-01 2018-11-06 湖北五方光电股份有限公司 A kind of low infrared transmittivity cutoff filter and preparation method thereof

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PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: A low infrared transmittance infrared cut-off filter

Granted publication date: 20190219

Pledgee: Bank of China Limited Jingzhou Branch

Pledgor: HUBEI W-OLF PHOTOELECTRIC CO.,LTD.

Registration number: Y2024980058390