CN207877849U - Vacuum coater - Google Patents
Vacuum coater Download PDFInfo
- Publication number
- CN207877849U CN207877849U CN201820113295.7U CN201820113295U CN207877849U CN 207877849 U CN207877849 U CN 207877849U CN 201820113295 U CN201820113295 U CN 201820113295U CN 207877849 U CN207877849 U CN 207877849U
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- Prior art keywords
- roller
- cavity
- film coating
- retractable volume
- coating roller
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- 239000007888 film coating Substances 0.000 claims abstract description 59
- 238000009501 film coating Methods 0.000 claims abstract description 59
- 239000000463 material Substances 0.000 claims abstract description 41
- 239000011248 coating agent Substances 0.000 claims abstract description 27
- 238000000576 coating method Methods 0.000 claims abstract description 27
- 239000012530 fluid Substances 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 10
- 230000001360 synchronised effect Effects 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims 1
- 238000007761 roller coating Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000001755 magnetron sputter deposition Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000011819 refractory material Substances 0.000 description 2
- 239000008399 tap water Substances 0.000 description 2
- 235000020679 tap water Nutrition 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Abstract
The utility model discloses a kind of vacuum coaters, including the first cavity and the second cavity, the second cavity to be movably disposed in the first cavity.It is provided with coating system in first cavity, reel system is provided on the second cavity.Coating system includes ion source and target body and is arranged on the inner wall of the first cavity.Reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, and film coating roller includes the first filming roller and the second film coating roller.First retractable volume, the second retractable volume are oppositely arranged, and the first filming roller and the second film coating roller are arranged between the first retractable volume and the second retractable volume and are oppositely arranged.Coating system has 2, is separately positioned on the inner wall of the first cavity on the outside of the first filming roller and the second film coating roller.In this case, the setting layout of the various roll bodies in reel system enables vacuum coater to the two-sided carry out plated film of material to be plated, to improve the efficiency of plated film work simultaneously.
Description
Technical field
The utility model is related to plated film field more particularly to a kind of vacuum coaters.
Background technology
In the related art, vacuum coater generally can only carry out coating operation to the one side of material to be plated, then will
Material to be plated takes out the cavity of vacuum coater, places into vacuum coater after overturning, carries out the coating operation of another side.
Cumbersome, plated film progress is slow, greatly reduces the working efficiency of coating operation.Meanwhile also affecting the quality of plated film.
Utility model content
A kind of vacuum coater that the utility model embodiment provides,
Including the first cavity and the second cavity, second cavity is movably disposed in first cavity and coordinates
Confined space is formed,
It is provided with coating system in first cavity, reel system is provided on second cavity,
The coating system includes ion source and target body and is arranged on the inner wall of first cavity,
The reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, and the film coating roller includes the
One film coating roller and the second film coating roller, the guide roller are used to the material to be plated guiding in first retractable volume being wound up into described
On the first filming roller and second film coating roller and it is further directed in second retractable volume or by second retractable volume
On material to be plated guided to first retractable volume by second film coating roller and the first filming roller,
First retractable volume, second retractable volume are oppositely arranged, the first filming roller and second film coating roller
It is arranged between first retractable volume and second retractable volume and is oppositely arranged,
The guide roller is arranged between first retractable volume and second retractable volume, and the coating system has 2,
It is separately positioned on the inner wall of the first cavity on the outside of the first filming roller and second film coating roller.
In the utility model embodiment, the settings of the various roll bodies in reel system layout enables vacuum coater
Simultaneously to the two-sided carry out plated film of material to be plated, the efficiency of plated film work is improved.
In some embodiments, second cavity bottom is fixedly installed traveling wheel, is arranged on first cavity
There is a track, the traveling wheel moves on the track so that second cavity is incorporated to first cavity and from described first
It is detached in cavity.
In some embodiments, the first filming roller and second film coating roller offer fluid passage, the liquid
The first filming roller and second film coating roller are run through in body channel.
In some embodiments, the fluid passage is cylinder, the axis of the fluid passage and first plating
The axis of deflector roll and second film coating roller is located along the same line.
In some embodiments, the vacuum coater further includes rotary joint, described in the rotary joint connection
Film coating roller, the fluid passage are connected to the rotary joint and the film coating roller.
In some embodiments, the rotary joint remains stationary, does not rotate.
In some embodiments, the fluid passage remains stationary, does not rotate.
In some embodiments, the reel system further includes motor and belt, and the output shaft of the motor passes through institute
It states belt and drives the first filming roller and second film coating roller rotation, the rotating speed of the motor is adjustable.
In some embodiments, the belt includes synchronous belt, big timing belt pulley and small timing belt pulley, described
Small timing belt pulley connects the output shaft of the motor, and the big timing belt pulley connects the film coating roller, the synchronous belt
Connect the big timing belt pulley and the small timing belt pulley.
In some embodiments, the reel system further includes pressure roller, jockey pulley and nip rolls, the pressure roller, described
Jockey pulley and guide roller cooperation are to adjust the tensioning degree of the material to be plated, and the pressure roller and nip rolls cooperation are to adjust
The flatness of material to be plated.
The additional aspect and advantage of the utility model embodiment will be set forth in part in the description, partly will be under
Become apparent in the description in face, or is recognized by the practice of the utility model.
Description of the drawings
In description of the above-mentioned and/or additional aspect and advantage of the utility model from combination following accompanying drawings to embodiment
It will be apparent and be readily appreciated that, wherein：
Fig. 1 is the planar structure schematic diagram of the vacuum coater of embodiment of the present invention；
Fig. 2 is the local part planar structure schematic diagram of the vacuum coater of embodiment of the present invention；
Fig. 3 is the another planar structure schematic diagram of the vacuum coater of embodiment of the present invention；
Fig. 4 is the work structure diagram of the vacuum coater of embodiment of the present invention；
Fig. 5 is the diagrammatic cross-section of the film coating roller of the vacuum coater of embodiment of the present invention.
Specific implementation mode
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein
Same or similar label indicates same or similar element or element with the same or similar functions from beginning to end.Lead to below
It crosses the embodiment being described with reference to the drawings to be exemplary, is only used for explaining the utility model, and should not be understood as to this practicality
Novel limitation.
In the description of the present invention, it should be understood that term "center", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside",
The orientation or positional relationship of the instructions such as " clockwise ", " counterclockwise " be based on the orientation or positional relationship shown in the drawings, be only for
Described convenient for description the utility model and simplifying, do not indicate or imply the indicated device or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.In addition, term " first ",
" second " is used for description purposes only, and is not understood to indicate or imply relative importance or implicitly indicates indicated technology
The quantity of feature.Define " first " as a result, the feature of " second " can explicitly or implicitly include it is one or more
The feature.The meaning of " plurality " is two or more in the description of the present invention, unless otherwise clearly specific
It limits.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, can also be to be electrically connected or can mutually communicate；It can be directly connected, it can also be in
Between medium be indirectly connected, can be the interaction relationship of the connection or two elements inside two elements.For this field
For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In the description of the present invention, unless otherwise clearly defined and limited, fisrt feature second feature it
"upper" or "lower" may include that the first and second features are in direct contact, can also include the first and second features not be directly to connect
It touches but passes through the other characterisation contact between them.Moreover, fisrt feature second feature " on ", " top " and " on
Face " includes fisrt feature right over second feature and oblique upper, or to be merely representative of fisrt feature level height special higher than second
Sign.Fisrt feature second feature " under ", " lower section " and " below " include fisrt feature immediately below second feature and obliquely downward
Side, or be merely representative of fisrt feature level height and be less than second feature.
Following disclosure provides many different embodiments or example is used for realizing the different structure of the utility model.
In order to simplify the disclosure of the utility model, hereinafter the component of specific examples and setting are described.Certainly, they are only
Example, and purpose does not lie in limitation the utility model.In addition, the utility model can in different examples repeat reference numerals
And/or reference letter, this repetition are for purposes of simplicity and clarity, itself not indicate discussed various embodiments
And/or the relationship between setting.In addition, the example for the various specific techniques and material that the utility model provides, but this
Field those of ordinary skill can be appreciated that the application of other techniques and/or the use of other materials.
Please refer to Fig.1-Fig. 5, a kind of vacuum coater 100 that embodiment of the present invention provides, including the first cavity 10
With the second cavity 20, the second cavity 20 is movably disposed in the first cavity 10 and cooperatively forms confined space.First cavity
It is provided with coating system 12 in 10, reel system 22 is provided on the second cavity 20.Coating system 12 includes target body 14 and ion
Source is simultaneously arranged on the inner wall of the first cavity 10.Reel system 22 includes the first retractable volume 222, the second retractable volume 224, film coating roller
226 and guide roller 228, film coating roller 226 includes the first filming roller 2262 and the second film coating roller 2264, and guide roller 228 is used for the
Material to be plated guiding in one retractable volume 222 is wound up on the first filming roller 2262 and the second film coating roller 2264 and further guides
Pass through the second film coating roller 2264 and the first filming roller on to the second retractable volume 224 or by the material to be plated in the second retractable volume 224
In 2262 guiding to the first retractable volumes 222.Guide roller is arranged between the first retractable volume and the second retractable volume, and coating system has 2
It is a, it is separately positioned on the inner wall of the first cavity on the outside of the first filming roller and the second film coating roller.
Target body 14 is arranged evenly and at intervals around film coating roller 226.
In some embodiments, 20 bottom of the second cavity is provided with traveling wheel, and track is provided on the first cavity 10, row
It walks to take turns movement in orbit so that the second cavity 20 is sent into the first cavity 10 and is pulled out from the first cavity 10.
100 personnel easy to operation of vacuum coater in embodiment of the present invention are by the second cavity 20 from the first cavity 10
In separate, carry out being placed and taken out for material volume to be plated, reduce operation difficulty, improve the efficiency of coating operation.Together
When, when being blocked there is a situation where material to be plated in reel system 22, personnel easy to operation are at the material to be plated that blocks
Reason, avoids the material damage machine to be plated of card master, extends the service life of vacuum coater 100.
Specifically, the vacuum coater 100 of present embodiment uses magnetic control sputtering cathode system, magnetic control sputtering cathode system
System is a kind of physical gas phase deposition technology, is used for sputter coating process, can prepare the multiple materials such as metal, semiconductor, insulator.
Vacuum coater 100 is simple in structure, easily controllable, and has the advantages that plated film area is big and strong adhesive force.Magnetron sputtering is cloudy
The operation principle of electrode systems is：Magnetic control sputtering cathode system is placed under ar gas environment, in magnetic control sputtering cathode system and anode
Apply enough voltage between substrate, form the electric field of some strength, electronics flies to substrate, and and argon gas under the action of electric field
Ar atmo collide, make ar atmo ionization produce argon ion and new electronics, new electronics flies to substrate, and argon ion exists
14 surface of the annular target body of high-energy bombardment is carried under electric field action, and 14 surface of annular target body is made to sputter.In present embodiment
Vacuum coater 100 in target body 14 be rectangle, the sputter locus that generates after sputter coating intermediate ion bombardment target body 14
Similar horse race road.Finally, the neutral target atom in sputtering particle or molecule deposition complete the plated film to substrate on substrate.
Certainly, argon gas can also be replaced with other low-pressure inert gas.
Magnetron sputtering deposition speed is higher, and equipment sows height, and air pressure needed for magnetron sputtering work is relatively low, saves energy
Source, so magnetron sputtering application is more extensive.
In some embodiments, coating system 12 and the setting of the interval of reel system 22.
In this way, the distance between coating system 12 and reel system 22 ensure that the stability of magnetron sputtering, it is effectively ensured
To the area coverage of material to be plated, the incomplete situation of material film plating to be plated is avoided.Meanwhile it also ensuring in reel system 22
Roller rotation process in and coating system 12 do not interfere.
In some embodiments, finite place piece (not shown) is set on track, and locating part is for limiting the second cavity 20
And the first relative position between cavity 10.
In this way, during mobile second cavity 20, opposite position between the second cavity 20 and the first cavity 10 is avoided
It is excessive to set variation, influences the structural stability of vacuum coater 100, then influences the leakproofness of vacuum coater 100,
Influence the quality of plated film.
In some embodiments, coating system further includes magnet assembly, and the magnetic field line of magnet assembly passes through target body 14.
In some embodiments, magnet assembly includes permanent magnet component and/or electromagnetic component.
In some embodiments, the first retractable volume 222, the second retractable volume 224 are oppositely arranged, 2262 He of the first filming roller
Second film coating roller 2264 is arranged between the first retractable volume 222 and the second retractable volume 224 and is oppositely arranged.
In this way, the layout of reel system 22 is so that guiding of the material to be plated by guide roller 228, is easy to implement two-sided plating
Film.
In some embodiments, guide roller 228 is arranged between the first retractable volume 222 and the second retractable volume 224, plated film
System 12 is arranged in the outside of the first filming roller 2262 and the second film coating roller 2264.
In this way, the first filming roller 2262 and the division of labor of the second film coating roller 2264 are clear, the two sides of material to be plated is carried out respectively
Coating operation.
In some embodiments, the distance phase of target body 14 and close the first filming roller 2262 or the second film coating roller 2264
Together.
In this way, ensure that each position plated film is uniform on material to be plated in coating operation, avoids material film plating to be plated endless
Entirely or massif shape deposition occurs on material to be plated for Coating Materials, influences the planarization of material surface to be plated.
In some embodiments, the first filming roller 2262 and the second film coating roller 2264 offer fluid passage 2266, liquid
The first filming roller 2262 and the second film coating roller 2264 are run through in body channel 2266.
In this way, liquid can be inputted in fluid passage 2266, by flowing of the liquid in fluid passage 2266, is taken away
High temperature on one film coating roller 2262 and the second film coating roller 2264, to make vacuum coater 100 in present embodiment can be with
Coating operation is carried out for the material of the non-refractories such as plastics.
Specifically, generally logical tap water in fluid passage 2266.In this way, cost is relatively low, and heat dissipation effect is also preferable.Into
One step, the problems such as such as considering machine maintenance and be lost, deionized water can be used, avoid fouling and corrosion in circuit.Into
One step, for the higher material of heatproof, tap water can be led in fluid passage 2266 and carries out cooling treatment, and reduces plated film
The quality of processing, in turn ensures coating quality；And for the material of other non-refractories, it is needed in fluid passage 2266 logical special
Cooling liquid ensures the quality of plated film to ensure the low temperature environment on film coating roller.
It is possible to further adjust the type of flowing velocity and liquid of the liquid in fluid passage 2266, to adjust
The heat dissipation effect of fluid passage 2266, and then the temperature of the first filming roller 2262 and the second film coating roller 2264 is adjusted, with for difference
The material of material carries out coating operation, ensures the quality of plated film.
In some embodiments, fluid passage 2266 is 1.
In this way, the first filming roller 2262 and 2264 structure of the second film coating roller are relatively simple, it is easy to manufacture.
In some embodiments, fluid passage 2266 is cylinder, the axis and the first filming roller of fluid passage 2266
2262 and second the axis of film coating roller 2264 be located along the same line.
In this way, reducing the shadow of liquid flowing two pairs of rollers body stability of the roll body in rotation process in fluid passage 2266
It rings, improves the quality and efficiency of plated film.
In some embodiments, vacuum coater 100 further includes rotary joint 30, and rotary joint 30 connects film coating roller
226, fluid passage 2266 is connected to rotary joint 30 and film coating roller 226.
In this way, rotary joint 30 ensure that the first filming roller 2262 and the second film coating roller 2264 liquid in rotation process are logical
Road 2266 will not leak coolant liquid.
In some embodiments, 30 remains stationary of rotary joint, does not rotate.
In some embodiments, 2266 remains stationary of fluid passage, does not rotate.
In some embodiments, reel system 22 further includes motor 221 and belt 223, and the output shaft of motor 221 passes through
Belt 223 drives the first filming roller 2262 and the rotation of the second film coating roller 2264, and the rotating speed of motor 221 is adjustable.
In some embodiments, belt 223 includes synchronous belt 2232, big timing belt pulley 2234 and small synchronous belt
Wheel 2236, small timing belt pulley 2236 connect the output shaft of motor 221, and big timing belt pulley 2234 connects film coating roller 226, synchronous
Belt 2232 connects big timing belt pulley 2234 and small timing belt pulley 2236.
In some embodiments, reel system 22 further includes pressure roller 225, jockey pulley 227 and nip rolls, and pressure roller 225 is opened
Power roller 227 and the cooperation of guide roller 228 are to adjust the tensioning degree of material to be plated, and pressure roller and nip rolls cooperation are to adjust material to be plated
Flatness.
In some embodiments, the position-adjustable of pressure roller 225 and jockey pulley 227.
In this way, the tensioning degree of material to be plated can be adjusted, to adapt to the plated film requirement of different materials to be plated, and then ensure
Coating effects.
In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation
What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example
Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the utility model.In this explanation
In book, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description
Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.
While there has been shown and described that the embodiment of the utility model, those skilled in the art can manage
Solution：A variety of to the progress of these embodiments can change in the case where not departing from the principles of the present invention and objective, change,
It replaces and modification, the scope of the utility model is limited by claim and its equivalent.
Claims (10)
1. a kind of vacuum coater, which is characterized in that
Including the first cavity and the second cavity, second cavity is movably disposed in first cavity and cooperatively forms
Confined space,
It is provided with coating system in first cavity, reel system is provided on second cavity,
The coating system includes ion source and target body and is arranged on the inner wall of first cavity,
The reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, and the film coating roller includes the first plating
Deflector roll and the second film coating roller, the guide roller are used to the material to be plated guiding in first retractable volume being wound up into described first
On film coating roller and second film coating roller and it is further directed in second retractable volume or will be in second retractable volume
Material to be plated is guided by second film coating roller and the first filming roller to first retractable volume,
First retractable volume, second retractable volume are oppositely arranged, the first filming roller and second film coating roller setting
Between first retractable volume and second retractable volume and it is oppositely arranged,
The guide roller is arranged between first retractable volume and second retractable volume, and the coating system has 2, respectively
It is arranged on the inner wall of the first cavity on the outside of the first filming roller and second film coating roller.
2. vacuum coater according to claim 1, which is characterized in that second cavity bottom is fixedly installed row
Wheel is walked, is provided with track on first cavity, the traveling wheel moves on the track so that second cavity is incorporated to
It first cavity and is detached from first cavity.
3. vacuum coater according to claim 1, which is characterized in that the first filming roller and second plated film
Roller offers fluid passage, and the fluid passage runs through the first filming roller and second film coating roller.
4. vacuum coater according to claim 3, which is characterized in that the fluid passage is cylinder, the liquid
The axis in body channel and the axis of the first filming roller and second film coating roller are located along the same line.
5. vacuum coater according to claim 4, which is characterized in that the vacuum coater further includes that rotation connects
Head, the rotary joint connect the film coating roller, and the fluid passage is connected to the rotary joint and the film coating roller.
6. vacuum coater according to claim 5, which is characterized in that the rotary joint remains stationary does not occur
Rotation.
7. vacuum coater according to claim 5, which is characterized in that the fluid passage remains stationary does not occur
Rotation.
8. vacuum coater according to claim 1, which is characterized in that the reel system further includes motor and skin
The output shaft of band, the motor drives the first filming roller and second film coating roller to rotate by the belt, the electricity
The rotating speed of machine is adjustable.
9. vacuum coater according to claim 8, which is characterized in that the belt includes synchronous belt, synchronizes greatly
Belt pulley and small timing belt pulley, the small timing belt pulley connect the output shaft of the motor, and the big timing belt pulley connects
The film coating roller is connect, the synchronous belt connects the big timing belt pulley and the small timing belt pulley.
10. vacuum coater according to claim 1, which is characterized in that the reel system further includes pressure roller, tension
Roller and nip rolls, the pressure roller, the jockey pulley and guide roller cooperation are to adjust the tensioning degree of the material to be plated, institute
Pressure roller and nip rolls cooperation are stated to adjust the flatness of material to be plated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820113295.7U CN207877849U (en) | 2018-01-22 | 2018-01-22 | Vacuum coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820113295.7U CN207877849U (en) | 2018-01-22 | 2018-01-22 | Vacuum coater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207877849U true CN207877849U (en) | 2018-09-18 |
Family
ID=63507998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820113295.7U Active CN207877849U (en) | 2018-01-22 | 2018-01-22 | Vacuum coater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207877849U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110643969A (en) * | 2018-06-27 | 2020-01-03 | 北京铂阳顶荣光伏科技有限公司 | Vacuum evaporation equipment |
| CN111118456A (en) * | 2020-01-16 | 2020-05-08 | 长钛工程技术研究院(北京)有限公司 | Novel strip steel vacuum coating equipment and process |
| CN112695289A (en) * | 2020-12-18 | 2021-04-23 | 盐城工学院 | Multi-target double-sided coating magnetron sputtering winding coating equipment |
-
2018
- 2018-01-22 CN CN201820113295.7U patent/CN207877849U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110643969A (en) * | 2018-06-27 | 2020-01-03 | 北京铂阳顶荣光伏科技有限公司 | Vacuum evaporation equipment |
| CN111118456A (en) * | 2020-01-16 | 2020-05-08 | 长钛工程技术研究院(北京)有限公司 | Novel strip steel vacuum coating equipment and process |
| CN111118456B (en) * | 2020-01-16 | 2022-03-11 | 长钛工程技术研究院(北京)有限公司 | Strip steel vacuum coating equipment and process |
| CN112695289A (en) * | 2020-12-18 | 2021-04-23 | 盐城工学院 | Multi-target double-sided coating magnetron sputtering winding coating equipment |
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