CN207811865U - Vacuum coater - Google Patents
Vacuum coater Download PDFInfo
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- CN207811865U CN207811865U CN201820108505.3U CN201820108505U CN207811865U CN 207811865 U CN207811865 U CN 207811865U CN 201820108505 U CN201820108505 U CN 201820108505U CN 207811865 U CN207811865 U CN 207811865U
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Abstract
The utility model discloses a kind of vacuum coaters, including the first cavity and the second cavity.It is provided with coating system in first cavity, reel system is provided on the second cavity.Coating system includes ion source and target body and is arranged on the inner wall of the first cavity.Reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, film coating roller includes the first filming roller and the second film coating roller, and guide roller is used to that the material to be plated guiding in the first retractable volume to be wound up on the first filming roller and the second film coating roller and be further directed in the second retractable volume or guide the material to be plated in second retractable volume to first retractable volume by second film coating roller and the first filming roller.The first filming roller is used to carry out plated film for the one side of material to be plated, and the second film coating roller is used to carry out plated film for the another side of material to be plated.Vacuum coater in the utility model embodiment can be carried out at the same time double-sided coating operation, substantially increase plating membrane efficiency.
Description
Technical field
The utility model is related to plated film field more particularly to a kind of vacuum coaters.
Background technology
In the related art, vacuum coater generally can only carry out plated film to the one side of material to be plated, after having plated on one side
Material to be plated is taken out, plated film machine is put into again after turn-over, carries out the coating operation of another side, program is cumbersome, and in turn-over process
The middle quality that can influence material film plating.
Utility model content
A kind of vacuum coater that the utility model embodiment provides, including the first cavity and the second cavity, it is described
Second cavity is movably disposed in first cavity and cooperatively forms confined space,
It is provided with coating system in first cavity, reel system is provided on second cavity,
The coating system includes ion source and target body and is arranged on the inner wall of first cavity,
The reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, and the film coating roller includes the
One film coating roller and the second film coating roller, the guide roller are used to the material to be plated guiding in first retractable volume being wound up into described
On the first filming roller and second film coating roller and it is further directed in second retractable volume or by second retractable volume
On material to be plated guided to first retractable volume by second film coating roller and the first filming roller,
The first filming roller is used to carry out plated film for the one side of the material to be plated, and second film coating roller is used for as institute
The another side for stating material to be plated carries out plated film.
The vacuum coater of the utility model embodiment utilizes the cooperation between reel system, is carried out at the same time two-sided plating
Film substantially reduces the time needed for plated film, improves the working efficiency of plated film.Improve coating quality simultaneously.
In some embodiments, first retractable volume, second retractable volume are oppositely arranged, the first filming roller
And second film coating roller is arranged between first retractable volume and second retractable volume and is oppositely arranged.
In some embodiments, the guide roller is arranged between first retractable volume and second retractable volume,
The coating system is arranged in the outside of the first filming roller and second film coating roller.
In some embodiments, the distance of the target body and the close the first filming roller or second film coating roller
It is identical.
In some embodiments, second cavity bottom is provided with traveling wheel, is fixedly installed on first cavity
There is a track, the traveling wheel moves on the track so that second cavity is incorporated to first cavity and from described first
It is detached in cavity.
In some embodiments, the first filming roller and second film coating roller offer fluid passage, the liquid
The first filming roller and second film coating roller are run through in body channel,
The fluid passage is cylinder, the axis of the fluid passage and the first filming roller and second plated film
The axis of roller is located along the same line.
In some embodiments, the vacuum coater further includes rotary joint, described in the rotary joint connection
Film coating roller, the fluid passage are connected to the rotary joint and the film coating roller.
In some embodiments, the rotary joint and the fluid passage remains stationary, do not rotate.
In some embodiments, the reel system further includes motor and belt, and the output shaft of the motor passes through institute
It states belt and drives the first filming roller and second film coating roller rotation, the rotating speed of the motor is adjustable,
The belt includes synchronous belt, big timing belt pulley and small timing belt pulley, the small timing belt pulley connection
The output shaft of the motor, the big timing belt pulley connect the film coating roller, and the synchronous belt connects the big synchronous skin
Belt wheel and the small timing belt pulley.
In some embodiments, the reel system further includes pressure roller, jockey pulley and nip rolls, the pressure roller, described
Jockey pulley and guide roller cooperation are to adjust the tensioning degree of the material to be plated, and the pressure roller and nip rolls cooperation are to adjust
The flatness of material to be plated.
The additional aspect and advantage of the utility model embodiment will be set forth in part in the description, partly will be under
Become apparent in the description in face, or is recognized by the practice of the utility model.
Description of the drawings
In description of the above-mentioned and/or additional aspect and advantage of the utility model from combination following accompanying drawings to embodiment
It will be apparent and be readily appreciated that, wherein：
Fig. 1 is the planar structure schematic diagram of the vacuum coater of embodiment of the present invention；
Fig. 2 is the local part planar structure schematic diagram of the vacuum coater of embodiment of the present invention；
Fig. 3 is the another planar structure schematic diagram of the vacuum coater of embodiment of the present invention；
Fig. 4 is the work structure diagram of the vacuum coater of embodiment of the present invention；
Fig. 5 is the diagrammatic cross-section of the film coating roller of the vacuum coater of embodiment of the present invention.
Specific implementation mode
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein
Same or similar label indicates same or similar element or element with the same or similar functions from beginning to end.Lead to below
It crosses the embodiment being described with reference to the drawings to be exemplary, is only used for explaining the utility model, and should not be understood as to this practicality
Novel limitation.
In the description of the present invention, it should be understood that term "center", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside",
The orientation or positional relationship of the instructions such as " clockwise ", " counterclockwise " be based on the orientation or positional relationship shown in the drawings, be only for
Described convenient for description the utility model and simplifying, do not indicate or imply the indicated device or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.In addition, term " first ",
" second " is used for description purposes only, and is not understood to indicate or imply relative importance or implicitly indicates indicated technology
The quantity of feature.Define " first " as a result, the feature of " second " can explicitly or implicitly include it is one or more
The feature.The meaning of " plurality " is two or more in the description of the present invention, unless otherwise clearly specific
It limits.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, can also be to be electrically connected or can mutually communicate；It can be directly connected, it can also be in
Between medium be indirectly connected, can be the interaction relationship of the connection or two elements inside two elements.For this field
For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In the description of the present invention, unless otherwise clearly defined and limited, fisrt feature second feature it
"upper" or "lower" may include that the first and second features are in direct contact, can also include the first and second features not be directly to connect
It touches but passes through the other characterisation contact between them.Moreover, fisrt feature second feature " on ", " top " and " on
Face " includes fisrt feature right over second feature and oblique upper, or to be merely representative of fisrt feature level height special higher than second
Sign.Fisrt feature second feature " under ", " lower section " and " below " include fisrt feature immediately below second feature and obliquely downward
Side, or be merely representative of fisrt feature level height and be less than second feature.
Following disclosure provides many different embodiments or example is used for realizing the different structure of the utility model.
In order to simplify the disclosure of the utility model, hereinafter the component of specific examples and setting are described.Certainly, they are only
Example, and purpose does not lie in limitation the utility model.In addition, the utility model can in different examples repeat reference numerals
And/or reference letter, this repetition are for purposes of simplicity and clarity, itself not indicate discussed various embodiments
And/or the relationship between setting.In addition, the example for the various specific techniques and material that the utility model provides, but this
Field those of ordinary skill can be appreciated that the application of other techniques and/or the use of other materials.
Please refer to Fig.1-Fig. 5, a kind of vacuum coater 100 that embodiment of the present invention provides, including the first cavity 10
With the second cavity 20, the second cavity 20 is movably disposed in the first cavity 10 and cooperatively forms confined space.First cavity
It is provided with coating system 12 in 10, reel system 22 is provided on the second cavity 20.Coating system 12 includes target body 14 and ion
Source is simultaneously arranged on the inner wall of the first cavity 10.Reel system 22 includes the first retractable volume 222, the second retractable volume 224, film coating roller
226 and guide roller 228, film coating roller 226 includes the first filming roller 2262 and the second film coating roller 2264, and guide roller 228 is used for the
Material to be plated guiding in one retractable volume 222 is wound up on the first filming roller 2262 and the second film coating roller 2264 and further guides
Pass through the second film coating roller 2264 and the first filming roller on to the second retractable volume 224 or by the material to be plated in the second retractable volume 224
In 2262 guiding to the first retractable volumes 222.The first filming roller is used to carry out plated film for the one side of material to be plated, and the second film coating roller is used
In the another side progress plated film for material to be plated.
Target body 14 is arranged evenly and at intervals around film coating roller 226.
In some embodiments, 20 bottom of the second cavity is provided with traveling wheel, and track is provided on the first cavity 10, row
It walks to take turns movement in orbit so that the second cavity 20 is sent into the first cavity 10 and is pulled out from the first cavity 10.
100 personnel easy to operation of vacuum coater in embodiment of the present invention are by the second cavity 20 from the first cavity 10
In separate, carry out being placed and taken out for material volume to be plated, reduce operation difficulty, improve the efficiency of coating operation.Together
When, when being blocked there is a situation where material to be plated in reel system 22, personnel easy to operation are at the material to be plated that blocks
Reason, avoids the material damage machine to be plated of card master, extends the service life of vacuum coater 100.
Specifically, the vacuum coater 100 of present embodiment uses magnetic control sputtering cathode system, magnetic control sputtering cathode system
System is a kind of physical gas phase deposition technology, is used for sputter coating process, can prepare the multiple materials such as metal, semiconductor, insulator.
Vacuum coater 100 is simple in structure, easily controllable, and has the advantages that plated film area is big and strong adhesive force.Magnetron sputtering is cloudy
The operation principle of electrode systems is：Magnetic control sputtering cathode system is placed under ar gas environment, in magnetic control sputtering cathode system and anode
Apply enough voltage between substrate, form the electric field of some strength, electronics flies to substrate, and and argon gas under the action of electric field
Ar atmo collide, make ar atmo ionization produce argon ion and new electronics, new electronics flies to substrate, and argon ion exists
14 surface of the annular target body of high-energy bombardment is carried under electric field action, and 14 surface of annular target body is made to sputter.In present embodiment
Vacuum coater 100 in target body 14 be rectangle, the sputter locus that generates after sputter coating intermediate ion bombardment target body 14
Similar horse race road.Finally, the neutral target atom in sputtering particle or molecule deposition complete the plated film to substrate on substrate.
Certainly, argon gas can also be replaced with other low-pressure inert gas.
Magnetron sputtering deposition speed is higher, and equipment sows height, and air pressure needed for magnetron sputtering work is relatively low, saves energy
Source, so magnetron sputtering application is more extensive.
In some embodiments, coating system 12 and the setting of the interval of reel system 22.
In this way, the distance between coating system 12 and reel system 22 ensure that the stability of magnetron sputtering, it is effectively ensured
To the area coverage of material to be plated, the incomplete situation of material film plating to be plated is avoided.Meanwhile it also ensuring in reel system 22
Roller rotation process in and coating system 12 do not interfere.
In some embodiments, finite place piece (not shown) is set on track, and locating part is for limiting the second cavity 20
And the first relative position between cavity 10.
In this way, during mobile second cavity 20, opposite position between the second cavity 20 and the first cavity 10 is avoided
It is excessive to set variation, influences the structural stability of vacuum coater 100, then influences the leakproofness of vacuum coater 100,
Influence the quality of plated film.
In some embodiments, coating system further includes magnet assembly, and the magnetic field line of magnet assembly passes through target body 14.
In some embodiments, magnet assembly includes permanent magnet component and/or electromagnetic component.
In some embodiments, the first retractable volume 222, the second retractable volume 224 are oppositely arranged, 2262 He of the first filming roller
Second film coating roller 2264 is arranged between the first retractable volume 222 and the second retractable volume 224 and is oppositely arranged.
In this way, the layout of reel system 22 is so that guiding of the material to be plated by guide roller 228, is easy to implement two-sided plating
Film.
In some embodiments, guide roller 228 is arranged between the first retractable volume 222 and the second retractable volume 224, plated film
System 12 is arranged in the outside of the first filming roller 2262 and the second film coating roller 2264.
In this way, the first filming roller 2262 and the division of labor of the second film coating roller 2264 are clear, the two sides of material to be plated is carried out respectively
Coating operation.
In some embodiments, the distance phase of target body 14 and close the first filming roller 2262 or the second film coating roller 2264
Together.
In this way, ensure that each position plated film is uniform on material to be plated in coating operation, avoids material film plating to be plated endless
Entirely or massif shape deposition occurs on material to be plated for Coating Materials, influences the planarization of material surface to be plated.
In some embodiments, the first filming roller 2262 and the second film coating roller 2264 offer fluid passage 2266, liquid
The first filming roller 2262 and the second film coating roller 2264 are run through in body channel 2266.
In this way, liquid can be inputted in fluid passage 2266, by flowing of the liquid in fluid passage 2266, is taken away
High temperature on one film coating roller 2262 and the second film coating roller 2264, to make vacuum coater 100 in present embodiment can be with
Coating operation is carried out for the material of the non-refractories such as plastics.
Specifically, generally logical tap water in fluid passage 2266.In this way, cost is relatively low, and heat dissipation effect is also preferable.Into
One step, the problems such as such as considering machine maintenance and be lost, deionized water can be used, avoid fouling and corrosion in circuit.Into
One step, for the higher material of heatproof, tap water can be led in fluid passage 2266 and carries out cooling treatment, and reduces plated film
The quality of processing, in turn ensures coating quality；And for the material of other non-refractories, it is needed in fluid passage 2266 logical special
Cooling liquid ensures the quality of plated film to ensure the low temperature environment on film coating roller.
It is possible to further adjust the type of flowing velocity and liquid of the liquid in fluid passage 2266, to adjust
The heat dissipation effect of fluid passage 2266, and then the temperature of the first filming roller 2262 and the second film coating roller 2264 is adjusted, with for difference
The material of material carries out coating operation, ensures the quality of plated film.
In some embodiments, fluid passage 2266 is 1.
In this way, the first filming roller 2262 and 2264 structure of the second film coating roller are relatively simple, it is easy to manufacture.
In some embodiments, fluid passage 2266 is cylinder, the axis and the first filming roller of fluid passage 2266
2262 and second the axis of film coating roller 2264 be located along the same line.
In this way, reducing the shadow of liquid flowing two pairs of rollers body stability of the roll body in rotation process in fluid passage 2266
It rings, improves the quality and efficiency of plated film.
In some embodiments, vacuum coater 100 further includes rotary joint 30, and rotary joint 30 connects film coating roller
226, fluid passage 2266 is connected to rotary joint 30 and film coating roller 226.
In this way, rotary joint 30 ensure that the first filming roller 2262 and the second film coating roller 2264 liquid in rotation process are logical
Road 2266 will not leak coolant liquid.
In some embodiments, 30 remains stationary of rotary joint, does not rotate.
In some embodiments, 2266 remains stationary of fluid passage, does not rotate.
In some embodiments, reel system 22 further includes motor 221 and belt 223, and the output shaft of motor 221 passes through
Belt 223 drives the first filming roller 2262 and the rotation of the second film coating roller 2264, and the rotating speed of motor 221 is adjustable.
In some embodiments, belt 223 includes synchronous belt 2232, big timing belt pulley 2234 and small synchronous belt
Wheel 2236, small timing belt pulley 2236 connect the output shaft of motor 221, and big timing belt pulley 2234 connects film coating roller 226, synchronous
Belt 2232 connects big timing belt pulley 2234 and small timing belt pulley 2236.
In some embodiments, reel system 22 further includes pressure roller 225, jockey pulley 227 and nip rolls, and pressure roller 225 is opened
Power roller 227 and the cooperation of guide roller 228 are to adjust the tensioning degree of material to be plated, and pressure roller and nip rolls cooperation are to adjust material to be plated
Flatness.
In some embodiments, the position-adjustable of pressure roller 225 and jockey pulley 227.
In this way, the tensioning degree of material to be plated can be adjusted, to adapt to the plated film requirement of different materials to be plated, and then ensure
Coating effects.
In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation
What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example
Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the utility model.In this explanation
In book, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description
Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.
While there has been shown and described that the embodiment of the utility model, those skilled in the art can manage
Solution：A variety of to the progress of these embodiments can change in the case where not departing from the principles of the present invention and objective, change,
It replaces and modification, the scope of the utility model is limited by claim and its equivalent.
Claims (10)
1. a kind of vacuum coater, which is characterized in that including the first cavity and the second cavity, second cavity is movably
It is arranged in first cavity and cooperatively forms confined space,
It is provided with coating system in first cavity, reel system is provided on second cavity,
The coating system includes ion source and target body and is arranged on the inner wall of first cavity,
The reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, and the film coating roller includes the first plating
Deflector roll and the second film coating roller, the guide roller are used to the material to be plated guiding in first retractable volume being wound up into described first
On film coating roller and second film coating roller and it is further directed in second retractable volume or will be in second retractable volume
Material to be plated is guided by second film coating roller and the first filming roller to first retractable volume,
The first filming roller is used to carry out plated film for the one side of the material to be plated, and second film coating roller is used to wait for be described
The another side for plating material carries out plated film.
2. vacuum coater according to claim 1, which is characterized in that first retractable volume, second folding and unfolding
Volume is oppositely arranged, and the first filming roller and second film coating roller are arranged in first retractable volume and second retractable volume
Between and be oppositely arranged.
3. vacuum coater according to claim 1, which is characterized in that the guide roller is arranged in first folding and unfolding
Between volume and second retractable volume, the coating system is arranged in the outer of the first filming roller and second film coating roller
Side.
4. vacuum coater according to claim 1, which is characterized in that the target body and the close the first filming
The distance of roller or second film coating roller is identical.
5. vacuum coater according to claim 1, which is characterized in that second cavity bottom is provided with walking
Wheel, is fixedly installed track on first cavity, the traveling wheel move on the track so that second cavity simultaneously
Enter first cavity and is detached from first cavity.
6. vacuum coater according to claim 1, which is characterized in that the first filming roller and second plated film
Roller offers fluid passage, and the fluid passage runs through the first filming roller and second film coating roller,
The fluid passage is cylinder, the axis of the fluid passage and the first filming roller and second film coating roller
Axis is located along the same line.
7. vacuum coater according to claim 6, which is characterized in that the vacuum coater further includes that rotation connects
Head, the rotary joint connect the film coating roller, and the fluid passage is connected to the rotary joint and the film coating roller.
8. vacuum coater according to claim 7, which is characterized in that the rotary joint and the fluid passage are protected
It holds static, does not rotate.
9. vacuum coater according to claim 1, which is characterized in that the reel system further includes motor and skin
The output shaft of band, the motor drives the first filming roller and second film coating roller to rotate by the belt, the electricity
The rotating speed of machine is adjustable,
The belt includes synchronous belt, big timing belt pulley and small timing belt pulley, described in the small timing belt pulley connection
The output shaft of motor, the big timing belt pulley connect the film coating roller, and the synchronous belt connects the big timing belt pulley
With the small timing belt pulley.
10. vacuum coater according to claim 9, which is characterized in that the reel system further includes pressure roller, tension
Roller and nip rolls, the pressure roller, the jockey pulley and guide roller cooperation are to adjust the tensioning degree of the material to be plated, institute
Pressure roller and nip rolls cooperation are stated to adjust the flatness of material to be plated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820108505.3U CN207811865U (en) | 2018-01-22 | 2018-01-22 | Vacuum coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820108505.3U CN207811865U (en) | 2018-01-22 | 2018-01-22 | Vacuum coater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207811865U true CN207811865U (en) | 2018-09-04 |
Family
ID=63323529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820108505.3U Active CN207811865U (en) | 2018-01-22 | 2018-01-22 | Vacuum coater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207811865U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109930119A (en) * | 2018-01-22 | 2019-06-25 | 无锡光润真空科技有限公司 | Vacuum coater |
| CN111235544A (en) * | 2020-01-17 | 2020-06-05 | 深圳市博能自动化设备有限公司 | Film coating machine |
| CN115852321A (en) * | 2022-12-09 | 2023-03-28 | 杭纳半导体装备(杭州)有限公司 | Roll-to-roll film coating equipment and film coating method |
-
2018
- 2018-01-22 CN CN201820108505.3U patent/CN207811865U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109930119A (en) * | 2018-01-22 | 2019-06-25 | 无锡光润真空科技有限公司 | Vacuum coater |
| CN111235544A (en) * | 2020-01-17 | 2020-06-05 | 深圳市博能自动化设备有限公司 | Film coating machine |
| CN111235544B (en) * | 2020-01-17 | 2022-05-10 | 深圳市博能自动化设备有限公司 | Film coating machine |
| CN115852321A (en) * | 2022-12-09 | 2023-03-28 | 杭纳半导体装备(杭州)有限公司 | Roll-to-roll film coating equipment and film coating method |
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