CN207820298U - An Efficient and Stable Arc Plasma Source - Google Patents

Abstract

The utility model discloses a kind of arc plasma sources of efficient stable, including anode, anode copper ring electrode, inner ceramic cylinder, intermediate ceramic cylinder, external ceramic cylinder, cathode, tough cathode ring electrode, molybdenum air injection pipe, cathodic ceramic lid, introducing electrode intermediate insulation, ceramic washer, energy to introduce crimping copper nose, ceramic insulation box, anode ceramic cap and molybdenum washer；Cathode and the coaxial assembly of anode, with the alternately folded filling of ceramic washer and molybdenum washer between cathode and anode, inner ceramic jacket casing is in bead outward, inner ceramic cylinder both ends are respectively embedded into the groove of cathode and anode, intermediate ceramic cylinder is put on again outside inner ceramic cylinder, the both ends of intermediate ceramic cylinder connect with the internal end surface of cathode and anode, are provided with the external ceramic jacket casing of pilot hole outside intermediate ceramic cylinder.The utility model only needs pulse gas injection, reduces the neutral operation matter gas in plasma, reduces as received basis gas usage amount, is conducive to the parameter for improving plasma when using under vacuum.

Description

An Efficient and Stable Arc Plasma Source

technical field

The utility model belongs to the field of basic plasma research, in particular to an efficient and stable arc plasma source.

Background technique

At present, the plasma sources mainly include helicon wave plasma source and oxide cathode plasma source. However, the helicon wave plasma source and the oxide cathode plasma source have disadvantages such as low temperature density of plasma, low resource utilization rate, unstable plasma generation, and inflexible plasma generation methods;

1. Both helicon wave and oxide cathode plasma sources need continuous gas injection to ensure the generation of plasma, and their ionization degree is not high, so the temperature and density of the generated plasma are relatively low, and the gas and power supply The utilization rate of energy is low, resulting in waste of resources;

2. The helicon wave plasma needs to be matched by a matcher to complete the energy coupling. The ionized gas is used to generate the plasma, and as the plasma parameters and gas parameters change, the matching will change, so there are some problems in the energy coupling, which cannot be stabilized. generate plasma,

3. The oxide cathode generates a small amount of electrons by heating the cathode material, and then increases the energy of the electrons through the acceleration grid. The accelerated electrons collide with the neutral gas to generate plasma. This plasma has a low temperature density and introduces A large number of impurities, and the huge heat generated by heating the oxide is not conducive to the physical experiment, and the preparation of the oxide is also cumbersome, and this method is very inflexible;

4. Due to the energy coupling problem of the helicon wave and the energy coupling problem of the oxide cathode, the energy utilization rate of the two is very low;

Based on the above problems, a plasma source with high energy and resource utilization, flexible, efficient and stable plasma generation is required in the fields of basic plasma physics research and plasma applications.

Utility model content

The purpose of this utility model is to overcome the disadvantages of the existing helicon wave plasma, such as continuous gas injection, low plasma temperature and density, low temperature and density of the oxidized cathode plasma, and the introduction of impurities, etc., to design a Efficient and stable generation of plasma with good parameters and pure plasma source.

The technical scheme adopted by the utility model is: a high-efficiency and stable arc plasma source, including anode, anode copper ring electrode, inner ceramic cylinder, middle ceramic cylinder, outer ceramic cylinder, cathode, cathode copper ring electrode, molybdenum gas injection tube, Cathode ceramic cover, lead-in electrode intermediate insulation, ceramic gasket, energy introduction crimping copper lug, ceramic insulation box, anode ceramic cover and molybdenum gasket, cathode and anode are coaxially assembled, and ceramic gasket and molybdenum gasket are alternately stacked between cathode and anode Filling, the inner ceramic cylinder is set on the outside of the gasket, the two ends of the inner ceramic cylinder are embedded in the grooves of the cathode and the anode respectively, and the inner ceramic cylinder is covered with the middle ceramic cylinder, and the two ends of the middle ceramic cylinder are in contact with the inner end faces of the cathode and the anode. Finally, the outer ceramic cylinder with assembly holes is placed outside the middle ceramic cylinder, and the two ends are respectively flush with the outer end surfaces of the cathode and anode, and the cathode ceramic cover with assembly holes is laid flat on the outer end surface of the cathode and shared with the cathode. Shaft, the anode ceramic cover with assembly holes is laid flat on the outer end surface of the anode and coaxial with the anode, adjust the cathode ceramic cover and anode ceramic cover so that their assembly holes are coaxial with the assembly holes of the external ceramic cylinder, and use a screw to fix the entire plasma source.

Further, the anode copper ring electrode is a copper ring with an inner diameter of 70 mm and an outer diameter of 90 mm. Twelve countersunk threaded holes are evenly opened in the center of the ring, and there are two symmetrical electrode arms on the outside of the ring.

Further, the above-mentioned anode is made of metal molybdenum, which is a cylindrical U-shaped structure, with a trumpet-shaped outlet on the outer end surface, and an annular groove with an inner diameter of 70mm and an outer diameter of 90mm, and a thickness of 3mm. The middle of the groove is round. Twelve threaded holes are evenly distributed in the ring, and the anode copper ring electrode is assembled on this ring groove.

Further, the anode copper ring electrode is a copper ring with an inner diameter of 70 mm and an outer diameter of 90 mm. Twelve countersunk threaded holes are evenly opened in the center of the ring, and an electrode arm is provided on the outside of the ring.

Further, the above-mentioned cathode is made of metal molybdenum, the inner cylinder has a bell mouth, and a fixed notch is opened between the inner cylinder and the outer cylinder, which is consistent with the wall thickness of the inner ceramic cylinder, and a hole coaxial with the cathode is opened in the middle of the entire cathode. There is an annular groove with an inner diameter of 70mm and an outer diameter of 90mm and a thickness of 3mm on the outer end of the cathode. Twelve threaded holes are evenly distributed in the ring in the middle of the groove. The cathode copper ring electrode is assembled on this annular groove.

Furthermore, the crimping copper lug has a hole with a diameter of 8mm and a depth of 15mm at one end, and an M8 stud at the other end.

Furthermore, the electrode arms of the cathode copper ring electrode and the anode copper ring electrode have an 8mm through hole, and the crimping copper nose is connected with the copper ring electrode through this hole, and external energy is introduced to generate plasma.

Further, the above-mentioned molybdenum gas injection pipe is connected to the cathode gas injection hole through threads, and the other side is connected to the external gas injection pipe of insulating material, and connected to the gas injection shut-off valve to inject the working gas into the ionization channel in pulse mode.

Advantage and positive effect of the present utility model are:

(1) An efficient and stable arc plasma source of the utility model works in pulse mode, only needs pulse gas injection, reduces the neutral working gas in the plasma, reduces the usage of working gas, and can be used under vacuum It is beneficial to improve the parameters of the plasma.

(2) A high-efficiency and stable arc plasma source of the utility model uses an arc discharge mode to generate plasma, and has high energy utilization rate. There are few impurities in it.

(3) The plasma beam produced by an efficient and stable arc plasma source of the utility model has high intensity and high parameters, and the parameters can be controlled according to gas injection and external power supply, which is beneficial to the parameter control in physical research and industrial application.

(4) Compared with the helicon wave plasma and the oxidizing cathode plasma, the efficient and stable arc plasma source of the utility model has a smarter structure, and the size can be scaled conveniently according to the demand.

Description of drawings

Fig. 1 is a schematic sectional view of an assembly of an efficient and stable arc plasma source of the present invention.

Fig. 2 is an anode of an efficient and stable arc plasma source of the present invention.

Fig. 3 is a cathode of an efficient and stable arc plasma source of the present invention.

Fig. 4 is an anode copper ring electrode of an efficient and stable arc plasma source of the utility model.

Fig. 5 is a cathode copper ring electrode of an efficient and stable arc plasma source of the present invention.

In the figure: 01 anode, 02 anode copper ring electrode, 03 internal ceramic cylinder, 04 middle ceramic cylinder, 05 external ceramic cylinder, 06 cathode, 07 cathode copper ring electrode, 08 molybdenum gas injection pipe, 09 cathode ceramic cover, 10 lead into the middle of the electrode Insulation, 11 ceramic washers, 12 energy introduction crimping copper lugs, 13 ceramic insulation boxes, 14 anode ceramic covers, 15 molybdenum washers.

Detailed ways

The technical solution will be described in detail below in conjunction with the accompanying drawings and embodiments.

As shown in Figure 1, an efficient and stable arc plasma source, including 01 anode, 02 anode copper ring electrode, 03 inner ceramic cylinder, 04 middle ceramic cylinder, 05 outer ceramic cylinder, 06 cathode, 07 cathode copper ring electrode, 08 Molybdenum gas injection pipe, 09 Cathode ceramic cover, 10 Introduce electrode intermediate insulation, 11 Ceramic gasket, 12 Energy introduction pressure wire copper nose, 13 Ceramic insulation box, 14 Anode ceramic cover, 15 Molybdenum gasket, used between cathode 06 and anode 01 The ceramic gasket 11 and the molybdenum gasket 15 are alternately stacked and filled, the inner ceramic cylinder 03 is set outside the gasket, the two ends of the inner ceramic cylinder 03 are respectively embedded in the grooves of the cathode 06 and the anode 01, and the inner ceramic cylinder 03 is covered with the middle ceramic cylinder 04 , the two ends of the middle ceramic cylinder 04 are connected to the inner end faces of the cathode 06 and the anode 01, and finally, the outer ceramic cylinder 05 with assembly holes is set outside the middle ceramic cylinder 04, and the two ends are respectively connected to the outer surface of the cathode 06 and the anode 01. The end faces are flush, and the cathode ceramic cover 09 with assembly holes is tiled on the outer end surface of the cathode 06 and is coaxial with the cathode 06. The anode ceramic cover 14 with assembly holes is tiled on the outer end surface of the anode 01 and is coaxial with the anode 01. The cathode ceramic cover 09 and the anode ceramic cover 14 make their mounting holes coaxial with the mounting holes of the external ceramic cylinder 05, and screw rods are used to fix the entire plasma source.

The ceramic devices are all processed by using boron nitride as a material.

Described screw mandrel is the 316 stainless steel screw mandrel of M8, and it passes 6 through holes on the anode ceramic cover 14, external ceramic cylinder 05 and cathode ceramic cover 09, screw on the nut on cathode 06 and anode 01 and fix, finally Plus ceramic insulation.

The energy introduction pressure wire copper nose 12 is made of red copper, one end tightly presses the electrode wire introduced from the outside, and the other end is tightly pressed with the electrode arm of the anode lead copper ring electrode 02 or the cathode lead copper ring electrode 07 through a nut.

The lead-in electrode intermediate insulation 10 is two boron nitride ceramic tanks, which are placed on the electrode arm of the cathode lead-in copper ring electrode 07 or the anode lead-in copper ring electrode 02 to play an over-insulation role, and the two lead-in electrodes are insulated through ceramic glue glued together.

The ceramic insulating box 13 is made of boron nitride ceramics, and is formed by two symmetrical splicing. One side of each piece is opened with a square groove, and the adjacent side is opened with a semicircular groove, so that the copper ring can be introduced into the cathode. The electrode 07 or the electrode arm of the anode lead-in copper ring electrode 02 and the energy lead-in pressure wire copper lug 12 act as over-insulation, and the two ceramic insulating boxes are bonded together by ceramic glue.

The above examples are illustrative, not restrictive, and other variations are within the scope of protection.

Claims (8)

1. a kind of arc plasma source of efficient stable, it is characterised in that：Including anode, anode copper ring electrode, inner ceramic Cylinder, external ceramic cylinder, cathode, tough cathode ring electrode, molybdenum air injection pipe, cathodic ceramic lid, introduces among electrode absolutely intermediate ceramic cylinder Edge, ceramic washer, energy introduce crimping copper nose, ceramic insulation box, anode ceramic cap and molybdenum washer, cathode and the coaxial dress of anode Match, with the alternately folded filling of ceramic washer and molybdenum washer between cathode and anode, inner ceramic jacket casing is in bead outward, inner ceramic Cylinder both ends are respectively embedded into the groove of cathode and anode, put on intermediate ceramic cylinder outside inner ceramic cylinder again, and the two of intermediate ceramic cylinder End connects with the internal end surface of cathode and anode, finally, is provided with the external ceramic jacket casing of pilot hole outside intermediate ceramic cylinder, external The both ends of ceramic cylinder are concordant with the outer end face of cathode and anode respectively, have the cathodic ceramic lid of pilot hole to be laid in the outer end of cathode Face is simultaneously coaxial with cathode, has the anode ceramic cap of pilot hole to be laid in anode outer end face and, adjusting cathodic ceramic coaxial with anode Lid and anode ceramic cap keep their pilot hole coaxial with the pilot hole of external ceramic cylinder, and entire plasma is fixed using lead screw Body source.

2. arc plasma source according to claim 1, it is characterised in that：Above-mentioned anode copper ring electrode is an internal diameter 12 countersunk head threaded holes are uniformly opened in the copper ring of 70mm outer diameters 90mm, circle ring center position, and there are two symmetrical in the outside of ring Horn.

3. arc plasma source according to claim 1, it is characterised in that：Above-mentioned anode is made by metal molybdenum, is one The U-shaped structure of a cylinder, outer end face are opened there are one flaring exit, and anode outer end face also opens that there are one internal diameter 70mm outer diameters 90mm, the annular groove of thickness 3mm are uniformly distributed 12 threaded holes in slot middle circle, and anode copper ring electrode just assembles this On a annular groove.

4. arc plasma source according to claim 1, it is characterised in that：Above-mentioned anode copper ring electrode is an internal diameter 12 countersunk head threaded holes are uniformly opened in the copper ring of 70mm outer diameters 90mm, circle ring center position, and there are one horns in the outside of ring.

5. arc plasma source according to claim 1, it is characterised in that：Above-mentioned cathode has metal molybdenum to make, in Portion's cylinder opens horn mouth, opened between interior cylinder and outside cylinder there are one with the thick consistent fixed notch of inner ceramic barrel, and An injecting hole coaxial with cathode is opened among entire cathode, is also opened there are one internal diameter 70mm outer diameter 90mm in cathode outer end face, The annular groove of thickness 3mm, 12 threaded holes are uniformly distributed in slot middle circle, and tough cathode ring electrode just assembles this annular On slot.

6. arc plasma source according to claim 1, it is characterised in that：Crimping copper lug is that one end is provided with diameter The hole of 8mm depths 15mm, other end are the studs of a M8.

7. arc plasma source according to claim 1, it is characterised in that：Tough cathode ring electrode and anode copper ring electrode Horn all open there are one 8mm through-holes, crimping copper lug is connected by this hole with copper ring electrode, external energy introducing use In generation plasma.

8. arc plasma source according to claim 1, it is characterised in that：Above-mentioned molybdenum air injection pipe passes through screw thread and cathode Injecting hole is connected, and other side is connected with the air injection pipe of external isolation material, and is connected with gas injection stop valve, in a pulsed mode As received basis gas is injected ionization channels.