CN207766634U - A kind of microwave-excited plasma device - Google Patents
A kind of microwave-excited plasma device Download PDFInfo
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- CN207766634U CN207766634U CN201721854294.XU CN201721854294U CN207766634U CN 207766634 U CN207766634 U CN 207766634U CN 201721854294 U CN201721854294 U CN 201721854294U CN 207766634 U CN207766634 U CN 207766634U
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- Prior art keywords
- microwave
- transmission mechanism
- magnetron
- converter
- microwave transmission
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- 230000005540 biological transmission Effects 0.000 claims abstract description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 40
- 239000000110 cooling liquid Substances 0.000 claims abstract description 34
- 238000001816 cooling Methods 0.000 claims abstract description 26
- 239000007788 liquid Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 8
- 239000012809 cooling fluid Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000003032 molecular docking Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 8
- 230000002045 lasting effect Effects 0.000 abstract description 2
- 239000002826 coolant Substances 0.000 description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Plasma Technology (AREA)
Abstract
The utility model is related to a kind of microwave-excited plasma devices, including magnetron, converter, microwave window and cavity, the output end of the magnetron and the input terminal of converter pass through the first microwave transmission mechanism connection, the output end of the converter is docked by the second microwave transmission mechanism with microwave window, the microwave window is placed on cavity, and the bottom side of second microwave transmission mechanism is equipped with air outlet；Further include air cooling system, gas is oriented to magnetron by air cooling system, and the gas flows out after flowing successively through magnetron, the first microwave transmission mechanism, converter and the second microwave transmission mechanism from air outlet.The utility model good cooling results integrally cool down device by air cooling system, while being cooled down to each position of device, and the promotion of device precision and the lasting normal work of device are conducive to；Corresponding cooling liquid flowing channel is additionally arranged in the heats concentrated position such as magnetron, converter and microwave window, can further promote cooling-down effect, promotes service life.
Description
Technical field
The utility model is related to a kind of microwave-excited plasma devices, more particularly to a kind of microwave plasma excitated
The cooling system of device.
Background technology
Microwave heating, excitation are fast with speed compared to other heating, mode of excitation, uniformity is good, easy to operate, clean
Property the advantages such as good, energy conservation and environmental protection, therefore microwave system is widely used in heating, ion excitation equipment.Usually, microwave system
Including microwave source, microwave transmission system, the components such as coupled antenna system, microwave window are further comprised in equipment component.Microwave
The components such as magnetron, transformer in system are main heat generating components, and the temperature in use of microwave magnetron is excessively high can be significantly
The service life of magnetron is reduced, in the prior art, often uses single water cooling or the air-cooled type of cooling, and water cooling will reach
To cooling effect good enough, the cooling water flow conduits for being laid with a large amount of/large area are needed, the cooling water flow conduits of a large amount of/large area
It is laid with the design of the use to equipment and causes larger limitation, and single water cooling less effective, cooling requirement cannot be met.Together
When, the service life of the components such as microwave transmission system, microwave window can be also greatly shortened in single water-cooling pattern.
In the prior art, the cooling at microwave window is typically only cooled down using cooling water, however microwave window
Area is larger, and window material（Such as quartz）Often thermal coefficient is not high, is reduced so as to cause microwave window central temperature tired
Difficulty, material temperature are unevenly distributed, the problems such as so as to cause material internal stress, burn into volume change, to the service life of material
Deleterious effect is generated with sealing effect.
Utility model content
In view of the deficiencies of the prior art, the utility model provides a kind of microwave-excited plasma device, existing to solve
The undesirable problem of cooling effect in the microwave-excited plasma device course of work.
In order to solve the above-mentioned technical problem, the technical solution of the utility model is as follows：A kind of microwave plasma excitated dress
It sets, including magnetron, converter, microwave window and cavity, the output end of the magnetron and the input terminal of converter pass through
The output end of one microwave transmission mechanism connection, the converter is docked by the second microwave transmission mechanism with microwave window, described
Microwave window is placed on cavity, and the bottom side of second microwave transmission mechanism is equipped with air outlet；Further include air cooling system, air cooling system
System introduces gas into magnetron, and the gas flows successively through magnetron, the first microwave transmission mechanism, converter and the second microwave and passes
It is flowed out from air outlet after transfer mechanism.
As a kind of embodiment of the utility model, the air cooling system includes air blower and gas flow, the drum
The air outlet of wind turbine is connected to by gas flow with magnetron.
As the another embodiment of the utility model, the air cooling system includes compression gas tank and gas flow,
The gas outlet of the compression gas tank is connected to by gas flow with magnetron.
Further, fan is equipped with around the magnetron, gas is directly blowed to magnetron by the fan, to promote
Magnetron cools down.
Further, the first cooling liquid flowing channel, first cooling liquid flowing channel and cooling are equipped with around the magnetron
Liquid organization of supply is connected to.
Further, first cooling liquid flowing channel in the shape of a spiral, and is wound on the outside of magnetron.
Further, first cooling liquid flowing channel includes more straight tubes, is bound in outside magnetron.
Further, the cooling fluid supply mechanism includes coolant liquid holding vessel, one kind in coolant liquid accumulator tank or more
Kind.
Further, the cooling liquid includes water, ethylene glycol type coolant liquid, glycerol type coolant liquid, alcohol type coolant
In it is one or more.Further, the coolant liquid is alternatively the cooling liquid of other commercializations.
Further, third cooling liquid flowing channel is equipped with around the converter, converter is equipped with cools down liquid stream with third
The first inlet and the first liquid outlet of road connection.
Further, second microwave transmission mechanism is mainly made from a material that be thermally conductive, to accelerate the heat dissipation of microwave window.
Preferably, the Heat Conduction Material is metal material, such as copper, aluminium, iron, titanium, magnesium alloy.
Preferably, the quantity of the air outlet is multiple, is in spoke centered on the central axis of the second microwave transmission mechanism
Shape distribution is penetrated, is removed with heat near microwave window contact site with accelerating the second microwave transmission mechanism, and ensure microwave window
Temperature is uniformly distributed mouth everywhere.Further, the base end wall of the second microwave transmission mechanism can be designed thicker, with increase and microwave
The contact area of window, further improving radiating effect.
Further, second microwave transmission mechanism includes microwave transmission pipeline.
Further, the second cooling liquid flowing channel is equipped with around the microwave window, the wall of second cooling liquid flowing channel is straight
It connects or is contacted indirectly with microwave window.Coolant liquid can be being injected into the second cooling liquid flowing channel in this way, by the heat at microwave window
Amount is taken out of, to reduce temperature.The side wall including runner that is in direct contact directly is contacted with microwave window, and described connects indirectly
It include between runner side wall and microwave window further includes the components such as washer, fluid sealant to touch, and is either directly or indirectly contacted, most
The effect realized eventually, which is the partial heat on microwave window, can be transmitted in the coolant liquid in the second coolant flow channel.
As a kind of embodiment of the utility model, second cooling liquid flowing channel is set to the second microwave transmission mechanism
In side wall, the second microwave transmission mechanism is equipped with the second inlet and the second liquid outlet being connected to the second cooling liquid flowing channel.It is micro-
The heat of wave window is by the second microwave transmission transfer mechanism such as coolant liquid of the second cooling liquid flowing channel, accelerating at microwave window
The transmission of heat, to accelerate to cool down.Preferably, the second inlet is set to the lower section of the second liquid outlet.
As a kind of scheme of the utility model, first cooling liquid flowing channel, the second cooling liquid flowing channel, third coolant liquid
Runner is parallel in same cooling fluid supply mechanism.
The microwave-excited plasma device good cooling results of the utility model integrally carry out device by air cooling system
It is cooling, while each position of device is cooled down, be conducive to the promotion of device precision and the lasting normal work of device；
In addition, additionally arranging corresponding cooling liquid flowing channel in the heats concentrated position such as magnetron, converter and microwave window, drop can be further promoted
Temp effect is beneficial to be maintained at lower temperature when each device work, promotes service life.
Description of the drawings
Fig. 1 is the structure diagram of the microwave-excited plasma device of the utility model the first embodiment.
Fig. 2 is that the microwave window of the utility model docks the structural schematic diagram at place with the second microwave transmission mechanism.
Fig. 3 is the transverse cross sectional schematic top plan view of the converter of the utility model the first embodiment.
Specific implementation mode
The utility model is described in detail below with reference to attached drawing and in conjunction with the embodiments.It should be noted that not conflicting
In the case of, the feature in the embodiments of the present invention and embodiment can be combined with each other.For sake of convenience, hereinafter such as
There are "upper", "lower", "left", "right" printed words, only indicates consistent with the upper and lower, left and right direction of attached drawing itself, not to structure
Play restriction effect.
As shown in Figure 1, a kind of microwave-excited plasma device, including magnetron 2, converter 6, microwave window 14 and chamber
The output end of body 7, the magnetron 2 is connected to the input terminal of converter 6 by the first microwave transmission mechanism 3, the converter 6
Output end docked with microwave window 14 by the second microwave transmission mechanism 13, the microwave window 14 is placed on cavity 7, described
The bottom side of second microwave transmission mechanism 13 is equipped with air outlet 9；Further include air cooling system 1, air cooling system 1 introduces gas into magnetron
2, the gas flows successively through after magnetron 2, the first microwave transmission mechanism 3, converter 6 and the second microwave transmission mechanism 13 from going out
It flows out in air port 9.
Wherein, around the magnetron 2 be equipped with the first cooling liquid flowing channel, first cooling liquid flowing channel by third into
Liquid mouth 11 and cooling fluid supply mechanism connection, and the coolant liquid after heat exchange is discharged by third liquid outlet 12.
The cooling liquid is alcohol type coolant.
Second microwave transmission mechanism 13 is mainly made from a material that be thermally conductive.The quantity of the air outlet is multiple, with the
It is radially distributed centered on the central axis of two microwave transmission mechanisms.
The second cooling liquid flowing channel is equipped with around the microwave window, the wall of second cooling liquid flowing channel is indirectly and microwave window
Mouth contact.
Second cooling liquid flowing channel is set in 13 side wall of the second microwave transmission mechanism, in the second microwave transmission mechanism 13
Equipped with the second inlet 8 and the second liquid outlet 10 being connected to the second cooling liquid flowing channel（See Fig. 2）.
The first embodiment is repeated, includes microwave converting antenna 15 in converter 6, third is arranged in 6 surrounding of converter
Cooling liquid flowing channel, converter 6 are equipped with the first inlet 4 and the first liquid outlet 5 being connected to third cooling liquid flowing channel（See figure
3）.
The content that above-described embodiment illustrates should be understood as that these embodiments are only used for being illustrated more clearly that the utility model,
Rather than limitation the scope of the utility model, after having read the utility model, those skilled in the art are new to this practicality
The modification of the various equivalent forms of type each falls within the application range as defined in the appended claims.
Claims (7)
1. a kind of microwave-excited plasma device, including magnetron（2）, converter（6）, microwave window（14）And cavity（7）,
The magnetron（2）Output end and converter（6）Input terminal pass through the first microwave transmission mechanism（3）Connection, the conversion
Device（6）Output end pass through the second microwave transmission mechanism（13）With microwave window（14）Docking, the microwave window（14）It is placed in
Cavity（7）On, which is characterized in that second microwave transmission mechanism（13）Bottom side be equipped with air outlet（9）；It further include air cooling system
System（1）, air cooling system（1）Gas is oriented to magnetron（2）, the gas flows successively through magnetron（2）, the first microwave transmission machine
Structure（3）, converter（6）With the second microwave transmission mechanism（13）, microwave window（14）Afterwards from air outlet（9）Outflow.
2. microwave-excited plasma device according to claim 1, which is characterized in that the magnetron（2）Around
Equipped with the first cooling liquid flowing channel, first cooling liquid flowing channel and cooling fluid supply mechanism connection.
3. microwave-excited plasma device according to claim 1, which is characterized in that the converter（6）Surrounding is set
There are third cooling liquid flowing channel, converter（6）It is equipped with the first inlet being connected to third cooling liquid flowing channel（4）Go out liquid with first
Mouthful（5）.
4. microwave-excited plasma device according to claim 1, which is characterized in that second microwave transmission mechanism
（13）Mainly it is made from a material that be thermally conductive.
5. microwave-excited plasma device according to claim 1, which is characterized in that the air outlet（9）Quantity
To be multiple, with the second microwave transmission mechanism（13）Central axis centered on be radially distributed.
6. microwave-excited plasma device according to claim 1, which is characterized in that be equipped with around the microwave window
The wall of second cooling liquid flowing channel, second cooling liquid flowing channel is directly or indirectly contacted with microwave window.
7. microwave-excited plasma device according to claim 6, which is characterized in that second cooling liquid flowing channel is set
It is placed in the second microwave transmission mechanism（13）In side wall, the second microwave transmission mechanism（13）It is equipped with and is connected to the second cooling liquid flowing channel
The second inlet（8）With the second liquid outlet（10）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721854294.XU CN207766634U (en) | 2017-12-27 | 2017-12-27 | A kind of microwave-excited plasma device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721854294.XU CN207766634U (en) | 2017-12-27 | 2017-12-27 | A kind of microwave-excited plasma device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207766634U true CN207766634U (en) | 2018-08-24 |
Family
ID=63184734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721854294.XU Active CN207766634U (en) | 2017-12-27 | 2017-12-27 | A kind of microwave-excited plasma device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207766634U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107949145A (en) * | 2017-12-27 | 2018-04-20 | 长沙新材料产业研究院有限公司 | A kind of microwave-excited plasma device |
-
2017
- 2017-12-27 CN CN201721854294.XU patent/CN207766634U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107949145A (en) * | 2017-12-27 | 2018-04-20 | 长沙新材料产业研究院有限公司 | A kind of microwave-excited plasma device |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 7th Floor, Building B8, Lugu Enterprise Plaza, Yuelu District, Changsha City, Hunan Province, 410000 Patentee after: Aerospace Science and Industry (Changsha) New Materials Research Institute Co.,Ltd. Address before: 410205 7th floor, building B8, Lugu Enterprise Square, Yuelu District, Changsha City, Hunan Province Patentee before: CHANGSHA ADVANCED MATERIALS INDUSTRIAL RESEARCH INSTITUTE Co.,Ltd. |
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| CP03 | Change of name, title or address |