CN207600951U - A kind of micro-Raman spectroscopy of fast automatic focusing - Google Patents

Abstract

A kind of micro-Raman spectroscopy of fast automatic focusing disclosed in the utility model, including micro imaging system, Raman spectrum system, control device and computer system, control device is connect with computer system, micro imaging system is located above control device, and Raman spectrum system is located at micro imaging system side.The utility model is compact-sized, full-featured, can automatic focusing, obtain sample regional area spectral information and can obtain complete object image information under high-resolution microscope, greatly improve the test effect of Raman spectrometer.

Description

A Rapid Autofocus Micro Raman Spectrometer

technical field

The utility model relates to the technical field of Raman spectrum detection, in particular to a micro-Raman spectrometer with rapid auto-focus.

Background technique

Raman spectroscopy is an analytical method that obtains information about the vibration and rotation of molecules and applies it to the study of molecular structures. Raman spectroscopy can achieve qualitative and quantitative analysis of substances through vibration and rotation information of substances. The Raman spectrometer has a simple structure and is easy to operate. The measurement is fast, efficient and accurate, and high-resolution spectral information can be obtained. Although the spectral information of the sample surface can be obtained, the Raman spectrometer collects the average spectrum of the sample surface, which cannot be obtained in the sample. Spectral information corresponding to local regions or local points.

At the same time, traditional microscopes can realize the observation of tiny objects, but they need to subjectively observe the target through the eyepiece and manually adjust the knob to focus. This manual focusing method is time-consuming and laborious and prone to manual errors. And under the high-resolution microscope, although the clear image information of the object at high resolution can be obtained, the internal structure information of the local area or local point of the object at high resolution cannot be obtained, and it cannot be obtained under the high-resolution microscope A complete object image information. Therefore, there is an urgent need for a Raman spectrometer that can automatically adjust the focus, obtain the spectral information of the local area of the sample, and obtain the complete object image information under a high-resolution microscope.

Utility model content

The utility model provides a microscopic Raman spectrometer with rapid auto-focus to solve the problem that the existing Raman spectrometer needs to focus manually, cannot obtain partial image information of the measured object, and cannot obtain complete object image information under a high-resolution microscope. The problem.

In order to solve the above technical problems, the utility model provides a rapid auto-focusing micro-Raman spectrometer, which includes a micro-imaging system, a Raman spectroscopy system, a control device and a computer system, the control device is connected to the computer system, and the The microscopic imaging system is located above the control device, and the Raman spectroscopy system is located on one side of the microscopic imaging system. The control device includes a stage, a first motor, a second motor, an autofocus device, a coarse adjustment knob, A control box and a base, the control box is connected to the computer system, the first motor, the second motor and the autofocus device are respectively connected to the control box circuit, the stage is connected to the first motor and the second motor and installed It is arranged above the base, and the coarse adjustment knob is matched with the stage.

Preferably, the control box includes a communication module, a single-chip microcomputer connected to the communication module, a driver connected to the single-chip computer, and a power supply connected to the driver.

Preferably, the microscopic imaging system includes an LED lamp, a first collimating mirror, a first beam splitter, a second beam splitter, a pipeline, a CCD camera and a microscopic objective lens, and the microscopic objective lens is located above the stage , the first beam splitter is located above the microscope objective lens and forms an angle of 45 degrees with the horizontal plane, the second beam splitter is located above the first beam splitter and forms an angle of 90 degrees with the first beam splitter, and the pipeline is located Above the second beam splitter, the CCD camera is located directly above the pipeline, the first collimator is vertically arranged on the lower side of the second beam splitter, and the LED light is arranged on the first collimator away from the second beam splitter. slice side.

Preferably, the Raman spectroscopy system includes a processing device, a reflector, a third beam splitter, a second collimating mirror, a coupling lens, a first optical fiber probe, a second optical fiber probe and an optical filter, and the processing device and the The computer system is connected, the third beam splitter is located on the side of the lower side of the first beam splitter, and the filter, coupling lens and first optical fiber probe are sequentially arranged on the side of the third beam splitter away from the first beam splitter , the reflector is located directly above the third beam splitter, the second collimator and the second fiber optic probe are sequentially arranged on the side of the lower side of the reflector, the first fiber optic probe and the second fiber optic probe are connected to the processing device connection.

Preferably, the computer system includes a display screen and a computer connected thereto.

The utility model provides a rapid auto-focusing micro-Raman spectrometer, which mainly includes a microscopic imaging system, a Raman spectroscopy system, a control device and a computer system. The autofocus microscope objective lens in the system obtains high-resolution clear images as the research object, and can quickly and easily obtain the corresponding spectral information of the sample through the selection of local areas or local points through the image. The spectral information obtained through the autofocus microscope can be Accurately detect the Raman signals of different layer depths and focal planes of the sample, which has good spatial resolution and can precisely locate the specific position of the sample through the control device to control the auto-focusing microscopic objective, and collect the Raman signals of this area. Thus, the combination of high-resolution image and spectrum of the sample under the microscope is realized. The utility model has compact structure and comprehensive functions, can automatically adjust the focus, obtain the spectral information of the local area of the sample, and can obtain the complete object image information under the high-resolution microscope, which greatly improves the test effect of the Raman spectrometer.

Description of drawings

Fig. 1 is a schematic structural view of a micro-Raman spectrometer with fast auto-focus provided by the utility model;

Among them, microscopic imaging system 1, Raman spectroscopy system 2, control device 3, computer system 4, LED lamp 11, first collimating mirror 12, first beam splitter 13, second beam splitter 14, pipeline 15, CCD camera 16. Microscopic objective lens 17, processing device 21, reflector 22, third beam splitter 23, second collimating mirror 24, coupling lens 25, first optical fiber probe 26, second optical fiber probe 27, optical filter 28, carrier Object stage 31, first motor 32, second motor 33, autofocus device 34, coarse adjustment knob 35, control box 36, base 37, display screen 41, computer 42, sample a.

Detailed ways

Below in conjunction with accompanying drawing and embodiment, the specific embodiment of the utility model is described in further detail. The following examples are used to illustrate the utility model, but not to limit the scope of the utility model.

Please refer to shown in Fig. 1, a kind of microscopic Raman spectrometer of rapid auto-focus provided by the utility model comprises microscopic imaging system 1, Raman spectroscopy system 2, control device 3 and computer system 4, control device 3 and computer The system 4 is connected, the microscopic imaging system 1 is a high-resolution microscopic imaging system, and is located above the control device 3 , and the Raman spectroscopy system 2 is located on the side of the microscopic imaging system 1 . Wherein, the control device 3 includes a stage 31, a first motor 32, a second motor 33, an autofocus device 34, a coarse adjustment knob 35, a control box 36 and a base 37, the control box 36 is connected with the computer system 4, the first The motor 32, the second motor 33 and the autofocus device 34 are respectively connected to the control box 36 circuits, the stage 31 is connected to the first motor 32 and the second motor 33 and installed above the base 37, the coarse adjustment knob 35 is connected to the load The object table 31 is matched and connected.

Further, the control box 36 includes a communication module, a single-chip microcomputer connected with the communication module, a driver connected with the single-chip microcomputer, and a power supply connected with the driver.

Microscopic imaging system 1 comprises LED lamp 11, the first collimating mirror 12, the first spectroscopic sheet 13, the second spectroscopic sheet 14, pipeline 15, CCD camera 16 and microscopic objective lens 17, and microscopic objective lens 17 is positioned at described loading object Above the stage 31, the first beam splitter 13 is located above the microscope objective lens 17 and forms an angle of 45 degrees with the horizontal plane, and the second beam splitter 14 is located above the first beam splitter 13 and forms an angle of 90 degrees with the first beam splitter 13. The pipeline 15 is positioned above the second beam splitter 14, the CCD camera 16 is positioned right above the pipeline 15, the first collimating mirror 12 is vertically arranged on one side of the lower side of the second beam splitter 14, and the LED light is arranged on the side of the first collimating mirror 12 away from One side of the second beam splitter 14 .

The Raman spectroscopy system 2 includes a processing device 21, a reflector 22, a third spectroscopic plate 23, a second collimating mirror 24, a coupling lens 25, a first fiber probe 26, a second fiber probe 27 and an optical filter 28, and the processing device 21 is connected to the computer system 4, the third beam splitter 23 is located at the side of the lower side of the first beam splitter 13, and the optical filter 28, the coupling lens 25 and the first optical fiber probe 26 are sequentially arranged on the third beam splitter 23 away from the first beam splitter 13 side, the reflector 22 is located directly above the third beam splitter 23, the second collimating mirror 24 and the second fiber optic probe 27 are successively arranged on the side of the lower side of the reflector 22, the first fiber optic probe 26 and the second fiber optic probe 27 Connect to the processing unit.

The computer system 4 includes a display screen 41 and a computer 42 connected thereto.

The working process of the utility model is as follows: firstly open the autofocus mode, click on the autofocus mode of the computer system of the display screen, start the LED light 11, and the incident light is reflected by the first collimating mirror 12, the second beam splitter 14 and the first beam splitter 13 After entering the microscope objective lens 17, the light source converges to the surface of the sample, and the reflected light generated passes through the microscopic object 17 and then passes through the first beam splitter 13 and the second beam splitter 14, and then enters the CCD camera with a high-pass filter through the pipeline 15 for instant image collection, the image signal collected is processed by computer 42 and displayed on the computer display screen 41; the calculation is based on the evaluation value of the sharpness function of the image, the larger the evaluation value, the clearer the image, and the computer 42 transmits the instruction to the control box 36 and drives the automatic The focusing device 34 drives the stage 31 carrying the sample a to move upwards or downwards. At this time, the microscopic imaging system 1 collects the image of the sample and transmits it to the computer system 4 for calculation to generate image function evaluation values. By comparing the function evaluation values, the computer 42. The command is transmitted to the control device 3 to drive the stage carrying the sample to move up and down to obtain different focus planes, and to find the position of the focus plane with the largest function evaluation value, which is the best focus image. At this time, the focus mode is turned off, and it automatically Focusing ends. The acquisition of the best focal plane of multiple different images is to transmit the instructions to the single-chip microcomputer in the control box through the computer 42, and the single-chip microcomputer drives the first motor 32 and the second motor 33 to drive the stage 31 carrying the sample a to move back and forth. When the computer 42 sends an instruction to the microscopic imaging system 1 to collect the best focus image under the microscope and save it through the computer 42 .

Next, open the image stitching mode: click the image stitching mode of the computer system on the display screen 41, and use the computer image stitching function to stitch multiple best-focus images saved by the computer into a complete high-resolution image information.

Finally, open the spectrum acquisition mode, click to select the spectrum acquisition mode of the computer system on the display screen 41, and select a local area or point on the image through the image information collected in the last two steps. At this time, the computer 14 outputs signals and instructions and transmits them to Raman. The spectrum system and the control device, the communication module in the control device, the single chip microcomputer, the driver, and the device 23 composed of a power supply receive instructions from the computer to drive the motor 19 and the motor 20 drives the stage to move the position of the local area or point selected on the image to the display. Under the micro-objective lens 17, at this time, the processing device 21 composed of the Raman module and the spectrometer in the Raman spectroscopy system 2 outputs continuous laser light through the second optical fiber probe 27, is collimated by the second collimating mirror 24, reflected by the mirror 22 and passes through the third The spectroscopic sheet 23 and the first spectroscopic sheet 13 are reflected into the microscope objective lens 17 and converged to the surface of the sample a, and the generated reflected light passes through the microscopic objective lens 17, is reflected by the first spectroscopic sheet 13 and transmitted by the third spectroscopic sheet 23, and passes through the filter sheet 28 And the coupling lens 25 enters the processing device 21 composed of the Raman module and the spectrometer through the first optical fiber probe 26, and the acquired spectral information is transmitted to the computer 42, and the computer 42 processes and displays it on the display screen 41 to complete the acquisition of the spectral information.

Finally, the method of the present application is only a preferred implementation, and is not intended to limit the protection scope of the present utility model. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.

Claims (5)

1. A microscopic Raman spectrometer with fast autofocus, characterized in that it comprises a microscopic imaging system, a Raman spectroscopy system, a control device and a computer system, the control device is connected with the computer system, and the microscopic The imaging system is located above the control device, and the Raman spectroscopy system is located on one side of the microscopic imaging system; the control device includes a stage, a first motor, a second motor, an autofocus device, and a coarse adjustment knob , a control box and a base, the control box is connected to the computer system, the first motor, the second motor and the autofocus device are respectively connected to the control box circuit, and the stage is connected to the first motor And the second motor is connected and installed above the base, and the coarse adjustment knob is matched with the stage. 2. the microscopic Raman spectrometer of a kind of fast autofocus according to claim 1, is characterized in that, described control box comprises communication module, the single-chip microcomputer that is connected with described communication module, the driver that is connected with described single-chip microcomputer, and a power supply connected to the drive. 3. The microscopic Raman spectrometer of a kind of fast auto-focus according to claim 1, is characterized in that, described microscopic imaging system comprises LED lamp, the first collimating lens, the first beam splitter, the second beam splitter , a pipeline, a CCD camera and a microscopic objective lens, the microscopic objective lens is located above the stage, the first beam splitter is located above the microscopic objective lens and forms an angle of 45 degrees with the horizontal plane, and the second beam splitter The sheet is located above the first beam splitter and forms an angle of 90 degrees with the first beam splitter, the pipeline is located above the second beam splitter, the CCD camera is located directly above the pipeline, and the first beam splitter is located above the pipeline. A collimating mirror is vertically arranged on the side of the lower side of the second beam splitter, and the LED light is arranged on a side of the first collimating mirror away from the second beam splitter. 4. the microscopic Raman spectrometer of a kind of fast autofocus according to claim 3, is characterized in that, described Raman spectroscopic system comprises processing device, reflection mirror, the 3rd beam splitter, the 2nd collimating mirror, coupling lens, a first optical fiber probe, a second optical fiber probe and an optical filter, the processing device is connected to the computer system, the third optical splitter is located on the lower side of the first optical splitter, and the optical filter , the coupling lens and the first optical fiber probe are sequentially arranged on the side of the third beam splitter away from the first beam splitter, the reflector is located directly above the third beam splitter, the second collimating mirror, the second optical fiber The probes are sequentially arranged on the side facing the lower side of the reflector, and the first fiber optic probe and the second fiber optic probe are connected to the processing device. 5. The microscopic Raman spectrometer of a kind of fast automatic focus according to claim 1, is characterized in that, described computer system comprises display screen and the computer that is connected with it.