CN207337957U - Transparency electrode including its touch sensor and image display - Google Patents
Transparency electrode including its touch sensor and image display Download PDFInfo
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- CN207337957U CN207337957U CN201720975100.5U CN201720975100U CN207337957U CN 207337957 U CN207337957 U CN 207337957U CN 201720975100 U CN201720975100 U CN 201720975100U CN 207337957 U CN207337957 U CN 207337957U
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- transparency electrode
- layer
- touch sensor
- metal oxide
- oxide layer
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- 150000004706 metal oxides Chemical class 0.000 claims abstract description 72
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- 239000002184 metal Substances 0.000 claims abstract description 49
- 238000002310 reflectometry Methods 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 22
- 239000010410 layer Substances 0.000 claims description 152
- 239000000203 mixture Substances 0.000 claims description 16
- 239000012528 membrane Substances 0.000 claims description 15
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 14
- 229920000089 Cyclic olefin copolymer Polymers 0.000 claims description 11
- -1 polyethylene terephthalate Polymers 0.000 claims description 11
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 8
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 8
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- 239000004411 aluminium Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 6
- 239000003595 mist Substances 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
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- JYMITAMFTJDTAE-UHFFFAOYSA-N aluminum zinc oxygen(2-) Chemical compound [O-2].[Al+3].[Zn+2] JYMITAMFTJDTAE-UHFFFAOYSA-N 0.000 claims description 3
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- TYHJXGDMRRJCRY-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) tin(4+) Chemical compound [O-2].[Zn+2].[Sn+4].[In+3] TYHJXGDMRRJCRY-UHFFFAOYSA-N 0.000 claims description 3
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Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04112—Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Non-Insulated Conductors (AREA)
- Position Input By Displaying (AREA)
Abstract
A kind of transparency electrode including its touch sensor and image display, more particularly to a kind of following transparency electrode are the utility model is related to, i.e.,：The transparency electrode includes lattice, the lattice includes the first metal oxide layer, metal layer and the second metal oxide layer stacked gradually, reflectivity on the 550nm wavelength of the transparency electrode is 5% to 20%, the transparency electrode has high transmittance and antiradar reflectivity, so as to improved observability, it is suitable suitable for flexible and large area image display with low areal resistance and outstanding bending characteristic, and because strong with the adhesion of base material.
Description
Technical field
It the utility model is related to the touch sensor of a kind of transparency electrode including the transparency electrode and including the touch
The image display of sensor.
Background technology
Currently, with the development of informationized society, the requirement to display field is also just being increased with variform, conformably,
Currently it is unfolded to many panel display apparatus (Flat Panel with features such as slimming, lightweight, low power consumptions
Display device), for example, liquid crystal display device (Liquid Crystal Display device), plasma display dress
Put (Plasma Display Panel device), el display device (Electro Luminescent Display
) etc. device research.
In addition, as the instruction occurred in the hand for being capable of employment or object the selection picture being attached in the display device
Content is favored to input the touch panel of the input unit of the order of user (touch panel).Touch panel possess in
The contact position of the hand of direct contact people or object is converted to electric signal by (front face) before display device.
So as to which the instruction content selected on contact position is taken as input signal reception.Since this touch panel can
The other input unit for being connected to image display with replacement such as keyboard and mouse to act, its utilization scope is in gradual
Widened trend.
Since the electrode of this touch panel need to be formed at before display device, as well-known transparency electrode,
Usually using ITO (indium doped Tin Oxide).However, ITO electrode is because of brittleness (brittleness) problem, not only
It is difficult to be suitable for flexible (flexible) touch sensor, also because showing high-resistance characteristic, in terms of large area is realized
With limitation, therefore there is the problem of being difficult with.
On the one hand, in transparency electrode, for metal grill (metal mesh) structure, although the ductility because of metal
Have the advantages that to be readily adapted for use in flexible touch sensor and wide area touch sensor with low resistance characteristic, but because of its observability
The shortcomings that weak, equally exist the problem of being difficult to be suitable for touch sensor.
Touch panel is disclosed in KR published patent the 2013-0116597th.
Prior art literature
Patent document
KR published patent the 2013-0116597th
Utility model content
First, make electrode can not because having high transmittance and antiradar reflectivity the purpose of this utility model is to provide a kind of
Macroscopic transparency electrode.
Secondly, it is adapted to be suitable for flexibility because having outstanding bending characteristic the purpose of this utility model is to provide a kind of
The transparency electrode of display device.
Again, it is suitable for large area image because having low areal resistance the purpose of this utility model is to provide a kind of
The transparency electrode of display device.
From secondary, the purpose of this utility model is to provide a kind of with the strong adhesive force of base material transparency electrode.
In addition, the purpose of this utility model is to provide a kind of touch sensor including aforementioned transparent electrode and including institute
State the image display of touch sensor.
In order to achieve the above object, the utility model adopts the following technical scheme.
(1) a kind of transparency electrode, the transparency electrode include lattice, the lattice include stacking gradually the
One metal oxide layer, metal layer and the second metal oxide layer, the reflectivity on the 550nm wavelength of the transparency electrode are
5% to 20%.
(2) transparency electrode according to above-mentioned (1), the reflectivity on the 550nm wavelength of the transparency electrode are
5% to 13%.
(3) transparency electrode according to above-mentioned (1), first metal oxide layer and the second metal oxide layer
Refractive index on 550nm wavelength is respectively each 1.7 to 2.2, the refractive index on the 550nm wavelength of the metal layer for 0.1 to
1.0, the extinction coefficient of the metal layer is 2.0 to 7.0.
(4) transparency electrode according to above-mentioned (1), first metal oxide layer and the second metal oxide layer
Thickness is respectively each 5nm to 140nm, and the thickness of the metal layer is 5nm to 30nm.
(5) transparency electrode according to above-mentioned (1), first metal oxide layer and the second metal oxide layer
Thickness is respectively each 30nm to 50nm, and the thickness of the metal layer is 8nm to 15nm.
(6) transparency electrode according to above-mentioned (1), the line width of the lattice is 1 μm to 7 μm.
(7) transparency electrode according to above-mentioned (1), first metal oxide layer and the second metal oxide layer are each
From respectively including being selected from by indium tin oxide (ITO), indium-zinc oxide (IZO), aluminium zinc oxide (AZO), gallium zinc oxide
(GZO), indium tin zinc oxide (ITZO), zinc tin oxide (ZTO), indium gallium oxide (IGO), tin oxide (SnO2) and oxidation
One in the group of zinc (ZnO) composition.
(8) transparency electrode according to above-mentioned (1), first metal oxide layer and the second metal oxide layer are each
From respectively including one in the group being made of indium tin oxide (ITO) and indium-zinc oxide (IZO).
(9) transparency electrode according to above-mentioned (1), the metal layer include be selected from by silver, gold, copper, aluminium, platinum, palladium,
It is at least one in the group that chromium, titanium, tungsten, niobium, tantalum, vanadium, calcium, iron, manganese, cobalt, nickel and zinc form.
(10) transparency electrode according to above-mentioned (1), the metal layer include being selected from by silver, gold, copper, palladium and aluminium
One in the group of composition.
(11) transparency electrode according to above-mentioned (1), the mist degree of the transparency electrode is -1% to+1%.
(12) transparency electrode according to above-mentioned (1), the value of chromatism b* of the transparency electrode is -4 to+4.
(13) transparency electrode according to above-mentioned (1), when described to 180 ° of direction foldings with the radius of curvature of more than 1mm
During prescribed electrode, line resistance is unchanged.
(14) a kind of touch sensor, it includes the transparency electrode according to any one of above-mentioned (1) to (13).
(15) touch sensor according to above-mentioned (14), the transparency electrode possess in including selected from being gathered by cycloolefin
Compound (COP), polyethylene terephthalate (PET), polyacrylate (PAR), polyetherimide (PEI), poly- naphthalene diformazan
Sour glycol ester (PEN), polyphenylene sulfide (PPS), polyarylate (Polyarylate), polyimides (PI), cellulose acetate propionate
(CAP), polyether sulfone (PES), cellulose triacetate (TAC), makrolon (PC), cyclic olefine copolymer (COC), polymethyl
On the base material of one in the group of sour methyl esters (PMMA) composition.
(16) touch sensor according to above-mentioned (14), the transparency electrode possess in including cyclic olefin polymer
(COP) on base material.
(17) touch sensor according to above-mentioned (14), the touch sensor include the sensing figure of multiple isolation
Case, the sensing patterns are configured on the same face, and are formed by the transparency electrode.
(18) touch sensor according to above-mentioned (17), the touch sensor include the formed to first direction
The unit figure of the isolation of one sensing patterns, the second sensing patterns formed to second direction and connection second sensing patterns
The bridge electrode of case.
(19) touch sensor according to above-mentioned (17), the touch sensor is in a manner of self-capacitance (self-cap)
Formed.
(20) a kind of membrane contact sensor, it includes：Separating layer；And be formed in the separating layer according to above-mentioned
(17) touch sensor described in.
(21) the membrane contact sensor according to above-mentioned (20), it goes back between the touch sensor and separating layer
Including protective layer.
(22) a kind of image display, it includes the touch sensor according to above-mentioned (14).
(23) a kind of image display, it includes the membrane contact sensor according to above-mentioned (20).
The effect of the utility model is as follows.
First, the transparency electrode of the utility model is visible with significantly improving because having high transmittance and antiradar reflectivity
Property.
Secondly, the transparency electrode of the utility model has the outstanding bending characteristic being adapted to suitable for flexible display apparatus.
Again, the surface resistance of the transparency electrode of the utility model is low, to be suitable for large area image display.
In addition, the strong adhesive force with base material of the transparency electrode of the utility model.
So as to which the transparency electrode of the utility model can be effective for manufacture touch sensor and image display.
Brief description of the drawings
Fig. 1 is the structure for including transparency electrode on the base material of one embodiment of the utility model.
Fig. 2 shows the sectional view of the lattice of an embodiment of the utility model.
Fig. 3 is the figure for the bending characteristic test method for diagrammatically showing the utility model.
Symbol description
100：Base material 200：Lattice
210：First metal oxide layer 220：Metal layer
230：Second metal oxide layer
Embodiment
A kind of transparency electrode, more particularly to a kind of following transparency electrode are the utility model is related to, i.e.,：The transparency electrode bag
Lattice is included, the lattice includes the first metal oxide layer, metal layer and the second metal oxidation stacked gradually
Nitride layer, the reflectivity on the 550nm wavelength of the transparency electrode are 5% to 20%, the transparency electrode have high transmittance and
Antiradar reflectivity, so that with improved observability, has low areal resistance and outstanding bending characteristic, and because of the adhesion with base material
By force, it is adapted to suitable for flexible and large area image display.
Fig. 1 shows showing including possessing in the structure of the transparency electrode on base material, Fig. 2 for an embodiment of the utility model
The sectional view of the lattice of an embodiment of the utility model is gone out.
In the following, to illustrate the utility model, it is described in detail referring to the drawings.
The transparency electrode of the utility model includes lattice 200, and the lattice 200 includes first stacked gradually
Metal oxide layer 210,220 and second metal oxide layer 230 of metal layer.
In this specification, the transparency electrode of " transparency electrode " meaning is more than actually transparent electrode, and refers to also
Although including being manufactured with non-transparent material, due to being manufactured with narrow linewidth etc. so that can not be recognized by the user, thus to user
For, substantially seem transparent electrode.
In this specification, lattice means net-like pattern, and in the utility model, lattice plays electrode.
The transparency electrode of the utility model is because of the structure with lattice 200, its bending characteristic is outstanding, thus bending
It is outstanding with recuperability, and can be used in the flexible touch sensor with retractility brilliance of manufacture.For example, when with the song of more than 1mm
Rate radius, during the transparency electrode for utility model of losing money in business preferably with the radius of curvature of more than 2mm to 180 ° of directions, its line resistance has can
Energy can be unchanged.Through judging, it is believed that this is because the transparency electrode of the utility model had not only had the structure of lattice, but also have
Three-decker, thus the characteristic of electrode and outstanding bending characteristic can be maintained.
In the utility model, the concrete form of network is not particularly limited.Such as can be right angle network of quadrilaterals
Lattice structure, network structure, hexagonal mesh structure etc., but not limited to this.In various configurations, the length of long side for example may be used
Think 2 μm to 500 μm, and can suitably be adjusted according to electric conductivity, transmitance etc. in the scope.
In the utility model, the line width of lattice 200 is not particularly limited, for example, the line of the lattice 200
Wide can be 1 μm to 7 μm.Existing lattice electrode with even in the case of 1 μm or so of line width, also can by its electrode
It is macroscopic, even and the lattice 200 of the utility model will not be by meat in the case where line width is 1 μm to 7 μm
Eye is as it can be seen that and can also have an optimal resistance value.
In the utility model, the lattice 200 includes the first metal oxide layer 210, the metal layer stacked gradually
220 and second metal oxide layer 230.
The utility model uses the first metal oxide layer 210,220 and second metal of metal layer for including stacking gradually
The transparency electrode of the lattice 200 of oxide skin(coating) 230 replaces existing ito transparent electrode, thus has not only had high transmittance, but also
With antiradar reflectivity, so that its observability can significantly improve.Moreover, the lattice of the utility model is because of bending
Characteristic is outstanding, and bending and recuperability are outstanding, at the same time, additionally it is possible to ensures low areal resistance, therefore is suitable as being used for touch sensor
Transparency electrode.
In the utility model, to the first metal oxide layer 210, metal layer 220 and second metal oxide layer 230
Thickness is not particularly limited, for the angle for bending characteristic while ensuring high transmittance and antiradar reflectivity, is improved, for example,
The thickness of first metal oxide layer, 210 and second metal oxide layer 230 can each be respectively 5nm to 140nm, institute
The thickness for stating metal layer 220 can be 5nm to 30nm.More preferably described first metal oxide layer, 210 and second metal oxidation
The thickness of nitride layer 230 can be respectively each 30nm to 50nm, and the thickness of the metal layer 220 can be 8nm to 15nm.
In the utility model, it is special that the material of the first metal oxide layer 210 and the second metal oxide layer 230 is not made
Limit, for example, first metal oxide layer, 210 and second metal oxide layer 230 can each respectively include be selected from by
Indium tin oxide (ITO), indium-zinc oxide (IZO), aluminium zinc oxide (AZO), gallium zinc oxide (GZO), indium tin zinc oxide
(ITZO), zinc tin oxide (ZTO), indium gallium oxide (IGO), tin oxide (SnO2) and zinc oxide (ZnO) composition group in
It is at least one.For the further angle for improving observability, further improving bending characteristic, preferably described first metal oxygen
210 and second metal oxide layer 230 of compound layer each can include being selected from being aoxidized by indium tin oxide (ITO) and indium zinc respectively
At least one, more preferably described first metal oxide layer, 210 and second metal oxide layer in the group of thing (IZO) composition
230 can include indium-zinc oxide (IZO).
In the utility model, the material of metal layer 220 is not particularly limited, for example, from both having outstanding electric conductivity
Again with low areal resistance angle for, can include be selected from by silver, gold, copper, aluminium, platinum, palladium, chromium, titanium, tungsten, niobium, tantalum, vanadium,
It is at least one in the group of alloy composition more than calcium, iron, manganese, cobalt, nickel, zinc and two of which.From both having aforementioned advantages
Again for the angle with outstanding bending characteristic, more preferably it can include being selected from by silver, gold, copper, palladium, aluminium and two of which
It is at least one in the group of alloy composition above, and more preferably can be alloy Ag-Pd-Cu (APC) conjunctions of silver, copper and palladium
Gold.
The first metal oxide layer 210,220 or second metal oxide layer 230 of metal layer to forming the utility model
Method be not particularly limited, for example, can utilize physical vapor deposition (Physical Vapor Deposition, PVD), change
A variety of film vapor deposition technologies such as vapour deposition method (Chemical VaporDeposition, CVD) are learned to be formed.Make for example, can utilize
For reactive sputtering (reactive sputtering) formation of an example of physical vapor deposition.
The method of lattice 200 to forming the utility model is not particularly limited, such as can utilize photoetching process shape
Into.
First metal oxide layer 210,220 and second metal oxide of metal layer are included to formation the utility model
The method of lattice 200 of layer 230 is not particularly limited, for example, can utilize sequentially form the first metal oxide layer 210,
220 and second metal oxide layer 230 of metal layer and be laminated after, by photoetching process to each layer be carried out at the same time etching or
The method that each layer is not etched respectively is formed.
Reflectivity on the 550nm wavelength of the transparency electrode of the utility model is 5% to 20%.The utility model it is transparent
Electrode has antiradar reflectivity, thus the visible degree of user will can be preferably minimized.Specifically, to the saturating of the utility model
The factor that the reflectivity of prescribed electrode has a great influence is metal layer 220.It is required to possess in the transparency electrode of the utility model
Electric conductivity at least, using metal layer 220, and this reflectivity that may result in transparency electrode rises.Thus, this practicality is new
The transparency electrode of type not only has foregoing three-decker, but also is formed by lattice 200, thus can reduce reflectivity, and can be with
Each layer of thickness and refractive index value are adjusted to reach foregoing reflectance value.If the 550nm of the transparency electrode 200 of the utility model
Reflectivity on wavelength is less than 5%, then needs to substantially reduce the thickness of metal layer 220, thus can there are in the resistance value of electrode
Rise the problem of, and if more than 20%, there are electrode it is macroscopic the problem of.Further to improve observability, more preferably originally
Reflectivity on the 550nm wavelength of the transparency electrode of utility model can be 5% to 13%.
In addition, the transparency electrode of the utility model includes lattice 200, the lattice 200 includes stacking gradually
The first metal oxide layer 210,220 and second metal oxide layer 230 of metal layer, therefore not only there is antiradar reflectivity, again
With high transmittance, so as to greatly improve observability.Specifically, the preferably 550nm of the transparency electrode of the utility model
Transmitance on wavelength can be 60% to 90%.
In addition, in contrast the first metal oxide layer 210 and the second metal oxide layer 230 have high index of refraction, gold
In contrast belonging to layer 220 has low-refraction, therefore can form 200 layers of the lattice successively with high-low-high refractive index,
Thus high transmittance and antiradar reflectivity are may insure to greatly improve observability.For example, can be by making first metal oxygen
Refractive index on the 550nm wavelength of 210 and second metal oxide layer 230 of compound layer is respectively each 1.7 to 2.2, is made described
Refractive index on the 550nm wavelength of metal layer 220 is 0.1 to 1.0, and the mode for making extinction coefficient be 2.0 to 7.0 reaches above-mentioned effect
Fruit, but not limited to this.The extinction coefficient can utilize the formula by the following expression of mathematical expression 1,2 to obtain.
[mathematical expression 1]
I=I0e(-αT)
(in formula, α is absorption coefficient, and T is thickness, and I0 is the luminous intensity before passing through, and I is the luminous intensity after passing through)
[mathematical expression 2]
The π k/ λ of α=40
(in formula, α is absorption coefficient, and k is extinction coefficient, λ0For wavelength)
The transparency electrode of the utility model includes the first metal that foregoing lattice 200 and lattice 200 include
The stepped construction of oxide skin(coating) 210,220 and second metal oxide layer 230 of metal layer, therefore not only there is high transmittance and low
Reflectivity, moreover it is possible to reach transparent value of chromatism.Specifically, the value of chromatism b* of the transparency electrode of the utility model is -4 to+4,
So as to reduce the observability of pattern, and prevent the distortion of showed color.
In addition, the transparency electrode of the utility model includes first that foregoing lattice 200 and lattice 200 include
The stepped construction of metal oxide layer 210,220 and second metal oxide layer 230 of metal layer, therefore can have low haze
Value.More specifically, the mist degree of the transparency electrode of the utility model is -1% to+1%, so as to special with outstanding optics
Property.
In addition, the utility model provides a kind of touch sensor for including aforementioned transparent electrode.
As touch-sensing, the touch sensor electrode of the utility model use with it is foregoing significantly improve it is visible
Property, have outstanding bending characteristic and low areal resistance aforementioned transparent electrode, so as to manufacture high-performance touch sensor, especially
Its is extremely suitable to be suitable for flexible display apparatus.The transparency electrode of the utility model is suitable for this area with being not particularly limited
The sensing electrode of known touch sensor.
In the touch sensor of the utility model, foregoing transparency electrode can possess on base material 100, to the base material
100 material is not particularly limited, for example, in the touch sensor of the utility model, foregoing transparency electrode can possess in
Including selected from by cyclic olefin polymer (COP), polyethylene terephthalate (PET), polyacrylate (PAR), polyethers acyl
Imines (PEI), polyethylene naphthalate (PEN), polyphenylene sulfide (PPS), polyarylate (Polyarylate), polyimides
(PI), cellulose acetate propionate (CAP), polyether sulfone (PES), cellulose triacetate (TAC), makrolon (PC), cycloolefin are common
On at least one base material 100 in the group that polymers (COC), polymethyl methacrylate (PMMA) form.The utility model
In touch sensor, preferably foregoing transparency electrode possesses on the base material 100 including cyclic olefin polymer (COP).
According to the present utility model one realizes example, and the touch sensor of the utility model can include the sensing of multiple isolation
Pattern.Each sensing patterns provide the coordinate information information of touch location, specifically, if the hand of people or object contact covering window base
Plate, then transmit the change of the static capacity of contact position by the pattern of the position and the position detection circuit being connected with pattern,
And electric signal is converted to by the change of the static capacity, grasp contact position.
As the one side for realizing example, each sensing patterns can pass through self-capacitance (self-cap, self
Capacitance) mode is formed.
As the another aspect for realizing example, the touch sensor of the utility model can include being formed to first direction
The first sensing patterns, the second sensing patterns and connection second sensing patterns that are formed to second direction isolation unit
The bridge electrode of pattern.
First sensing patterns and the second sensing patterns are configured with mutually different direction.For example, the first direction can be with
For X-direction, second direction can be the Y direction of perpendicular intersection, but not limited to this.
First sensing patterns and the second sensing patterns will be provided to by the information of the X-coordinate of touch location and Y-coordinate.Specifically
For, if the hand of people or object contact covering window substrate, via the first sensing patterns, the second sensing patterns and position detection lines
Transmit the change of the static capacity of contact position in road direction drive circuit side.In addition, by by X, Y input processing circuit (not shown)
Electric signal is converted to etc. the change for making static capacity to grasp contact position.
First sensing patterns, the second sensing patterns can be to include the transparency electrode of foregoing lattice.
First sensing patterns and the second sensing patterns can be configured on the same face.
Bridge electrode connects the unit cell pattern of the isolation of the second lattice.At this time, bridge electrode need to be with sensing patterns
One sensing patterns insulate, for this reason, forming insulating layer.
Insulating layer rises between sensing patterns and bridge electrode makes what the first sensing patterns insulated with the second sensing patterns
Effect.
In addition, the utility model provides a kind of membrane contact sensor including the touch sensor.
The membrane contact sensor of the utility model can include separating layer and the touch being formed in the separating layer passes
Sensor.
When the separating layer of the utility model is the manufacturing engineering of membrane contact sensor in order to from carrier substrate peel off and shape
Into layer, the material of the separating layer of the utility model is not particularly limited, for example, can be by polyimides (polyimide)
It is that macromolecule, polyvinyl alcohol (poly vinyl alcohol) are that macromolecule, polyamic acid (polyamic acid) are high score
Son, polyamide (polyamide) are that macromolecule, polyethylene (polyethylene) are macromolecule, polystyrene
(polystylene) it is that macromolecule, polynorbornene (polynorbornene) are macromolecule, phenyl maleimide copolymers
(phenylmaleimide copolymer) is that macromolecule, poly- azobenzene (polyazobenzene) are macromolecule, polyphenylene
Phthalamide (polyphenylenephthalamide) is that macromolecule, polyester (polyester) are macromolecule, polymethylacrylic acid
Methyl esters (polymethyl methacrylate) is that macromolecule, polyarylate (polyarylate) are macromolecule, cinnamate
(cinnamate) it is that macromolecule, cumarin (coumarin) are macromolecule, phthalimide (phthalimidine) system
Macromolecule, chalcone (chalcone) are the manufacture of the macromolecules such as macromolecule, aromatic series acetylene system macromolecule, and these macromolecules can
To be used alone or mix two or more uses.
The peel strength of the separating layer of the utility model is not particularly limited, such as can be 0.01 to 1N/25mm, it is excellent
Choosing can be 0.01 to 0.2N/25mm., can be easy residue-free when forming membrane contact sensor if meeting above range
Peeled off from carrier substrate, for curling (curl) caused by the tension force occurred when reducing and peeling off and the angle in crack preferably.
The thickness of the separating layer of the utility model is not particularly limited, such as can be 10nm to 1000nm, preferably may be used
Think 50nm to 500nm.If meeting above range, from peel strength stabilization and can be formed for the angle of uniform pattern
Preferably.
In addition, the membrane contact sensor of the utility model can further include between the touch sensor and separating layer
Protective layer.
Identical with the separating layer, protective layer coats transparency electrode to protect transparency electrode, in the film of the utility model
In the manufacturing engineering of touch sensor, separating layer plays a part of to prevent from being exposed to the etchant for being used for forming transparency electrode.
As protective layer, macromolecule well known in the art is used with can not limiting, such as can be by organic insulating film system
Make, wherein, it is particularly possible to formed by the curable adhensive compositions including polyalcohol and melamine curing agent, but not limited to this.
As the specific species of the polyalcohol, such as can be polyether polyols 01 derivatives, polyester-diol derivative, gathers
Caprolactone ethylene glycol derivative etc., but not limited to this.
As the specific species of the melamine curing agent, such as can be methylated methylol melamine derivative, first
Base melamine derivative, melamine-butyl derivative, isobutoxy melamine derivative and butoxy melamine
Derivative etc., but not limited to this.
Another realization example according to the present utility model, the protective layer can be by organic-inorganic mixed hardening composition shapes
Into if using organic compound and inorganic compound at the same time, for the angle in the crack occurred when reducing and peeling off preferably.
As organic compound, aforesaid ingredients can be used.As inorganic matter, such as it can be silica-based nanometer
Grain, silicon systems nano particle, glass nano-fibre etc., but not limited to this.
To ensure flexibility, the membrane contact sensor of the utility model can be by being coated with separating layer shape on carrier substrate
Separating layer is formed into composition, and after forming the touch sensor for possessing aforementioned transparent electrode in the separating layer, is removed
The engineering of carrier substrate is gone to manufacture.
Above steps is specifically described below.
First, separating layer formation of the aforesaid ingredients with physical property after satisfaction hardening is coated with carrier substrate with composition come shape
Into separating layer.
The separating layer formation is not particularly limited with the coating method of composition, as long as what is be applicable in this area is logical
Normal method, such as have the coating using slit injectors such as spraying process, print roll coating method, discharge nozzle type rubbing methods
Method of spin coating, extrusion coated method, the scraper rubbing methods such as method, central load rotary process etc., can combine more than two of which
Coating method is coated with, and can also carry out dry engineering, heat drying (prebake) after being coated with, or is heated after being dried under reduced pressure to wave
Send out solvent etc..Typically 80 DEG C to 250 DEG C of heating-up temperature.
The carrier substrate play a part of be used for above formed separating layer base material, can make thereon face it is flat so that point
Absciss layer is formed uniformly, as long as there is the intensity for the stacking engineering for being enough stably to perform each layer for being formed at separating layer top,
Use with being then not particularly limited, such as glass substrate, plastic base etc. can be used.
Afterwards, the touch sensor that can will be provided with aforementioned transparent electrode is formed in the separating layer.To forming this reality
It is not particularly limited with the method for the first new metal oxide layer, metal layer or the second metal oxide layer, such as can be with
Utilize physical vapor deposition (Physical Vapor Deposition, PVD), chemical vapor deposition (Chemical
VaporDeposition, CVD) etc. a variety of film vapor deposition technologies formed.For example, an example as physical vapor deposition can be utilized
Reactive sputtering (reactive sputtering) formation.
The method for the lattice that formation transparency electrode to the utility model includes is not particularly limited, such as can be with
Formed using photoetching process.
Formation to the utility model includes the net of the first metal oxide layer, metal layer and the second metal oxide layer
The method of grid pattern is not particularly limited, such as can be utilized and be sequentially formed the first metal oxide layer, metal layer and second
After metal oxide layer and stacking, etching is carried out at the same time to each layer by photoetching process or each layer is not etched respectively
Method formed.
Then, the step that the top sandwich for including separating layer and the transparency electrode is peeled off from the carrier substrate is performed
Suddenly.
In the membrane contact sensor of the utility model, the transparency electrode included by it can be visible with significantly improving
Property, outstanding bending characteristic and low areal resistance.
Filled in addition, the utility model provides a kind of shown including the image of the touch sensor or membrane contact sensor
Put.
In addition to common liquid crystal display device, the touch sensor or membrane contact sensor of the utility model can be with
Suitable for the various image displays such as el display, plasma display system, field-emission display device.
Foregoing transparency electrode has the observability significantly improved, and has outstanding bending characteristic and low areal resistance, therefore
It is preferred that it can be adapted for flexible image display.
For ease of understanding the utility model, preferred embodiment will be prompted to below, and these embodiments are only used for illustrating this reality
With new, it is not used to limit scope, the general technical staff of this area is apparent that in this practicality newly
It can implement numerous variations and modification to embodiment in the range of the category and technological thought of type, it is clear that these deformations and modification
Fall within the scope of the appended claims.
Embodiment and comparative example
Embodiment 1. manufactures transparency electrode
To evaluate the optical characteristics of the transparency electrode of the utility model, electrical characteristic and bending characteristic, transparent electricity has been manufactured
Pole.First metal oxide layer and the second metal oxide layer have used indium-zinc oxide (IZO), metal layer used silver-palladium-
Copper (APC) alloy, and using sputtering method by the first metal oxide layer, metal layer, the second metal oxide layer stack gradually in
After on cyclic olefin polymer (COP), while it is etched using photoetching process to form the lattice that line width is 3 μm.Each layer
Thickness difference it is as follows, i.e.,：First metal oxide layer is 30nm, and metal layer 10nm, the second metal oxide layer is 30nm.
Embodiment 2 to 12 and comparative example 1 to 5
Make the material identical of each layer, and only make material, line width, thickness difference according to table 1 below come according to the method for embodiment 1
Embodiment 2 to 12 and the transparency electrode of comparative example 1 to 5 are manufactured.
【Table 1】
Experimental example 1
1. measure reflectivity
Using spectral photometric colour measuring meter (CM-3600A, Konica Minolta), measured under 550nm wavelength conditions and pass through reality
Apply the reflectivity of example and the transparency electrode of comparative example manufacture.
2. measure transmitance
Using spectral photometric colour measuring meter (CM-3600A, Konica Minolta), measured under 550nm wavelength conditions and pass through reality
Apply the transmitance of example and the transparency electrode of comparative example manufacture.
3. measure surface resistance
The transparency electrode manufactured by embodiment and comparative example is measured using surface resistance measuring instrument (RG-80, Napson)
Surface resistance.
4. measure value of chromatism
Using spectral photometric colour measuring meter (CM-3600A, Konica Minolta), measured under 550nm wavelength conditions and pass through reality
Apply the value of chromatism of example and the transparency electrode of comparative example manufacture.
5. measure mist degree
Measured using haze measurement instrument (hazemeter) (HM-150, Murasaki) by embodiment and comparative example system
The mist degree for the transparency electrode made.
6. measure adhesive force
The adhesive force of the transparency electrode manufactured by embodiment and comparative example is measured using ASTM D3359, it evaluates base
It is accurate as follows.
5B：Without stripping
4B：Peel off and be less than 5%
3B：5% is peeled off with 15%
2B：15% is peeled off with 35%
1B：35% is peeled off with 65%
0B：Peel off more than 65%
【Table 2】
According to experimental example, the reflectivity and adhesive force of comparative example decline, and the reflectivity of embodiment, transmitance, b*,
Surface resistance, mist degree and adhesion are outstanding.
In comparative example 1,2, although transparency electrode, not as it can be seen that adhesive force is remarkably decreased relative to embodiment, comparative example 3 is not
But its adhesive force is remarkably decreased, and transparency electrode is also macroscopic.
Although comparative example 4 its transparency electrode not as it can be seen that but surface resistance it is very high, thus be not used as electrode, comparative example 5 it is saturating
Prescribed electrode is with the naked eye easily visible.
Experimental example 2：Measurement bending characteristic
To the transparency electrode manufactured by embodiment and comparative example, as shown in figure 3, with radius of curvature (R)=2mm to 180 °
Direction performs the cripping test (folding test) of the number described in folding table 3 below, measures line resistance (k Ω) after folding, and will
Its result is recorded in table 3.
【Table 3】
With reference to table 3, even if can confirm that the transparency electrode radius of curvature of the utility model reaches 2mm, line electricity during bending
Resistance is still unchanged.
However, the line resistance when bending number and being respectively 100,000 times and 50,000 times is confirmed in comparative example 1 to 3 and comparative example 5
Steeply rise, although the line resistance of comparative example 4 is unchanged, its line resistance is very high in itself, therefore is not used as electrode.
So that the transparency electrode of the utility model can be efficiently used in flexible display apparatus because flexibility is outstanding.
Claims (23)
- A kind of 1. transparency electrode, it is characterised in thatThe transparency electrode includes lattice,The lattice includes the first metal oxide layer, metal layer and the second metal oxide layer stacked gradually,Reflectivity on the 550nm wavelength of the transparency electrode is 5% to 20%.
- 2. transparency electrode according to claim 1, it is characterised in thatReflectivity on the 550nm wavelength of the transparency electrode is 5% to 13%.
- 3. transparency electrode according to claim 1, it is characterised in thatRefractive index on the 550nm wavelength of first metal oxide layer and the second metal oxide layer is respectively each 1.7 To 2.2, the refractive index on the 550nm wavelength of the metal layer is 0.1 to 1.0, the extinction coefficient of the metal layer for 2.0 to 7.0。
- 4. transparency electrode according to claim 1, it is characterised in thatThe thickness of first metal oxide layer and the second metal oxide layer is respectively each 5 to 140nm, the metal layer Thickness be 5nm to 30nm.
- 5. transparency electrode according to claim 1, it is characterised in thatThe thickness of first metal oxide layer and the second metal oxide layer each be respectively 30nm to 50nm, the metal The thickness of layer is 8nm to 15nm.
- 6. transparency electrode according to claim 1, it is characterised in thatThe line width of the lattice is 1 μm to 7 μm.
- 7. transparency electrode according to claim 1, it is characterised in thatFirst metal oxide layer and the second metal oxide layer each include being selected from by indium tin oxide, indium zinc oxygen respectively Compound, aluminium zinc oxide, gallium zinc oxide, indium tin zinc oxide, zinc tin oxide, indium gallium oxide, tin oxide and oxidation One in the group of zinc composition.
- 8. transparency electrode according to claim 1, it is characterised in thatFirst metal oxide layer and the second metal oxide layer each include being selected from by indium tin oxide and indium zinc respectively One in the group of oxide composition.
- 9. transparency electrode according to claim 1, it is characterised in thatThe metal layer include be selected from by silver, gold, copper, aluminium, platinum, palladium, chromium, titanium, tungsten, niobium, tantalum, vanadium, calcium, iron, manganese, cobalt, nickel, with And one in the group of zinc composition.
- 10. transparency electrode according to claim 1, it is characterised in thatThe metal layer includes one in the group being made of silver, gold, copper, palladium and aluminium.
- 11. transparency electrode according to claim 1, it is characterised in thatThe mist degree of the transparency electrode is -1% to+1%.
- 12. transparency electrode according to claim 1, it is characterised in thatThe value of chromatism b* of the transparency electrode is -4 to+4.
- 13. transparency electrode according to claim 1, it is characterised in thatWhen rolling over the transparency electrode to 180 ° of directions with the radius of curvature of more than 1mm, line resistance is unchanged.
- A kind of 14. touch sensor, it is characterised in thatThe touch sensor includes transparency electrode according to any one of claim 1 to 13.
- 15. touch sensor according to claim 14, it is characterised in thatThe transparency electrode possess in including selected from by cyclic olefin polymer, polyethylene terephthalate, polyacrylate, Polyetherimide, polyethylene naphthalate, polyphenylene sulfide, polyarylate, polyimides, cellulose acetate propionate, polyether sulfone, On the base material of one in the group that cellulose triacetate, makrolon, cyclic olefine copolymer, polymethyl methacrylate form.
- 16. touch sensor according to claim 14, it is characterised in thatThe transparency electrode possesses on the base material including cyclic olefin polymer.
- 17. touch sensor according to claim 14, it is characterised in thatThe touch sensor includes the sensing patterns of multiple isolation, and the sensing patterns are configured on the same face, and by described Transparency electrode is formed.
- 18. touch sensor according to claim 17, it is characterised in thatThe touch sensor includes the first sensing patterns to first direction formation, schemes to the second sensing that second direction is formed The bridge electrode of the unit cell pattern of the isolation of case and connection second sensing patterns.
- 19. touch sensor according to claim 17, it is characterised in thatThe touch sensor is formed in a manner of self-capacitance.
- A kind of 20. membrane contact sensor, it is characterised in that including：Separating layer；AndThe touch sensor according to claim 17 being formed in the separating layer.
- 21. membrane contact sensor according to claim 20, it is characterised in thatProtective layer is further included between the touch sensor and separating layer.
- A kind of 22. image display, it is characterised in thatIncluding touch sensor according to claim 14.
- A kind of 23. image display, it is characterised in thatIncluding membrane contact sensor according to claim 20.
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| Application Number | Priority Date | Filing Date | Title |
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| KR20160101157 | 2016-08-09 | ||
| KR10-2016-0101157 | 2016-08-09 | ||
| KR10-2016-0178001 | 2016-12-23 | ||
| KR1020160178001A KR20180018249A (en) | 2016-08-09 | 2016-12-23 | Transparent electrode and touch sensor including the same |
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| CN207337957U true CN207337957U (en) | 2018-05-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022218060A1 (en) * | 2021-04-13 | 2022-10-20 | 珠海华萃科技有限公司 | Flexible transparent led display screen |
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2016
- 2016-12-23 KR KR1020160178001A patent/KR20180018249A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022218060A1 (en) * | 2021-04-13 | 2022-10-20 | 珠海华萃科技有限公司 | Flexible transparent led display screen |
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