CN206931552U - Transmission electron microscope Measurement of environmental magnetic field function specimen holder - Google Patents

Abstract

The utility model discloses a sample rod with the function of measuring the environmental magnetic field of a transmission electron microscope. It includes a sample rod head, a thin rod at the front end, a thick rod at the rear end, a handle, and a handle cover. The handle is provided with a first guide pin, and the thin rod at the front end is provided with a second guide pin; the sample rod The head includes a front gasket, a rear circuit board, a front circuit board, a queue electrode, and a sensor; the sample rod head is connected to the front thin rod, the front thin rod is connected to the rear thick rod, and the rear thick rod is connected to the handle. There is a handle cover on the handle, and an outlet is opened on the handle cover; the sensor is welded on the queue electrode, the queue electrode is set on the sample rod head, and the rear circuit board and the front circuit board are connected by metal posts And use the front end gasket to fix on the front thin rod; one end of the wire is welded on the rear circuit board, and the other end is connected to the outlet through the hollow part of the sample rod; the sample rod of the utility model has a high Versatility.

Description

TEM environmental magnetic field measurement function sample holder

technical field

The utility model belongs to the research field of transmission electron microscope accessories and nanometer material measurement, relates to the field of magnetism and magnetic materials, and is mainly used for magnetic field measurement of a sample cavity inside a transmission electron microscope.

Background technique

Since the invention of the world's first transmission electron microscope (TEM) by Ruska and Knoll in 1932, after nearly a century of continuous efforts and progress, the transmission electron microscope has made breakthroughs in all aspects: spherical aberration correction technology makes it space Higher resolution, energy monochromator for higher energy resolution, CCD camera for higher temporal resolution. Advances in transmission electron microscopy have made great contributions to research in the fields of physics, chemistry, biology, materials science, and the semiconductor industry.

Magnetic properties are one of the important properties of materials. The research on the magnetic properties of materials has promoted the development of magnetic materials and their continuous application of functional devices, as well as the technical development of magnetic theory and experiments. The magnetic properties of magnetic materials, or electrical, mechanical and other physical properties related to magnetism, are closely related to the microstructure of magnetic materials. Magnetic information obtained through transmission electron microscopy can help to build physical models of materials, and fundamentally clarify the mechanisms and mechanisms of magnetostrictive effects, magnetic transport properties, and magnetic origins of magnetic materials.

In general, the magnetic field received by the sample in the cavity of the TEM is the vector sum of the magnetic fields of multiple electromagnetic lenses, and the magnitude of the magnetic field of each electromagnetic lens cannot be accurately known. Therefore, the biggest problem in using the TEM to study the magnetic properties of the sample is It is not possible to determine the exact magnetic field magnitude at the sample location within the TEM.

For the magnetic field measurement of the sample position inside the TEM, it is necessary to place sensors, circuit boards and other components in the narrow space of the TEM sample rod and maintain the vacuum of the cavity to maintain mechanical stability, and the structure needs to be reasonably arranged. Because the work of measuring the magnetic field at the sample position inside the transmission electron microscope has rarely been done before, and commercial companies cannot benefit from it, so there is no very mature precedent technology at present. The power-on function is relatively complete. For example, Han Xiaodong et al. used queue electrodes to realize the power-loading function in the patent of power-on force sample rod.

Existing research institutions or commercial institutions rarely involve in the research and development of magnetic field measurement sample rods, so there is no existing technology, but measuring magnetic fields requires sensors, and the sensors are made according to the Hall effect and require current drive, so they need to be soldered on the circuit board superior. Previous sample holders had the following problems:

1. The more functions the sample rod has, the more difficult it is to load the sample, and it is easy to damage the sample during the sample loading process. This sample rod only measures the internal ambient magnetic field, no sample loading process is required, and subsequent expansion functions only need to add a 2mm*2mm hole on the circuit board and use a gold wire ball welder to connect the sample placed on the Si3N4 film on the circuit board.

2. In the past, most of the sample rods were developed by commercial companies, and the cost was high. This sample rod uses a PCB circuit board, and the sensor is directly welded on the circuit board, and the cost is significantly lower than that of a commercial sample rod. And if you need to realize other measurement functions in the later stage, you can directly replace the front-end circuit board and sensor type of the sample rod, so as to facilitate the realization of more extended functions.

Contents of the invention

The purpose of the utility model is to overcome the deficiencies of the prior art and provide a sample rod with the function of measuring the environmental magnetic field of a transmission electron microscope.

With the further development of transmission electron microscopy technology, transmission electron microscopy has become an innovative tool in research fields such as physics, chemistry, biology, and semiconductor science, and plays an irreplaceable role in scientific research. However, the existing transmission electron microscope can only provide an approximate magnetic field in the sample area because it magnetizes the sample in situ by changing the excitation current of the objective lens. The ambient magnetic field in the sample area will be applied to a wider range of research fields in the future. It is believed that the research and development of the functional sample rod for TEM environmental magnetic field measurement will have an important impact and impetus on the research of magnetism and semiconductor science in the foreseeable future.

TEM sample holders with different functions have become the most basic configuration of TEM. The TEM environmental magnetic field measurement function sample rod can not only provide the environmental magnetic field of the TEM sample area, but also further improve the TEM data. If more expansions are made to the front-end circuit board, it will have more powerful functions. The cost of the sample rod for the measurement of the environmental magnetic field of the electron microscope is significantly lower than that of the commercial sample rod, and it will definitely have a wide range of market application prospects.

The technical scheme of the utility model is as follows:

A sample rod with a transmission electron microscope environmental magnetic field measurement function, including a sample rod head, a thin rod at the front end, a thick rod at the rear end, a handle, and a handle cover,

The handle is provided with a first guide pin, and the thin rod at the front end is provided with a second guide pin; the sample rod head includes a front gasket, a rear circuit board, a front circuit board, and a queue electrodes, sensors;

The head of the sample rod is connected to one end of the front thin rod, the other end of the front thin rod is connected to one end of the rear thick rod, and the other end of the rear thick rod is connected to the handle, and the handle is provided with a handle cover and a handle cover. There are outlets on the top;

The sensor is welded on the queue electrode, the queue electrode is set on the head of the sample rod, the rear circuit board and the front circuit board are connected by metal posts and fixed on the front thin rod with the front gasket; one end of the wire is welded on the rear circuit board , the other end is connected to the outlet through the hollow part of the sample rod;

The sensor is a 3D magnetic field measurement sensor.

Preferably, the thin rod at the front end and the thick rod at the rear end are connected by a tapered transition section, and a sealing ring is provided on the tapered transition section.

Preferably, the first guide pin is in the shape of a cuboid, one end is fixed on the handle, the other end faces the direction of the sample rod head, and is parallel to the thick rod at the rear end; the second guide pin is cylindrical, and is parallel to the front end. The thin rod is vertical.

Preferably, a branching joint is also provided at the connection between the thick rod at the rear end and the handle.

Preferably, the diameter of the connecting wire inside the sample rod is 0.1 mm; the size of the screw hole inside the sample rod is 1-2 mm; the size of the internal parts of the sample rod is at the millimeter level.

The sample rod with the function of measuring the environmental magnetic field of the transmission electron microscope of the present invention has high versatility and can be used for transmission electron microscopes of the same manufacturer, and the specific structure of the sample rod can be different due to different designs of the transmission electron microscope.

Description of drawings

Fig. 1 is the overall schematic diagram of the sample rod of the environmental magnetic field measurement function of the transmission electron microscope;

Figure 2 is a schematic cross-sectional view of a sample rod with a TEM environmental magnetic field measurement function;

Fig. 3 is a partial schematic diagram of the front end of the sample rod with the environmental magnetic field measurement function of the transmission electron microscope;

In the figure, the sample rod head 1, the front end thin rod 2, the rear end thick rod 3, the handle 4, the handle cover 5, the first guide pin 6A, the second guide pin 6B, the sealing ring 7, the outlet 8, Tapered transition section 9, front gasket 10, rear circuit board 11, front circuit board 12, queue electrode 13, sensor 14.

detailed description

The present invention will be further described below in conjunction with the accompanying drawings.

As shown in Figures 1-3, the sample rod with TEM environmental magnetic field measurement function of the utility model includes a sample rod head 1, a thin rod at the front end 2, a thick rod at the rear end 3, a handle 4, and a handle cover 5,

The handle 4 is provided with a first guide pin 6A, and the thin rod 2 at the front end is provided with a second guide pin 6B; the sample rod head 1 includes a front gasket 10, a rear circuit board 11 , front circuit board 12, queue electrode 13, sensor 14; Sample rod head 1 is connected with front end thin rod 2 one end, front end thin rod 2 other end is connected with rear end thick rod 3 one end, rear end thick rod 3 other end is connected with hand The handle 4 is connected, the handle 4 is provided with a handle cover 5, and the handle cover 5 is provided with an outlet 8;

The sensor 14 is welded on the queue electrode 13, the queue electrode 13 is arranged on the sample rod head 1, the rear circuit board 11 and the front circuit board 12 are connected by metal posts and fixed on the front thin rod 2 with the front gasket 10; One end is welded on the rear circuit board 11, and the other end is connected to the outlet 8 through the hollow part of the sample rod. The handle is hollow inside, used to convert the wire connector, and finally connected to the external power supply of the transmission electron microscope and the test platform through the outlet 8.

In a specific embodiment of the present invention, the sensor and the sample rod head are connected and fixed by solder, and the electrode array is the pad of the front-end PCB circuit board; the sensor is welded on the pad with solder.

In a specific embodiment of the present invention, the sensor is a 3D magnetic field measurement sensor of Infineon.

In a specific embodiment of the present invention, the thin rod 2 at the front end and the thick rod 3 at the rear end are connected by a tapered transition section 9, and a sealing ring 7 is provided on the tapered transition section 9, and epoxy resin glue is used to ensure that Vacuum.

In a specific embodiment of the present invention, there is also a branch joint at the connection between the thick rod 3 at the rear end and the handle 4, which is used for sorting and sorting the wires and preventing interference between the wires.

In a specific embodiment of the present invention, the first guide pin 6A is in the shape of a cuboid, one end is fixed on the handle 4, and the other end faces the direction of the sample rod head, the first guide pin 6A and the rear end thick rod 3 In parallel, the first guide pin 6A is used for positioning the sample rod; the second guide pin 6B is cylindrical and perpendicular to the thin rod 2 at the front end. The second guide pin is used to rotate and open the vacuum valve inside the transmission electron microscope.

Insert the sample rod into the transmission electron microscope, obtain the current sensor position, that is, the environmental magnetic field at the sample position through the signal of the sensor, and test the environmental magnetic field under different conditions. In the Lorentz mode, it corresponds to the objective lens current and the ambient magnetic field, making the Lorentz mode data more accurate.

Claims (4)

1. a kind of transmission electron microscope Measurement of environmental magnetic field function specimen holder, including sample head (1), front end thin bar (2), rear end thick bar (3), hold handle (4), hold handle lid (5), described holding handle (4) is provided with the first guide finger (6A), described front end thin bar (2) it is provided with the second guide finger (6B)；Described sample head (1) includes front end pad (10), rear portion circuit board (11), front portion Circuit board (12), queue electrode (13), sensor (14)；Sample head (1) is connected with front end thin bar (2) one end, front end thin bar (2) other end is connected with rear end thick bar (3) one end, and thick bar (3) other end in rear end is connected with holding handle (4), is held and is set on handle (4) Have and hold handle lid (5), hold and offer outlet (8) on handle lid (5)；Sensor (14) is welded on queue electrode (13), team Row electrode (13) is arranged on anterior circuit board (12), and rear portion circuit board (11), anterior circuit board (12) are connected by metal column And it is fixed on using front end pad (10) in front end thin bar (2)；One, wire is welded on rear portion circuit board (11), and other end leads to Cross specimen holder hollow space and be connected to outlet (8)；Described sensor is 3D magnetic field probes.

2. transmission electron microscope Measurement of environmental magnetic field function specimen holder according to claim 1, it is characterised in that described front end Thin bar (2) and rear end thick bar (3) are connected by tapering transition section (9), and tapering transition section (9) is provided with sealing ring (7).

3. transmission electron microscope Measurement of environmental magnetic field function specimen holder according to claim 1, it is characterised in that described first Guide finger (6A) is into cuboid, and one end, which is fixed on, to be held on handle (4), and the other end is towards sample head direction, with rear end thick bar (3) it is parallel；The second described guide finger is vertical with front end thin bar (2) in cylinder.

4. transmission electron microscope Measurement of environmental magnetic field function specimen holder according to claim 1, it is characterised in that described rear end Thick bar (3) and holding handle (4) junction are additionally provided with a branch joint.