CN110333372A - A kind of magnetic scanning microscope probe and preparation method thereof - Google Patents
A kind of magnetic scanning microscope probe and preparation method thereof Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
- G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
- G01Q60/56—Probes with magnetic coating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
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Abstract
本发明提供了一种磁性扫描显微镜探针及其制备方法。该探针包括用于连接扫描探针显微镜的探针基体平台、悬臂梁与针尖，悬臂梁的一端固定连接探针基体平台，悬臂梁的另一端固定连接针尖，针尖整体由磁性纳米晶体构成，悬臂梁与探针基底平台由非磁性材料构成，可探测材料的磁性特性，由于仅针尖具有磁性，其他部分不具有磁性而避免了引入系统误差，实现了磁信号的精确探测，并且制备简单易操作，使用寿命长。
The invention provides a magnetic scanning microscope probe and a preparation method thereof. The probe includes a probe substrate platform, a cantilever beam and a needle tip for connecting a scanning probe microscope. One end of the cantilever beam is fixedly connected to the probe substrate platform, and the other end of the cantilever beam is fixedly connected to the needle tip. The needle tip is composed of magnetic nanocrystals as a whole. The cantilever beam and the probe base platform are composed of non-magnetic materials, which can detect the magnetic properties of the material. Since only the tip of the needle is magnetic and the other parts are not magnetic, the introduction of systematic errors is avoided, and the accurate detection of magnetic signals is realized. The preparation is simple and easy operation, long service life.
Description
技术领域technical field
本发明属于扫描探针显微镜技术领域，尤其涉及一种磁性扫描显微镜探针及其制备方法。The invention belongs to the technical field of scanning probe microscopes, in particular to a magnetic scanning microscope probe and a preparation method thereof.
背景技术Background technique
扫描探针显微镜(SPM)是一种具有原子级分辨率的用于表面形貌采集、电磁性能分析的重要仪器，是表面科学、纳米技术等领域的重要表征工具。其中，探针是扫描探针显微镜中的重要组成部分，属于该高科技设备常用的耗材。Scanning probe microscope (SPM) is an important instrument with atomic-level resolution for surface topography acquisition and electromagnetic property analysis, and is an important characterization tool in the fields of surface science and nanotechnology. Among them, the probe is an important part of the scanning probe microscope and belongs to the commonly used consumables of this high-tech equipment.
SPM中的探针一般利用微机电系统技术加工硅或氮化硅等材料制得，用于探测材料形貌、力学等简单信息。探针包括探针基体平台、悬臂梁与针尖，探针基体平台用于连接SPM，悬臂梁连接探针基体平台与针尖，针尖用于靠近或者接触样品进行信息检测。伴随器件小型化的发展趋势，需要对材料进行纳米尺度相关性能，例如磁学、电学等的观测，这就需要在普通探针针尖表面制备额外的涂层，一般为金属层。例如，磁性SPM探针是在普通探针的针尖一侧表面镀几十纳米厚的磁性金属层(如铁、钴、镍及其合金等)以及其他用于提高镀层结合力的金属层(如钛、铬、铂和铱等)。但是，由于探针针尖较小，仅在针尖表面制备镀层，即避免在悬臂处覆盖镀层，其工艺难度及成本将显著增加。因此目前除了探针针尖表面，磁性镀层也往往覆盖部分或者全部的探针悬臂表面。由于磁力显微镜(MFM)探测的是磁性探针与磁性样品之间远程力(吸引力和排斥力)的相互作用，因此探针针尖处的磁性镀层以及悬臂处的磁性镀层都会与磁性样品之间产生相互作用，从而会引入一些系统误差，对磁性材料，尤其是三维纳米磁性材料磁畴结构的准确观测产生干扰。The probes in SPM are generally made of materials such as silicon or silicon nitride by microelectromechanical system technology, and are used to detect simple information such as material morphology and mechanics. The probe includes a probe base platform, a cantilever beam and a needle tip. The probe base platform is used to connect the SPM, the cantilever beam connects the probe base platform and the needle tip, and the needle tip is used to approach or contact the sample for information detection. With the development trend of device miniaturization, it is necessary to observe the nanoscale related properties of materials, such as magnetism, electricity, etc., which requires the preparation of additional coatings on the surface of ordinary probe tips, usually metal layers. For example, the magnetic SPM probe is coated with tens of nanometers thick magnetic metal layer (such as iron, cobalt, nickel and its alloys, etc.) titanium, chromium, platinum and iridium, etc.). However, since the tip of the probe is small, the coating is only prepared on the surface of the tip, that is, to avoid covering the cantilever, the difficulty and cost of the process will increase significantly. Therefore, in addition to the surface of the probe tip, the magnetic coating often covers part or all of the surface of the probe cantilever. Since the magnetic force microscope (MFM) detects the long-range force (attraction and repulsion) interaction between the magnetic probe and the magnetic sample, the magnetic coating at the tip of the probe and the magnetic coating at the cantilever will be in contact with the magnetic sample. Interaction occurs, which will introduce some systematic errors, which will interfere with the accurate observation of the magnetic domain structure of magnetic materials, especially three-dimensional nanomagnetic materials.
发明内容Contents of the invention
针对上述技术问题，本发明提供一种磁性扫描显微镜探针，具有磁学信号探测精度高，使用寿命长等优点。In view of the above technical problems, the present invention provides a magnetic scanning microscope probe, which has the advantages of high detection precision of magnetic signals and long service life.
本发明所采用的技术方案是：一种磁性扫描显微镜探针，包括用于连接扫描探针显微镜的探针基体平台，悬臂梁以及针尖，悬臂梁的一端固定连接探针基体平台，悬臂梁的另一端固定连接针尖，其特征是：所述针尖由磁性纳米晶体构成，所述悬臂梁由非磁性材料构成，所述探针基底平台由非磁性材料构成。The technical scheme adopted in the present invention is: a magnetic scanning microscope probe, comprising a probe substrate platform for connecting a scanning probe microscope, a cantilever beam and a needle tip, one end of the cantilever beam is fixedly connected to the probe substrate platform, and the cantilever beam The other end is fixedly connected with the needle tip, and the feature is that: the needle tip is made of magnetic nano crystals, the cantilever beam is made of non-magnetic material, and the probe base platform is made of non-magnetic material.
所述固定连接的方式不限，包括使用连接件固定连接，以及通过物理粘结法固定连接。The manner of the fixed connection is not limited, including using a connector to fix the connection, and using a physical bonding method to fix the connection.
所述探针基底平台是非磁性材料，包括但不限于普通硅材料、氮化硅材料等中的一种或者两种。The probe base platform is made of non-magnetic material, including but not limited to one or both of common silicon material, silicon nitride material and the like.
所述悬臂梁是非磁性材料，包括但不限于普通硅材料、氮化硅材料等中的一种或者两种。The cantilever is made of non-magnetic material, including but not limited to one or both of common silicon material, silicon nitride material and the like.
所述磁性纳米晶体材料不限，包括铁、钴、镍及其合金，以及氧化物晶体等。The magnetic nanocrystal material is not limited, including iron, cobalt, nickel and their alloys, and oxide crystals.
作为优选，所述针尖呈锥体。作为进一步优选，锥体底部尺寸为50nm-200nm，椎体高度为50nm-400nm。Preferably, the needle tip is in the shape of a cone. As a further preference, the size of the bottom of the cone is 50nm-200nm, and the height of the cone is 50nm-400nm.
与现有技术相比，本发明具有如下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
(1)本发明中探针悬臂起支撑作用，探针针尖用于靠近样品或者接触样品，以测量样品的形貌、磁性等，探针针尖由磁性纳米晶体构成，悬臂梁与探针基底平台由非磁性材料构成而不具有磁性。这种结构设计一方面可以利用探针探测材料的磁性特性，另一方面仅保留针尖具有磁性，其他部分不具有磁性，避免了系统误差的引入，实现了磁信号的精确探测。(1) In the present invention, the probe cantilever plays a supporting role, and the probe tip is used to approach the sample or contact the sample to measure the shape, magnetism, etc. of the sample. The probe tip is made of magnetic nanocrystals, and the cantilever beam and the probe base platform Constructed of non-magnetic material and not magnetic. On the one hand, this structural design can use the magnetic properties of the probe to detect the material, on the other hand, only the tip of the needle is magnetic, and the other parts are not magnetic, avoiding the introduction of systematic errors and realizing the accurate detection of magnetic signals.
(2)本发明中，探针针尖整体为磁性纳米晶体，磁性纳米晶体的材料选择广泛，可根据测试样品的需要灵活选择或设计具有高/低磁矩或高/低矫顽力的磁性探针。(2) In the present invention, the probe tip is a magnetic nanocrystal as a whole, and the material selection of the magnetic nanocrystal is extensive, and a magnetic probe with high/low magnetic moment or high/low coercive force can be flexibly selected or designed according to the needs of the test sample. Needle.
(3)现有技术中，探针在使用过程中针尖磁性镀层易磨损，易导致探测失效。本发明中探针针尖为整体保持均匀磁性的纳米晶体，纳米晶体顶端与样品接触，针尖局域的磨损不会造成探针磁性的显著衰减，因此能够保证探测的有效性与稳定性，并且大大增加了探针的使用寿命。(3) In the prior art, the magnetic coating on the tip of the probe is easy to wear during use, which easily leads to detection failure. In the present invention, the tip of the probe is a nanocrystal that maintains uniform magnetic properties as a whole. The top of the nanocrystal is in contact with the sample. The local wear of the tip will not cause a significant attenuation of the magnetism of the probe, so the effectiveness and stability of the probe can be guaranteed, and the probe can be greatly improved. Increased probe life.
本发明还提供了一种制备该磁性扫描显微镜探针的方法，包括如下步骤：The present invention also provides a method for preparing the magnetic scanning microscope probe, comprising the following steps:
采用磁性纳米晶体，将该磁性纳米晶体固定在探针悬臂梁的一端，探针悬臂梁的另一端固定连接探针基底平台；然后，将磁性纳米晶体切割为探针针尖结构；Using magnetic nanocrystals, the magnetic nanocrystals are fixed on one end of the probe cantilever beam, and the other end of the probe cantilever beam is fixedly connected to the probe substrate platform; then, the magnetic nanocrystals are cut into a probe tip structure;
或者，采用磁性纳米晶体，将该磁性纳米晶体切割为探针针尖结构；然后，将该磁性纳米晶体固定在探针悬臂梁的一端，探针悬臂梁的另一端连接探针基底平台。Alternatively, the magnetic nanocrystal is used, and the magnetic nanocrystal is cut into a probe tip structure; then, the magnetic nanocrystal is fixed on one end of the probe cantilever beam, and the other end of the probe cantilever beam is connected to the probe substrate platform.
磁性纳米晶体固定在探针悬臂梁上的方法不限，包括化学胶粘固定、焊接固定等。The method for fixing the magnetic nanocrystals on the probe cantilever beam is not limited, including chemical adhesive fixing, welding fixing and the like.
将磁性纳米晶体切割为探针针尖结构的方法不限，作为一种实现方式，利用聚焦离子束对磁性纳米晶体进行切割。The method for cutting the magnetic nanocrystal into the probe tip structure is not limited, and as an implementation manner, the magnetic nanocrystal is cut by using a focused ion beam.
附图说明Description of drawings
图1是本发明实施例1中的磁性扫描显微镜探针的结构示意图；Fig. 1 is the structural representation of the magnetic scanning microscope probe in the embodiment 1 of the present invention;
图2是本发明实施例1中的磁性扫描显微镜探针的制备过程示意图。Fig. 2 is a schematic diagram of the preparation process of the magnetic scanning microscope probe in Example 1 of the present invention.
具体实施方式Detailed ways
下面结合实施例对本发明作进一步详细描述，需要指出的是，以下所述实施例旨在便于对本发明的理解，而对其不起任何限定作用。The present invention will be described in further detail below in conjunction with the examples. It should be pointed out that the following examples are intended to facilitate the understanding of the present invention, but do not limit it in any way.
探针基体平台1、针尖2、悬臂梁3、连接部4、磁性纳米晶体5。Probe base platform 1 , needle tip 2 , cantilever beam 3 , connection part 4 , magnetic nanocrystal 5 .
实施例1：Example 1:
磁性扫描显微镜探针结构如图1所示，包括用于连接扫描探针显微镜的探针基体平台1，悬臂梁3与针尖2，悬臂梁的3的一端固定连接针基体平台1，悬臂梁3的另一端通过连接部固定连接针尖2，连接部为化学胶。针尖2呈锥形。针尖2由磁性纳米晶体构成，悬臂梁3由非磁性材料构成，探针基底平台1由非磁性材料构成。The structure of the magnetic scanning microscope probe is shown in Figure 1, including the probe substrate platform 1 for connecting the scanning probe microscope, the cantilever beam 3 and the needle tip 2, and one end of the cantilever beam 3 is fixedly connected to the needle substrate platform 1 and the cantilever beam 3 The other end of the needle tip 2 is fixedly connected to the connecting part, and the connecting part is chemical glue. The needle tip 2 is conical. The needle tip 2 is made of magnetic nano crystals, the cantilever beam 3 is made of non-magnetic material, and the probe base platform 1 is made of non-magnetic material.
该磁性扫描显微镜探针的制备方法如图2所示，包括以下步骤：The preparation method of this magnetic scanning microscope probe is shown in Figure 2, comprises the following steps:
(1)利用机械法在探针悬臂2前端连接磁性纳米晶体3(1) Connect the magnetic nanocrystal 3 to the front end of the probe cantilever 2 by mechanical method
利用机械手操纵技术，将悬臂梁3靠近块状的磁性纳米晶体5，采用化学胶使磁性纳米晶体5的一端与探针悬臂梁3粘合，探针悬臂梁3的另一端固定连接探针基底平台1；Using the manipulator manipulation technology, the cantilever beam 3 is brought close to the block-shaped magnetic nanocrystal 5, and one end of the magnetic nanocrystal 5 is bonded to the probe cantilever beam 3 with chemical glue, and the other end of the probe cantilever beam 3 is fixedly connected to the probe base Platform 1;
(2)按照探针针尖的形状，采用聚焦离子束的方法对磁性纳米晶体5的形状及尺寸进行切除加工，得到探针针尖形状。(2) According to the shape of the probe tip, the shape and size of the magnetic nanocrystal 5 are cut and processed by the method of focusing ion beams to obtain the shape of the probe tip.
实施例2：Example 2:
本实施例中，磁性扫描显微镜探针结构与实施例1中的探针结构基本相同，所不同的是连接部为焊接材料。In this embodiment, the structure of the magnetic scanning microscope probe is basically the same as that in Embodiment 1, except that the connection part is a solder material.
该磁性扫描显微镜探针的制备方法包含以下步骤：The preparation method of the magnetic scanning microscope probe comprises the following steps:
(1)利用机械手操纵技术，将悬臂梁3靠近块状的磁性纳米晶体5，采用施加偏压焊接的方法使磁性纳米晶体5的一端与悬臂梁3固定连接，悬臂梁3的另一端固定连接探针基底平台1；(1) Utilize the manipulator manipulation technology, the cantilever beam 3 is close to the magnetic nanocrystal 5 of block shape, adopts the method for applying bias welding to make one end of the magnetic nanocrystal 5 fixedly connected with the cantilever beam 3, and the other end of the cantilever beam 3 is fixedly connected Probe base platform 1;
(2)按照探针针尖的形状，采用聚焦离子束的方法对磁性纳米晶体5的形状及尺寸进行切除加工，得到探针针尖形状。(2) According to the shape of the probe tip, the shape and size of the magnetic nanocrystal 5 are cut and processed by the method of focusing ion beams to obtain the shape of the probe tip.
实施例3：Example 3:
本实施例中，磁性扫描显微镜探针结构与实施例2中的探针结构相同。In this embodiment, the probe structure of the magnetic scanning microscope is the same as that in Embodiment 2.
该磁性扫描显微镜探针的制备方法包含以下步骤：The preparation method of the magnetic scanning microscope probe comprises the following steps:
(1)按照探针针尖的形状，采用聚焦离子束的方法对磁性纳米晶体5的形状及尺寸进行切除加工，得到探针针尖形状。(1) According to the shape of the probe tip, the shape and size of the magnetic nanocrystal 5 are cut and processed by focusing the ion beam to obtain the shape of the probe tip.
(2)利用机械手操纵技术，将悬臂梁3靠近步骤(1)处理后的磁性纳米晶体5，采用施加偏压焊接的方法使磁性纳米晶体5的一端与悬臂梁3固定连接，悬臂梁3的另一端固定连接探针基底平台1。(2) Utilize manipulator manipulation technology, with cantilever beam 3 near the magnetic nanocrystal 5 after step (1) process, adopt the method for applying bias welding to make one end of magnetic nanocrystal 5 be fixedly connected with cantilever beam 3, the cantilever beam 3 The other end is fixedly connected to the probe substrate platform 1 .
以上所述的实施例对本发明的技术方案进行了详细说明，应理解的是以上所述仅为本发明的具体实施例，并不用于限制本发明，凡在本发明的原则范围内所做的任何修改、补充或类似方式替代等，均应包含在本发明的保护范围之内。The embodiments described above have described the technical solutions of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention, and are not intended to limit the present invention. All done within the principle scope of the present invention Any modification, supplement or substitution in a similar manner shall be included within the protection scope of the present invention.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111089988A (en) * | 2019-12-27 | 2020-05-01 | 季华实验室 | A kind of high uniformity magnetic probe and preparation method thereof |
| CN111825056A (en) * | 2020-07-17 | 2020-10-27 | 杭州电子科技大学 | Method for forming cantilever beam probe based on femtosecond laser and high temperature and cantilever beam probe |
| CN114088981A (en) * | 2021-10-21 | 2022-02-25 | 华南理工大学 | Side wall scanning probe and processing method thereof |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050088173A1 (en) * | 2003-10-24 | 2005-04-28 | Abraham David W. | Method and apparatus for tunable magnetic force interaction in a magnetic force microscope |
| CN1826662A (en) * | 2003-07-08 | 2006-08-30 | 库纳诺公司 | Probe structures incorporating nanowhiskers, production methods thereof, and methods of forming nanowhiskers |
| JP2006266794A (en) * | 2005-03-23 | 2006-10-05 | Osaka Prefecture | Magnetic force microscope probe |
| US20100205699A1 (en) * | 2009-01-05 | 2010-08-12 | Tachizaki Takehiro | Magnetic device inspection apparatus and magnetic device inspection method |
| CN102778589A (en) * | 2011-05-09 | 2012-11-14 | 株式会社日立高新技术 | Cantilever for magnetic force microscope and method of manufacturing the same |
| TW201404711A (en) * | 2012-07-26 | 2014-02-01 | Univ Nat Taiwan | Method for manufacturing a probe of a scanning microscope and product thereof |
| CN105510642A (en) * | 2014-09-24 | 2016-04-20 | 中国科学院宁波材料技术与工程研究所 | Nanometer magnetic-thermal in-situ detection apparatus based on scanning probe microscope, and detection method thereof |
| CN106483340A (en) * | 2016-08-05 | 2017-03-08 | 南开大学 | Logarithmic non linear metal bores probe |
| CN106597026A (en) * | 2016-12-09 | 2017-04-26 | 中国科学院宁波材料技术与工程研究所 | Magneto-electro-thermo multi-parameter coupling microscope probe, and preparation method and detection method thereof |
| CN107064565A (en) * | 2017-05-27 | 2017-08-18 | 中国科学院宁波材料技术与工程研究所 | The hot many reference amounts coupling microscope probe of magnetoelectricity, its preparation method and detection method |
| CN108414794A (en) * | 2018-01-24 | 2018-08-17 | 胡欢 | A kind of atomic force microscope probe production method with nanoscale ball point |
-
2019
- 2019-07-18 CN CN201910652075.0A patent/CN110333372A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1826662A (en) * | 2003-07-08 | 2006-08-30 | 库纳诺公司 | Probe structures incorporating nanowhiskers, production methods thereof, and methods of forming nanowhiskers |
| US20050088173A1 (en) * | 2003-10-24 | 2005-04-28 | Abraham David W. | Method and apparatus for tunable magnetic force interaction in a magnetic force microscope |
| JP2006266794A (en) * | 2005-03-23 | 2006-10-05 | Osaka Prefecture | Magnetic force microscope probe |
| US20100205699A1 (en) * | 2009-01-05 | 2010-08-12 | Tachizaki Takehiro | Magnetic device inspection apparatus and magnetic device inspection method |
| CN102778589A (en) * | 2011-05-09 | 2012-11-14 | 株式会社日立高新技术 | Cantilever for magnetic force microscope and method of manufacturing the same |
| TW201404711A (en) * | 2012-07-26 | 2014-02-01 | Univ Nat Taiwan | Method for manufacturing a probe of a scanning microscope and product thereof |
| CN105510642A (en) * | 2014-09-24 | 2016-04-20 | 中国科学院宁波材料技术与工程研究所 | Nanometer magnetic-thermal in-situ detection apparatus based on scanning probe microscope, and detection method thereof |
| CN106483340A (en) * | 2016-08-05 | 2017-03-08 | 南开大学 | Logarithmic non linear metal bores probe |
| CN106597026A (en) * | 2016-12-09 | 2017-04-26 | 中国科学院宁波材料技术与工程研究所 | Magneto-electro-thermo multi-parameter coupling microscope probe, and preparation method and detection method thereof |
| CN107064565A (en) * | 2017-05-27 | 2017-08-18 | 中国科学院宁波材料技术与工程研究所 | The hot many reference amounts coupling microscope probe of magnetoelectricity, its preparation method and detection method |
| CN108414794A (en) * | 2018-01-24 | 2018-08-17 | 胡欢 | A kind of atomic force microscope probe production method with nanoscale ball point |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111089988A (en) * | 2019-12-27 | 2020-05-01 | 季华实验室 | A kind of high uniformity magnetic probe and preparation method thereof |
| CN111825056A (en) * | 2020-07-17 | 2020-10-27 | 杭州电子科技大学 | Method for forming cantilever beam probe based on femtosecond laser and high temperature and cantilever beam probe |
| CN114088981A (en) * | 2021-10-21 | 2022-02-25 | 华南理工大学 | Side wall scanning probe and processing method thereof |
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