CN206832200U - A kind of wide range three-dimensional surface profile measurement apparatus - Google Patents
A kind of wide range three-dimensional surface profile measurement apparatus Download PDFInfo
- Publication number
- CN206832200U CN206832200U CN201720699828.XU CN201720699828U CN206832200U CN 206832200 U CN206832200 U CN 206832200U CN 201720699828 U CN201720699828 U CN 201720699828U CN 206832200 U CN206832200 U CN 206832200U
- Authority
- CN
- China
- Prior art keywords
- interference
- coaxial
- light
- observation device
- amici prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 34
- 238000005286 illumination Methods 0.000 claims abstract description 33
- 230000003287 optical effect Effects 0.000 claims abstract description 32
- 238000003384 imaging method Methods 0.000 claims abstract description 20
- 230000010363 phase shift Effects 0.000 claims description 9
- 241000276498 Pollachius virens Species 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims 1
- 238000010276 construction Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005305 interferometry Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005183 dynamical system Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses a kind of wide range three-dimensional surface profile measurement apparatus.The device includes light source, coaxial-illuminating observation device, interference objective, area array CCD camera, PZT+ motors driving linear moving platform (motor driving linear moving platform), objective table.Illumination path emergent light is towards Amici prism, and the reflected light of Amici prism is towards interference objective；PZT and motor driving linear moving platform are sequentially coaxially arranged on the reflection optical axis direction of Amici prism with interference objective；Interference objective is arranged on the both sides of Amici prism with imaging lens, forms interference imaging light path；Area array CCD camera is arranged on the top of coaxial-illuminating observation device；Interference imaging light path is connected in one with illumination path by Amici prism, forms coaxial-illuminating observation device；The wide range three-dimensional surface profile measurement apparatus is simple in construction, and measurement accuracy is high, and range is big.
Description
Technical field
Surface profile measurement technical field is the utility model is related to, specifically one kind can be operated in phase shift interference and white light is done
Relate to the wide range surface profiling device of two kinds of mode of operations of vertical scanning.
Background technology
In recent years, with the continuous progress of fine processing technique, especially in semiconductor nano making technology, micro-electro-mechanical systems
The fields such as system, nano composite material, Ultra-precision Turning, there is an urgent need to part three-dimensional surface micro-profile measurement correlation technique and
Measuring instrument.And feature and measurement table of the three-dimensional surface micro-profile due to can more comprehensively, more realistically reflect piece surface
The quality in face and be increasingly taken seriously, therefore the measurement of three-dimensional surface micro-profile is more aobvious important.
Interference microtechnic is the product that optical interference techniques and microtechnic are combined, by increasing in interference system
Micro- amplification system, the lateral resolution of interference pattern is improved, enable to complete the three-dimensional surface profile measurement of micro-nano structure.Move
Interference technology and the white light interference vertical scanning technique to grow up on this basis are two kinds of common interference micrometerings
Technology.Phase-Shifting Interferometry can be with the smooth and continuous apparent height of the resolution measurement of Subnano-class, but the problem of it is present
It is 1/4 of continuous difference in height no more than optical source wavelength of surface.White light interference vertical scanning technique overcomes Phase-Shifting Interferometry
The limitation of apparent height measurement range, available for the height of measurement smooth surface and appropriate rough surface, especially surface step
Highly>150nm profile and appearance structure.Piezoelectric ceramics PZT is the dynamical system for driving vertical scanning, is characterized in precision
Height, but swash width is short, generally within 200um.This just greatly limit the scope of three-dimensional surface profile measurement.
Measured for fine profiling object surface, interference microtechnic has the advantages that quick, non-contact.Publication No.
CN101050949 Chinese patent literature discloses one kind using phase shift Microscopic inteferometry measurement large field object microcosmic surface three
Tie up pattern.But the measurement pattern of this measurement apparatus is single, and the problems such as volume is larger, and antijamming capability is poor be present.
The content of the invention
The purpose of this utility model is in view of the shortcomings of the prior art, there is provided a kind of new wide range three-dimensional surface profile
Measurement apparatus, have the characteristics that simple and compact for structure, measurement accuracy is high.
Above-mentioned purpose is realized in position, the technical solution that the utility model uses for：
A kind of wide range three-dimensional surface profile measurement apparatus, including light source, coaxial-illuminating observation device, interference objective, face
Array CCD camera, PZT, motor driving linear moving platform, objective table, the monochromatic filter for carrying measured workpiece；Coaxial-illuminating is seen
Examine device and include collecting lens, speculum and the condenser set gradually along lighting optical axis direction, realize the illumination to measured workpiece；
The built-in Amici prism of coaxial-illuminating observation device and focused images camera lens simultaneously；PZT and sequentially coaxially it is arranged on interference objective
On the reflection optical axis direction of Amici prism；Interference objective is arranged on the both sides of Amici prism with imaging lens, forms interference imaging
Light path；Area array CCD camera is arranged on the top of coaxial-illuminating observation device；Interference imaging light path is with illumination path by being divided rib
Mirror is connected in one, forms coaxial-illuminating observation device；Objective table is arranged on the lower section of interference objective；The motor driving is linear
Displacement platform is installed on the outside of coaxial-illuminating observation device or installed in the lower section of objective table；When motor drives linear displacement
For stage+module when the outside of coaxial-illuminating observation device, PZT driving interference objectives or motor driving linear moving platform are same
Axle illumination observation device optical axis vertically moves；When motor driving linear moving platform is arranged on the lower section of objective table, motor drives
Linear displacement platform drives measured workpiece to move and is scanned to change interference objective and quilt along optical axis driving sample stage
The light path surveyed between workpiece.
Beneficial effect：The utility model compared with prior art, its remarkable advantage：Motor driving linear moving platform can be with
By the measurement range of white light interference vertical scanning technique from PZT~100um microns extend to>1000um, its measurement accuracy can
With suitable with PZT vertical scanning techniques.Ensureing that white light interference hangs down using motor driving linear moving platform in the technical program
While straight scanning survey precision, surface step difference in height range measurement range, the essence in advanced manufacturing industry are greatly expanded
Held out broad prospects in the application of the estate surveyings such as close component of machine, integrated circuit three-dimensional packaging technology, new Display Technique.
Other beneficial effects of the present utility model also include：Speculum is added in illumination path and is used for light path of turning back, is reduced
Volume, simplifies structure so that apparatus structure is compact, size especially in the horizontal greatly reduces, so as to alleviate vibration
Influence, so as to significantly improve measurement accuracy.
Further, the utility model surface profiling device can be operated in wideband light source (such as white light) vertical scanning
Interfere two kinds of mode of operations with monochromatic light phase shift, i.e. an equipment can provide two kinds of metering systems.When for the former when, monochrome filter
Piece removes illumination path；When for the latter when, monochromatic filter shift-in illumination path.
Brief description of the drawings
Fig. 1 is the structural representation of wide range three-dimensional surface profile measurement apparatus in the utility model embodiment one.
Fig. 2 is the structural representation of wide range three-dimensional surface profile measurement apparatus in the utility model embodiment two.
Fig. 3 is the structural representation of Mirau type interference objectives.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Following reality
Apply example to be used to illustrate the present invention, but be not limited to the scope of the present invention.
Embodiment one
It is as shown in Figure 1 the structural representation of present apparatus embodiment one, including light source (1), coaxial-illuminating observation device
(22), Mirau types interference objective (4), area array CCD camera (6), PZT (7), the objective table (9) of carrying measured workpiece (8), monochrome
Optical filter (11), motor driving linear moving platform (31).Coaxial-illuminating observation device (22) falls to penetrate Shi Kele photographs using coaxial
Bright structure (2), including collecting lens (201), speculum (202) and the condenser (203) set gradually along lighting optical axis direction are real
Now to the illumination of measured workpiece (8)；Coaxial-illuminating observation device (22) built-in Amici prism (3) and focused images camera lens simultaneously
(5).Illumination path emergent light is towards Amici prism (3), and the reflected light of Amici prism is towards Mirau interference objectives (4).PZT(7)
Sequentially coaxially it is arranged on the reflection optical axis direction of Amici prism (3) with interference objective (4).Mirau types interference objective (4) with
Imaging lens (5) are arranged on the both sides of Amici prism (3), form interference imaging light path.Area array CCD camera (6) is arranged on coaxially
The top of illumination observation device (22).Interference imaging light path is connected in one with illumination path by Amici prism (3), is formed same
Axle illumination observation device (22).Measured workpiece (8) is placed on objective table (9).Objective table (9) is arranged on Mirau type interferences
The lower section of mirror (4).
As shown in figure 1, the light that light source (1) is sent is successively by way of collecting lens (201), speculum (202) and condenser
(203) after, collimation uniform beam is formed.Speculum (202) is placed with optical axis angle at 45 °, and illumination path is turned back 90 ° so that
Illumination path emergent light is towards Amici prism (3).The beam-splitting surface of Amici prism (3) and the optical axis angle at 45 ° of interference imaging light path
Set, make illumination path emergent light through the light that Amici prism (3) reflects towards Mirau types interference objective (4).Mirau types are interfered
Object lens (4) make the light beam by Amici prism (3) reflection converge in the direction of the optical axis and be irradiated in measured workpiece (8), and make from
The measuring beam that measured workpiece (8) reflection obtains is interferenceed with the reference beam obtained inside interference objective.Interference light is from institute
After stating interference objective (4) return, successively after Amici prism (3) and imaging lens (5), CCD camera (6) target surface is focused on
On, form interference fringe.Motor driving linear moving platform (31) is installed on the outside of coaxial-illuminating observation device；PZT (7) drives
Dynamic interference objective (4) is vertically moved along optical axis or motor driving linear moving platform (31) driving coaxial-illuminating observation device edge
Optical axis vertically moves；
Be illustrated in figure 3 the structural representation of Mirau type interference objectives, including microcobjective (401), reference plate (402),
Reflector space (404) on beam-splitter (403) and reference plate.Light beam from optical system front end is after microcobjective (401)
Through reference plate (402), then it is divided into two beams through part reflective semitransparent film on beam-splitter (403), a branch of plate that is split (403) reflexes to
Reflector space (404) on reference plate (402), return to beam-splitter (403) after being reflected by reflector space (404) and reflected again,
Object lens (401) finally are returned to through reference plate (402), form reference light.Another beam projects tested work through beam-splitter (403)
Part, returned to after measured workpiece reflects through beam-splitter (403) and reference plate (402) on microcobjective (401), form test light.
Two-beam merges in object lens (401) visual field and interfered.
The measurement apparatus can be operated in vertical scanning and monochromatic light phase shift interference both of which.When for the former when, monochrome filter
Mating plate removes illumination path, and wideband light source is as lighting source.When for the latter when, realize that phase shift is done by installing monochromatic filter
Relate to the switching of pattern monochromatic source.
When device is operated in monochromatic light phase shift interference pattern, Mirau interference objectives and PZT precisions travel mechanism are along optical axis
Direction is connected firmly with screw thread, when PZT moves along optical axis precision, drives Mirau interference objectives to move up and down, and changes Mirau interference
Light path on object lens and objective table between measured workpiece, phase shift is realized so as to change phase.Phase-shifting algorithm is by means of appropriate
Program surface phase diagram is converted into height of specimen distribution map.
Embodiment two
It is the structural representation of present apparatus embodiment one referring again to shown in Fig. 2.
Embodiment two includes light source (1), coaxial-illuminating observation device (22), Mirau types interference objective (4), area array CCD
Camera (6), PZT (7), the objective table (9) of carrying measured workpiece (8), monochromatic filter (11), motor driving linear moving platform
(31).Coaxial-illuminating observation device (22) uses coaxially to fall to penetrate formula Kohler illumination structure (2), including along lighting optical axis direction successively
Collecting lens (201), speculum (202) and the condenser (203) of setting, realize the illumination to measured workpiece (8)；It is simultaneously coaxial to shine
The built-in Amici prism of bright observation device (22) (3) and focused images camera lens (5).Illumination path emergent light towards Amici prism (3),
The reflected light of Amici prism is towards Mirau interference objectives (4).PZT (7) and sequentially coaxially it is arranged on light splitting with interference objective (4)
On the reflection optical axis direction of prism (3).Mirau types interference objective (4) is arranged on the two of Amici prism (3) with imaging lens (5)
Side, form interference imaging light path.Area array CCD camera (6) is arranged on the top of coaxial-illuminating observation device (22).Inteference imaging
Road is connected in one with illumination path by Amici prism (3), forms coaxial-illuminating observation device (22).Measured workpiece (8) is pacified
It is placed on objective table (9).Objective table (9) is arranged on the lower section of Mirau types interference objective (4).
As shown in figure 1, the light that light source (1) is sent is successively by way of collecting lens (201), speculum (202) and condenser
(203) after, collimation uniform beam is formed.Speculum (202) is placed with optical axis angle at 45 °, and illumination path is turned back 90 ° so that
Illumination path emergent light is towards Amici prism (3).The beam-splitting surface of Amici prism (3) and the optical axis angle at 45 ° of interference imaging light path
Set, make illumination path emergent light through the light that Amici prism (3) reflects towards Mirau types interference objective (4).Mirau types are interfered
Object lens (4) make the light beam by Amici prism (3) reflection converge in the direction of the optical axis and be irradiated in measured workpiece (8), and make from
The measuring beam that measured workpiece (8) reflection obtains is interferenceed with the reference beam obtained inside interference objective.Interference light is from institute
After stating interference objective (4) return, successively after Amici prism (3) and imaging lens (5), CCD camera (6) target surface is focused on
On, form interference fringe.Motor driving linear moving platform (31) is arranged on the lower section of objective table (9), PZT (7) driving interference
Object lens (4) vertically move along optical axis or motor driving linear moving platform (31) drives sample stage (9) to drive along optical axis
Measured workpiece movement is scanned to change the light path between interference objective (4) and measured workpiece (8).CCD camera (6) will be shot
Image be real-time transmitted to computer (not provided in figure).Computer arranges these interference images successively, is formed a series of dry
Image is related to, three-dimensional surface micro-profile image is finally rebuild according to the relation of phase or luminous intensity and height.
When device is operated in white light interference vertical scan mode, sample surfaces each point can obtain when being in optimal focus position
To maximum interference fringe contrast.It is tested that PZT or motor drive linear moving platform to be driven along optical axis driving sample stage
Workpiece is scanned, and each point on surface can indicate zero light path by focusing using the zero order fringe of white light interference
The position of difference, the relative altitude of each point is obtained to reconstruct three-dimensional surface profile by detecting interference fringe envelope peak value
Figure.
Claims (6)
- A kind of 1. wide range three-dimensional surface profile measurement apparatus, it is characterised in that：Including light source (1), coaxial-illuminating observation device, Interference objective (4), area array CCD camera (6), PZT (7), motor drive linear moving platform (31), carry measured workpiece (8) Objective table (9), monochromatic filter (11)；Coaxial-illuminating observation device includes the collecting lens set gradually along lighting optical axis direction (201), speculum (202) and condenser (203), realize the illumination to measured workpiece (8)；Simultaneously in coaxial-illuminating observation device Hide Amici prism (3) and focused images camera lens (5)；PZT (7) and sequentially coaxially it is arranged on Amici prism (3) with interference objective (4) Reflection optical axis direction on；Interference objective (4) is arranged on the both sides of Amici prism (3) with imaging lens (5), forms interference imaging Light path；Area array CCD camera (6) is arranged on the top of coaxial-illuminating observation device；Interference imaging light path is with illumination path by dividing Light prism (3) is connected in one, forms coaxial-illuminating observation device；Objective table (9) is arranged on the lower section of interference objective (4)；The motor driving linear moving platform (31) is installed on the outside of coaxial-illuminating observation device or installed in objective table (9) lower section；When motor driving linear moving platform (31) is installed on the outside of coaxial-illuminating observation device, PZT (7) driving interferences Mirror (4) or motor driving linear moving platform (31) coaxial-illuminating observation device optical axis vertically move；When motor driving linear moving platform (31) is arranged on the lower section of objective table (9), motor driving linear moving platform (31) drive sample stage (9) to drive measured workpiece to move along optical axis to be scanned to change interference objective (4) and tested work Light path between part (8).
- A kind of 2. wide range three-dimensional surface profile measurement apparatus according to claim 1, it is characterised in that：Coaxial-illuminating is seen Device is examined using coaxially falling to penetrate formula Kohler illumination structure (2)；The light that light source (1) is sent falls to penetrate formula Kohler illumination structure coaxially (2) it is internal to form collimation uniform beam by way of collecting lens (201), speculum (202) and condenser (203) successively.
- A kind of 3. wide range three-dimensional surface profile measurement apparatus according to claim 1, it is characterised in that：Coaxially fall to penetrate formula Speculum (202) in Kohler illumination structure (2) is placed with optical axis angle at 45 °, and illumination path, which is turned back 90 °, goes out illumination path Light is penetrated towards Amici prism (3).
- A kind of 4. wide range three-dimensional surface profile measurement apparatus according to claim 1, it is characterised in that：Amici prism (3) beam-splitting surface and the optical axis angle at 45 ° of interference imaging light path are set, and illumination path emergent light is reflected through Amici prism (3) Light towards interference objective (4).
- A kind of 5. wide range three-dimensional surface profile measurement apparatus according to claim 1, it is characterised in that：Interference objective (4) one kind in Michelson structures, Mirau structures and Linnik structures can be selected.
- A kind of 6. wide range three-dimensional surface profile measurement apparatus according to claim 1, it is characterised in that：The measurement apparatus It is operated in white light interference vertical scanning and monochromatic light phase shift interference both of which；When for the former when, monochromatic filter (11) remove Illumination path, wideband light source is as lighting source；When for the latter when, installation monochromatic filter (11) realize phase shift interference pattern list The switching of color light source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720699828.XU CN206832200U (en) | 2017-06-15 | 2017-06-15 | A kind of wide range three-dimensional surface profile measurement apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720699828.XU CN206832200U (en) | 2017-06-15 | 2017-06-15 | A kind of wide range three-dimensional surface profile measurement apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206832200U true CN206832200U (en) | 2018-01-02 |
Family
ID=60776080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720699828.XU Active CN206832200U (en) | 2017-06-15 | 2017-06-15 | A kind of wide range three-dimensional surface profile measurement apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206832200U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108286940A (en) * | 2018-03-23 | 2018-07-17 | 杭州电子科技大学 | A kind of laser feeler device and its application method that multrirange is integrated |
| CN108489417A (en) * | 2018-02-11 | 2018-09-04 | 杭州电子科技大学 | A kind of laser feeler device and its curved face measurement method that range is variable |
| CN110307802A (en) * | 2019-06-24 | 2019-10-08 | 天津大学 | A Surface Topography Measurement Method Based on Automatic Focus Search of Laser Focusing Probe |
-
2017
- 2017-06-15 CN CN201720699828.XU patent/CN206832200U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108489417A (en) * | 2018-02-11 | 2018-09-04 | 杭州电子科技大学 | A kind of laser feeler device and its curved face measurement method that range is variable |
| CN108286940A (en) * | 2018-03-23 | 2018-07-17 | 杭州电子科技大学 | A kind of laser feeler device and its application method that multrirange is integrated |
| CN110307802A (en) * | 2019-06-24 | 2019-10-08 | 天津大学 | A Surface Topography Measurement Method Based on Automatic Focus Search of Laser Focusing Probe |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105486247B (en) | It is a kind of can continuous zoom surface figure measuring device | |
| TWI576563B (en) | Method and device for non-contact measuring surfaces | |
| CN201050978Y (en) | Precise distribution device for surface shape of white light interferometry sample | |
| CN106441157B (en) | A fast measurement method for complex topography | |
| Mei et al. | Structure light telecentric stereoscopic vision 3D measurement system based on Scheimpflug condition | |
| CN104614558B (en) | A kind of, line CCD combine atomic force probe scanning measurement system and measuring method | |
| CN101608904B (en) | Multifunction three-dimensional displacement and topography laser interferometry system | |
| CN105157606A (en) | Non-contact type high-precision three-dimensional measurement method and measurement device for complex optical surface shapes | |
| CN206832200U (en) | A kind of wide range three-dimensional surface profile measurement apparatus | |
| CN113588682A (en) | Large-range high-precision rapid defect detection system for 3D parts | |
| CN106595515B (en) | A topography measurement device combined with white light and laser scanning | |
| CN107144217A (en) | Fiber optic interferometric confocal system for optical element crudy on-line checking | |
| CN204255304U (en) | A kind of three-dimensional surface profile measurement mechanism | |
| CN107144237A (en) | Heavy caliber interferometer measuration system and algorithm based on three-dimensional splicing | |
| JP2010528314A (en) | 3D shape measuring device | |
| JP2006329751A (en) | Surface shape measuring method and surface shape measuring instrument | |
| CN114543702A (en) | High-precision and fast measurement method and device for three-dimensional topography of target position based on stereo vision guidance | |
| CN106767500B (en) | Light path system for topography measurement | |
| US8593644B2 (en) | White light optical profilometer for measuring complex surfaces | |
| CN107923735B (en) | Method and device for deducing the topography of an object surface | |
| CN100552431C (en) | Laser speckle interferometry method and device | |
| CN106404525A (en) | Apparatus for testing micro-nano structure mechanical properties of material | |
| KR20170078200A (en) | Apparatus of high speed white light scanning interferometer using dual coherence for high step height and thickness measurements | |
| CN111854628A (en) | Three-dimensional imaging device for weld surface appearance | |
| CN215574729U (en) | Large-range high-precision rapid defect detection system for 3D parts |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221208 Address after: Unit E2E3-301, Artificial Intelligence Industrial Park, No. 88, Jinjihu Avenue, Suzhou Industrial Park, Jiangsu Province, 215000 Patentee after: Changchuan Technology (Suzhou) Co.,Ltd. Address before: 1809, Block A, Twin Building, No. 468, Wisdom Avenue, Dingmao District, Zhenjiang City, Jiangsu Province, 212000 Patentee before: ZHENJIANG SUBNANO INSTRUMENTS INCORPORATED., LTD. |
|
| TR01 | Transfer of patent right |