CN106767500B - Light path system for topography measurement - Google Patents
Light path system for topography measurement Download PDFInfo
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- CN106767500B CN106767500B CN201611061350.4A CN201611061350A CN106767500B CN 106767500 B CN106767500 B CN 106767500B CN 201611061350 A CN201611061350 A CN 201611061350A CN 106767500 B CN106767500 B CN 106767500B
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- 238000005259 measurement Methods 0.000 title claims abstract description 67
- 238000012876 topography Methods 0.000 title claims abstract description 35
- 230000003287 optical effect Effects 0.000 claims abstract description 25
- 238000007514 turning Methods 0.000 claims description 4
- 238000005305 interferometry Methods 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims 2
- 238000003384 imaging method Methods 0.000 abstract description 10
- 238000012546 transfer Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 4
- 230000004927 fusion Effects 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 238000012625 in-situ measurement Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 101100117236 Drosophila melanogaster speck gene Proteins 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention discloses a kind of light path system for topography measurement, including 1, three Amici prism of white light source, micro- eyepiece 5, microcobjective 6, interference objective 7, four-quadrant photoelectric sensor 8, laser 9 and imaging sensor 10, there is two optical paths and laser measurement optical path；Laser measurement optical path are as follows: transfer by laser 9 through third Amici prism 4, measured surface 11 is focused to by microcobjective 6, after the reflection of measured surface 11, pass through microcobjective 6, third Amici prism 4 and the second Amici prism 3 respectively, is projected to measurement of the four-quadrant photoelectric sensor 8 for 11 elevation information of measured surface；Laser 9 is transferred through the reflected light of measured surface 11 by the second Amici prism 3, after the first Amici prism 2 and micro- eyepiece 5, it is imaged together with the lighting background light formed by white light source 1 to imaging sensor 10, forms acquisition figure when laser measurement.
Description
Technical field
The present invention relates to a kind of topography measurement devices, machine components, optical component especially for Ultra-precision Turning
Machined surface quality and Shape measure in manufacturing process.
Background technique
Surface topography refers to the geometric shape that the interface of object and surrounding medium shows, by surface basic configuration and
The surface defects parameter such as percent ripple, texture, surface roughness together constitutes the feature of body surface primary morphology.Added by machinery
The surface topography that the techniques such as work, surface treatment are formed directly affects its function and service performance.With national defense industry, aerospace
And the rapid development in the fields such as machine-building, the demand of Ultra-precision Turning part also increasingly improve, product surface pattern and structure
Also it becomes increasingly complex, it is therefore, most important to surface profile measurements technologies such as machine components, the optical elements of Ultra-precision Turning.
Surface topography measuring method is varied, and in order to adapt to complex surface topography measurement demand, main measurement means are still
For point by point scanning measurement method, most common contourgraph can satisfy the demand of ultraprecise highly-efficient processing.Meanwhile some use whole field
The method that scanning mode realizes surface topography rapid survey optical surface, such as lasing area interferometry, reflecting grating method.More than but
The measurement data sample rate of method is relatively relatively low, is only capable of obtaining the basic configuration (low-frequency information of surface topography) of surface topography.
And contact contourgraph is suitable only for the Roughness Information (high-frequency information of surface topography) on collection surface contour line.However,
The surface details such as the texture of surface topography or percent ripple information (intermediate frequency information of surface topography) influences service performance very big.
Currently, the white light interference method for being appropriate for surface details analysis is relatively confined to local measurement, cardinal principle is using white
The Low coherence characteristic of light by object surface appearance message reflection to interference signal, and is obtained by the analysis to interference image
Restore the three-dimensional appearance on sample to be tested surface, Measurement Resolution can reach nanoscale.
Summary of the invention
The object of the present invention is to provide a kind of optical paths that can be used to realize a wide range of full frequency band measuring surface form in surface
System.The present invention can also independently carry out off-line measurement using the in situ measurement in a set of measuring device, can both having processed.
Technical solution is as follows:
A kind of light path system for topography measurement, including it is 1, three Amici prism of white light source, micro- eyepiece 5, micro-
Object lens 6, interference objective 7, four-quadrant photoelectric sensor 8, laser 9 and imaging sensor 10 have two optical paths and swash
Light measurement optical path, wherein
White light interferometric optical path are as follows: be divided into two after issuing light beam parallel projection to the first Amici prism 2 by white light source 1
Beam, light beam are transferred 90 ° by the first Amici prism 2 and project measured surface 11 by interference objective 7, and the light of reflection is through interfering
Object lens 7 and the first Amici prism 2 return to micro- eyepiece 5, and light beam and its light reflected occur dry in micro- 5 visual field of eyepiece
It relates to, imaging sensor 10 obtains interference fringe to obtain the surface topography information in region to be measured；Second beam light passes through the first light splitting
Prism 2 successively passes through the second Amici prism 3, third Amici prism 4 and microcobjective 6, converges at measured surface 11, through tested
Surface 11 reflect after respectively by microcobjective 6, third Amici prism 4, the second Amici prism 3, the first Amici prism 2 and micro-
Eyepiece 5 is imaged onto imaging sensor 10, is responsible for laser measurement optical path and provides lighting background light；
Laser measurement optical path are as follows: transfer by laser 9 through third Amici prism 4, by microcobjective 6 focus to by
Surface 11 is surveyed, after the reflection of measured surface 11, passes through microcobjective 6, third Amici prism 4 and the second Amici prism 3 respectively, throws
It is incident upon measurement of the four-quadrant photoelectric sensor 8 for 11 elevation information of measured surface；Laser 9 is reflected through measured surface 11
Light transferred by the second Amici prism 3, after the first Amici prism 2 and the micro- eyepiece 5, and formed by white light source 1
Lighting background light is imaged together to imaging sensor 10, and acquisition figure when laser measurement is formed.
" white light-laser " complex form that light path system of the invention uses, then it is aided with three-dimensional movement platform, it can be real simultaneously
Existing laser scanning measurement and white light interference topography measurement.Wherein laser scanning measurement realizes that surface topography low-frequency information obtains, and adopts
Sampling point quantity is few, and measuring speed is fast, can quickly be recognized to measured surface；White light interference topography measurement then passes through multiple haplopias
Field connecting method obtains measured surface medium-high frequency information, and monoscopic measuring route can be according to laser measurement recognizing for measured surface
Knowledge is planned.Therefore, light path system of the invention is placed in three-dimensional movement platform, high speed full range can be carried out to surface topography
Section measurement.Simultaneously as the light path system for topography measurement of the invention is by laser measurement and white light interferometric system light
Road progress is effectively compound, therefore, can form the measuring system that structure is simple, is easily installed, not only can be with cooperative movement platform
The scanning survey for carrying out measured surface, can also be installed on machining tool, survey to the in situ of surface topography of processed device
Amount avoids the error of the secondary proper equal introducings of dress in process.
Detailed description of the invention:
Fig. 1 " index path of the light path system for topography measurement
Light path system structural schematic diagram for topography measurement Fig. 2 of the invention
Light path system for topography measurement Fig. 3 of the invention is placed in three-dimensional movement platform schematic diagram
Light path system for topography measurement Fig. 4 of the invention places machining tool schematic diagram
Fig. 5 " white light-laser " measurement flow chart
Fig. 6 " white light-laser " measuring route schematic diagram, (a) helical scan path；(b) grid line scan path 1；(c) grid
Line scan path 2.
The reference numerals are as follows: white light source 1, Amici prism 3, Amici prism 4, micro- eyepiece 5, is shown Amici prism 2
Speck mirror 6, interference objective 7, four-quadrant photoelectric sensor 8, laser 9, imaging sensor 10, measured surface 11, system shell
12, system handle 13, power supply and control 14, the light path system 15 for topography measurement of the invention, 16 (Z-direction of linear motion axis
Kinematic axis), linear motion axis 17 (X to kinematic axis), linear motion axis 18 (Y-direction kinematic axis), sample stage 19, be processed device
20, knife rest 21, system of processing 22 are processed
Specific embodiment
Present invention combination white light interference and Laser Scanning realize a wide range of full frequency band measuring surface form in surface.White light
Interferometry can fast implement the nanometer accuracy measurement of small field of view boundary surface pattern, since the sampling number of local measurement is more, because
This, may be implemented the acquisition of full frequency band surface information.Broad surface pattern is just needed to carry out multiple haplopia field datas
Splicing fusion.However, since measured surface is complex-shaped, measuring route of how making rational planning for realizes rapid survey and high-precision
Splicing is that the problem of broad surface topography measurement is realized by White Light Interferometer.Therefore, present invention introduces Laser Scannings
Quick predict amount can be carried out to surface to be measured, the characteristic information on surface to be measured is fully understanded by analysis, is targetedly advised
Draw the path of white light interferometric.It is also possible to which binding analysis is as a result, targetedly focal point region carries out piecemeal survey
Amount.In the hope of measured surface is effectively measured and is evaluated.
Therefore, the present invention proposes the method (" white light-laser ") that white light interference and laser scanning measurement combine, by means of swashing
Optical scanning measurement method realizes the acquisition of surface topography low-frequency information, and white light interferometric passes through multiple monoscopic connecting methods
The two is combined into a system integrity measurement by optical path, guarantees measurement by the principle for obtaining surface to be machined medium-high frequency information
The precise measurement to measured surface pattern is realized in the miniaturization of system.
Fig. 1 is the light path schematic diagram of the light path system for topography measurement of the invention.Measuring system is mainly by white light light
Source 1, Amici prism 2/3/4, micro- eyepiece 5, microcobjective 6, interference objective 7, four-quadrant photoelectric sensor 8, laser 9 and figure
As sensor 10 forms.Measuring system includes two optical paths.It is flat that white light interferometric optical routing white light source 1 issues light beam
Row projects Amici prism 2 and is divided into two beams, and a branch of prism 2 that is split, which is transferred 90 °, projects measured surface by interference objective 7
11, eyepiece 5 is returned to through interference objective 7 and Amici prism 2 after reflection, two-beam interferes in 5 visual field of eyepiece, image sensing
Device 10 obtains interference fringe to obtain the surface topography information in region to be measured；Another beam pass through Amici prism 2, through Amici prism 3,
Amici prism 4 and microcobjective 6, converge at measured surface 11, and measured surface 11 passes through microcobjective 6, light splitting after reflecting respectively
Prism 4, Amici prism 3, Amici prism 2 and eyepiece 5, are imaged onto imaging sensor 10, are responsible for laser measurement optical path and provide photograph
Bright bias light.Laser measurement optical routing laser 9 sets out transfers through Amici prism 4, focuses to measured surface by microcobjective 6
11, after the reflection of measured surface 11, passes through microcobjective 6, Amici prism 4 and Amici prism 3 respectively, be projected to four-quadrant photoelectricity
Sensor 8 is used for the measurement of 11 elevation information of measured surface.When the change due to 11 measured position elevation information of measured surface, meeting
Cause laser irradiation to 8 position of four-quadrant photoelectric sensor difference, height letter in measured position is calculated by laser point position
Breath.Laser 9 is transferred through the reflected light of measured surface 11 by Amici prism 3, by Amici prism 2 and eyepiece 5 and white
The lighting background light that radiant 1 is formed is imaged together to imaging sensor 10, and acquisition figure when laser measurement is formed.Due to two
Road optical path does not simultaneously focus measured zone in measurement process, and therefore, either white light interference is surveyed in measurement process
Amount or laser measurement, white light source 1 and laser 9 open simultaneously, but not are imaged on imaging sensor 10 simultaneously, because
This, two-way measuring system is independent of each other.
Fig. 2 is the structure design diagram of the light path system for topography measurement of the invention.The measuring system can match
Resultant motion platform carries out the topography scan of measured surface, as shown in figure 3, can also be placed directly in machining tool, realization pair
In the in situ measurement of surface to be machined, avoid in process to measured surface 11 measure when to processed device 20 repeatedly
Clamping, schematic diagram in situ measurements are as shown in Figure 4.
Fig. 5 is flow chart when " white light-laser " system measures.First by laser scanning system according to certain measurement
Measured surface is quickly scanned in path, and scan path spacing is larger, scanning speed is fast, can quick obtaining measured surface it is big
Cause contour feature.Scan path mode is related with the operation form of kinetic control system, main scanning form as shown in fig. 6,
It mainly include that helical scanning or grid line scan.According to white light measuring system single measurement field range, white light measurement system is determined
The measuring route of system guarantees there there is certain overlapping adjacent measurement field range in white light measurement process, to guarantee measurement data
Integrality.And after obtaining measured surface feature, each location point of white light measuring route can be according to the surface characteristics, mainly
It is height relief amount, the elevation carrection position of dialogue light measurement system is quickly positioned, to ensure that the fast of white light systems
Speed measurement, while also ensuring the consistency of measurement dead-center position every time.Measurement after white light is measured, to each visual field
As a result carrying out data fusion can be obtained the system of entire measured surface, complete topographic data.So-called data fusion is by phase
The data overlap part of adjacent measured zone is spliced, and in general, the final partial data is the average value of overlapped data.Number
According to the general technology that fusion is in more visual field tests, can be realized with reference to related data.
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| CN201611061350.4A CN106767500B (en) | 2016-11-25 | 2016-11-25 | Light path system for topography measurement |
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| CN201611061350.4A CN106767500B (en) | 2016-11-25 | 2016-11-25 | Light path system for topography measurement |
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| CN106767500B true CN106767500B (en) | 2019-03-22 |
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| CN108871206B (en) * | 2018-08-23 | 2021-06-22 | 业成科技（成都）有限公司 | Surface measuring method and surface measuring device |
| CN111412861B (en) * | 2020-03-31 | 2022-02-11 | 天津大学 | Linear white light surface profile measuring method |
| CN114485464B (en) * | 2022-01-24 | 2022-12-27 | 天津大学 | Large-range plane element white light interference rapid measurement method |
| CN116931236B (en) * | 2023-09-14 | 2023-11-28 | 长春长光智欧科技有限公司 | Double-rate optical system based on probe alignment wafer |
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| CN201569419U (en) * | 2009-11-16 | 2010-09-01 | 浙江大学 | Rapid surface quality measuring device |
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| JP3693771B2 (en) * | 1996-11-13 | 2005-09-07 | オリンパス株式会社 | Shape measuring method and apparatus |
| JP4180084B2 (en) * | 2006-03-30 | 2008-11-12 | アンリツ株式会社 | Three-dimensional shape measuring apparatus and measuring method |
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| CN101403608A (en) * | 2008-11-13 | 2009-04-08 | 哈尔滨工程大学 | Accurate measurement apparatus and method for workpiece surface appearance |
| CN201569419U (en) * | 2009-11-16 | 2010-09-01 | 浙江大学 | Rapid surface quality measuring device |
| CN103975220A (en) * | 2011-12-07 | 2014-08-06 | 柯尼卡美能达株式会社 | Shape-measuring device |
| CN102589463A (en) * | 2012-01-10 | 2012-07-18 | 合肥工业大学 | Two-dimensional and three-dimensional integrated imaging measurement system |
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