CN206711888U - Top has the chip-packaging structure of guide-joining plate - Google Patents
Top has the chip-packaging structure of guide-joining plate Download PDFInfo
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- CN206711888U CN206711888U CN201720469099.9U CN201720469099U CN206711888U CN 206711888 U CN206711888 U CN 206711888U CN 201720469099 U CN201720469099 U CN 201720469099U CN 206711888 U CN206711888 U CN 206711888U
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims abstract description 21
- 238000003466 welding Methods 0.000 claims 3
- 238000005538 encapsulation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 18
- 235000012431 wafers Nutrition 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000005674 electromagnetic induction Effects 0.000 description 3
- 238000012536 packaging technology Methods 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 239000011540 sensing material Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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Abstract
Description
技术领域technical field
本实用新型涉及芯片封装结构,尤其是一种上方具有导接片的芯片封装结构。The utility model relates to a chip packaging structure, in particular to a chip packaging structure with a conductive piece on the top.
背景技术Background technique
半导体工艺中,某些种类的芯片由于必须感光或电磁感应所以要求在芯片上方的封装结构必须做得相当的薄,以使得在下方的芯片可以感光或电磁感应。比如指纹辨识芯片或由CMOS所形成的影像芯片。指纹辨识芯片是将指纹按压在芯片上方,并通过感光或电磁感应而使得芯片可以感测到上方的指纹。CMOS所形成的影像芯片可以应用在指纹辨识及影像摄入,为了可以产生良好的影像效果,所以必须上方的封装结构相当的薄。比如要求在芯片上方封装成的厚度仅150到200μm。而现今的半导体工艺要制造这么薄的封装结构相当的困难,而且成本也高昂。In the semiconductor process, some types of chips must be sensitive to light or electromagnetic induction, so the packaging structure above the chip must be made quite thin, so that the chip below can be sensitive to light or electromagnetic induction. For example, a fingerprint recognition chip or an image chip formed by CMOS. The fingerprint identification chip is to press the fingerprint on the chip, and through photosensitive or electromagnetic induction, the chip can sense the fingerprint on the top. The image chip formed by CMOS can be used in fingerprint recognition and image capture. In order to produce a good image effect, the upper packaging structure must be quite thin. For example, the thickness required to be packaged above the chip is only 150 to 200 μm. However, it is quite difficult and expensive to manufacture such a thin packaging structure with current semiconductor processes.
故本实用新型希望提出一种崭新的上方具有导接片的芯片封装结构及其制造方法,以解决上述现有技术上的缺陷。Therefore, the utility model hopes to provide a brand-new chip packaging structure with conductive pads on the top and its manufacturing method, so as to solve the above-mentioned defects in the prior art.
实用新型内容Utility model content
所以本实用新型的目的是为了解决上述现有技术上的问题,本实用新型中提出一种上方具有导接片的芯片封装结构及其制造方法,其应用导接片贴附在芯片的上方,可以将导接片做的非常的薄,以目前的技术可以到60μm至100μm之间,比传统的封装技术更薄,而且制作技术也相当简易。另一方面可以选择所需要的导接片以适应所使用的芯片的需要,而产生更好的效果。尤其是指纹辨识及影像芯片更是有这一方面的需要。如果用传统的封装方式,必须将在芯片上方感应区的封装层做得相当的薄,可是在制造技术上相当困难,并且,其感应的能力也比直接选用适当的感应材料差。Therefore, the purpose of this utility model is to solve the above-mentioned problems in the prior art. In this utility model, a chip packaging structure with a conductive piece on the top and its manufacturing method are proposed. The conductive piece is attached to the top of the chip, The conductive sheet can be made very thin, with the current technology can be between 60 μm and 100 μm, which is thinner than the traditional packaging technology, and the manufacturing technology is also quite simple. On the other hand, you can choose the required lead strips to meet the needs of the chip used, and produce better results. In particular, fingerprint identification and image chips have this need. If the traditional packaging method is used, the packaging layer in the sensing area above the chip must be made quite thin, but it is quite difficult in manufacturing technology, and its sensing ability is also worse than directly selecting appropriate sensing materials.
为达到上述目的,本实用新型中提出一种上方具有导接片的芯片封装结构,包括:一基板;该基板上有多个焊垫;至少一芯片,其下表面置于该基板上;各芯片上有多个焊垫,可通过导线连接该基板上的多个焊垫;至少一导接片,该导接片为一薄片状的板状材料;各导接片黏贴在对应的芯片的上表面上;其中,该导接片的材料不同于后续封装结构的材料。In order to achieve the above object, the utility model proposes a chip packaging structure with a conductive sheet above, including: a substrate; a plurality of solder pads on the substrate; at least one chip, the lower surface of which is placed on the substrate; There are multiple soldering pads on the chip, which can be connected to multiple soldering pads on the substrate through wires; at least one conductive piece, the conductive piece is a thin plate-shaped material; each conductive piece is pasted on the corresponding chip on the upper surface; wherein, the material of the lead sheet is different from the material of the subsequent packaging structure.
其中,本实用新型芯片封装结构还包括:Wherein, the utility model chip packaging structure also includes:
一封装结构,用于封装该至少一芯片及该基板,而使得该至少一导接片可以外露至外部。A packaging structure is used for packaging the at least one chip and the substrate, so that the at least one conductive piece can be exposed to the outside.
其中,该导接片的材料为电磁或光可穿透的材料。Wherein, the material of the conductive sheet is an electromagnetic or optically permeable material.
其中,该芯片为指纹辨识芯片。Wherein, the chip is a fingerprint recognition chip.
其中,该芯片为CMOS芯片,用于影像感测或指纹辨识。Wherein, the chip is a CMOS chip for image sensing or fingerprint recognition.
本实用新型的有益效果为:可以将导接片做的非常的薄,以目前的技术可以到60μm至100μm之间,比传统的封装技术更薄,而且制作技术也相当简易。The beneficial effects of the utility model are: the conductive sheet can be made very thin, which can be between 60 μm and 100 μm with the current technology, which is thinner than the traditional packaging technology, and the manufacturing technology is also quite simple.
附图说明Description of drawings
图1显示本实用新型的组件组合示意图;Fig. 1 shows the assembly schematic diagram of the utility model;
图2显示图1的截面示意图;Figure 2 shows a schematic cross-sectional view of Figure 1;
图3显示本实用新型的组件组合示意图的另一说明例;Fig. 3 shows another illustrative example of the assembly schematic diagram of the present utility model;
图4显示图3的截面示意图;Figure 4 shows a schematic cross-sectional view of Figure 3;
图5显示本实用新型工艺中晶圆置于胶黏底板的示意图;Fig. 5 shows the schematic diagram of the wafer being placed on the adhesive base plate in the process of the present invention;
图6显示本实用新型工艺中晶圆切割成多个芯片的示意图;Fig. 6 shows the schematic diagram that wafer is cut into a plurality of chips in the process of the present invention;
图7显示本实用新型工艺中导接片与芯片的示意图;Fig. 7 shows the schematic diagram of lead piece and chip in the utility model technology;
图8显示本实用新型工艺中导接片与芯片结合的示意图;Fig. 8 shows the schematic diagram of the combination of the lead sheet and the chip in the process of the present invention;
图9显示本实用新型工艺的步骤流程图。Figure 9 shows a flow chart of steps of the process of the present invention.
附图标记说明Explanation of reference signs
10 基板10 Substrate
20 芯片20 chips
30 导接片30 lead strip
40 封装结构40 package structure
50 晶圆50 wafers
70 胶黏底板70 Adhesive backplane
80 导线80 wire
100 焊垫100 pads
200 焊垫。200 solder pads.
具体实施方式detailed description
现谨就本实用新型的结构组成及所能产生的功效与优点,配合附图,根据本实用新型的一较佳实施例详细说明如下。With regard to the structural composition and the functions and advantages of the utility model, a preferred embodiment of the utility model is described in detail as follows with reference to the accompanying drawings.
请参考图1至图4所示,显示本实用新型的上方具有导接片的芯片封装结构,包括下列组件:Please refer to Fig. 1 to Fig. 4, which shows the chip packaging structure with conductive pads above the utility model, including the following components:
一基板10,该基板10上有多个焊垫100。A substrate 10 with a plurality of pads 100 on the substrate 10 .
至少一芯片20,其下表面置于该基板10上,各芯片20上有多个焊垫200,可通过导线80连接该基板10上的多个焊垫100。At least one chip 20 , the lower surface of which is placed on the substrate 10 , each chip 20 has a plurality of bonding pads 200 , which can be connected to the plurality of bonding pads 100 on the substrate 10 through wires 80 .
至少一导接片30,该导接片30为一薄片状的板状材料,各导接片30黏贴在对应的芯片20的上表面。At least one conductive strip 30 , the conductive strip 30 is a sheet-shaped plate material, and each conductive strip 30 is pasted on the upper surface of the corresponding chip 20 .
一封装结构40,用于封装该至少一芯片20及该基板10,而使得该至少一导接片30可以外露至外部。A packaging structure 40 is used to package the at least one chip 20 and the substrate 10 so that the at least one conductive pad 30 can be exposed to the outside.
其中,该导接片30的材料不同于该封装结构40的材料。Wherein, the material of the bonding pad 30 is different from the material of the packaging structure 40 .
在本实用新型的一实施例中,该导接片30的材料为电磁可穿透的材料,如塑料材料(PI、PET)或玻璃等。该芯片20可为指纹辨识芯片。因此当手指置于该导接片30的上方时,手指的指纹可以反射该芯片20所发射的电磁波,而使得该芯片20接收到指纹的信号,以进行相关的应用,如指纹储存或辨识。In an embodiment of the present invention, the material of the conductive strip 30 is an electromagnetically permeable material, such as plastic material (PI, PET) or glass. The chip 20 can be a fingerprint recognition chip. Therefore, when a finger is placed on the contact plate 30 , the fingerprint of the finger can reflect the electromagnetic wave emitted by the chip 20 , so that the chip 20 can receive the signal of the fingerprint for related applications, such as fingerprint storage or recognition.
在本实用新型的另一实施例中,该导接片30的材料为光可穿透的材料。该芯片20可为CMOS芯片,可做为影像感测之用,如摄影或指纹辨识。比如作为指纹辨识时,当手指置于该导接片30的上方时,指纹可以反射该芯片20的光波,而使得该芯片20接收到指纹的信号,以进行相关的应用,如指纹储存或辨识。In another embodiment of the present invention, the material of the conductive sheet 30 is a light-permeable material. The chip 20 can be a CMOS chip and can be used for image sensing, such as photography or fingerprint recognition. For example, when used as a fingerprint identification, when the finger is placed on the top of the conductive sheet 30, the fingerprint can reflect the light wave of the chip 20, so that the chip 20 can receive the signal of the fingerprint for related applications, such as fingerprint storage or identification .
当CMOS芯片使用在摄影时,必须要能有效的接收外部的光波,本实用新型中可选用透明材质的导接片30,以使得外部的光线可以几近完全的穿透该导接片30以得到良好的效果。When the CMOS chip is used in photography, it must be able to effectively receive external light waves. In the utility model, the conductive sheet 30 of transparent material can be selected so that the external light can penetrate the conductive sheet 30 almost completely. get good results.
图1及2中显示该基板10上只有单一芯片20的结构。但是本实用新型也可以使用在多个芯片20的情况,如图3及4中显示该基板10上有多个芯片20的结构。但附图中所示焊垫及导线的连接位置及连接方式并不用于限制本实用新型的结构,其他的连接位置及连接方式均在本实用新型的范围之内。1 and 2 show the structure of only a single chip 20 on the substrate 10 . However, the present invention can also be used in the case of multiple chips 20 , as shown in FIGS. 3 and 4 , there are multiple chips 20 on the substrate 10 . However, the connection positions and connection methods of the pads and wires shown in the drawings are not intended to limit the structure of the present invention, and other connection positions and connection methods are within the scope of the present invention.
本实用新型中,在工艺上的一大优点为:可以在晶圆50还没有将各个芯片20从该晶圆50单独分开成个别独立的芯20时,应用统一工艺的方式一次将大量的导接片30直接置于各对应芯片20的上方,然后再制作封装结构40,因此在工艺上相当的方便。In the present utility model, a great advantage in technology is: when the wafer 50 has not separately separated each chip 20 from the wafer 50 into individual independent cores 20, a large amount of lead-in chips can be processed at one time by using a unified process. The tabs 30 are placed directly above the corresponding chips 20, and then the packaging structure 40 is fabricated, so the process is quite convenient.
在芯片工艺中,必须将一晶圆5与基板结合,然后再进行切割而形成众多的芯片,再分别对这些芯片进行封装。而本实用新型在工艺上可以在各芯片20还没从该晶圆50单独分开形成个别独立的芯片20时,即将大量的导接片30一次贴附在该晶圆50上,而节省整体工艺。In the chip process, a wafer 5 must be combined with a substrate, and then cut to form many chips, and then these chips are packaged separately. And the utility model can be about a large amount of conductive strips 30 once attached on this wafer 50 when each chip 20 has not been separately separated from this wafer 50 to form individual independent chips 20 in technology, and saves overall process .
现举一例说明如下,图5至图8显示本实用新型中工艺的一实施例,在本实施例中,与上一实施例相同的组件以相同的附图标记表示,其功能相同,所以不再详细赘述。如图9所示,本实施例中包括下列步骤:Now give an example to illustrate as follows, Fig. 5 to Fig. 8 show an embodiment of technology in the present utility model, in this embodiment, with the assembly identical reference numeral of last embodiment, its function is identical, so does not Let me go into more detail. As shown in Figure 9, the present embodiment includes the following steps:
将一晶圆50置于一胶黏底板70上(如俗称的blue tape)(步骤100),如图5所示。Place a wafer 50 on an adhesive substrate 70 (such as commonly known as blue tape) (step 100 ), as shown in FIG. 5 .
将该晶圆50切割成多个芯片20,但这些芯片20仍然黏贴在该胶黏底板70上,而大致维持该晶圆50外形的完整性(步骤110),如图6所示。The wafer 50 is diced into a plurality of chips 20 , but these chips 20 are still stuck on the adhesive backplane 70 to substantially maintain the integrity of the shape of the wafer 50 (step 110 ), as shown in FIG. 6 .
将多个导接片30置于该多个芯片20上,而大致上维持对齐的关系。并将各导接片30黏贴到对应的芯片20上(步骤120),如图7及图8所示。A plurality of bonding pads 30 are placed on the plurality of chips 20 to substantially maintain an aligned relationship. And paste each conductive piece 30 on the corresponding chip 20 (step 120 ), as shown in FIG. 7 and FIG. 8 .
将该胶黏底板70撕掉,再将该多个芯片20置于基板10上进入分离、焊接、导线连接及封装的程序(步骤130)。此为一般现有的封装程序,本实用新型将不再说明。The adhesive bottom plate 70 is torn off, and then the plurality of chips 20 are placed on the substrate 10 to enter the process of separation, soldering, wire connection and packaging (step 130 ). This is a general existing packaging program, and will not be described in the present invention.
应用本实用新型封装方法的优点为,因为应用导接片贴附在芯片的上方,可以将导接片做的非常的薄,以目前的技术可以到60μm至100μm之间,比传统的封装技术更薄,而且制作技术也相当简易。另一方面可以选择所需要的导接片以适应所使用的芯片的需要,而产生更好的效果。尤其是指纹辨识及影像芯片更是有这一方面的需要。如果用传统的封装方式,必须将在芯片上方感应区的封装层做得相当的薄,可是在制造技术上相当困难,并且其感应的能力也比直接选用适当的感应材料差。The advantage of applying the packaging method of the utility model is that, because the conductive sheet is attached on the top of the chip, the conductive sheet can be made very thin, and the current technology can reach between 60 μm and 100 μm, which is much thinner than the traditional packaging technology. Thinner, and the production technique is quite simple. On the other hand, you can choose the required lead sheet to meet the needs of the chip used, so as to produce better results. In particular, fingerprint identification and image chips have this need. If the traditional packaging method is used, the packaging layer in the sensing area above the chip must be made quite thin, but it is quite difficult in manufacturing technology, and its sensing ability is also worse than directly selecting appropriate sensing materials.
综上所述,本实用新型人性化的体贴设计,相当符合实际需求。其具体改进现有技术的缺点,相较于现有技术明显具有突破性的进步优点,确实具有功效的增进,且不易于达成。本实用新型未曾公开于国内与国外的文献与市场上,已符合专利法规定。To sum up, the humanized and considerate design of the utility model quite meets the actual needs. It specifically improves the shortcomings of the prior art. Compared with the prior art, it has the advantages of breakthrough progress, indeed has the enhancement of efficacy, and is not easy to achieve. The utility model has not been disclosed in domestic and foreign documents and markets, and has complied with the provisions of the Patent Law.
上述详细说明是针对本实用新型的一可行实施例的具体说明,但该实施例并非用以限制本实用新型的专利保护范围,凡未脱离本实用新型技艺精神所作的等效实施或变更,均应包括于本实用新型的专利范围中。The above detailed description is a specific description of a feasible embodiment of the utility model, but this embodiment is not used to limit the scope of patent protection of the utility model, and any equivalent implementation or change made without departing from the technical spirit of the utility model shall be considered Should be included in the patent scope of the present utility model.
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