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CN204633639U - A micro-nano motor - Google Patents

A micro-nano motor Download PDF

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Publication number
CN204633639U
CN204633639U CN201520200935.4U CN201520200935U CN204633639U CN 204633639 U CN204633639 U CN 204633639U CN 201520200935 U CN201520200935 U CN 201520200935U CN 204633639 U CN204633639 U CN 204633639U
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piezoelectric ceramic
ceramic sheet
micro
circumferential
motor
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Expired - Fee Related
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CN201520200935.4U
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Chinese (zh)
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齐琛森
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

The utility model discloses micro-nano motor, comprise a kind of micro-nano motor, comprise shell, rotating shaft, longitudinal piezoelectric ceramic piece, circumferential piezoelectric ceramic piece, friction plate and rotating disk; Described rotating shaft runs through the center of described shell, described rotating shaft is fixed with described rotating disk, described enclosure is also provided with a support, one end of described longitudinal piezoelectric ceramic piece is fixing on the bracket, the other end of described longitudinal piezoelectric ceramic is fixedly connected with one end of described circumferential piezoelectric ceramic, and the other end of described circumferential piezoelectric ceramic is fixedly connected described friction plate.The utility model can make the size of motor very little, and the power consumption of motor is extremely low.

Description

一种微纳电机A micro-nano motor

【技术领域】 【Technical field】

本实用新型涉及微机电的技术领域,特别是微纳电机的技术领域。 The utility model relates to the technical field of micro-electromechanical devices, in particular to the technical field of micro-nano motors.

【背景技术】 【Background technique】

微机电系统(MEMS),也叫做微电子机械系统,是在微电子技术(半导体制造技术)基础上发展起来的,融合了光刻、腐蚀、薄膜、LIGA、硅微加工、非硅微加工和精密机械加工等技术制作的高科技电子机械器件。随着MEMS的不断发展,微机电系统正由微电子机械系统向微机械电子系统转变,MEMS内部正在越来越多的集成各种微小可动零件,而对微小零件进行驱动的电机要求是低功耗、发热低、尺寸小,这直接排除了目前市场上的大部分传统电机,需要一种新型的微小电机作为MEMS的未来引擎。 Micro-Electro-Mechanical Systems (MEMS), also known as Micro-Electro-Mechanical Systems, is developed on the basis of microelectronics technology (semiconductor manufacturing technology), integrating lithography, corrosion, thin film, LIGA, silicon micromachining, non-silicon micromachining and High-tech electronic and mechanical devices produced by precision machining and other technologies. With the continuous development of MEMS, micro-electro-mechanical systems are transforming from micro-electro-mechanical systems to micro-mechanical electronic systems. More and more tiny movable parts are being integrated inside MEMS, and the motor requirements for driving tiny parts are low. Power consumption, low heat generation, and small size directly exclude most of the traditional motors currently on the market, and a new type of tiny motor is needed as the future engine of MEMS.

【实用新型内容】 【Content of utility model】

本实用新型的目的就是解决现有技术中的问题,提出一种微纳电机,能够使电机的尺寸非常小,电机的功耗极低。 The purpose of the utility model is to solve the problems in the prior art, and propose a micro-nano motor, which can make the size of the motor very small, and the power consumption of the motor is extremely low.

为实现上述目的,本实用新型提出了一种微纳电机,包括外壳、转轴、纵向压电陶瓷片、周向压电陶瓷片、摩擦片和转盘;所述转轴贯穿所述外壳的中心,所述转轴上固定有所述转盘,所述外壳内部还设置有一个支架,所述纵向压电陶瓷片的一端固定在所述支架上,所述纵向压电陶瓷的另一端与所述周向压电陶瓷的一端固定连接,所述周向压电陶瓷的另一端固定连接着所述摩擦片。 In order to achieve the above object, the utility model proposes a micro-nano motor, which includes a casing, a rotating shaft, a longitudinal piezoelectric ceramic sheet, a circumferential piezoelectric ceramic sheet, a friction sheet and a turntable; the rotating shaft runs through the center of the casing, and the The turntable is fixed on the rotating shaft, and a bracket is arranged inside the housing, one end of the longitudinal piezoelectric ceramic sheet is fixed on the bracket, and the other end of the longitudinal piezoelectric ceramic sheet is connected to the circumferential piezoelectric ceramic sheet. One end of the electric ceramic is fixedly connected, and the other end of the circumferential piezoelectric ceramic is fixedly connected with the friction plate.

作为优选,所述纵向压电陶瓷片由两片极性相反的压电陶瓷薄片粘贴而成。 Preferably, the longitudinal piezoelectric ceramic sheet is formed by pasting two piezoelectric ceramic thin sheets with opposite polarities.

作为优选,所述周向压电陶瓷薄片由两片极性相反的压电陶瓷薄片粘贴而成。 Preferably, the circumferential piezoelectric ceramic sheet is formed by pasting two piezoelectric ceramic sheets with opposite polarities.

作为优选,所述周向压电陶瓷片与所述摩擦片通过环氧树脂粘结固定。 Preferably, the circumferential piezoelectric ceramic sheet and the friction sheet are bonded and fixed by epoxy resin.

作为优选,所述纵向压电陶瓷片和周向压电陶瓷片的长度均为2-3mm。 Preferably, the lengths of the longitudinal piezoelectric ceramic sheets and the circumferential piezoelectric ceramic sheets are both 2-3 mm.

本实用新型的有益效果:本实用新型通过将微小尺寸的纵向压电陶瓷片与周向压电陶瓷片进行组合并应用于电机动力装置中,使得电机的整体尺寸大为缩减,而且采用压电陶瓷作为驱动电机的动力,使得电机运转过程中没有电流,电机的整体发热极低,适合于精密的微纳零件运转。 Beneficial effects of the utility model: the utility model combines the micro-sized longitudinal piezoelectric ceramic sheet and the circumferential piezoelectric ceramic sheet and applies them to the motor power device, so that the overall size of the motor is greatly reduced, and the piezoelectric ceramic sheet is adopted Ceramics are used as the power to drive the motor, so that there is no current during the operation of the motor, and the overall heat generation of the motor is extremely low, which is suitable for the operation of precise micro-nano parts.

本实用新型的特征及优点将通过实施例结合附图进行详细说明。 The features and advantages of the utility model will be described in detail through embodiments in conjunction with the accompanying drawings.

【附图说明】 【Description of drawings】

图1是本实用新型微纳电机的整体结构图; Fig. 1 is the overall structural diagram of the micro-nano motor of the present invention;

图2是本实用新型微纳电机的内部结构原理图。 Fig. 2 is a schematic diagram of the internal structure of the micro-nano motor of the present invention.

图中:1-外壳、2-转轴、3-支架、4-纵向压电陶瓷片、5-周向压电陶瓷片、6-摩擦片、7-转盘。 In the figure: 1-housing, 2-rotating shaft, 3-bracket, 4-longitudinal piezoelectric ceramic sheet, 5-circumferential piezoelectric ceramic sheet, 6-friction plate, 7-turntable.

【具体实施方式】 【Detailed ways】

参阅图1和图2,本实用新型,包括外壳1、转轴2、纵向压电陶瓷片4、周向压电陶瓷片5、摩擦片6和转盘7;所述转轴2贯穿所述外壳1的中心,所述转轴2上固定有所述转盘7,所述外壳1内部还设置有一个支架3,所述纵向压电陶瓷片4的一端固定在所述支架3上,所述纵向压电陶瓷片4的另一端与所述周向压电陶瓷片5的一端固定连接,所述周向压电陶瓷片5的另一端固定连接着所述摩擦片6。所述纵向压电陶瓷片4由两片极性相反的压电陶瓷薄片粘贴而成。所述周向压电陶瓷片5由两片极性相反的压电陶瓷薄片粘贴而成。所述周向压电陶瓷片5与所述摩擦片6通过环氧树脂粘结固定。所述纵向压电陶瓷片4和周向压电陶瓷片5的长度均为2-3mm。 Referring to Fig. 1 and Fig. 2, the utility model includes a casing 1, a rotating shaft 2, a longitudinal piezoelectric ceramic sheet 4, a circumferential piezoelectric ceramic sheet 5, a friction sheet 6 and a turntable 7; the rotating shaft 2 runs through the casing 1 In the center, the turntable 7 is fixed on the rotating shaft 2, and a support 3 is arranged inside the housing 1, and one end of the longitudinal piezoelectric ceramic sheet 4 is fixed on the support 3, and the longitudinal piezoelectric ceramic The other end of the sheet 4 is fixedly connected to one end of the circumferential piezoelectric ceramic sheet 5 , and the other end of the circumferential piezoelectric ceramic sheet 5 is fixedly connected to the friction sheet 6 . The longitudinal piezoelectric ceramic sheet 4 is formed by pasting two piezoelectric ceramic sheets with opposite polarities. The circumferential piezoelectric ceramic sheet 5 is formed by pasting two piezoelectric ceramic sheets with opposite polarities. The circumferential piezoelectric ceramic sheet 5 and the friction sheet 6 are bonded and fixed by epoxy resin. The lengths of the longitudinal piezoelectric ceramic sheet 4 and the circumferential piezoelectric ceramic sheet 5 are both 2-3 mm.

本实用新型工作过程: The working process of the utility model:

本实用新型微纳电机在工作过程中,转轴2的转动靠转盘7来带动,转盘7 的转动靠摩擦片6的滑动摩擦来驱动,在一个工作周期内,当给纵向压电陶瓷片4施加一定的电压后,纵向压电陶瓷片4向下弯曲,带动周向压电陶瓷片5和摩擦片6向下运动,使摩擦片6与转盘7相接处,通过给周向压电陶瓷片5施加一定的电压后,周向压电陶瓷片5在与转盘平行的方向进行弯曲,使摩擦片6带动转盘7进行转动;当周向压电陶瓷片5弯曲到最大位置后,断开对纵向压电陶瓷片4所施加的电压,此时纵向压电陶瓷片4复位,带动周向压电陶瓷片5和摩擦片6向上运动,使摩擦片6离开转盘7,然后断开施加在周向压电陶瓷片5上的电压,使得周向压电陶瓷片5和摩擦片6复位,完成一个周期的运动,此时再重复上述过程,则电机的转轴2将连续旋转。 During the working process of the micro-nano motor of the utility model, the rotation of the rotating shaft 2 is driven by the turntable 7, and the rotation of the turntable 7 is driven by the sliding friction of the friction plate 6. In one working cycle, when the longitudinal piezoelectric ceramic sheet 4 is applied After a certain voltage, the longitudinal piezoelectric ceramic sheet 4 bends downward, driving the circumferential piezoelectric ceramic sheet 5 and the friction sheet 6 to move downward, so that the joint between the friction sheet 6 and the turntable 7, through the circumferential piezoelectric ceramic sheet 5 After a certain voltage is applied, the circumferential piezoelectric ceramic sheet 5 bends in a direction parallel to the turntable, so that the friction sheet 6 drives the turntable 7 to rotate; when the circumferential piezoelectric ceramic sheet 5 bends to the maximum position, disconnect the pair The voltage applied by the longitudinal piezoelectric ceramic sheet 4, at this time, the longitudinal piezoelectric ceramic sheet 4 resets, drives the circumferential piezoelectric ceramic sheet 5 and the friction sheet 6 to move upward, makes the friction sheet 6 leave the turntable 7, and then disconnects the applied voltage on the peripheral The voltage applied to the piezoelectric ceramic sheet 5 causes the circumferential piezoelectric ceramic sheet 5 and the friction sheet 6 to reset to complete a cycle of motion. At this time, the above process is repeated, and the rotating shaft 2 of the motor will continue to rotate.

本实用新型,通过将微小尺寸的纵向压电陶瓷片与周向压电陶瓷片进行组合并应用于电机动力装置中,使得电机的整体尺寸大为缩减,而且采用压电陶瓷作为驱动电机的动力,使得电机运转过程中没有电流,电机的整体发热极低,适合于精密的微纳零件运转。 In the utility model, the overall size of the motor is greatly reduced by combining the micro-sized longitudinal piezoelectric ceramic sheet and the circumferential piezoelectric ceramic sheet and applying them to the motor power device, and the piezoelectric ceramic is used as the driving force of the motor , so that there is no current during the operation of the motor, and the overall heat generation of the motor is extremely low, which is suitable for the operation of precise micro-nano parts.

上述实施例是对本实用新型的说明,不是对本实用新型的限定,任何对本实用新型简单变换后的方案均属于本实用新型的保护范围。 The above-mentioned embodiment is an illustration of the utility model, not a limitation of the utility model, and any scheme after a simple transformation of the utility model belongs to the protection scope of the utility model.

Claims (5)

1.一种微纳电机,其特征在于:包括外壳(1)、转轴(2)、纵向压电陶瓷片(4)、周向压电陶瓷片(5)、摩擦片(6)和转盘(7);所述转轴(2)贯穿所述外壳(1)的中心,所述转轴(2)上固定有所述转盘(7),所述外壳(1)内部还设置有一个支架(3),所述纵向压电陶瓷片(4)的一端固定在所述支架(3)上,所述纵向压电陶瓷片(4)的另一端与所述周向压电陶瓷片(5)的一端固定连接,所述周向压电陶瓷片(5)的另一端固定连接着所述摩擦片(6)。 1. A kind of micro-nano motor, it is characterized in that: comprise housing (1), rotating shaft (2), longitudinal piezoelectric ceramic sheet (4), circumferential piezoelectric ceramic sheet (5), friction plate (6) and rotating disk ( 7); the rotating shaft (2) runs through the center of the casing (1), the rotating disk (7) is fixed on the rotating shaft (2), and a bracket (3) is also arranged inside the casing (1) , one end of the longitudinal piezoelectric ceramic sheet (4) is fixed on the support (3), the other end of the longitudinal piezoelectric ceramic sheet (4) and one end of the circumferential piezoelectric ceramic sheet (5) Fixedly connected, the other end of the circumferential piezoelectric ceramic sheet (5) is fixedly connected to the friction sheet (6). 2.如权利要求1所述的微纳电机,其特征在于:所述纵向压电陶瓷片(4)由两片极性相反的压电陶瓷薄片粘贴而成。 2. The micro-nano motor according to claim 1, characterized in that: the longitudinal piezoelectric ceramic sheet (4) is formed by pasting two piezoelectric ceramic sheets with opposite polarities. 3.如权利要求1所述的微纳电机,其特征在于:所述周向压电陶瓷片(5)由两片极性相反的压电陶瓷薄片粘贴而成。 3. The micro-nano motor according to claim 1, characterized in that: the circumferential piezoelectric ceramic sheet (5) is formed by pasting two piezoelectric ceramic sheets with opposite polarities. 4.如权利要求1所述的微纳电机,其特征在于:所述周向压电陶瓷片(5)与所述摩擦片(6)通过环氧树脂粘结固定。 4. The micro-nano motor according to claim 1, characterized in that: the circumferential piezoelectric ceramic sheet (5) and the friction sheet (6) are bonded and fixed by epoxy resin. 5.如权利要求1所述的微纳电机,其特征在于:所述纵向压电陶瓷片(4)和周向压电陶瓷片(5)的长度均为2-3mm。 5. The micro-nano motor according to claim 1, characterized in that: the lengths of the longitudinal piezoelectric ceramic sheet (4) and the circumferential piezoelectric ceramic sheet (5) are both 2-3 mm.
CN201520200935.4U 2015-04-03 2015-04-03 A micro-nano motor Expired - Fee Related CN204633639U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105402931A (en) * 2015-12-23 2016-03-16 王嫣俐 Outer heat source interference-free low power consumption magnetic refrigerator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105402931A (en) * 2015-12-23 2016-03-16 王嫣俐 Outer heat source interference-free low power consumption magnetic refrigerator

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Granted publication date: 20150909

Termination date: 20160403