CN204101765U - Polarizing element unit and polarized light irradiation device using polarizing element unit - Google Patents

Abstract

The utility model provides a polarisation component unit and use polarisation illuminator of polarisation component unit, polarisation component unit can prevent not revealing such as polarized light to reduce not the polarized light and shine in the resist for the optical orientation film, and reduce the illumination inequality of exposure light, still provide a polarisation illuminator who uses this unit. The utility model provides a polarisation illuminator (10) shine the polarized light to resist (W1) for the orientation film, carries out the light orientation, a serial communication port, include: a light source unit (11) for irradiating the resist (W1) with light; and a polarizing element unit (1) which is composed of parallelogram unit polarizing elements and polarizes the light from the light source into predetermined polarized light. The light source (12) of the light source unit (11) is a linear light source arranged parallel to the arrangement direction of the unit polarizing elements (2) of the polarizing element unit (1).

Description

Polarizing element unit and polarized light irradiation device using polarizing element unit

technical field

The utility model relates to a polarizing element unit, a polarized light irradiation device for optically orientating an orientation film such as an orientation film of a liquid crystal display element by using the polarization element unit, and an optical orientation device.

In detail, it relates to a polarizer unit that reduces the influence of the connecting portion of each wire grid polarizer by combining a plurality of wire grid polarizers, a polarized light irradiation device and a light alignment device using the polarizer unit.

Background technique

In the past, in the alignment treatment of the alignment film of the liquid crystal panel, the alignment layer of the viewing angle compensation film, etc., the mechanical rubbing method was used. However, the contamination of the substrate caused by rubbing was a problem. A photo-alignment technology that uses a resist film to irradiate polarized light of a certain wavelength to align the photo-alignment film.

The size of the polarized light irradiation apparatus which irradiates polarized light to the resist film for photo-alignment films is also enlarged by the enlargement of a liquid crystal panel.

However, since the polarizing element is limited by the manufacturable size, a combination of a rod-shaped lamp and a polarizing element unit in which a plurality of polarizing elements are arranged in a row has been proposed as a polarizing light irradiation device (Patent Document 1).

Moreover, in this polarized light irradiation device, since the direct light from the light source, that is, unpolarized light, leaks from the gap between the connecting parts between the polarizing elements, the extinction ratio deteriorates. The direction of conveyance of the substrate of the resist for alignment film arranges a multilayer polarizing element unit formed by shielding the boundary portion of the polarizing element, and the boundary portion between the polarizing elements of each layer and the boundary portion of the other layer polarizing element are relative to the above-mentioned An apparatus arranged with positions shifted in a direction perpendicular to the conveying direction of the substrates so that the conveying directions of the substrates do not overlap with each other.

However, in this method, since there are regions affected by the connecting portion and the light-shielding portion, and peripheral portions not affected at all, the formation of the photo-alignment film varies.

Furthermore, there has been proposed a polarizing element unit in which a wire grid polarizing element having a quadrangular wire grid row shape is combined, and a plurality of connecting portions are arranged so as to overlap along the conveying direction of the substrate.

prior art literature

patent documents

Patent Document 1: JP 2006-126464

Utility model content

However, in the polarizing element unit in which a parallelogram-shaped wire grid polarizing element is combined and arranged so that a plurality of connecting portions overlap along the transport direction of the substrate, since the plurality of connecting portions overlap along the traveling direction of the substrate, Therefore, there is a problem that the illuminance of exposure light is low.

The utility model is completed in view of the above-mentioned circumstances, and its purpose is to provide a polarizing element unit, which can prevent unpolarized light or polarized light with a poor extinction ratio from passing through the polarizing element in a polarizing element unit formed by paralleling wire grid polarizing elements. Boundary part leaks, and can reduce the uneven irradiation of exposure light to the resist film for photo-alignment film; Also provide a polarized light irradiation device, which can perform photo-alignment treatment on the resist film for photo-alignment film by using the polarizing element unit .

The polarizing element unit of the present utility model is characterized in that a plurality of unit polarizing elements in the shape of a parallelogram whose diagonal line is at right angles to the bottom are arranged in a direction parallel to the bottom of the parallelogram, and adjacent A light-shielding portion is provided at the connecting portion of the unit polarizing element.

Preferably in the parallelogram, the ratio of the base, hypotenuse and height of the parallelogram is 1: 5:2.

Preferably in the parallelogram, the ratio of the base, hypotenuse and height of the parallelogram is 1: 2:1.

The polarizer unit of the present utility model is characterized in that, for a plurality of unit polarizers in the shape of a parallelogram obtained by contacting the hypotenuses of the two unit polarizers as claimed in claim 1 , in parallel to the The polarizer rows are arranged in the direction of the base of the parallelogram, and the polarizer rows are stacked up and down in two layers, and the upper unit polarizers are equally divided across the connecting portion of the lower unit polarizers.

The polarized light irradiation device of the present invention is a polarized light irradiation device for irradiating polarized light on an alignment film to perform optical alignment, and is characterized in that it includes: a light source unit for irradiating light to the resist film used for the alignment film; and a polarizer for polarizing the light from the light source into a predetermined polarized light, the polarizer is the polarizer unit according to any one of claims 1 to 4, and the light source is parallel to the A linear light source arranged in the arrangement direction of the unit polarizers in the polarizer unit.

The utility model can obtain the following effects.

Owing to light-shielding to the connection part of each unit polarizing element, therefore can prevent that unpolarized light leaks, can prevent the deterioration of extinction ratio, and, as shown in Figure 4, light-shielding part does not overlap in the conveying direction of described substrate, therefore, can make The loss of the light quantity irradiated to the resist film for photo-alignment films is the smallest, and it can prevent that the light quantity in the resist film for photo-alignment films does not vary.

Description of drawings

FIG. 1 is a schematic diagram illustrating the structure of a polarizer unit according to one embodiment of the present invention.

Fig. 2 is the schematic diagram of the unit polarizing element of one embodiment of the present utility model, (a) is the unit polarizing element of the first embodiment, (b) is the unit polarizing element of the second embodiment, (c) is the third Schematic diagram of the unit polarizer of the embodiment.

FIG. 3 is an explanatory schematic diagram of a polarized light irradiation device according to an embodiment of the present invention.

4 is a schematic diagram illustrating the relationship between light shielding portions of a unit polarizer connection portion of a polarizer unit.

5 is a schematic diagram of a unit polarizer in a fourth embodiment of the present invention.

6 is an explanatory schematic diagram of a polarizer unit in a fourth embodiment of the present invention.

Explanation of reference signs

1 polarizer unit

2,20 unit polarizer

3 shading part

4a,4b box

10 Polarized light irradiation device

11 Light source department

12 stick lights

13 barrel collector lens

B connection part

W workpiece

W1 Resist for photo-alignment film

Detailed ways

Embodiments of the present utility model are described below with reference to the accompanying drawings.

The polarizing element unit of the present utility model is characterized in that a plurality of unit polarizing elements in the shape of a parallelogram whose diagonal line is at right angles to the bottom are arranged in a direction parallel to the bottom of the parallelogram, and adjacent A light-shielding portion is provided at the connecting portion of the unit polarizing element.

(a) of Fig. 1 is a figure representing the unit polarizer 2a in the 1st embodiment of the present utility model, and Fig. 1 (b) is a figure representing the unit polarizer 2b in the 2nd embodiment of the present utility model, (c) of FIG. 1 is a figure which shows the unit polarizer 2c in the 3rd Example of this invention. The unit polarizers 2 (2a, 2b, 2c) shown in Figure 1 are all wire grid polarizing elements, and the unit polarizer 2a can be the base (upper side), hypotenuse and height shown in (a) of Figure 1 has a ratio of 1: In a parallelogram of 5:2, the unit polarizer 2b can be the base (top), hypotenuse and height shown in (b) of FIG. 1 with a ratio of 1: 5:1 parallelogram, the unit polarizer 2 c may be a parallelogram in which one diagonal line of the parallelogram is at right angles to the base as shown in (c) of FIG. 1 . At this time, the ratio of the base, hypotenuse and height of the parallelogram is more preferably 1: 5:2 or the ratio of the base, hypotenuse and height of the parallelogram is 1: 2:1.

FIG. 2 is a diagram showing the structure of the polarizer unit 1 . This polarizer unit 1 includes a plurality of parallelogram unit polarizers 2 arranged along the first X-axis direction, a light shielding portion 3 that shields the connecting portion of each unit polarizer 2, and frames 4a, 4b that horizontally hold and fix the unit polarizers. .

That is, (a) of FIG. 2 is a view of the polarizing element unit 1 viewed from the irradiation direction of the irradiating light. The side cross section of the polarizing element unit 1 is shown in (b) of FIG. , in order not to leak unpolarized exposure light from the connection part B of each unit polarizer 2 , the connection part of each unit polarizer 2 is covered with a light shielding part 3 .

The frame 4 includes an upper frame 4a and a lower frame 4b, and a plurality of unit polarizers 2 are horizontally arranged between the frames 4a and 4b, and are held and fixed.

Furthermore, the light shielding portion 3 is attached to the upper frame 4 a so as to cover the connection portion B of each unit polarizer 2 .

Although the illuminance of the part where the light-shielding part 3 is provided is low, unpolarized light does not leak from the gap between the unit polarizers 2 arranged in close contact with each other horizontally, and the extinction ratio does not decrease. In addition, the light shielding part 3 is the length along the hypotenuse of the unit polarizer, and when the unit polarizing element 2 is a parallelogram in which one diagonal line of a parallelogram as shown in (c) of FIG. 1 is at right angles to the base, as shown in FIG. As shown in 4, the projected length L in the Y-axis direction does not overlap with each other or have insufficient length. Therefore, the exposure light irradiated on the resist film for photo-alignment film will not have uneven illuminance distribution in the X-axis direction.

In addition, since there is no need to use a diffused light source as in the conventional method, the deterioration of the illuminance distribution can be corrected by increasing the distance between the light source and the polarizer unit. Light. Accordingly, the output power of the light source can also be kept low.

In addition, since there is no variation in the illuminance distribution due to the light shielding portion as in the prior art, it is not necessary to arrange a plurality of polarizer units along the conveying direction of the alignment film.

Next, a polarized light irradiation device using the polarizer unit 1 of the present invention will be described. FIG. 3 is a schematic diagram of a polarized light irradiation device 10 according to an embodiment of the present invention.

The polarized light irradiation device 10 has a light source unit 11, a polarizer unit 1 arranged below the light source unit 11, and a device for continuously conveying a glass substrate (hereinafter simply referred to as a “workpiece”) W in a predetermined direction (direction of arrow B) along the Y-axis. In the transport unit (not shown), the workpiece W is disposed below the polarizer unit 1 , and the resist W1 for a photo-alignment film to be exposed is coated.

In addition, in a state where the light source unit 11 and the polarizing element unit 1 are maintained at a predetermined distance, the workpiece W is supported above the conveying unit of the workpiece W by an integrated support unit (not shown), and the workpiece W is conveyed below the polarized light irradiation device 10. At this time, the light from the lamp 12 polarized by the polarizer unit 1 of the present invention is irradiated on the resist W1 of the workpiece W, and the photo-alignment process is performed.

The light source unit 11 has a linear lamp 12 arranged along the longitudinal direction (X-axis direction) of the polarizer unit 1, and a linear lamp 12 arranged above the lamp 12 (in the direction opposite to the glass substrate W where the lamp 12 is inserted). The barrel-shaped reflector 13 reflects the light emitted from the upper side of the glass substrate toward the glass substrate.

The lamp 12 is a high-pressure mercury lamp, a metal halide lamp, or the like, and may be a linear light source in which a plurality of LEDs or LDs are linearly arranged in parallel. At this time, the direction in which LEDs or LDs are arranged corresponds to the longitudinal direction of the lamp 12 .

In addition, the wavelength of the light radiated from the lamp 12 is selected suitably according to the material of the resist W1 for photo-alignment films, For example, it is the light of 260 nm of light wavelength, 365 nm, etc.

Exposure light from the light source unit 11 is irradiated to the polarizer unit 1 , polarized into predetermined polarized light, and irradiated to the resist W1 of the workpiece W. As shown in FIG.

That is, the resist of the workpiece W is irradiated with polarized light, and the polarized light transmits light (P polarized light) vibrating in a direction perpendicular to the line arrangement direction of the wire grid polarizer in the polarizer unit 1. Ratio to the transmittance of light (S polarized light) vibrating in a direction parallel to the line arrangement direction (referred to as "extinction ratio") is a predetermined value or more (for example, 20:1 or more).

Next, as the 4th embodiment of the present utility model, instead of the unit polarizer 2 of the polarizer unit 1, the parallelogram shown in Fig. 5, i.e. the ratio of the base, the hypotenuse and the height, can also be 1: The unit polarizing element 20 of 5:1 is closely contacted horizontally along the hypotenuse direction and arranged in multiples to form a polarizing element group, and as shown in FIG. The element bisects the unit polarizing element across the underside. Alternatively, for a plurality of unit polarizers in the shape of a parallelogram in which one diagonal line is at right angles to the base, the hypotenuses of two sheets may be abutted to form polarizers arranged in a direction parallel to the base of the parallelogram. The row of polarizers is stacked up and down in two layers, and the unit polarizers on the upper side are equally divided across the unit polarizers on the lower side.

At this time, the unpolarized light leaked from the connecting portion of each unit polarizer in the upper polarizer group is polarized by the lower polarizer group, and the polarized light polarized by the upper polarizer group enters the lower polarizer. The connecting portion of each unit polarizing element of the group, therefore, no unpolarized light directly irradiates the resist W1 of the workpiece W. Therefore, it is not necessary to provide the light shielding portion 3 covering the connection portion B of each unit polarizer 20 .

Claims (5)

1. A polarizing element unit, characterized in that, A plurality of unit polarizing elements in the shape of a parallelogram whose diagonal line is at right angles to the bottom are arranged in a direction parallel to the bottom of the parallelogram, and arranged at the connecting parts of the adjacent unit polarizing elements There is a shade. 2. The polarizing element unit according to claim 1, characterized in that, In the parallelogram, the ratio of the base, hypotenuse and height of the parallelogram is 1: 5:2. 3. The polarizing element unit according to claim 1, characterized in that, In the parallelogram, the ratio of the base, hypotenuse and height of the parallelogram is 1: 2:1. 4. A polarizing element unit, characterized in that, As for the unit polarizer according to claim 1, a plurality of parallelogram-shaped unit polarizers obtained by abutting the hypotenuses of two sheets are arranged in a direction parallel to the base of the parallelogram to form The polarizer row is stacked up and down in two layers, and the unit polarizer on the upper side is equally divided across the connecting portion of the unit polarizer on the lower side. 5. A polarized light irradiation device, which is a polarized light irradiation device that irradiates polarized light to an alignment film and carries out photo-orientation, it is characterized in that, comprising: a light source unit for irradiating light to a resist film used for the alignment film; and a polarizing unit for polarizing the light from the light source unit into a prescribed polarized light, The polarizer is the polarizer unit according to any one of claims 1 to 4, The light source part is a linear light source arranged parallel to the arrangement direction of the unit polarizers in the polarizer unit.