CN203786461U - Compatible type flower basket used for feeding and blanking of mask templates - Google Patents
Compatible type flower basket used for feeding and blanking of mask templates Download PDFInfo
- Publication number
- CN203786461U CN203786461U CN201420177506.5U CN201420177506U CN203786461U CN 203786461 U CN203786461 U CN 203786461U CN 201420177506 U CN201420177506 U CN 201420177506U CN 203786461 U CN203786461 U CN 203786461U
- Authority
- CN
- China
- Prior art keywords
- mask
- flower basket
- support level
- supporting
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002955 isolation Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000013461 design Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Packging For Living Organisms, Food Or Medicinal Products That Are Sensitive To Environmental Conditiond (AREA)
Abstract
The utility model relates to a compatible type flower basket used for feeding and blanking of mask templates. The compatible type flower basket used for feeding and blanking of the mask template comprises a flower basket frame, wherein at least one layer of mask template supporting seats used for holding and supporting the mask templates is arranged in the flower basket frame, and the mask template supporting seats are symmetrically distributed in the flower basket frame; the mask template supporting seats comprise first supporting steps used for supporting first mask templates, second supporting steps used for supporting second mask templates, and third supporting steps used for supporting third mask templates; the bottom ends of the third supporting steps are positioned at the top ends of the second supporting steps, and the top ends of the second supporting steps are positioned at the top ends of the first supporting steps. The compatible type flower basket provided by the utility model is simple and compact in structure, and convenient to use, meets the requirements for feeding and blanking of the mask templates of different sizes, meets the transmission requirement of a mechanical arm, reduces the risk of frequent contact among the mask templates, and is wide in applicable range, safe and reliable.
Description
Technical field
The utility model relates to a kind of flower basket structure, and especially a kind of Campatible mask loading and unloading gaily decorated basket, is specifically applicable to the loading and unloading gaily decorated basket that integrated circuit mask substrate manufacturing enterprise, mask manufacturing enterprise and wafer manufacturing enterprise use.
Background technology
In integrated circuit production process, when being transformed into actual chip circuit, design data need to use mask.Mask is the tie connecting between design corporation and wafer manufacture, is a kind of product that is similar to die type, is that integrated circuit wafer is manufactured the mother matrix using in carving technology.Because at present also cannot direct imaging on disk, thus mask is integrated circuit manufacture in an indispensable ring.
That applies according to current mask need not, mask size also has multiple, at present common 5009,6025,7015 the three types that mainly contains, because mask has the feature of high precision, zero-fault, in actual production process, most operations adopt mechanical arm to carry out loading and unloading to mask and starting material, avoid people to contact with the direct of mask, still, due to the disunity of mask size, need to design different load mode instruments to meet the demand of different mask size.
At present, industry common are 5 cun of gailys decorated basket, 6 cun of gailys decorated basket, 7 cun of gailys decorated basket, because the size of the different gailys decorated basket is different and need to carry out gaily decorated basket replacing at every turn, this has brought inconvenience to actual production application, the frequent replacing of the gaily decorated basket has also increased the frequency that personnel contact with the gaily decorated basket, has increased the risk that dust falls into; Part company adopts overloading platform pattern to place the gaily decorated basket of different size, and having taken purification area has also increased the probability that mechanical arm is made mistakes.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, a kind of Campatible mask loading and unloading gaily decorated basket is provided, it is simple and compact for structure, easy to use, meet the loading and unloading requirement of different size mask, met the transmission requirement of mechanical arm, reduced the risk of the frequent contact of mask, wide accommodation, safe and reliable.
The technical scheme providing according to the utility model, the described Campatible mask loading and unloading gaily decorated basket, comprises flower basket rack; In described flower basket rack, be provided with that at least one deck is for placing and support the mask supporting seat of mask, described mask supporting seat is symmetrically distributed in flower basket rack; Described mask supporting seat comprises the first support level for supporting the first mask, for supporting the second support level of the second mask and for supporting the 3rd support level of the 3rd mask; The bottom of the 3rd support level is positioned at the top of the second support level, and the top of the second support level is positioned at the top of the first support level.
The back side of described flower basket rack is provided with obstruct bar, and described obstruct bar is between mask supporting seat.
The bottom of described flower basket rack is provided with bedplate, and the top outside flower basket rack is provided with handle, and described handle is fixedly mounted on the outer end of flower basket rack by handle installing plate.
Described the first mask is that 5 inches of masks, the second mask are 6 inches of masks, and the 3rd mask is 7 inches of masks.
Described handle installing plate is fixedly mounted on the outer end of flower basket rack by screw.The back side of described flower basket rack arranges three and intercepts bar, and described three obstruct bars are uniformly distributed between mask supporting seat.
In described flower basket rack, be provided with bilevel mask supporting seat; Described two-layer mask supporting seat is isolated by isolation channel.The width of described isolation channel is 1.2cm ~ 2cm.
Advantage of the present utility model: mask supporting seat is set in flower basket rack, by form different support levels in mask supporting seat, realizing, the loading and unloading of different masks are supported, can realize the one-stop placement of different size mask loading and unloading, effectively improving production efficiency, reduce Material Cost, simple in structure, cost is low, easy to use, meet the transmission requirement of mechanical arm, reduced the risk of the frequent contact of mask, safe and reliable.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the rear view of Fig. 1.
Fig. 4 is the test pattern of Fig. 1.
Description of reference numerals: 1-bedplate, 2-flower basket rack, 3-mask supporting seat, 4-isolation channel, 5-the first support level, 6-the second support level, 7-the 3rd support level, 8-intercept article, 9-handle installing plate, 10-handle and 11-screw.
Embodiment
Below in conjunction with concrete drawings and Examples, the utility model is described in further detail.
As shown in Figure 1, Figure 2, Figure 3 and Figure 4: in order to have met the loading and unloading requirement of different size mask, meet the transmission requirement of mechanical arm, reduced the risk of the frequent contact of mask, the utility model comprises flower basket rack 2; In described flower basket rack 2, be provided with that at least one deck is for placing and support the mask supporting seat 3 of mask, described mask supporting seat 3 is symmetrically distributed in flower basket rack 2; Described mask supporting seat 3 comprises the first support level 5 for supporting the first mask, for supporting the second support level 6 of the second mask and for supporting the 3rd support level 7 of the 3rd mask; The bottom of the 3rd support level 7 is positioned at the top of the second support level 6, and the top of the second support level 6 is positioned at the top of the first support level 5.
Particularly, the structure that described flower basket rack 2 is hollow, the mask supporting seat 3 that flower basket rack is 2 can be used in the mask that simultaneously supports different size.In the utility model embodiment, the size difference of the first mask, the second mask and the 3rd mask, is in particular, and described the first mask is that 5 inches of masks, the second mask are 6 inches of masks, and the 3rd mask is 7 inches of masks.
Distance in same layer between the first support level 5 of two mask supporting seats 3 is corresponding with the width of 5 inches of masks, the height of the first support level 5 is corresponding with the thickness of 5 inches of masks, distance in same layer between the second support level 6 of two mask supporting seats 3 is corresponding with the width of 6 inches of masks, the height of the second support level 6 is corresponding with the thickness of 6 inches of masks, distance in same layer between the 3rd support level 7 of two mask supporting seats 3 is corresponding with the width of 7 inches of masks, the height of the 3rd support level 7 is corresponding with the thickness of 7 inches of masks.In the utility model embodiment, the top of the second support level 6 is formed on the bottom of the 3rd support level 7, the top of the first support level 5 is formed on the bottom of the second support level 6, between the first support level 5, the second support level 6 and the 3rd support level 7, interconnects integral.Wherein, the first support level 5 is positioned at and does outside, and the 3rd support level 7 is positioned at inner side, and the second support level 6 is between the first support level 5 and the 3rd support level 7.Certainly, in order can, at the mask of the more sizes of flower basket rack 2 inner support, can, at the support level of the more sizes of the interior formation of mask supporting seat 3 of flower basket rack 2, to repeat no more herein.
In the specific implementation, the first support level 5, it is corresponding that the step surface of the second support level 6 and the 3rd support level 7 is in flower basket rack 2, when mask is placed on the first support level 5, on the second support level 6 or the 3rd support level 7 time, two corresponding the first support levels 5 in flower basket rack 2, distance between the second support level 6 or the 3rd support level 7 is greater than the width of corresponding mask, be after mask is placed on corresponding support level, between the side of mask and support level, there is the gap of 1 ~ 2mm, with avoid mask extract time and support level between inner side rub, simultaneously, avoid mask to fall from corresponding support level.The height of the first support level 5, the second support level 6 and the 3rd support level 7 is greater than the thickness of mask, be after mask is supported on corresponding support level, the height of support level is greater than mask thickness 8 ~ 12mm, so that mechanical arm flexible when mask loading and unloading.
The back side of described flower basket rack 2 is provided with and intercepts bar 8, and described obstruct bar 8 is between mask supporting seat 3.The back side of described flower basket rack 2 arranges three and intercepts bar 8, and described three obstruct bars 8 are uniformly distributed between mask supporting seat 3.Can prevent the back side landing of mask from flower basket rack 2 by intercepting bar 8, can ensure that again the air-flow in flower basket rack 2 is unimpeded, prevent the poly-dust on gaily decorated basket surface simultaneously.
The bottom of described flower basket rack 2 is provided with bedplate 1, and the top outside flower basket rack 2 is provided with handle 10, and described handle 10 is fixedly mounted on the outer end of flower basket rack 2 by handle installing plate 9.Described handle installing plate 9 is fixedly mounted on the outer end of flower basket rack 2 by screw 11.Described handle 10 is T-shaped after installing by handle installing plate 9 in the upper surface of flower basket rack 2, handle 10 is adopted and is formed from aluminium, and expands fixed-area by handle 10, promotes firmness.The end of handle 10 carries out fillet processing, polishes smooth, and prevents that point discharge effect from producing.
In described flower basket rack 2, be provided with bilevel mask supporting seat 3; Described two-layer mask supporting seat 3 is isolated by isolation channel 4.Can realize the placement of six masks supports by two-layer mask supporting seat 3 simultaneously.The width of described isolation channel 4 is 1.2cm ~ 2cm.
The utility model is at the interior mask supporting seat 3 that arranges of flower basket rack 2, by at the different support level of the interior formation of mask supporting seat 3, realizing, the loading and unloading of different masks are supported, can realize the one-stop placement of different size mask loading and unloading, effectively improving production efficiency, reduce Material Cost, simple in structure, cost is low, easy to use, meet the transmission requirement of mechanical arm, reduced the risk of the frequent contact of mask, safe and reliable.
The relevant practitioner of this area will be appreciated that; above embodiment is only for the technical solution of the utility model is described; and be not used as the restriction to patent of the present invention; variation, modification that any connotation based on patent of the present invention is done the above embodiment, all will drop in the protection domain of claim of the present invention.
Claims (8)
1. a Campatible mask loading and unloading gaily decorated basket, comprises flower basket rack (2); It is characterized in that: in described flower basket rack (2), be provided with that at least one deck is for placing and support the mask supporting seat (3) of mask, described mask supporting seat (3) is symmetrically distributed in flower basket rack (2); Described mask supporting seat (3) comprises the first support level (5) for supporting the first mask, for supporting second support level (6) of the second mask and for supporting the 3rd support level (7) of the 3rd mask; The bottom of the 3rd support level (7) is positioned at the top of the second support level (6), and the top of the second support level (6) is positioned at the top of the first support level (5).
2. the Campatible mask loading and unloading gaily decorated basket according to claim 1, is characterized in that: the back side of described flower basket rack (2) is provided with and intercepts bar (8), and described obstruct bar (8) is positioned between mask supporting seat (3).
3. the Campatible mask loading and unloading gaily decorated basket according to claim 1, it is characterized in that: the bottom of described flower basket rack (2) is provided with bedplate (1), the outer top of flower basket rack (2) is provided with handle (10), and described handle (10) is fixedly mounted on the outer end of flower basket rack (2) by handle installing plate (9).
4. the Campatible mask loading and unloading gaily decorated basket according to claim 1, is characterized in that: described the first mask is that 5 inches of masks, the second mask are 6 inches of masks, and the 3rd mask is 7 inches of masks.
5. the Campatible mask loading and unloading gaily decorated basket according to claim 3, is characterized in that: described handle installing plate (9) is fixedly mounted on the outer end of flower basket rack (2) by screw (11).
6. the Campatible mask loading and unloading gaily decorated basket according to claim 2, is characterized in that: the back side of described flower basket rack (2) arranges three and intercepts bar (8), and described three obstruct bars (8) are uniformly distributed between mask supporting seat (3).
7. the Campatible mask loading and unloading gaily decorated basket according to claim 1, is characterized in that: in described flower basket rack (2), be provided with bilevel mask supporting seat (3); Described two-layer mask supporting seat (3) is by isolation channel (4) isolation.
8. the Campatible mask loading and unloading gaily decorated basket according to claim 7, is characterized in that: the width of described isolation channel (4) is 1.2cm ~ 2cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420177506.5U CN203786461U (en) | 2014-04-11 | 2014-04-11 | Compatible type flower basket used for feeding and blanking of mask templates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420177506.5U CN203786461U (en) | 2014-04-11 | 2014-04-11 | Compatible type flower basket used for feeding and blanking of mask templates |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203786461U true CN203786461U (en) | 2014-08-20 |
Family
ID=51322628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420177506.5U Expired - Fee Related CN203786461U (en) | 2014-04-11 | 2014-04-11 | Compatible type flower basket used for feeding and blanking of mask templates |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203786461U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109557763A (en) * | 2018-12-31 | 2019-04-02 | 无锡中微掩模电子有限公司 | A kind of common mask chuck |
| CN110941137A (en) * | 2019-12-29 | 2020-03-31 | 无锡中微掩模电子有限公司 | Multi-layer feeding box for mask process |
-
2014
- 2014-04-11 CN CN201420177506.5U patent/CN203786461U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109557763A (en) * | 2018-12-31 | 2019-04-02 | 无锡中微掩模电子有限公司 | A kind of common mask chuck |
| CN109557763B (en) * | 2018-12-31 | 2024-04-12 | 无锡中微掩模电子有限公司 | Universal mask chuck |
| CN110941137A (en) * | 2019-12-29 | 2020-03-31 | 无锡中微掩模电子有限公司 | Multi-layer feeding box for mask process |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2013214739A5 (en) | ||
| CN203786461U (en) | Compatible type flower basket used for feeding and blanking of mask templates | |
| CN203092518U (en) | Glass vacuum adsorption base | |
| CN201506062U (en) | screen printing equipment | |
| CN206408109U (en) | A touch screen fixing device for a single-knife cutting machine | |
| CN207697246U (en) | A kind of general cover board silk-screen pedestal | |
| CN102653165A (en) | Transfer printing device | |
| CN105459434A (en) | Powder pressure forming device | |
| CN206011972U (en) | A kind of glass printing anti-scratch base | |
| CN201845753U (en) | Wafer clamp | |
| CN202905768U (en) | A hook assembly used for coating a solar energy battery graphite frame with film | |
| CN201247768Y (en) | Quartz boat for clipping silicon chip | |
| CN204966467U (en) | Novel year dish of RTA | |
| CN103871943A (en) | Electrostatic adsorption device | |
| CN205723478U (en) | A kind of combination type crystal-boat box hand basket | |
| CN105183969A (en) | Layout contact hole pitch amplification method | |
| CN104609365A (en) | Deep silicon etching machine table and wafer protection device thereof | |
| CN204771659U (en) | Accessory for support | |
| CN203746809U (en) | Wafer cassette | |
| CN202481448U (en) | Substrate provided with slots | |
| CN208991989U (en) | More specification silicon wafer laser cyclotomic support bases | |
| CN209461428U (en) | A kind of silicium wafer loading frame | |
| CN221927975U (en) | A film expansion machine bracket pressing mechanism | |
| CN202940780U (en) | Resonator with high stability | |
| CN201309966Y (en) | Basket for installing silicon chip on 12 inch silicon chip corroding machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140820 |